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    • 15. 发明授权
    • Method for manufacturing liquid jet recording heads and a head manufactured by such method of manufacture
    • 用于制造液体喷射记录头的方法和通过这种制造方法制造的头部
    • US06225032B1
    • 2001-05-01
    • US09139399
    • 1998-08-25
    • Toshinori HasegawaMasaki InabaAkio SaitohAkira GotoMasao FurukawaShin IshimatsuMiki Ito
    • Toshinori HasegawaMasaki InabaAkio SaitohAkira GotoMasao FurukawaShin IshimatsuMiki Ito
    • G03F700
    • B41J2/1634B41J2/162B41J2/1637Y10S430/146
    • A method for manufacturing liquid jet recording heads, each provided with discharge ports to discharge liquid, a discharge port plate having the discharge ports arranged therefor, and performing ablation processing of holes becoming the discharge ports by use of a mask for projecting the image of the mask onto the discharge port plate with coherent laser beam as light source, comprises the following steps of forming water-repellent layer on the surface of the discharge port plate on the liquid discharge side; and of performing the ablation processing by irradiating the laser beam from the reverse side of the surface of discharge port plate having the water-repellent layer formed thereon in a state of such surface being arranged to be under the atmosphere containing fluorine atom, and forming the discharge ports, at the same time, enabling the substance containing the fluorine atom excited by the laser beam to adhere to the surface having the water-repellent layer formed thereon. In this manner, the throughput of product manufacture is enhanced without any provision of extra processing steps to remove the byproducts to be created by the irradiation of laser beam, hence contributing to a significant cost reduction of the manufacture of liquid jet recording heads.
    • 一种液体喷射记录头的制造方法,每个液体喷射记录头均具有用于排出液体的排出口,具有排出口的排出口板,并且通过使用用于投影所述排出口的图像的掩模对成为排出口的孔进行消融处理 将具有相干激光束作为光源的排出口板掩模,包括在排液侧的排出口板的表面上形成防水层的步骤; 并且通过在形成有所述防水层的排出口板的表面的背面照射激光束,在这样的表面被布置在含有氟原子的气氛的状态下进行烧蚀处理,并且形成 排出口,同时使含有被激光束激发的氟原子的物质粘附到形成有防水层的表面上。 以这种方式,增加了产品生产的吞吐量,而没有任何额外的处理步骤来除去由激光束照射产生的副产品,从而有助于大大降低液体喷射记录头的制造成本。