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11. 发明授权

US5304357A Apparatus for zone melting recrystallization of thin semiconductor film 失效
标题翻译：薄半导体膜的区域熔融重结晶装置
公开(公告)号：US5304357A
公开(公告)日：1994-04-19
申请号：US880755
申请日：1992-05-08
申请人： Yukito Sato , Mitsugu Irinoda , Kouichi Ohtaka , Takeshi Hino , Masafumi Kumano
发明人： Yukito Sato , Mitsugu Irinoda , Kouichi Ohtaka , Takeshi Hino , Masafumi Kumano
IPC分类号： H01L21/20 , H01L21/00 , H01L21/208 , H01L21/268 , H01L21/336 , H01L29/78 , H01L29/786
CPC分类号： H01L21/67121 , Y10S117/904 , Y10S148/09
摘要： An apparatus for zone melting a thin semiconductor film comprises an first laser for heating the thin semiconductor film, at least one additional laser for heating an insulating substrate, a first temperature detecting device for detecting the temperature of a melted portion of the thin semiconductor film, and a second temperature detecting device for detecting the temperature of a solidified portion of the thin semiconductor film. The apparatus further comprises a first controller for controlling an output of the first laser so as to maintain the temperature of the melted portion in a first predetermined temperature range, and a second controller for controlling an output of the additional laser so as to maintain the temperature of the solidified portion in a second predetermined temperature range.
摘要翻译：用于对薄半导体膜进行区域熔融的装置包括用于加热薄半导体膜的第一激光器，用于加热绝缘基板的至少一个附加激光器，用于检测薄半导体膜的熔化部分的温度的第一温度检测装置，以及第二温度检测装置，用于检测薄半导体膜的凝固部分的温度。该装置还包括第一控制器，用于控制第一激光器的输出，以将熔融部分的温度保持在第一预定温度范围;以及第二控制器，用于控制附加激光器的输出，以便保持温度在第二预定温度范围内的凝固部分。

12. 发明申请

US20160297675A1 SEMICONDUCTOR DEVICE, AND METHOD OF MANUFACTURING DEVICE 审中-公开
标题翻译：半导体器件及其制造方法
公开(公告)号：US20160297675A1
公开(公告)日：2016-10-13
申请号：US15183540
申请日：2016-06-15
申请人： Yuichi ANDO , Yukito Sato , Katsunori Mae
发明人： Yuichi ANDO , Yukito Sato , Katsunori Mae
IPC分类号： B81C1/00 , B81B7/00
CPC分类号： B81C1/00301 , B81B7/007 , B81B2201/0235 , B81B2201/0264 , B81B2201/0292 , B81B2201/047 , B81B2207/095 , B81C2203/031 , B81C2203/0707 , H01L24/03 , H01L24/09 , H01L2924/1461 , H01L2924/15788 , H01L2924/00
摘要： A device including a first substrate in which a functional element and an electrode are formed; a second substrate in which a through electrode is formed; a joining material that joins the first substrate and the second substrate while reserving a predetermined space between the functional element and the second substrate; and a conductive material that electrically connects the electrode to the through electrode. Here, the joining material is harder than the conductive material, and the joining material is electrically less conductive than the conductive material.
摘要翻译：一种包括形成功能元件和电极的第一基板的装置; 形成通孔的第二基板; 连接材料，其在所述功能元件和所述第二基板之间保留预定空间的同时连接所述第一基板和所述第二基板; 以及将电极与贯通电极电连接的导电材料。这里，接合材料比导电材料硬，并且接合材料比导电材料导电性更差。

13. 发明授权

US08199389B2 Vibration elements 有权
标题翻译：振动元件
公开(公告)号：US08199389B2
公开(公告)日：2012-06-12
申请号：US12400911
申请日：2009-03-10
申请人： Mochizuki Eiji , Tetsurou Saitoh , Yukito Sato
发明人： Mochizuki Eiji , Tetsurou Saitoh , Yukito Sato
IPC分类号： G02B26/08
CPC分类号： G02B26/0841 , B81B2201/047 , B81C1/00682
摘要： A vibration unit including a frame, a vibration element including a substrate configured to vibrate, and a beam configured to connect the vibration element to the frame. The vibration unit is produced by applying an etching process to at least two surfaces of a substrate. A meeting position of the two surfaces of the substrate is located where a first etching process, which takes place on a first surface of the substrate and a second etching process, which takes place on a second surface of the substrate meet, and is located at a position other than a center position in a width direction of the beam.
摘要翻译：包括框架的振动单元，包括被配置为振动的基板的振动元件以及被配置为将振动元件连接到框架的梁。振动单元通过对基板的至少两个表面施加蚀刻工艺来制造。衬底的两个表面的会合位置位于在衬底的第二表面上发生的在衬底的第一表面上发生的第一蚀刻工艺和在衬底的第二表面上发生的第二蚀刻工艺，并且位于除了梁的宽度方向上的中心位置以外的位置。

14. 发明申请

US20090225384A1 VIBRATION ELEMENTS 有权
标题翻译：振动元件
公开(公告)号：US20090225384A1
公开(公告)日：2009-09-10
申请号：US12400911
申请日：2009-03-10
申请人： Mochizuki Eiji , Tetsurou Saitoh , Yukito Sato
发明人： Mochizuki Eiji , Tetsurou Saitoh , Yukito Sato
IPC分类号： G02B26/08 , H03H9/15
CPC分类号： G02B26/0841 , B81B2201/047 , B81C1/00682
摘要： A vibration unit including a frame, a vibration element including a substrate configured to vibrate, and a beam configured to connect the vibration element to the frame. The vibration unit is produced by applying an etching process to at least two surfaces of a substrate. A meeting position of the two surfaces of the substrate located where a first etching process, which takes place on a first surface of the substrate and a second etching process, which takes place on a second surface of the substrate meet, and is located at a position other than a center position in a width direction of the beam.
摘要翻译：包括框架的振动单元，包括被配置为振动的基板的振动元件以及被配置为将振动元件连接到框架的梁。振动单元通过对基板的至少两个表面施加蚀刻工艺来制造。位于基板的第一表面上发生的第一蚀刻工艺和在基板的第二表面上发生的第二蚀刻工艺的基板的两个表面的会合位置相交并位于除了梁的宽度方向上的中心位置以外的位置。

15. 发明申请

US20080043310A1 VIBRATING MIRROR, LIGHT WRITING DEVICE, AND IMAGE FORMING APPARATUS 审中-公开
标题翻译：振动镜，光写装置和图像形成装置
公开(公告)号：US20080043310A1
公开(公告)日：2008-02-21
申请号：US11838392
申请日：2007-08-14
申请人： Yukito Sato
发明人： Yukito Sato
IPC分类号： G02B26/10 , G02B17/00
CPC分类号： G02B26/105
摘要： A vibrating mirror is disclosed that is able to stably adjust a resonating frequency. The vibrating mirror includes a frame, a torsional beam, and a mirror substrate supported by the torsional beam and installed inside the frame. The mirror substrate is able to vibrate with the torsional beam as a center axis, and the frame, the torsional beam, and the mirror substrate are integrated together. Further, the vibrating mirror includes an elastic modulus adjustment unit arranged in the frame for adjusting an elastic modulus of the torsional beam.
摘要翻译：公开了能够稳定地调节谐振频率的振动镜。振动镜包括由扭转梁支撑并安装在框架内的框架，扭转梁和反射镜基板。镜面基板能够以扭转梁作为中心轴振动，并将框架，扭转梁和反射镜基板结合在一起。此外，振动镜包括布置在框架中用于调节扭转梁的弹性模量的弹性模量调节单元。

16. 发明授权

US06203673B1 Method of producing a thin-film platinum temperature-sensitive resistor for a thin-film microstructure sensor 失效
标题翻译：薄膜微结构传感器用薄膜铂温敏电阻的制造方法
公开(公告)号：US06203673B1
公开(公告)日：2001-03-20
申请号：US09450742
申请日：1999-11-30
申请人： Hiroyoshi Shoji , Takayuki Yamaguchi , Junichi Azumi , Yukito Sato , Morimasa Kaminishi
发明人： Hiroyoshi Shoji , Takayuki Yamaguchi , Junichi Azumi , Yukito Sato , Morimasa Kaminishi
IPC分类号： C23C1400
CPC分类号： B81B7/0087 , G01J5/20 , G01K7/186 , H01L2224/48091 , H01L2924/00014
摘要： A thin-film microstructure sensor includes a substrate having an insulation layer. A thin-film platinum temperature-sensitive resistor is provided on the insulation layer of the substrate, the thin-film platinum temperature-sensitive resistor comprising a platinum layer, the platinum layer having a maximum crystal grain size above a reference grain size of 800 Å. The thin-film platinum temperature-sensitive resistor is formed by a sputtering process to provide a temperature coefficient of resistance TCR above a reference TCR level of 3200 ppm.
摘要翻译：薄膜微结构传感器包括具有绝缘层的基板。在基板的绝缘层上设置薄膜铂温敏电阻器，该薄膜铂温敏电阻器包括铂层，该铂层的最大晶粒尺寸高于参考晶粒尺寸800 。通过溅射工艺形成薄膜铂温敏电阻器，以提供高于3200ppm的参考TCR水平的电阻TCR的温度系数。

17. 发明授权

US11796793B2 Optical deflector, deflection apparatus, distance measuring apparatus, image projecting apparatus, and movable body 有权
公开(公告)号：US11796793B2
公开(公告)日：2023-10-24
申请号：US16953826
申请日：2020-11-20
申请人： Mitsuhiro Yoda , Yukito Sato , Mizuki Shinkawa , Goichi Akanuma , Shuichi Suzuki
发明人： Mitsuhiro Yoda , Yukito Sato , Mizuki Shinkawa , Goichi Akanuma , Shuichi Suzuki
IPC分类号： G02B26/08 , G02B26/10 , G02B7/182 , G02B5/08
CPC分类号： G02B26/105 , G02B7/182 , G02B5/08
摘要： An optical deflector includes a mirror configured to reflect light; a pair of support portions each having an end connected to the mirror, and configured to support the mirror; first actuators connected to the respective support portions, and configured to deform the support portions so as to cause the mirror to oscillate about a first axis; a movable frame configured to support the first actuators; and second actuators connected to the movable frame and disposed opposite to the first actuators, with the support portions being interposed between the first actuators and the second actuators. The second actuators are not connected to the support portions. The first actuators and the second actuators bend and deform in the same direction.

18. 发明授权

US08970309B2 Atomic oscillator and method for fabricating atomic oscillator 有权
标题翻译：原子振荡器和制造原子振荡器的方法
公开(公告)号：US08970309B2
公开(公告)日：2015-03-03
申请号：US13546531
申请日：2012-07-11
申请人： Shunichi Sato , Akihiro Itoh , Yukito Sato
发明人： Shunichi Sato , Akihiro Itoh , Yukito Sato
IPC分类号： H03L7/26 , G04F5/14
CPC分类号： G04F5/14 , H03L7/26 , Y10T29/49002
摘要： An atomic oscillator is disclosed, including an Alkaline metal cell, a light source illuminating a laser beam to the Alkaline metal cell, and a light detector detecting light passing through the Alkaline metal cell. The Alkaline metal cell includes a first member, a second member, a cell internal portion, and an Alkaline metal raw material. In the first member, a first glass substrate is bonded on a second surface of a first substrate where a first opening part is formed. In the second member, a second glass substrate is bonded to a fourth surface of a second substrate where a second opening part is formed. The cell internal portion is formed by the first opening part and the second opening part by bonding the first surface to the third surface. The Alkaline metal raw material is enclosed by the cell internal portion.
摘要翻译：公开了一种原子振荡器，其包括碱金属电池，向碱金属电池照射激光束的光源和检测通过碱金属电池的光的光检测器。碱金属电池包括第一构件，第二构件，电池内部部分和碱金属原料。在第一构件中，第一玻璃基板接合在形成第一开口部的第一基板的第二表面上。在第二构件中，将第二玻璃基板接合到形成第二开口部的第二基板的第四表面。通过将第一表面粘合到第三表面，由第一开口部和第二开口部形成电池内部。碱金属原料被电池内部包围。

19. 发明申请

US20050243396A1 Deflector mirror, optical scanning device, and image forming apparatus 有权
标题翻译：偏转镜，光学扫描装置和图像形成装置
公开(公告)号：US20050243396A1
公开(公告)日：2005-11-03
申请号：US11102658
申请日：2005-04-11
申请人： Mitsumi Fujii , Yukito Sato , Tomohiro Nakajima , Yoshinori Hayashi , Eiji Mochizuki , Tetsurou Saitoh , Kohki Sasaki
发明人： Mitsumi Fujii , Yukito Sato , Tomohiro Nakajima , Yoshinori Hayashi , Eiji Mochizuki , Tetsurou Saitoh , Kohki Sasaki
IPC分类号： B41J27/00 , G02B26/08
CPC分类号： G02B26/0841
摘要： A deflector mirror is disclosed that includes a mirror substrate configured to vibrate in a reciprocating manner on beams as a torsional rotary shaft so as to deflect a light beam emitted from a light source. The mirror substrate includes multiple regions in each of portions thereof extending from the torsional rotary shaft to respective ends of the mirror substrate, the regions being different in flexural rigidity.
摘要翻译：公开了一种偏转镜，其包括被配置为以往复方式在作为扭转旋转轴的波束上振动以便偏转从光源发射的光束的反射镜基板。镜面基板在其各部分中包括从扭转旋转轴延伸到镜基板的相应端部的多个区域，该区域的抗弯刚度不同。

20. 发明授权

US5852239A Flow sensor having an intermediate heater between two temperature-sensing heating portions 失效
标题翻译：流量传感器在两个感温加热部分之间具有中间加热器
公开(公告)号：US5852239A
公开(公告)日：1998-12-22
申请号：US873455
申请日：1997-06-12
申请人： Yukito Sato , Takayuki Yamaguchi , Hiroyoshi Shoji , Junichi Azumi , Morimasa Kaminishi
发明人： Yukito Sato , Takayuki Yamaguchi , Hiroyoshi Shoji , Junichi Azumi , Morimasa Kaminishi
IPC分类号： G01F1/684 , G01F1/68
CPC分类号： G01F1/6845
摘要： A flow sensor includes a first heating portion, provided at a first position in a flow of a fluid, which heats the fluid and outputs a voltage in response to a temperature of the first position. A second heating portion, provided at a second, downstream position in the flow of the fluid, heats the fluid and outputs a voltage in response to a temperature of the second position, the first position and the second position being spaced from each other in a direction parallel to the flow of the fluid. An intermediate heater, provided between the first heating portion and the second heating portion, heats the fluid at an intermediate position between the first position and the second position.
摘要翻译：流量传感器包括设置在流体流中的第一位置处的第一加热部分，其加热流体并响应于第一位置的温度输出电压。设置在流体流中的第二下游位置的第二加热部分加热流体并输出响应于第二位置的温度的电压，第一位置和第二位置彼此间隔开方向平行于流体的流动。设置在第一加热部分和第二加热部分之间的中间加热器在第一位置和第二位置之间的中间位置处加热流体。

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