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11. 发明申请

US20150123008A1 ION GENERATOR 审中-公开
标题翻译：离子发生器
公开(公告)号：US20150123008A1
公开(公告)日：2015-05-07
申请号：US14381460
申请日：2012-11-08
申请人： Koganei Corporation
发明人： Yoshinari Fukada
IPC分类号： H01T23/00 , H01J27/02
CPC分类号： H01T23/00 , G03G15/0291 , H01J27/022 , H01J27/26 , H01T19/04
摘要： In an ion generator, a flexible discharge electrode 44 composed of one wire is provided to a base 43, and a swinging motion or a turning motion of a free end 44b of the discharge electrode 44 about a fixed end 44a of the discharge electrode 44 is performed by repulsive force of a corona discharge generated by supplying a high voltage to the fixed end 44a. Therefore, in comparison with a discharge electrode composed of a bundle of thin wires, it is possible to significantly reduce dust emission from the free end 44b of the discharge electrode 44, and to further improve the ion generator 30 in maintenance interval. Since the discharge electrode 44 is compose of one wire, it is possible to reduce the discharge electrode 44 in size, easily observe the state of the discharge electrode 44, and simplify its maintenance. Since the discharge electrode 44 performs the swinging motion or the turning motion, it is possible to transport the generated air ions EI to a wide area of a packaging film 10, and to enhance ionizing efficiency.
摘要翻译：在离子发生器中，将由一根导线构成的柔性放电电极44设置在基座43上，并且放电电极44的自由端44b围绕放电电极44的固定端44a的摆动运动或转动运动是由通过向固定端44a提供高电压而产生的电晕放电的斥力执行。因此，与由一束细线组成的放电电极相比，可以显着地减少来自放电电极44的自由端44b的灰尘的发射，并且在维护间隔中进一步改善离子发生器30。由于放电电极44由一根导线组成，所以可以减小放电电极44的尺寸，容易观察放电电极44的状态，并简化其维护。由于放电电极44进行摆动运动或转动运动，因此可以将产生的空气离子EI输送到包装膜10的广泛区域，提高电离效率。

12. 发明授权

US08963101B2 Apparatus and method for thermal assisted desorption ionization systems 有权
标题翻译：热辅助解吸电离系统的装置和方法
公开(公告)号：US08963101B2
公开(公告)日：2015-02-24
申请号：US14455611
申请日：2014-08-08
申请人： Jordan Krechmer , Brian D. Musselman
发明人： Jordan Krechmer , Brian D. Musselman
IPC分类号： H01J49/30 , H01J37/08 , H01J49/04 , H01J27/26 , H01J49/12
CPC分类号： H01J49/049 , G01N27/622 , G01N27/626 , G01N27/64 , H01J27/26 , H01J49/004 , H01J49/04 , H01J49/0431 , H01J49/10 , H01J49/126 , H01J49/14 , H01J49/24 , Y10T436/24
摘要： The present invention is directed to a method and device to desorb an analyte using heat to allow desorption of the analyte molecules, where the desorbed analyte molecules are ionized with ambient temperature ionizing species. In various embodiments of the invention a current is passed through a mesh upon which the analyte molecules are present. The current heats the mesh and results in desorption of the analyte molecules which then interact with gas phase metastable neutral molecules or atoms to form analyte ions characteristic of the analyte molecules.
摘要翻译：本发明涉及一种使用热解析分析物以允许分析物分子解吸的方法和装置，其中解吸的分析物分子与环境温度电离物质电离。在本发明的各种实施方案中，电流通过其上存在分析物分子的网。电流加热网格并导致分析物分子的解吸，然后分析物分子与气相亚稳态的中性分子或原子相互作用以形成分析物分子特征的分析物离子。

13. 发明申请

US20150008341A1 CHARGED PARTICLE BEAM SYSTEM AND METHOD OF OPERATING A CHARGED PARTICLE BEAM SYSTEM 有权
标题翻译：充电颗粒束系统和操作充电颗粒束系统的方法
公开(公告)号：US20150008341A1
公开(公告)日：2015-01-08
申请号：US14314219
申请日：2014-06-25
申请人： Carl Zeiss Microscopy, LLC
发明人： John A. Notte, IV , Alexander Groholski , Robert Conners , Mark D. DiManna , Raymond Hill
IPC分类号： H01J37/08 , H01J37/18
CPC分类号： H01J37/18 , G21K5/04 , H01J27/26 , H01J37/08 , H01J2237/002 , H01J2237/0216 , H01J2237/032 , H01J2237/0653 , H01J2237/0807 , H01J2237/1501 , H01J2237/1502 , H01J2237/1825 , H01J2237/188 , H01J2237/20207 , H01J2237/20214 , H01J2237/20221 , H01J2237/20235
摘要： The present disclosure relates to a charged particle beam system, comprising a noble gas field ion beam source, a charged particle beam column, and a housing defining a first vacuum region and a second vacuum region. A noble gas field ion beam source is arranged within the first vacuum region. A first mechanical vacuum pump is functionally attached to the first vacuum region, an ion getter pump is attached to the charged particle beam column, and a gas supply is attached to the first vacuum region configured to supply a noble gas to the noble gas field ion beam source.
摘要翻译：本发明涉及带电粒子束系统，其包括惰性气体场离子束源，带电粒子束柱和限定第一真空区域和第二真空区域的壳体。惰性气体场离子束源设置在第一真空区域内。第一机械真空泵功能地附接到第一真空区域，离子吸气剂泵连接到带电粒子束柱，并且气体供应附着到构造成向惰性气体场离子供应惰性气体的第一真空区域光束源。

14. 发明申请

US20150008334A1 CHARGED PARTICLE BEAM SYSTEM AND METHOD OF OPERATING A CHARGED PARTICLE BEAM SYSTEM 有权
标题翻译：充电颗粒束系统和操作充电颗粒束系统的方法
公开(公告)号：US20150008334A1
公开(公告)日：2015-01-08
申请号：US14314289
申请日：2014-06-25
申请人： Carl Zeiss Microscopy, LLC
发明人： John A. Notte, IV , FHM-Faridur Rahman , Weijie Huang , Shawn McVey
IPC分类号： H01J27/26 , G21K5/04
CPC分类号： H01J37/18 , G21K5/04 , H01J27/26 , H01J37/08 , H01J2237/002 , H01J2237/0216 , H01J2237/032 , H01J2237/0653 , H01J2237/0807 , H01J2237/1501 , H01J2237/1502 , H01J2237/1825 , H01J2237/188 , H01J2237/20207 , H01J2237/20214 , H01J2237/20221 , H01J2237/20235
摘要： The present disclosure relates to a gas field ion source comprising a housing, an electrically conductive tip arranged within the housing, a gas supply for supplying one or more gases to the housing, wherein the one or more gases comprise neon or a noble gas with atoms having a mass larger than neon, and an extractor electrode having a hole to permit ions generated in the neighborhood of the tip to pass through the hole. A surface of the extractor electrode facing the tip can be made of a material having a negative secondary ion sputter rate of less than 10−5 per incident neon ion.
摘要翻译：本公开涉及一种气体离子源，其包括壳体，布置在壳体内的导电尖端，用于向壳体供应一种或多种气体的气体源，其中所述一种或多种气体包括氖或具有原子的惰性气体具有大于氖的质量，以及具有孔的提取器电极，其允许在尖端附近产生的离子穿过孔。提取器电极的面向尖端的表面可以由每个入射氖离子具有小于10-5的负次级离子溅射速率的材料制成。

15. 发明申请

US20140326897A1 GAS FIELD IONIZATION ION SOURCE AND ION BEAM DEVICE 审中-公开
标题翻译：气体离子源和离子束装置
公开(公告)号：US20140326897A1
公开(公告)日：2014-11-06
申请号：US14332923
申请日：2014-07-16
申请人： HITACHI HIGH-TECHNOLOGIES CORPORATION
发明人： Yoshimi KAWANAMI , Tohru ISHITANI
IPC分类号： H01J37/08
CPC分类号： H01J37/08 , H01J27/26 , H01J37/3056 , H01J2237/002 , H01J2237/006 , H01J2237/0807
摘要： Provided is a gas field ionization ion source capable of emitting heavy ions with high brightness which are suitable for processing a sample. The gas field ionization ion source according to the present invention includes a temperature controller individually controlling the temperature of the tip end of an emitter electrode (1) and the temperature of a gas injection port part (3) of a gas supply unit.
摘要翻译：提供能够发出适合于处理样品的高亮度的重离子的气体电离离子源。根据本发明的气体电离离子源包括温度控制器，其分别控制发射极电极（1）的末端的温度和气体供给单元的气体注入口部分（3）的温度。

16. 发明授权

US08779380B2 Ion beam device 有权
标题翻译：离子束装置
公开(公告)号：US08779380B2
公开(公告)日：2014-07-15
申请号：US12995700
申请日：2009-03-30
申请人： Hiroyasu Shichi , Shinichi Matsubara , Norihide Saho , Masahiro Yamaoka , Noriaki Arai
发明人： Hiroyasu Shichi , Shinichi Matsubara , Norihide Saho , Masahiro Yamaoka , Noriaki Arai
IPC分类号： H01J27/00
CPC分类号： H01J27/26 , H01J27/022 , H01J37/023 , H01J37/067 , H01J37/08 , H01J37/26 , H01J37/28 , H01J2237/002 , H01J2237/006 , H01J2237/061 , H01J2237/0807 , H01J2237/2803
摘要： An ion beam device according to the present invention includes a gas field ion source (1) including an emitter tip (21) supported by an emitter base mount (64), a ionization chamber (15) including an extraction electrode (24) and being configured to surround the emitter tip (21), and a gas supply tube (25). A center axis line of the extraction electrode (24) overlaps or is parallel to a center axis line (14A) of the ion irradiation light system, and a center axis line (66) passing the emitter tip (21) and the emitter base mount (64) is inclinable with respect to a center axis line of the ionization chamber (15). Accordingly, an ion beam device including a gas field ion source capable of adjusting the direction of the emitter tip is provided.
摘要翻译：根据本发明的离子束装置包括气体离子源（1），其包括由发射极基座（64）支撑的发射极尖端（21），包括引出电极（24）的电离室（15）构造成围绕发射器尖端（21），以及气体供应管（25）。引出电极（24）的中心轴线与离子照射光系统的中心轴线（14A）重叠或平行，通过发射极尖端（21）和发射极基座（64）相对于所述电离室（15）的中心轴线是可倾斜的。因此，提供了包括能够调节发射极尖端的方向的气体场离子源的离子束装置。

17. 发明授权

US08581484B2 Liquid metal ion gun 失效
标题翻译：液态金属离子枪
公开(公告)号：US08581484B2
公开(公告)日：2013-11-12
申请号：US13375147
申请日：2010-05-14
申请人： Hiroyasu Kaga , Kanehiro Nagao , Motohide Ukiana
发明人： Hiroyasu Kaga , Kanehiro Nagao , Motohide Ukiana
IPC分类号： H01J27/02 , G01N23/00 , G21G5/00
CPC分类号： H01J37/08 , H01J27/26 , H01J2237/061 , H01J2237/0805 , H01J2237/31749
摘要： A liquid metal ion gun 3 includes a liquid metal ion source 31 and a beam limiting aperture 33. The liquid metal ion source 31 includes a reservoir 36 and an emitter 35. The reservoir 36 is made of tungsten (W) and holds liquid metal gallium (Ga). The emitter 35 is made of W. The beam limiting aperture 33 is formed with a liquid metal member 44 made of Ga placed on a base 46 made of W, has an opening 41 that enables an ion beam 2 extracted from the liquid metal ion source 31 to pass therethrough, and limits the diameter of the ion beam 2. The beam limiting aperture 33 has a groove structure 45 that causes the liquid metal 44 to gather into a region located around the opening 41. The lifetime of the beam limiting aperture can be increased, and an emission can be maintained stable for a long time period and reproducibly restored to a stable state.
摘要翻译：液体金属离子枪3包括液体金属离子源31和束限制孔33.液体金属离子源31包括储存器36和发射器35.储存器36由钨（W）制成并保持液态金属镓（Ga）。发射器35由W制成。限流孔33由放置在由W制成的基座46上的由Ga制成的液态金属构件44形成，具有能够从液态金属离子源中提取离子束2的开口41 31限制了离子束2的直径。光束限制孔33具有凹槽结构45，其使液体金属44聚集到位于开口41周围的区域中。光束限制孔径的寿命并且可以长时间保持稳定的发射并且可再现地恢复到稳定状态。

18. 发明授权

US08519355B2 Charged particle source 有权
标题翻译：带电粒子源
公开(公告)号：US08519355B2
公开(公告)日：2013-08-27
申请号：US13646037
申请日：2012-10-05
申请人： Carl Zeiss Microscopy GmbH
发明人： Wolfram Buhler , Matthias Langer , Xiong Liu
IPC分类号： H01J49/10 , H01J27/26 , H01J27/24 , H01J3/14
CPC分类号： G21K5/00 , H01J27/022 , H01J27/26
摘要： A charged particle source comprises at least one gas inlet configured to supply gas particles, at least one tip having a tip apex being biased to provide an electrical field for generating charged particles, and at least one ionization area to which gas particles are supplied. The gas particles are ionized in the ionization area due to the electrical field. Additionally, the charged particle source comprises at least one first electrode configured to accelerate charged particles and at least one light emitting device providing a light beam. The light beam is focused to a focus point in the ionization area, specifically, to a focus volume such that the ionization area is at least partly positioned in the focus volume. The ionization area is arranged between the tip apex and the first electrode. The distance between the ionization area and the tip apex may be from 0.1 nm to 1 nm.
摘要翻译：带电粒子源包括构造成供应气体颗粒的至少一个气体入口，至少一个具有尖端顶点的尖端被偏置以提供用于产生带电粒子的电场以及供应气体颗粒的至少一个电离区域。由于电场，气体粒子在电离区域被离子化。另外，带电粒子源包括构造成加速带电粒子的至少一个第一电极和提供光束的至少一个发光器件。光束被聚焦到电离区域中的焦点，具体地聚焦到聚焦体积，使得电离区域至少部分地位于焦点体积中。电离区域设置在尖端顶点和第一电极之间。电离区域与尖端顶点之间的距离可以为0.1nm至1nm。

19. 发明申请

US20130214147A1 Apparatus and Method for Inhibiting Ionization Source Filament Failure 有权
标题翻译：用于抑制电离源丝失效的装置和方法
公开(公告)号：US20130214147A1
公开(公告)日：2013-08-22
申请号：US13399791
申请日：2012-02-17
申请人： Christopher MULLEN , John E. P. SYKA , Scott T. QUARMBY
发明人： Christopher MULLEN , John E. P. SYKA , Scott T. QUARMBY
IPC分类号： H01J49/26
CPC分类号： H01J49/147 , H01J27/26 , H01J49/0027 , H01J49/16 , H01J2237/06308
摘要： An ion source apparatus for a mass spectrometer comprises a refractory metal filament operable to provide a flow of electrons by thermionic emission; an electrical current source electrically coupled to the filament for heating the filament; a vacuum chamber enclosing the filament; an ionization volume within the vacuum chamber capable of receiving the flow of electrons; a source of an oxygen-providing gas or gases; a restrictive fluidic coupling to the source of oxygen-providing gas or gases; and a gas conduit fluidically coupled to the restrictive fluidic coupling, the restrictive fluidic coupling and conduit operable to provide a flow of the oxygen-providing gas or gases into the vacuum chamber so as to maintain a partial pressure of said gas or gases within the vacuum chamber that is sufficiently high so as to inhibit the otherwise formation of a carbonaceous growth on the filament in the presence of a gaseous carbon-containing material.
摘要翻译：用于质谱仪的离子源装置包括可操作以通过热离子发射提供电子流的难熔金属细丝; 与灯丝电耦合以加热灯丝的电流源; 封闭灯丝的真空室; 能够接收电子流的真空室内的电离体积; 供氧气体或气体的来源; 与供氧气体或气体源的限制性流体耦合; 以及气体导管，其流体地联接到所述限制性流体耦合，所述限制性流体耦合和导管可操作以将所述供氧气体或所述气体的流提供到所述真空室中，以便将所述气体或气体的分压保持在所述真空中室，其足够高以便在气态含碳材料存在下抑制另外在细丝上形成碳质生长。

20. 发明申请

US20130098774A1 Method and Apparatus for a Porous Metal Electrospray Emitter 审中-公开
标题翻译：多孔金属电喷发射体的方法和装置
公开(公告)号：US20130098774A1
公开(公告)日：2013-04-25
申请号：US13681155
申请日：2012-11-19
申请人： Massachusetts Institute of Technology
发明人： Paulo Lozano , Robert Scott Legge, JR.
IPC分类号： C25F3/02
CPC分类号： C25F3/02 , F03H1/0012 , H01J9/025 , H01J27/26 , Y10T29/494
摘要： An ionic liquid ion source can include a microfabricated body including a base and a tip. The microfabricated body can be formed of a porous metal compatible (e.g., does not react or result in electrochemical decaying or corrosion) with an ionic liquid or a room-temperature molten salt. The microfabricated body can have a pore size gradient that decreases from the base of the body to the tip of the body, so that the ionic liquid can be transported through capillarity from the base to the tip.
摘要翻译：离子液体离子源可以包括包含基底和尖端的微加工体。微制造体可以由与离子液体或室温熔融盐相容的多孔金属（例如，不反应或导致电化学腐蚀或腐蚀）形成。微加工体可以具有从身体的底部到身体的尖端减小的孔径梯度，使得离子液体可以通过从基部到尖端的毛细作用传输。

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