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11. 发明授权

US06539045B1 Laser with device for modifying the distribution of laser light intensity across the laser beam cross-section 有权
标题翻译：激光器用于修改激光束横截面上激光光强度的分布
公开(公告)号：US06539045B1
公开(公告)日：2003-03-25
申请号：US09647850
申请日：2000-12-07
申请人： Michael Von Borstel , Frank Ackermann , Mark Geschwandner
发明人： Michael Von Borstel , Frank Ackermann , Mark Geschwandner
IPC分类号： H01S3097
CPC分类号： H01S3/038 , B23K26/073 , H01S3/076 , H01S3/0804 , H01S3/0975 , H01S3/104 , H01S3/2232
摘要： A gas laser includes a control to modify the distribution of the intensity of the laser light over the laser beam cross section produced in the lasing gas within at least one laser tube by at least two electrodes and a voltage supply unit by means of which a voltage can be fed to electrodes. A discharge area forms in the lasing gas and this can be affected by adjusting the amplification profile of the laser over the excitation cross section of the laser tube.
摘要翻译：一种气体激光器包括一个控制，用于通过至少两个电极和一个电压供应单元来修改激光束在至少一个激光管内的激光束截面中产生的激光束横截面上的强度分布，可以供给电极。在激光气体中形成放电区域，这可以通过调整激光器在激光管的激发截面上的放大曲线来影响。

12. 发明授权

US06507596B1 Gas laser apparatus 有权
标题翻译：气体激光设备
公开(公告)号：US06507596B1
公开(公告)日：2003-01-14
申请号：US09657666
申请日：2000-09-08
申请人： Tsukasa Hori , Takanobu Ishihara , Hirotoshi Inoue , Takashi Matsunaga
发明人： Tsukasa Hori , Takanobu Ishihara , Hirotoshi Inoue , Takashi Matsunaga
IPC分类号： H01S3097
CPC分类号： H01S3/038 , H01S3/0384 , H01S3/09713 , H01S3/0977
摘要： The amount of pre-ionization by the pre-ionization electrode provided on the gas outflow side of the main discharge space, out of at least one pair of pre-ionization electrodes, is adjusted so as to attain the desired beam profile. As a result, the pre-ionization intensity of the laser gas remaining on the gas outflow side of the main discharge space is made lower than the pre-ionization intensity of the laser gas flowing into the main discharge space. In other words, the intensity of the laser light on the gas outflow side of the main discharge space is made weaker than the intensity of the laser light in the center of the main discharge space. Accordingly, the location of the maximum light intensity of the beam profile does not deviate from the center of the discharge width. Also, since the pre-ionization electrodes are provided on both the gas inflow side and the gas outflow side of the main discharge space, the pre-ionization intensity of the laser gas on the gas inflow side of the main discharge space is never stronger than the pre-ionization intensity of the laser gas present at the center of the main discharge space.
摘要翻译：通过设置在主放电空间的气体流出侧上的至少一对预电离电极中的预电离电极的预电离量被调节以获得期望的光束轮廓。结果，使残留在主放电空间的气体流出侧的激光气体的电离前强度低于流入主放电空间的激光气体的电离前强度。换句话说，使主放电空间的气体流出侧上的激光的强度比主放电空间的中心处的激光强度弱。因此，光束轮廓的最大光强度的位置不偏离放电宽度的中心。此外，由于在主放电空间的气体流入侧和气体流出侧均设置有预电离电极，所以主放电空间的气体流入侧的激光气体的前电离强度永不比存在于主放电空间中心的激光气体的电离前强度。

13. 发明授权

US06490310B1 Laser discharge electrodes with current return plate structure 有权
标题翻译：具有电流回流板结构的激光放电电极
公开(公告)号：US06490310B1
公开(公告)日：2002-12-03
申请号：US09658920
申请日：2000-09-11
申请人： Takayuki Yabu , Takanobu Ishihara , Takashi Matsunaga , Yasufumi Kawasuji
发明人： Takayuki Yabu , Takanobu Ishihara , Takashi Matsunaga , Yasufumi Kawasuji
IPC分类号： H01S3097
CPC分类号： H01S3/038
摘要： A discharge electrode for a laser device allowing return plates to be easily attached/detached and a laser device with the discharge electrode are provided. To this end, structure in which a pair of an anode (5A) and a cathode (5B), provided facing each other inside a laser chamber (2) sealing in laser gases, for discharging electricity to excite the laser gases flowing through a space between them, thereby oscillating a laser beam, a conductive anode base (6) for holding the anode (5A), an insulating cathode base (8) for holding the cathode (5B), and a plurality of return plates (9B) for electrically connecting the anode base (6) and the laser chamber (2) and supplying an electric current to the anode (5A) are provided, and in which upper portions and lower portions of the return plates (9B) are connected respectively with an upper fixed plate (9A) and a lower fixed plate (9C), is given.
摘要翻译：提供了一种用于允许容易地安装/拆卸返回板的激光装置的放电电极和具有放电电极的激光装置。为此，在密封激光气体的激光室（2）内相对设置的一对阳极（5A）和阴极（5B），用于放电以激发流过空间的激光气体的结构在它们之间，由此振荡激光束，用于保持阳极（5A）的导电阳极基座（6），用于保持阴极（5B）的绝缘阴极基座（8）和用于电气的多个返回板连接阳极基体（6）和激光室（2）并向阳极（5A）供给电流，其中返回板（9B）的上部和下部分别与上固定板（9A）和下固定板（9C）。

14. 发明授权

US06434181B1 Gas laser oscillator 有权
公开(公告)号：US06434181B1
公开(公告)日：2002-08-13
申请号：US09843950
申请日：2001-04-30
申请人： Hiroyuki Hayashikawa , Satoshi Eguchi , Takayuki Yamashita
发明人： Hiroyuki Hayashikawa , Satoshi Eguchi , Takayuki Yamashita
IPC分类号： H01S3097
摘要： A gas laser oscillator having at least three discharge tubes disposed along the optical axis, and a spacer having an opening centered on the optical axis. The spacer is disposed between a partially reflective mirror and the closest discharge tube. Further, the discharge tubes are disposed in series along the optical axis, and satisfy the following three formulas simultaneously: Formula 1 r1/r2 > 1.0 Formula 2 L2/(L1 + L2)

15. 发明授权

US06785316B1 Excimer or molecular laser with optimized spectral purity 失效
标题翻译：准分子激光或具有优化光谱纯度的分子激光
公开(公告)号：US06785316B1
公开(公告)日：2004-08-31
申请号：US09640595
申请日：2000-08-17
申请人： Igor Bragin , Vadim Berger , Uwe Stamm
发明人： Igor Bragin , Vadim Berger , Uwe Stamm
IPC分类号： H01S3097
CPC分类号： G03F7/70025 , G03F7/70041 , H01S3/0971 , H01S3/225
摘要： A final stage capacitance of a pulse compression circuit for an excimer or molecular fluorine lithography laser system is provided by a set of peaking capacitors connected through a first inductance to the electrodes and a set of sustaining capacitors connected to the electrodes through a second inductance substantially greater than the first inductance. Current pulses through the discharge are temporally extended relative to current pulses of a system having its final stage capacitance provided only by a set of peaking capacitors connected to the electrodes via the first inductance. An amplified spontaneous emission (ASE) level in the laser pulses is reduced thereby enhancing their spectral purity.
摘要翻译：用于准分子或分子氟光刻激光系统的脉冲压缩电路的最终级电容由通过第一电感连接到电极的一组峰化电容器提供，并且一组维持电容器通过大体上更大的第二电感连接到电极比第一个电感。通过放电的电流脉冲相对于具有其最终级电容的系统的电流脉冲在时间上延长，该最终级电容仅由通过第一电感连接到电极的一组峰值电容器提供。激光脉冲中的放大自发发射（ASE）水平降低，从而增强其光谱纯度。

16. 发明授权

US06782030B2 Gas laser 有权
标题翻译：气体激光
公开(公告)号：US06782030B2
公开(公告)日：2004-08-24
申请号：US10187324
申请日：2002-07-01
申请人： Claus Strowitzki
发明人： Claus Strowitzki
IPC分类号： H01S3097
CPC分类号： H01S3/0388 , H01S3/03 , H01S3/0385 , H01S3/097 , H01S3/0975
摘要： The present invention relates to a gas laser with a high-voltage electrode 12 and a ground electrode 14, which electrodes 12, 14 are disposed relative to each other so as to form a discharge gap 16 between them, and with high voltage generating means including a circuit having at least one storage capacitor and at least one secondary capacitor 18, 20, said secondary capacitor 18, 20 being disposed in the area of said high-voltage electrode 12 within a discharge chamber 32 filled with laser gas. Said secondary capacitor 18, 20 includes at least one external surface 28, 28′ oriented towards said high-voltage electrode 12 and made of a material which is inert with respect to said laser gas, which external surface 28, 28′ forms at least one boundary surface of a flow channel 26, 26′ for said laser gas.
摘要翻译：本发明涉及一种具有高电压电极12和接地电极14的气体激光器，电极12,14相对于彼此设置，以便在它们之间形成放电间隙16，并且包括高压发生装置，包括具有至少一个存储电容器和至少一个次级电容器18,20的电路，所述次级电容器18,20设置在充满激光气体的放电室32内的所述高压电极12的区域中。所述次级电容器18,20包括至少一个朝向所述高压电极12定向并由相对于所述激光气体惰性的材料制成的外表面28,28'，所述外表面28,28'形成至少一个用于所述激光气体的流动通道26,26'的边界表面。

17. 发明授权

US06771685B1 Discharge electrodes connecting structure for laser apparatus and laser apparatus therewith 有权
标题翻译：激光装置的放电电极连接结构和激光装置
公开(公告)号：US06771685B1
公开(公告)日：2004-08-03
申请号：US09648632
申请日：2000-08-28
申请人： Takayuki Yabu , Takanobu Ishihara , Takashi Matsunaga , Yasufumi Kawasuji
发明人： Takayuki Yabu , Takanobu Ishihara , Takashi Matsunaga , Yasufumi Kawasuji
IPC分类号： H01S3097
CPC分类号： H01S3/038 , H01S3/0971 , H01S3/225
摘要： The invention provides a discharge electrodes connecting structure for a laser apparatus in which a thickness of the return plate is set to be within an optimum range, and a laser apparatus employing the same. Accordingly, a laser apparatus is provided with a laser chamber (2) sealing a laser gas, a pair of anode (5A) and cathode (5B) provided within the laser chamber in an opposing manner, generating a discharge so as to excite a laser gas flowing therebetween and oscillating a laser beam, a conductive anode base (6) holding the anode, an insulative cathode base (8) holding the cathode, and a return plate (9) electrically connecting the anode base to the laser chamber so as to supply a current to the anode. A thickness (t) of the return plate is set to be equal to or more than 100 &mgr;m and equal to or less than 500 &mgr;m, and the return plate is arranged substantially in parallel to a gas flow of the laser gas flowing between the discharge electrodes.
摘要翻译：本发明提供一种用于激光装置的放电电极连接结构，其中将返回板的厚度设置在最佳范围内，以及采用该放电电极连接结构的激光装置。因此，激光装置设置有激光室（2），密封激光气体，以相对的方式设置在激光室内的一对阳极（5A）和阴极（5B），产生放电以激发激光在其间流动的气体和激光束的振荡，保持阳极的导电阳极基座（6），保持阴极的绝缘阴极基座（8）和将阳极基座电连接到激光室的回流板（9）向阳极提供电流。返回板的厚度（t）设定为100μm以上且500μm以下，返回板大致平行于在排出口之间流动的激光气体的气流电极。

18. 发明授权

US06711202B2 Discharge laser with porous insulating layer covering anode discharge surface 有权
标题翻译：放电激光器具有覆盖阳极放电表面的多孔绝缘层
公开(公告)号：US06711202B2
公开(公告)日：2004-03-23
申请号：US09953026
申请日：2001-09-13
申请人： Richard G. Morton
发明人： Richard G. Morton
IPC分类号： H01S3097
CPC分类号： H01S3/225 , G03F7/70025 , G03F7/70041 , G03F7/70575 , G03F7/70933 , H01S3/036 , H01S3/038 , H01S3/0381 , H01S3/0382 , H01S3/0385 , H01S3/0387 , H01S3/0388 , H01S3/041 , H01S3/097 , H01S3/09702 , H01S3/0979 , H01S3/22 , H01S3/2207 , H01S3/223
摘要： A gas discharge laser having an elongated cathode and an elongated anode with a porous insulating layer covering the anode discharge surface. A pulse power system provides electrical pulses at rates of at least 1 KHz. A blower circulates laser gas between the electrodes at speeds of at least 5 m/s and a heat exchanger is provided to remove heat produced by the blower and the discharges. In preferred embodiments at least a portion of the anode is comprised of lead, and fluorine ion sputtering of the anode surface creates the insulating layer (over the discharge surface of the anode) comprised in large part of lead fluoride. In a particular preferred embodiment the anode is fabricated in two parts, a first part having the general shape of a prior art anode with a trench shaped cavity at the top and a second part comprised of lead rich brass and disposed in the trench shape cavity.
摘要翻译：一种气体放电激光器，其具有细长阴极和具有覆盖阳极放电表面的多孔绝缘层的细长阳极。脉冲功率系统以至少1KHz的速率提供电脉冲。鼓风机以至少5m / s的速度在电极之间循环激光气体，并且提供热交换器以去除由鼓风机和排出物产生的热量。在优选实施例中，阳极的至少一部分由铅构成，并且阳极表面的氟离子溅射产生大部分氟化铅所包含的绝缘层（在阳极的排放表面上）。在特别优选的实施例中，阳极制造成两部分，第一部分具有现有技术阳极的一般形状，在顶部具有沟槽形空腔，第二部分由富含铅的黄铜组成并设置在沟槽形腔中。

19. 发明授权

US06654402B1 Corona preionization electrode unit for use in gas laser apparatus 有权
标题翻译：用于气体激光装置的电晕前置电极单元
公开(公告)号：US06654402B1
公开(公告)日：2003-11-25
申请号：US09626417
申请日：2000-07-26
申请人： Koji Kakizaki , Kazuaki Hotta , Motohiro Arai
发明人： Koji Kakizaki , Kazuaki Hotta , Motohiro Arai
IPC分类号： H01S3097
CPC分类号： H01S3/0385 , H01S3/0384 , H01S3/09713
摘要： A corona preionization electrode unit for use in gas laser apparatus, wherein the electric field for corona discharge is concentrated, and ultraviolet radiation is not blocked, and further the laser gas stream is not obstructed, thereby allowing efficient, stable and uniform corona preionization. The corona preionization electrode unit is disposed in a gas laser apparatus together with a pair of main discharge electrodes for ionizing and exciting a laser gas. The corona preionization electrode unit includes a first electrode covered with a dielectric material and a second electrode placed in contact with the outer surface of the dielectric material around the first electrode. The corona preionization electrode unit is positioned in the vicinity of either one of the main discharge electrodes. The second electrode is a plate-shaped member having a straight edge contacting at least the outer surface of the dielectric material. A portion of the plate-shaped member other than the edge is provided with a plurality of openings for passage of ultraviolet light for preionization and a circulating laser gas.
摘要翻译：一种用于气体激光装置的电晕前置电极单元，其中用于电晕放电的电场集中，并且紫外线辐射不被阻挡，并且进一步激光气流不被阻挡，由此允许有效，稳定和均匀的电晕预电离。电晕前置电极单元与一对用于电离和激发激光气体的主放电电极一起设置在气体激光装置中。电晕前置电极单元包括覆盖有介电材料的第一电极和与第一电极周围的电介质材料的外表面接触的第二电极。电晕前置电极单元位于任一个主放电电极附近。第二电极是具有与电介质材料的至少外表面接触的直边缘的板状构件。除了边缘之外的板状构件的一部分设置有多个用于前体的紫外线通过的开口和循环的激光气体。

20. 发明授权

US06650679B1 Preionization arrangement for gas laser 失效
标题翻译：气体激光器的预处理装置
公开(公告)号：US06650679B1
公开(公告)日：2003-11-18
申请号：US09247887
申请日：1999-02-10
申请人： Igor Bragin , Ulrich Rebhan , Uwe Stamm , Dirk Basting
发明人： Igor Bragin , Ulrich Rebhan , Uwe Stamm , Dirk Basting
IPC分类号： H01S3097
CPC分类号： G03F7/70025 , H01S3/0384 , H01S3/0385
摘要： A preionization device for a gas laser comprises an internal preionization electrode having a dielectric housing around it and an external preionization electrode displaced from the dielectric housing by a small gap. The dielectric housing includes two cylindrical regions of differing outer radii of curvature. An open end of the housing has a larger radius of curvature than the other end which is closed. The internal electrode connects to circuitry external to the discharge chamber via a conductive feedthrough which penetrates through the housing. The external circuitry prevents voltage oscillations caused by residual energy stored as capacitance in the dielectric housing. The external preionization electrode, which is connected electrically to one of the main discharge electrodes, is formed to shield the internal preionization electrode from the other main discharge electrode to prevent arcing therebetween. The external electrode is also formed to shield the outer gas volume and walls of the discharge chamber from the preionization unit. A semi-transparent external electrode prevents charged particles emanating from the main discharge area from settling on the housing and causing field distortion and discharge instabilities.
摘要翻译：用于气体激光器的预电离装置包括其周围具有介电壳体的内部预电离电极和通过小间隙从绝缘壳体移位的外部预电离电极。介电壳体包括具有不同外部曲率半径的两个圆柱形区域。外壳的开口端具有比封闭的另一端更大的曲率半径。内部电极通过穿透壳体的导电馈通连接到放电室外部的电路。外部电路防止由绝缘外壳中的电容存储的剩余能量引起的电压振荡。与主放电电极之间电连接的外部预电离电极被形成为将内部预电离电极与另一个主放电电极屏蔽，以防止它们之间的电弧。外部电极也形成为将外部气体体积和排出室的壁与预电离单元进行屏蔽。半透明外部电极防止从主放电区域发出的带电粒子沉降在壳体上并导致场失真和放电不稳定。

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