专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

11. 发明授权

US09336979B2 Focused ion beam apparatus with precious metal emitter surface 有权
标题翻译：聚焦离子束设备，具有贵金属发射体表面
公开(公告)号：US09336979B2
公开(公告)日：2016-05-10
申请号：US14591843
申请日：2015-01-07
申请人： HITACHI HIGH-TECH SCIENCE CORPORATION
发明人： Anto Yasaka , Fumio Aramaki , Yasuhiko Sugiyama , Tomokazu Kozakai , Osamu Matsuda
IPC分类号： H01J27/02 , H01J37/08 , H01J37/305 , H01J27/26
CPC分类号： H01J27/024 , H01J27/26 , H01J37/08 , H01J37/3056 , H01J2237/0807 , H01J2237/182
摘要： A focused ion beam apparatus has an ion source chamber in which is disposed an emitter for emitting ions. The surface of the emitter is formed of a precious metal, such as platinum, palladium, iridium, rhodium or gold. A gas supply unit supplies nitrogen gas to the ion source chamber so that the nitrogen gas adsorbs on the surface of the emitter. An extracting electrode is spaced from the emitter, and a voltage is applied to the extracting electrode to ionize the adsorbed nitrogen gas and extract nitrogen ions in the form of an ion beam. A temperature control unit controls the temperature of the emitter.
摘要翻译：聚焦离子束装置具有离子源室，其中设置有用于发射离子的发射极。发射体的表面由贵金属形成，例如铂，钯，铱，铑或金。气体供给单元向离子源室供给氮气，使得氮气吸附在发射体的表面。提取电极与发射极间隔开，并向提取电极施加电压，使吸附的氮气离子化，并以离子束形式提取氮离子。温度控制单元控制发射器的温度。

12. 发明申请

US20160104595A1 ION GENERATION APPARATUS AND ELECTRIC EQUIPMENT INCLUDING THE SAME 有权
标题翻译：离子发生装置和包括其的电气设备
公开(公告)号：US20160104595A1
公开(公告)日：2016-04-14
申请号：US14889263
申请日：2014-02-27
申请人： SHARP KABUSHIKI KAISHA
发明人： Hiromu NISHIDA , Koichi IZU , Nobuyuki OHE , Yoshinori SEKOGUCHI
IPC分类号： H01J27/02 , H01J27/26
CPC分类号： H01J27/022 , H01J27/26 , H01T19/04 , H01T23/00
摘要： A housing, a substrate accommodated in the housing, a needle electrode for generating ions through discharging, which is held by the substrate such that a tip end portion protrudes outside the housing, an insulating sealing portion insulating and sealing the substrate in the housing, and an electrode protection portion for protecting the needle electrode outside the housing are included. The housing is provided with an opening portion through which a side of the tip end portion of the needle electrode is inserted and which is sealed with the insulating sealing portion. The electrode protection portion has a first protection portion and a second protection portion which are provided to protrude from the housing relative to the tip end portion of the needle electrode and opposed to each other at a distance from each other on opposing sides of the needle electrode.
摘要翻译：壳体，容纳在壳体中的基板，用于通过排出产生离子的针状电极，其由基板保持，使得前端部突出到壳体外部;绝缘密封部，其将基板绝缘并密封在壳体中;以及包括用于将针电极保护在壳体外部的电极保护部分。壳体设置有开口部，针状电极的前端部的一侧插入该开口部，并且与绝缘密封部密封。电极保护部具有第一保护部和第二保护部，该第一保护部和第二保护部设置成相对于针电极的前端部从壳体突出并且在针电极的相对侧彼此相对距离。

13. 发明申请

US20160079051A1 INTEGRATED NANOSPRAY SYSTEM 有权
标题翻译：综合纳米系统
公开(公告)号：US20160079051A1
公开(公告)日：2016-03-17
申请号：US14409233
申请日：2014-06-05
申请人： NEW OBJECTIVE, INC.
发明人： Gary VALASKOVIC , Ben NGO , John P. DEVLIN , Kurt M. MAW , Ian SCHON
IPC分类号： H01J49/16 , H01J27/02 , H01J49/06 , H01J27/26
CPC分类号： H01J49/165 , G01N30/7266 , H01J27/022 , H01J27/26 , H01J49/068
摘要： Integrated nanospray ionization package, comprising a nanospray emitter, a push button carriage with button element projecting through a bore in said package, an integral high voltage contact pin, a bore in said package for reversible protrusion of the nanospray emitter, a push-and-retract spring mechanism in which the range of forward motion of the emitter is not dependent on range of travel of the said button, and then upon actuation of said button element and spring element for retraction of said nanospray emitter, said nanospray emitter is pushed forward to establish electrical contact, and upon release of said button retracts and breaks the electrical contact.
摘要翻译：集成的纳米喷雾离子化封装，包括纳米喷雾发射器，具有通过所述封装中的孔突出的按钮元件的按钮托架，整体高压接触销，所述封装中的用于纳米喷雾发射器可逆突起的孔，收缩弹簧机构，其中发射器的向前运动的范围不取决于所述按钮的行程范围，然后在所述按钮元件和弹簧元件的致动时用于缩回所述纳米喷雾发射器，所述纳喷射发射器被推向建立电接触，并且在释放所述按钮时缩回并断开电接触。

15. 发明申请

US20150371807A1 SURFACE IONIZATION SOURCE 审中-公开
标题翻译：表面离子源
公开(公告)号：US20150371807A1
公开(公告)日：2015-12-24
申请号：US14764834
申请日：2014-01-30
申请人： SMITHS DETECTION MONTREAL INC.
发明人： Jan Hendrikse , Vladimir Romanov
IPC分类号： H01J27/26 , H01J49/26 , H01J49/16
CPC分类号： H01J27/26 , G01N27/64 , H01J49/142 , H01J49/16 , H01J49/26
摘要： A surface ionization source comprises a tube having a first end, a second end, and an interior bore extending through the tube from the first end to the second end. The first end of the tube is configured to receive a flow of gas and the second end of the tube is configured to direct the flow of gas onto a surface configured to hold an analyte. A radioactive source is at least substantially disposed in the interior bore of the tube. The radioactive source is configured to form ions in the flow of gas as the flow of gas passes through the interior bore. The flow of gas containing the ions is directed onto the analyte to at least partially ionize the analyte.
摘要翻译：表面电离源包括具有第一端，第二端和从第一端到第二端延伸穿过管的内孔的管。管的第一端被配置为接收气流，并且管的第二端被配置成将气流引导到构造成保持分析物的表面上。放射源至少基本上设置在管的内孔中。放射源被配置成随着气流通过内孔而在气流中形成离子。含有离子的气体流被引导到被分析物上以至少部分地离子化分析物。

16. 发明申请

US20150357147A1 EMITTER STRUCTURE, GAS ION SOURCE AND FOCUSED ION BEAM SYSTEM 审中-公开
标题翻译：发射体结构，气体离子源和聚焦离子束系统
公开(公告)号：US20150357147A1
公开(公告)日：2015-12-10
申请号：US14830106
申请日：2015-08-19
申请人： HITACHI HIGH-TECH SCIENCE CORPORATION
发明人： Anto YASAKA , Yasuhiko SUGIYAMA , Hiroshi OBA
IPC分类号： H01J27/26 , H01J27/02 , H01J37/08
CPC分类号： H01J27/26 , H01J1/15 , H01J1/18 , H01J3/04 , H01J27/024 , H01J37/08 , H01J2237/002 , H01J2237/06316
摘要： A focused ion beam system includes a gas ion source and an emitter structure. The emitter structure includes a pair of conductive pins fixed to a base member, a filament connected between the pair of conductive pins, and an emitter which has a tip end with one atom or three atoms and which is connected to the filament. A supporting member is fixed to the base material, and the emitter is connected to the supporting member.
摘要翻译：聚焦离子束系统包括气体离子源和发射极结构。发射极结构包括固定到基底构件的一对导电引脚，连接在一对导电引脚之间的细丝和具有一个原子或三个原子的尖端并连接到灯丝的发射极。支撑构件固定在基材上，发射体与支撑构件连接。

17. 发明授权

US09159542B2 Apparatus and method for inhibiting ionization source filament failure 有权
标题翻译：用于抑制电离源灯丝故障的装置和方法
公开(公告)号：US09159542B2
公开(公告)日：2015-10-13
申请号：US13399791
申请日：2012-02-17
申请人： Christopher Mullen , John E. P. Syka , Scott T. Quarmby
发明人： Christopher Mullen , John E. P. Syka , Scott T. Quarmby
IPC分类号： H01J49/14 , H01J49/16 , H01J27/26 , H01J49/00
CPC分类号： H01J49/147 , H01J27/26 , H01J49/0027 , H01J49/16 , H01J2237/06308
摘要： An ion source apparatus for a mass spectrometer comprises a refractory metal filament operable to provide a flow of electrons by thermionic emission; an electrical current source electrically coupled to the filament for heating the filament; a vacuum chamber enclosing the filament; an ionization volume within the vacuum chamber capable of receiving the flow of electrons; a source of an oxygen-providing gas or gases; a restrictive fluidic coupling to the source of oxygen-providing gas or gases; and a gas conduit fluidically coupled to the restrictive fluidic coupling, the restrictive fluidic coupling and conduit operable to provide a flow of the oxygen-providing gas or gases into the vacuum chamber so as to maintain a partial pressure of said gas or gases within the vacuum chamber that is sufficiently high so as to inhibit the otherwise formation of a carbonaceous growth on the filament in the presence of a gaseous carbon-containing material.
摘要翻译：用于质谱仪的离子源装置包括可操作以通过热离子发射提供电子流的难熔金属细丝; 与灯丝电耦合以加热灯丝的电流源; 封闭灯丝的真空室; 能够接收电子流的真空室内的电离体积; 供氧气体或气体的来源; 与供氧气体或气体源的限制性流体耦合; 以及气体导管，其流体地联接到所述限制性流体耦合，所述限制性流体耦合和导管可操作以将所述供氧气体或所述气体的流提供到所述真空室中，以便将所述气体或气体的分压保持在所述真空中室，其足够高以便在气态含碳材料存在下抑制另外在细丝上形成碳质生长。

18. 发明授权

US09159527B2 Systems and methods for a gas field ionization source 有权
标题翻译：气田电离源的系统和方法
公开(公告)号：US09159527B2
公开(公告)日：2015-10-13
申请号：US12100570
申请日：2008-04-10
申请人： Billy W. Ward , Lou Farkas , John A. Notte , Randall Percival
发明人： Billy W. Ward , Lou Farkas , John A. Notte , Randall Percival
IPC分类号： H01J27/00 , H01J37/08 , H01J27/26
CPC分类号： H01J37/08 , H01J27/26 , H01J2237/06341 , H01J2237/065 , H01J2237/0807 , H01J2237/28
摘要： In one aspect the invention provides a gas field ion source assembly that includes an ion source in connection with an optical column such that an ion beam generated at the ion source travels through the optical column. The ion source includes an emitter having a width that tapers to a tip comprising a few atoms. In other aspects, the methods provide for manufacturing, maintaining and enhancing the performance of a gas field ion source including sharpening the tip of the ion source in situ.
摘要翻译：在一个方面，本发明提供了一种气体离子源组件，其包括与光学柱连接的离子源，使得在离子源处产生的离子束穿过光学柱。离子源包括具有与包含少量原子的尖端逐渐变细的宽度的发射体。在其它方面，该方法提供制造，维持和提高气体离子源的性能，包括原位锐化离子源的尖端。

19. 发明授权

US09018597B2 Gas field ionization ion source and ion beam apparatus 有权
标题翻译：气田电离离子源和离子束装置
公开(公告)号：US09018597B2
公开(公告)日：2015-04-28
申请号：US14390071
申请日：2013-03-11
申请人： Hitachi High-Technologies Corporation
发明人： Yoshimi Kawanami , Hironori Moritani
IPC分类号： H01J27/26 , H01J37/08 , H01J37/10 , H01J37/147 , H01J37/26
CPC分类号： H01J37/08 , H01J27/26 , H01J37/10 , H01J37/147 , H01J37/26 , H01J37/28 , H01J2237/006 , H01J2237/0807
摘要： In the case of a conventional gas field ionization ion source, it was not possible to carry out an analysis with a high S/N ratio and a high-speed machining process because the current amount of an ion beam is small. In view of these problems, the present invention has been devised, and its object is to obtain a large ion beam current, while suppressing a probability of damaging an emitter electrode. The present invention is characterized by a process in which an ion beam is emitted at least in two operation states including a first operation state in which, when a first extraction voltage is applied, with the gas pressure being set to a first gas pressure, ions are emitted from a first ion emission region at the apex of the emitter electrode, and a second operation state in which, when a second extraction voltage that is higher than the first extraction voltage is applied, with the gas pressure being set to a second gas pressure that is higher than the first gas pressure, ions are emitted from a second ion emission region that is larger than the first ion emission region.
摘要翻译：在常规气田电离离子源的情况下，由于离子束的电流量小，所以不可能以高S / N比和高速加工工艺进行分析。鉴于这些问题，本发明的目的是为了获得大的离子束电流，同时抑制发射电极损坏的可能性。本发明的特征在于，其中离子束至少在两种操作状态下发射的过程，包括第一操作状态，其中当施加第一提取电压时，将气体压力设置为第一气体压力，离子从发射电极的顶点处的第一离子发射区域发射;以及第二操作状态，其中当施加高于第一提取电压的第二提取电压时，将气体压力设定为第二气体高于第一气体压力的压力，从大于第一离子发射区域的第二离子发射区域发射离子。

20. 发明授权

US09017562B2 Particle sources and methods for manufacturing the same 有权
标题翻译：粒子来源及其制造方法
公开(公告)号：US09017562B2
公开(公告)日：2015-04-28
申请号：US13726971
申请日：2012-12-26
申请人： 38th Research Institute, China Electronics Technology Group Corporation
发明人： Huarong Liu
IPC分类号： C25F3/00 , C03C15/00 , C23F4/02 , H01J1/00 , H01J1/304 , H01J9/02 , H01J37/04 , H01J37/06 , H01J37/08 , B82Y99/00 , H01J27/26 , H01J37/073
CPC分类号： C23F4/02 , B82Y99/00 , H01J1/00 , H01J1/3044 , H01J9/025 , H01J27/26 , H01J37/04 , H01J37/06 , H01J37/073 , H01J37/08 , H01J2201/30415 , H01J2237/0807
摘要： The present disclosure provides a method for manufacturing a particle source, comprising: placing a metal wire in vacuum, introducing active gas and catalyst gas, adjusting a temperature of the metal wire, and applying a positive high voltage V to the metal wire to dissociate the active gas at the surface of the metal wire, in order to generate at a peripheral surface of the head of the metal wire an etching zone in which field induced chemical etching (FICE) is performed; increasing by the FICE a surface electric field at the top of the metal wire head to be greater than the to evaporation field of the material for the metal wire, so that metal atoms at the wire apex are evaporated off; after the field evaporation is activated by the FICE, causing mutual adjustment between the FICE and the field evaporation, until the head of the metal wire has a shape of combination of a base and a tip on the base; and stopping the FICE and the field evaporation when the head of the metal wire takes a predetermine shape.
摘要翻译：本公开提供了一种制造颗粒源的方法，包括：将金属丝放置在真空中，引入活性气体和催化剂气体，调节金属丝的温度，以及向金属丝施加正高电压V以使在金属线的表面处的活性气体，以在金属线的头部的外周表面上产生进行场诱导化学蚀刻（FICE）的蚀刻区域; 通过FICE增加金属丝头顶部的表面电场大于金属线材料的蒸发场，使金属丝顶端的金属原子蒸发掉; 在通过FICE激活场蒸发之后，引起FICE和场蒸发之间的相互调节，直到金属丝的头部具有基部和底部的尖端的组合的形状; 并且当金属丝的头部具有预定形状时，停止FICE和场蒸发。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式