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11. 发明授权

US08844061B2 Scanning probe microscope 有权
标题翻译：扫描探针显微镜
公开(公告)号：US08844061B2
公开(公告)日：2014-09-23
申请号：US13726764
申请日：2012-12-26
申请人： Shuichi Baba , Masahiro Watanabe , Toshihiko Nakata , Yukio Kembo , Toru Kurenuma , Takafumi Morimoto , Manabu Edamura , Satoshi Sekino
发明人： Shuichi Baba , Masahiro Watanabe , Toshihiko Nakata , Yukio Kembo , Toru Kurenuma , Takafumi Morimoto , Manabu Edamura , Satoshi Sekino
IPC分类号： G01Q60/28 , G01Q10/04 , G01Q60/24 , G01Q10/00 , G01Q60/34 , B82Y35/00
CPC分类号： G01Q10/00 , B82Y35/00 , G01Q60/28 , G01Q60/34
摘要： In the case of measuring a pattern having a steep side wall, a probe adheres to the side wall by the van der Waals forces acting between the probe and the side wall when approaching the pattern side wall, and an error occurs in a measured profile of the side wall portion. When a pattern having a groove width almost equal to a probe diameter is measured, the probe adheres to both side walls, the probe cannot reach the groove bottom, and the groove depth cannot be measured. When the probe adheres to a pattern side wall in measurements of a microscopic high-aspect ratio pattern using an elongated probe, the probe is caused to reach the side wall bottom by detecting the adhesion of the probe to the pattern side wall, and temporarily increasing a contact force between the probe and the sample. Also, by obtaining the data of the amount of torsion of a cantilever with the shape data of the pattern, a profile error of the side wall portion by the adhesion is corrected by the obtained data of the amount of torsion.
摘要翻译：在测量具有陡峭侧壁的图案的情况下，当接近图案侧壁时，探针通过作用在探针和侧壁之间的范德华力附着在侧壁上，并且在测量的轮廓中发生错误侧壁部分。当测量具有几乎等于探针直径的槽宽度的图案时，探针粘附到两个侧壁，探针不能到达凹槽底部，并且不能测量凹槽深度。当使用细长的探针测量微观高纵横比图案时探头粘附到图案侧壁上时，通过检测探针与图案侧壁的粘附力使探针到达侧壁底部，并暂时增加探针和样品之间的接触力。此外，通过利用图案的形状数据获得悬臂的扭转量的数据，通过获得的扭转量的数据来校正侧壁部分的粘附的轮廓误差。

12. 发明授权

US08342008B2 Scanning probe microscope 有权
标题翻译：扫描探针显微镜
公开(公告)号：US08342008B2
公开(公告)日：2013-01-01
申请号：US12187430
申请日：2008-08-07
申请人： Shuichi Baba , Masahiro Watanabe , Toshihiko Nakata , Yukio Kembo , Toru Kurenuma , Takafumi Morimoto , Manabu Edamura , Satoshi Sekino
发明人： Shuichi Baba , Masahiro Watanabe , Toshihiko Nakata , Yukio Kembo , Toru Kurenuma , Takafumi Morimoto , Manabu Edamura , Satoshi Sekino
IPC分类号： G01B5/28 , G01Q60/28
CPC分类号： G01Q10/00 , B82Y35/00 , G01Q60/28 , G01Q60/34
摘要： In the case of measuring a pattern having a steep side wall, a probe adheres to the side wall by the van der Waals forces acting between the probe and the side wall when approaching the pattern side wall, and an error occurs in a measured profile of the side wall portion. When a pattern having a groove width almost equal to a probe diameter is measured, the probe adheres to both side walls, the probe cannot reach the groove bottom, and the groove depth cannot be measured. When the probe adheres to a pattern side wall in measurements of a microscopic high-aspect ratio pattern using an elongated probe, the probe is caused to reach the side wall bottom by detecting the adhesion of the probe to the pattern side wall, and temporarily increasing a contact force between the probe and the sample. Also, by obtaining the data of the amount of torsion of a cantilever with the shape data of the pattern, a profile error of the side wall portion by the adhesion is corrected by the obtained data of the amount of torsion.
摘要翻译：在测量具有陡峭侧壁的图案的情况下，当接近图案侧壁时，探针通过作用在探针和侧壁之间的范德华力附着在侧壁上，并且在测量的轮廓中发生错误侧壁部分。当测量具有几乎等于探针直径的槽宽度的图案时，探针粘附到两个侧壁，探针不能到达凹槽底部，并且不能测量凹槽深度。当使用细长的探针测量微观高纵横比图案时探头粘附到图案侧壁上时，通过检测探针与图案侧壁的粘附力使探针到达侧壁底部，并暂时增加探针和样品之间的接触力。此外，通过利用图案的形状数据获得悬臂的扭转量的数据，通过获得的扭转量的数据来校正侧壁部分的粘附的轮廓误差。

13. 发明授权

US5359199A Specific modification of the surfaces of solids in the nanometer range by local delamination, and the storage of information units 失效
标题翻译：通过局部分层对纳米范围内的固体表面进行具体改性，并存储信息单元
公开(公告)号：US5359199A
公开(公告)日：1994-10-25
申请号：US924487
申请日：1992-08-04
申请人： Harald Fuchs , Thomas Schimmel
发明人： Harald Fuchs , Thomas Schimmel
IPC分类号： G01Q60/28 , B82B3/00 , G01Q70/08 , G01Q80/00 , G11B9/00 , G11B9/14 , G11C7/00 , H01J37/28 , H01J37/30
CPC分类号： B82B3/00 , B82Y30/00 , B82Y40/00 , G11B9/14 , B82Y10/00 , G01Q80/00 , Y10S977/855
摘要： A process for the specific, location-selective and time-stable modification of surfaces of solids in the nanometer range without destruction of the atomic order of the surface at the location of the structure or in the vicinity thereof, where a local delamination is caused at the surface of solids having a layered structure due to the action of a local probe. This process is used for the storage of information.
摘要翻译：在纳米范围内对固体表面进行具体的位置选择性和时间稳定的改性的方法，而不破坏在结构的位置或其附近的表面的原子序列，其中在由于局部探针的作用，固体表面具有层状结构。此过程用于存储信息。

14. 发明授权

US11846611B2 In situ mechanical characterization of a single cell-cell adhesion interface under large strain 有权
公开(公告)号：US11846611B2
公开(公告)日：2023-12-19
申请号：US17473090
申请日：2021-09-13
申请人： NUTECH VENTURES , UT-BATTELLE, LLC
发明人： Ruiguo Yang , Nikolay V. Lavrik , Amir Monemian Esfahani , Jordan Daniel Rosenbohm , Bahareh Tajvidi Safa , Grayson Minnick
IPC分类号： G01N3/08 , G01Q60/26 , G01N3/06 , G01N19/04 , G01Q60/28
CPC分类号： G01N3/08 , G01N3/06 , G01N19/04 , G01Q60/26 , G01N2203/0089 , G01N2203/0286 , G01Q60/28
摘要： A method of measuring a stress-strain curve in a cell-cell adhesion interface, the method including: providing a structure including a first movable island supported by a first beam, a second movable island supported by a second beam, and a gap therebetween connected by a pair of cells forming a junction, the pair of cells comprising a cell-cell adhesion interface having an initial length defined by a distance between nuclei of the pair of cells; moving the second movable island with a defined displacement; determining a displacement of the first movable island based on moving the second movable island; calculating a difference between the displacement of the first movable island and the defined displacement of the second movable island based on moving the second movable island; determining an applied strain in the cell-cell adhesion interface between the pair of cells based on the difference divided by the initial length of the cell-cell adhesion interface; calculating a force between the cell-cell adhesion interface of the pair of cells based on the displacement of the first movable island; calculating a stress in the cell-cell adhesion interface between the pair of cells based on the force; and determining the stress-strain curve of the cell-cell adhesion interface between the pair of cells by plotting the calculated stress against the applied strain.

15. 发明授权

US11243156B2 Determining interfacial tension for fluid-fluid-solid environments 有权
公开(公告)号：US11243156B2
公开(公告)日：2022-02-08
申请号：US16923180
申请日：2020-07-08
申请人： International Business Machines Corporation
发明人： Michael Engel , Filipe Viana Ferreira , Rodrigo Neumann Barros Ferreira , Ronaldo Giro , Mathias Steiner
IPC分类号： G01N13/02 , G01Q60/28
摘要： Aspects of the invention include determining, by a first AFM tip, a first snap-off force of a solid surface immersed in a first fluid, determining, by a second AFM tip, a second snap-off force, determining, by a third AFM tip, a third snap-off force, determining, by the first AFM tip, a fourth snap-off force of a droplet of the first fluid immersed in the second fluid on the solid surface, determining, by the second AFM tip, a fifth snap-off force, determining, by the third AFM tip, a sixth snap-off force, determining a first capillary force for first AFM tip and first droplet based on first snap-off force and fourth snap-off force, determining a second capillary force for second AFM tip and first droplet and a third capillary force for third AFM tip and first droplet, and determining interfacial tension between first fluid and second fluid based on the capillary forces.

16. 发明授权

US10895584B2 Method of controlling a probe using constant command signals 有权
公开(公告)号：US10895584B2
公开(公告)日：2021-01-19
申请号：US16141413
申请日：2018-09-25
申请人： Louis Pacheco
发明人： Louis Pacheco
IPC分类号： G01Q10/06 , G01Q60/28 , G01Q60/30 , G01Q20/04 , G01Q60/26 , G01Q60/38
摘要： A method for commanding a tip of a probe is disclosed, wherein a command signal, representative of the force applied by said tip on the surface of a sample to be analyzed, includes at least one cycle successively defined by: a first step where the value of said command signal decreases from a maximum value (Smax) to a minimum value (Smin) so as to move said tip away from said surface at a predetermined distance called detachment height; a second step where the value of the command signal is maintained constant at said minimum value so as to maintain the tip at said detachment height; a third step where the value of the command signal increases from the minimum value up to said maximum value so as to bring the tip closer towards the surface to be analyzed until the tip comes into contact with the surface; and a fourth step where the value of the command signal is maintained constant at said maximum value to maintain the tip in contact with the surface to be analyzed under a constant force between the tip and the surface to be analyzed; the command signal being controlled between two successive steps to avoid any oscillation of the tip.

17. 发明申请

US20200003801A1 Passive Semiconductor Device Assembly Technology 审中-公开
公开(公告)号：US20200003801A1
公开(公告)日：2020-01-02
申请号：US16486690
申请日：2018-02-15
申请人： Nu Nano Ltd
发明人： James Vicary
IPC分类号： G01Q60/38 , G01Q60/28 , H01L21/50 , H01L21/68 , H01L21/683
摘要： A method of assembling a group of devices, the method comprising the steps of: evacuating a space between each component of a first group of two or more components on a source device and a transfer device thereby to create a temporary bond between each component of the first group of two or more components and the transfer device; selectively removing the first group of two or more components from the source device whilst the transfer device is temporarily bonded to each component of the first group of two or more components on the source device; positioning the first group of two or more components on a host device; and decoupling the first group of two or more components from the transfer device, thereby to form a first group of assembled devices.

18. 发明申请

US20170299627A1 METHOD FOR DETERMINING ANTIFOULING ABILITY OF A MATERIAL SURFACE AND DETERMINING DEVICE FOR DETERMINING ANTIFOULING ABILITY OF MATERIAL SURFACE 有权
公开(公告)号：US20170299627A1
公开(公告)日：2017-10-19
申请号：US15383045
申请日：2016-12-19
申请人： INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
发明人： Feng-Sheng KAO , Jen-You CHU
IPC分类号： G01Q60/28
CPC分类号： G01Q60/28 , G01Q60/42
摘要： A method for determining antifouling ability of a material surface includes: (a) providing a determining device, wherein the determining device includes: a probe, wherein the probe includes a micro particle or a micro particle and a pollutant fixed on a surface of the micro particle; and a determining unit with a spring characteristic structure, wherein the probe is fixed at one end of the spring characteristic structure; (b) contacting the probe with a material surface-to-be-determined to make the micro particle itself or the pollutant on the surface of the micro particle adhere to the material surface-to-be-determined; (c) deforming the spring characteristic structure until the probe departs from the material surface-to-be-determined to recover the spring characteristic structure, and determining the level of the deformation; (d) determining the adhesion value of the probe to the material surface-to-be-determined using the deformation; and (e) determining the antifouling ability of the material surface.

19. 发明申请

US20050029450A1 Sensing mode atomic force microscope 失效
标题翻译：感应模式原子力显微镜
公开(公告)号：US20050029450A1
公开(公告)日：2005-02-10
申请号：US10933591
申请日：2004-09-03
申请人： Paul Hough , Chengpu Wang
发明人： Paul Hough , Chengpu Wang
IPC分类号： G01Q10/04 , G01Q10/06 , G01Q30/04 , G01Q60/24 , G01Q60/28 , G01Q60/38 , G01N23/00 , G01B5/28 , G21K7/00
CPC分类号： G01Q60/38 , G01Q10/06 , Y10S977/851 , Y10S977/852 , Y10S977/863 , Y10S977/869 , Y10S977/875
摘要： An atomic force microscope is described having a cantilever comprising a base and a probe tip on an end opposite the base; a cantilever drive device connected to the base; a magnetic material coupled to the probe tip, such that when an incrementally increasing magnetic field is applied to the magnetic material an incrementally increasing force will be applied to the probe tip; a moveable specimen base; and a controller constructed to obtain a profile height of a specimen at a point based upon a contact between the probe tip and a specimen, and measure an adhesion force between the probe tip and the specimen by, under control of a program, incrementally increasing an amount of a magnetic field until a release force, sufficient to break the contact, is applied. An imaging method for atomic force microscopy involving measuring a specimen profile height and adhesion force at multiple points within an area and concurrently displaying the profile and adhesion force for each of the points is also described. A microscope controller is also described and is constructed to, for a group of points, calculate a specimen height at a point based upon a cantilever deflection, a cantilever base position and a specimen piezo position; calculate an adhesion force between a probe tip and a specimen at the point by causing an incrementally increasing force to be applied to the probe tip until the probe tip separates from a specimen; and move the probe tip to a new point in the group.
摘要翻译：描述了一种具有悬臂的原子力显微镜，该悬臂包括在与基座相对的端部上的基部和探针尖端; 连接到基座的悬臂驱动装置; 耦合到探针尖端的磁性材料，使得当向磁性材料施加递增增加的磁场时，递增增加的力将被施加到探针尖端; 可动标本基地以及控制器，其被构造成在基于所述探针针尖和样本之间的接触的点处获得样本的轮廓高度，并且在程序的控制下通过程序的控制来测量所述探针针尖和所述样本之间的粘附力，施加足以破坏接触的释放力的磁场的量。还描述了用于原子力显微镜的成像方法，其涉及测量区域内的多个点处的样本轮廓高度和粘附力，并且同时显示每个点的轮廓和附着力。还描述了一种显微镜控制器，并被构造成针对一组点，在基于悬臂偏转，悬臂底座位置和样本压电位置的点处计算样本高度; 通过对探针尖端施加递增增加的力直到探针尖端与试样分离来计算探针尖端和样品之间的粘附力; 并将探针尖端移动到组中的新点。

20. 发明授权

US5503010A Directional atomic force microscope and method of observing a sample with the microscope 失效
标题翻译：定向原子力显微镜和用显微镜观察样品的方法
公开(公告)号：US5503010A
公开(公告)日：1996-04-02
申请号：US338179
申请日：1994-11-09
申请人： Kazushi Yamanaka
发明人： Kazushi Yamanaka
IPC分类号： G01B21/30 , G01B5/28 , G01N37/00 , G01Q10/06 , G01Q30/04 , G01Q60/24 , G01Q60/26 , G01Q60/28 , G01Q60/32 , G01Q60/34 , H01J37/28
CPC分类号： G01Q60/32 , B82Y35/00 , G01Q60/26 , Y10S977/851 , Y10S977/852
摘要： An atomic force microscope includes a vibrator which imparts vibration between a probe and a sample such that a relative vertical vibration and a relative lateral vibration are superimposed. A method of observing a sample with the microscope includes the steps of imparting phase-controlled vertical and lateral vibration between a sample and a probe so that the probe moves along a straight line or a ring relative to the sample, controlling the direction of the straight line or the ring, and measuring the amplitude and/or the phase of the bending vibration and/or the torsional vibration of a cantilever excited by the vibration.
摘要翻译：原子力显微镜包括振动器，其在探针和样品之间施加振动，使得叠加相对垂直振动和相对横向振动。用显微镜观察样品的方法包括以下步骤：在样品和探针之间施加相位控制的垂直和横向振动，使得探针相对于样品沿着直线或环移动，控制直线的方向线或环，并且测量由振动激励的悬臂的弯曲振动和/或扭转振动的振幅和/或相位。

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