会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 12. 发明授权
    • Method of making an electronic device having a single crystal substrate formed by solid state crystal conversion
    • 制造具有通过固态晶体转换形成的单晶衬底的电子器件的方法
    • US06214427B1
    • 2001-04-10
    • US09141711
    • 1998-08-28
    • Lionel Monty Levinson
    • Lionel Monty Levinson
    • C30B102
    • C30B1/02C30B29/20H01L21/0242H01L21/0243H01L33/0095Y10T428/15
    • A method of making an electronic device, according to an exemplary embodiment of the invention, comprises the steps of: forming a polycrystalline substrate in a desired shape; converting the polycrystalline substrate into a single crystal substrate using a solid state crystal conversion process; and forming an electronic element on the substrate. Typically, alumina is formed in the shape of a wafer, sintered to form a densified polycrystalline alumina wafer, and heated to a temperature between the melting point of alumina and one-half the melting point of alumina to convert the densified polycrystalline alumina wafer into a sapphire wafer. A light-emitting diode or other electronic device, such as a laser diode, a high frequency microwave device, or an optoelectronic detector, can be formed on the wafer by depositing layers of semiconductor material on the wafer. The solid state crystal conversion process provides several advantages in forming electronic devices. For example, the cost of the single crystal substrate is significantly reduced since crystal growing from a melt is not required. Also, less processing is required after the crystal is formed, since the precursor polycrystalline substrate can be formed to near net shape. In addition, the polycrystalline substrate can be made in many shapes, in contrast to the shapes possible when growing a crystal from a melt.
    • 根据本发明的示例性实施例的制造电子设备的方法包括以下步骤:形成期望形状的多晶衬底; 使用固态晶体转换工艺将多晶衬底转换成单晶衬底; 以及在所述基板上形成电子元件。 通常,氧化铝形成为晶片形状,烧结形成致密的多晶氧化铝晶片,并加热至氧化铝的熔点和氧化铝熔点的一半之间的温度,以将致密化的多晶氧化铝晶片转化为 蓝宝石晶圆 通过在晶片上沉积半导体材料层,可以在晶片上形成诸如激光二极管,高频微波器件或光电子检测器之类的发光二极管或其它电子器件。 固态晶体转换工艺在形成电子器件方面提供了几个优点。 例如,由于不需要从熔体生长的晶体,所以单晶基板的成本显着降低。 此外,在形成晶体之后需要较少的加工,因为前体多晶基板可以形成为近净形状。 此外,与从熔体生长晶体时可能的形状相反,多晶衬底可以制成许多形状。