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11. 发明申请

US20180110116A1 SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT 审中-公开
公开(公告)号：US20180110116A1
公开(公告)日：2018-04-19
申请号：US15832476
申请日：2017-12-05
申请人： Gigaphoton Inc.
发明人： Tsukasa HORI , Kouji KAKIZAKI , Tatsuya YANAGIDA , Osamu WAKABAYASHI , Hakaru MIZOGUCHI
IPC分类号： H05G2/00 , H01S3/00 , H01S3/23 , H01S3/223 , H01S3/16 , H01S3/11 , H01S3/104 , H01S3/09 , H01S3/102
CPC分类号： H05G2/008 , H01S3/005 , H01S3/0071 , H01S3/09 , H01S3/102 , H01S3/104 , H01S3/1106 , H01S3/1611 , H01S3/1643 , H01S3/1673 , H01S3/2232 , H01S3/2308 , H01S3/2366 , H01S3/2391 , H05G2/003 , H05G2/005
摘要： A system includes a chamber, a laser beam apparatus configured to generate a laser beam to be introduced into the chamber, a laser controller for the laser beam apparatus to control at least a beam intensity and an output timing of the laser beam, and a target supply unit configured to supply a target material into the chamber, the target material being irradiated with the laser beam for generating extreme ultraviolet light.

12. 发明申请

US20180034228A1 LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS 审中-公开
公开(公告)号：US20180034228A1
公开(公告)日：2018-02-01
申请号：US15552730
申请日：2016-04-20
申请人： MITSUBISHI ELECTRIC CORPORATION
发明人： Kouji FUNAOKA , Masashi NARUSE
IPC分类号： H01S3/03 , H01S3/00 , H01S3/034 , H01S3/041 , H05G2/00 , H01S3/223
CPC分类号： H01S3/03 , H01S3/0071 , H01S3/02 , H01S3/034 , H01S3/041 , H01S3/2232 , H01S3/2366 , H05G2/008
摘要： Kinematic mounts have three points having zero degree of freedom, one degree of freedom, and two degrees of freedom, respectively. As viewed from a direction perpendicular to a plane containing the three points, an extension of an entrance optical axis of a laser beam to an amplifying apparatus or an extension of an exit optical axis from the amplifying apparatus is oriented to the point with the zero degree of freedom. A translational direction of the point with the one degree of freedom is oriented to the point with the zero degree of freedom. One of the extension of the entrance optical axis and the extension of the exist optical axis passes on a side closer to the point with the two degrees of freedom with respect to a side of the point with the one degree of freedom.

13. 发明授权

US09680277B2 Slab amplifier, and laser apparatus and extreme ultraviolet light generation apparatus including slab amplifier 有权
公开(公告)号：US09680277B2
公开(公告)日：2017-06-13
申请号：US14657640
申请日：2015-03-13
申请人： Gigaphoton Inc.
发明人： Krzysztof Nowak , Takashi Suganuma , Takashi Saito , Yasufumi Kawasuji
IPC分类号： H01S3/034 , H01S3/07 , H01S3/09 , H01S3/23 , H01S3/223 , H01S3/22 , H01S3/0971 , H01S3/03 , H05G2/00
CPC分类号： H01S3/034 , H01S3/03 , H01S3/076 , H01S3/0971 , H01S3/2232 , H01S3/2316 , H01S3/2325 , H01S3/2366 , H01S3/2375 , H01S2301/02 , H05G2/008
摘要： There is provided a slab amplifier including an optical system (48, 51) provided in a chamber (47) to allow a seed beam having entered from a first window into the space between a pair of electrodes (42, 43) to be repeatedly reflected between the space so that the seed beam is amplified to be an amplified beam; a first aperture plate (61) provided between the first window and the electrodes, and having an opening of a dimension equal to or greater than a cross-section of the seed beam and equal to or smaller than a dimension of the first window; and a second aperture plate (62) provided between the second window and the electrodes, and having an opening of a dimension equal to or greater than a cross-section of the amplified beam and equal to or smaller than a dimension of the second window.

14. 发明授权

US09664898B2 Laser device and method for marking an object 有权
公开(公告)号：US09664898B2
公开(公告)日：2017-05-30
申请号：US14342504
申请日：2012-07-19
申请人： Kevin L. Armbruster , Brad D. Gilmartin , Peter J. Kueckendahl , Bernard J. Richard , Daniel J. Ryan
发明人： Kevin L. Armbruster , Brad D. Gilmartin , Peter J. Kueckendahl , Bernard J. Richard , Daniel J. Ryan
IPC分类号： G02B26/10 , B23K26/06 , H01S3/07 , H01S3/23 , H01S3/00 , H01S3/03 , B23K26/00 , B23K26/70 , B23K26/142 , B23K26/082 , H01S3/0975 , H01S3/223 , H01S3/041
CPC分类号： G02B26/10 , B23K26/00 , B23K26/0608 , B23K26/082 , B23K26/142 , B23K26/702 , B23K26/703 , H01S3/0071 , H01S3/03 , H01S3/041 , H01S3/076 , H01S3/0975 , H01S3/2232 , H01S3/2383
摘要： Laser device comprising at least two gas laser units (10), stacked in layers, each laser unit comprising a plurality of resonator tubes (12), the resonator tubes being in fluidic communication with each other and forming a common tubular space, connecting elements (20, 21) for connecting adjacent resonator tubes so as to form a loop, mirrors (22) arranged in the connecting elements for reflecting the laser light between the resonator tubes, a rear mirror (44) and a partially reflecting output coupler (42) for coupling out a laser beam. In each laser unit an integrated output flange (40) comprises the rear mirror, the partially reflecting output coupler and an output mirror (46) which deflects the laser beam passing through the output coupler to a scanning device (80) located in the central space (8) surrounded by the resonator tubes. The invention also relates to a method for marking an object.

15. 发明授权

US09647406B2 Laser unit and extreme ultraviolet light generating system 有权
公开(公告)号：US09647406B2
公开(公告)日：2017-05-09
申请号：US15172757
申请日：2016-06-03
申请人： GIGAPHOTON INC.
发明人： Takashi Suganuma , Takayuki Yabu , Osamu Wakabayashi , Seiji Nogiwa
IPC分类号： H01S3/00 , H01S3/23 , H05G2/00 , H01S3/223
CPC分类号： H01S3/005 , H01S3/2232 , H01S3/2316 , H01S3/2366 , H05G2/005 , H05G2/008
摘要： There is provided a laser unit that may include a master oscillator, a laser amplifier, and an adjuster. The master oscillator may be configured to output a laser light beam. The laser amplifier may be disposed in a light path of the laser light beam outputted from the master oscillator. The adjuster may be disposed in the light path of the laser light beam, and may be configured to adjust a beam cross-sectional shape of the laser light beam amplified by the laser amplifier to be a substantially circular shape. The beam cross-sectional shape may be at a beam waist of the laser light beam or in the vicinity of the beam waist of the laser light beam, and may be in a plane orthogonal to a light path axis.

16. 发明授权

US09614342B2 Air-cooled carbon-dioxide laser 有权
公开(公告)号：US09614342B2
公开(公告)日：2017-04-04
申请号：US14688369
申请日：2015-04-16
申请人： Coherent, Inc.
发明人： Eric R. Mueller , Adrian Papanide
IPC分类号： H01S3/04 , H01S3/223 , H01S3/041 , H01S3/09
CPC分类号： H01S3/0404 , H01S3/041 , H01S3/0906 , H01S3/2232
摘要： A carbon dioxide waveguide-laser includes an elongated resonator unit and an elongated power-supply unit. The resonator and power-supply units are spaced by a cooling unit including a plurality of longitudinally extending, spaced-apart fins, with fans arranged to drive air through the spaces between the fins.

17. 发明授权

US09577399B2 Marking apparatus with a plurality of lasers and individually adjustable sets of deflection means 有权
标题翻译：具有多个激光器和可单独调节的偏转装置组的标记装置
公开(公告)号：US09577399B2
公开(公告)日：2017-02-21
申请号：US14342495
申请日：2012-07-19
申请人： Kevin L. Armbruster , Brad D. Gilmartin , Peter J. Kueckendahl , Bernard J. Richard , Daniel J. Ryan
发明人： Kevin L. Armbruster , Brad D. Gilmartin , Peter J. Kueckendahl , Bernard J. Richard , Daniel J. Ryan
IPC分类号： B23K26/00 , H01S3/00 , B23K26/06 , H01S3/23 , H01S3/101 , B23K26/36 , H01S3/07 , H01S3/08 , H01S3/223 , H01S3/03
CPC分类号： H01S3/0071 , B23K26/0604 , B23K26/0608 , B23K26/0643 , B23K26/0648 , B23K26/082 , B23K26/355 , B23K26/361 , B23K26/362 , H01S3/005 , H01S3/03 , H01S3/076 , H01S3/08059 , H01S3/101 , H01S3/2232 , H01S3/23 , H01S3/2383
摘要： The invention relates to a marking apparatus for marking an object with laser light, comprising a plurality of lasers and a control unit for individually activating each of the lasers to emit a laser beam (90) according to a sign to be marked. A set of deflection means (30) for rearranging the laser beams (90) into a desired array of laser beams (90) is provided, the set of deflection means (30) comprises at least two deflection means (33a-i, 34a-i) per laser beam (90), in particular at least two mapping mirrors (33a-i, 34a-i) or at least one optical waveguide and one lens per laser beam (90a-i), and each deflection means (33a-i, 34a-i) is individually adjustable in its deflection direction and/or individually shiftable.
摘要翻译：本发明涉及一种用激光对物体进行标记的标记装置，包括多个激光器和一个控制单元，用于单独地激活每个激光器以根据要标记的符号发射激光束（90）。提供了一组用于将激光束（90）重新布置成所需阵列的激光束（90）的偏转装置（30），该偏转装置（30）包括至少两个偏转装置（33a-i，34a- i）每个激光束（90），特别是至少两个映射反射镜（33a-i，34a-i）或至少一个光波导和每个激光束（90a-i）的一个透镜，以及每个偏转装置（33a- i，34a-i）可以在其偏转方向上单独调节和/或单独移动。

18. 发明授权

US09573223B2 Marking apparatus with a plurality of gas lasers with resonator tubes and individually adjustable deflection means 有权
标题翻译：具有多个具有谐振器管的气体激光器和可单独调节的偏转装置的标记装置
公开(公告)号：US09573223B2
公开(公告)日：2017-02-21
申请号：US14342499
申请日：2012-07-19
申请人： Kevin L. Armbruster , Brad D. Gilmartin , Peter J. Kueckendahl , Bernard J. Richard , Daniel J. Ryan
发明人： Kevin L. Armbruster , Brad D. Gilmartin , Peter J. Kueckendahl , Bernard J. Richard , Daniel J. Ryan
IPC分类号： B23K26/00 , B23K26/08 , B23K26/06 , H01S3/23 , B23K26/36 , H01S3/07 , H01S3/08 , H01S3/223 , H01S3/00 , H01S3/03
CPC分类号： B23K26/362 , B23K26/0604 , B23K26/0608 , B23K26/0643 , B23K26/0648 , B23K26/082 , B23K26/355 , B23K26/361 , H01S3/005 , H01S3/03 , H01S3/076 , H01S3/08059 , H01S3/2232 , H01S3/2383
摘要： The invention relates to a marking apparatus (100) for marking an object with laser light, comprising a plurality of gas lasers (10) and a control unit for individually activating each of the gas lasers (10) to emit a laser beam according to a sign to be marked. The gas lasers (10) are stacked such that the laser beams emitted by the gas lasers (10) form an array of laser beams, in particular a linear array with parallel laser beams, each gas laser (10a-i) comprises laser tubes (12) that at least partially surround an inner area (5). The apparatus (100) further comprises beam-delivery means (14) for directing the array of laser beams into the inner area (5) and a set of deflection means (30) for rearranging the array of laser beams into a desired array of laser beams. The set of deflection means (30) is arranged in the inner area (5) and comprises at least one deflection means (33a, 33i) per laser beam, in particular at least one mapping mirror (33a, 33i) or one optical waveguide per laser beam. Each deflection means (30) is individually adjustable in its deflection direction and/or individually shiftable.
摘要翻译：本发明涉及一种用于用激光标记物体的标记设备（100），包括多个气体激光器（10）和控制单元，用于单独激活每个气体激光器（10）以根据标志被标记。气体激光器（10）被堆叠，使得由气体激光器（10）发射的激光束形成激光束阵列，特别是具有平行激光束的线性阵列，每个气体激光器（10a-i）包括激光管 12）至少部分地围绕内部区域（5）。装置（100）还包括用于将激光束阵列引导到内部区域（5）和一组偏转装置（30）的光束传送装置（14），用于将激光束阵列重新排列成所需的激光阵列梁。该偏转装置（30）设置在内部区域（5）中，并且每个激光束包括至少一个偏转装置（33a，33i），特别是至少一个映射反射镜（33a，33i）或每个光波导激光束。每个偏转装置（30）可在其偏转方向上单独调节和/或单独移动。

19. 发明授权

US09570884B2 Laser apparatus, extreme ultraviolet light generation system, method for controlling the laser apparatus, and method for generating the extreme ultraviolet light 有权
标题翻译：激光装置，极紫外光发生系统，激光装置的控制方法以及产生极紫外光的方法
公开(公告)号：US09570884B2
公开(公告)日：2017-02-14
申请号：US13817817
申请日：2012-01-25
申请人： Krzysztof Nowak , Osamu Wakabayashi
发明人： Krzysztof Nowak , Osamu Wakabayashi
IPC分类号： H01S5/06 , B82Y20/00 , G03F7/20 , H01S3/23 , H01S5/062 , H01S3/13 , H01S3/223 , H01S5/065 , H01S5/14 , H01S5/34 , H01S5/40 , H05G2/00
CPC分类号： H01S5/06 , B82Y20/00 , G03F7/70025 , G03F7/70033 , H01S3/1305 , H01S3/2232 , H01S3/2316 , H01S3/235 , H01S3/2375 , H01S5/0612 , H01S5/06216 , H01S5/0622 , H01S5/0653 , H01S5/0654 , H01S5/141 , H01S5/3402 , H01S5/4025 , H05G2/003 , H05G2/005 , H05G2/008
摘要： A laser apparatus may include: a master oscillator configured to output a pulsed laser beam at a repetition rate, the master oscillator including at least one semiconductor laser apparatus; at least one amplifier configured to amplify the pulsed laser beam from the master oscillator, the at least one amplifier being configured to include at least one gain bandwidth; and a controller for controlling a parameter affecting an output wavelength of the pulsed laser beam from the master oscillator such that a wavelength chirping range of the pulsed laser beam from the master oscillator overlaps at least a part of the at least one gain bandwidth.
摘要翻译：激光装置可以包括：主振荡器，其被配置为以重复频率输出脉冲激光束，所述主振荡器包括至少一个半导体激光装置; 至少一个放大器被配置为放大来自所述主振荡器的所述脉冲激光束，所述至少一个放大器被配置为包括至少一个增益带宽; 以及控制器，用于控制影响来自主振荡器的脉冲激光束的输出波长的参数，使得来自主振荡器的脉冲激光束的波长啁啾范围与至少一个增益带宽的至少一部分重叠。

20. 发明授权

US09570875B2 Laser oscillator including fans which cool resonator unit 有权
标题翻译：激光振荡器包括冷却谐振器单元的风扇
公开(公告)号：US09570875B2
公开(公告)日：2017-02-14
申请号：US15019059
申请日：2016-02-09
申请人： FANUC CORPORATION
发明人： Takanori Sato
IPC分类号： H01S3/04 , H01S3/042 , H01S3/041
CPC分类号： H01S3/0407 , H01S3/04 , H01S3/0404 , H01S3/041 , H01S3/042 , H01S3/2232
摘要： A laser oscillator according to this invention includes a resonator unit, heat exchangers, fans, a resonator temperature measuring unit, and a fan control unit. The resonator unit resonates a laser beam to be output. The heat exchangers are arranged adjacent to the resonator unit and are to be supplied with a cooling liquid. The fans are arranged at least at one of two opposite positions across both the resonator unit and the heat exchangers and generate airflow in one direction, which passes through both the resonator unit and the heat exchangers. The resonator temperature measuring unit measures the temperature of the resonator unit. The fan control unit controls the fans. The fan control unit switches the direction in which air is blown by the fans, based on the temperature of the resonator unit.
摘要翻译：根据本发明的激光振荡器包括谐振器单元，热交换器，风扇，谐振器温度测量单元和风扇控制单元。谐振器单元谐振要输出的激光束。热交换器被布置成与谐振器单元相邻并且被供应冷却液体。风扇至少布置在谐振器单元和热交换器两个相对的两个位置中的一个处，并且在一个方向上产生通过谐振器单元和热交换器的气流。谐振器温度测量单元测量谐振器单元的温度。风扇控制单元控制风扇。风扇控制单元基于谐振器单元的温度来切换风扇吹送空气的方向。

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