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11. 发明授权

US06820487B2 Reflective moveable diaphragm unit and pressure sensor containing same 有权
标题翻译：反光式可动隔膜单元和含有此压力传感器的压力传感器
公开(公告)号：US06820487B2
公开(公告)日：2004-11-23
申请号：US10153884
申请日：2002-05-24
申请人： Masayoshi Esashi , Yoichi Haga , Takashi Katsumata
发明人： Masayoshi Esashi , Yoichi Haga , Takashi Katsumata
IPC分类号： G01L900
CPC分类号： G01L9/0077
摘要： A reflective movable diaphragm unit 2 having diaphragm portions 25 formed by a circular SiO2 film, a mesa portion 22 and light-reflecting mirror portion 23 of the SiO2 film disposed in the center, and a ring-shaped spacer 24a and bonding layer 24b formed of metal layers in the circumferential edge portion of the diaphragm portion 25, whereby a pressure sensor is formed.
摘要翻译：具有由环状SiO 2膜形成的膜部25，设置在中心的SiO 2膜的台面部22和光反射镜部23的反射性可动膜单元2，以及环状间隔物24a和由在隔膜部分25的周缘部分中的金属层，由此形成压力传感器。

12. 发明授权

US06230564B1 Semiconductor acceleration sensor and its self-diagnosing method 失效
标题翻译：半导体加速度传感器及其自诊断方法
公开(公告)号：US06230564B1
公开(公告)日：2001-05-15
申请号：US09367312
申请日：1999-08-11
申请人： Tadao Matsunaga , Takashi Kunimi , Masahiro Nezu , Masatomo Mori , Masayoshi Esashi
发明人： Tadao Matsunaga , Takashi Kunimi , Masahiro Nezu , Masatomo Mori , Masayoshi Esashi
IPC分类号： G01P1500
CPC分类号： H01H35/142 , G01P15/0802 , G01P15/135 , H01H1/0015 , H01H1/0036
摘要： The invention provides a semiconductor acceleration sensor which is small in size, light in weight, simple in manufacture, low in manufacturing cost, and high in accuracy, and which, with a switch-on time set to a predetermined value, is stable in operation. In a semiconductor acceleration sensor in which a central board 1 having a central contact section 11, and outside boards 2 at least one of which has an outside contact section 21 are stacked; the central board 1 has a weight 12 near the central contact section 11, and the outside board 2 having the outside contact section 21 has a weight confronting section 11 which confronts with the weight 12, for squeezed damping effect.
摘要翻译：本发明提供一种尺寸小，重量轻，制造简单，制造成本低，精度高的半导体加速度传感器，其接通时间设定为规定值，操作稳定在具有中央接触部11的中央板1和至少其中一个具有外部接触部21的外部板2的半导体加速度传感器中，中心板1在中心接触部分11附近具有重物12，具有外接触部分21的外板2具有与重物12相对的重量面对部分11，用于挤压阻尼作用。

13. 发明授权

US6153917A Semiconductor acceleration sensor and manufacturing method thereof 有权
标题翻译：半导体加速度传感器及其制造方法
公开(公告)号：US6153917A
公开(公告)日：2000-11-28
申请号：US270659
申请日：1999-03-16
申请人： Tadao Matsunaga , Takashi Kunimi , Masahiro Nezu , Masatomo Mori , Masayoshi Esashi
发明人： Tadao Matsunaga , Takashi Kunimi , Masahiro Nezu , Masatomo Mori , Masayoshi Esashi
IPC分类号： G01P15/08 , G01P15/125 , H01L29/84 , H01L21/283
CPC分类号： G01P15/0802 , G01P15/125 , G01P2015/0828
摘要： A semiconductor acceleration sensor including a central board having a movable electrode section, an outside board having a stationary electrode section, and a sealing insulating section for joining the central board and the outside board which are laminated on each other, wherein the sealing insulating section has a conductive layer, and the conductive layer is a sealing member or an anodic bonding electrode.
摘要翻译：一种半导体加速度传感器，包括具有可动电极部分的中心板，具有固定电极部分的外部板和用于接合中心板和外部板的彼此层压的密封绝缘部分，其中密封绝缘部分具有导电层，并且导电层是密封构件或阳极接合电极。

14. 发明授权

US5606447A Planar type mirror galvanometer and method of manufacture 失效
标题翻译：平面式反射镜及其制造方法
公开(公告)号：US5606447A
公开(公告)日：1997-02-25
申请号：US507244
申请日：1995-10-19
申请人： Norihiro Asada , Masayoshi Esashi
发明人： Norihiro Asada , Masayoshi Esashi
IPC分类号： B41J2/44 , G02B26/08 , G02B26/10
CPC分类号： G02B26/085 , G02B26/0816 , G02B26/105 , Y10S359/90
摘要： A slim-type small size mirror galvanometer is made using semiconductor manufacturing techniques to form a silicon substrate 2 having a planar movable plate 5 and a torsion bar 6 for axially supporting the movable plate 5 formed integrally therewith, with a planar coil 7 and a total reflecting mirror 8 provided on an upper face of the movable plate 5. Upper and lower glass substrates 3, 4 are provided on upper and lower faces of the silicon substrate 2, and permanent magnets 10A, 10B and 11A, 11B are fixed to the upper and lower substrates 3, 4 at predetermined locations so as to produce a magnetic field at the planar coil 7. The direction and quantity of current flowing in the planar coil 7 is controlled to variably control the displacement angle of the movable plate 5 depending on the balance between the generated magnetic force and the torsion force of the torsion bar 6.
摘要翻译： PCT No.PCT / JP94 / 02062 Sec。 371 1995年10月19日日期 102（e）1995年10月19日PCT PCT 1994年12月8日PCT公布。 WO95 / 17698 PCT公开号日期：1995年6月29日使用半导体制造技术制造薄型小型反射镜电流计，以形成具有平面可动板5的硅基板2和用于轴向支撑与其一体形成的可动板5的扭杆6，线圈7和设置在可动板5的上表面上的全反射镜8.上玻璃基板3,4和下玻璃基板3,4设置在硅基板2的上表面和下表面上，永磁体10A，10B和11A，11B 在预定位置处固定到上基板3,4和下基板3上，以在平面线圈7处产生磁场。控制在平面线圈7中流动的电流的方向和数量以可变地控制可移动的位移角板5取决于所产生的磁力与扭杆6的扭转力之间的平衡。

15. 发明授权

US07723896B2 Driving mechanism using shape memory alloys including a magnetic latch 有权
标题翻译：使用形状记忆合金的驱动机制包括磁性锁定
公开(公告)号：US07723896B2
公开(公告)日：2010-05-25
申请号：US10585998
申请日：2005-01-19
申请人： Masayoshi Esashi , Yoichi Haga , Masanori Mizushima , Tadao Matsunaga
发明人： Masayoshi Esashi , Yoichi Haga , Masanori Mizushima , Tadao Matsunaga
IPC分类号： G09B21/00 , F03G7/06
CPC分类号： G09B21/004 , G09B21/007
摘要： A driving mechanism using shape memory alloys comprises a first and a second shape memory alloys coils (1, 2), a pin-like drive member (3) connected to each of the shape memory alloys coils (1, 2) extending in the axis direction, a substrate (4) having a wiring pattern (11) and a drive circuit (4a) to supply current to the shape memory alloys coils (1, 2), and a magnetic latch part (9) to hold the drive member (3), and the magnetic latch part (9) has a latch position in the axis direction of the drive member (3), the drive circuit (4a) selectively current-drives the first and the second shape memory alloys coils (1, 2), the driven first or second shape memory alloys coils (1, 2) is heated and compressed to move the drive member (3) in the axis direction, and magnetic bodies (9a, 9b) provided to the drive member (3) is magnetically fixed at the latch position, thereby fixed and held in the axis direction.
摘要翻译：使用形状记忆合金的驱动机构包括第一和第二形状记忆合金线圈（1,2），连接到沿着轴线延伸的每个形状记忆合金线圈（1,2）的销状驱动构件（3）具有布线图案的基板（4）和向形状记忆合金线圈（1,2）供给电流的驱动电路（4a）和用于保持驱动部件的磁性卡定部（9） 3），并且磁性锁定部（9）在驱动部件（3）的轴向具有闩锁位置，驱动电路（4a）选择性地电流驱动第一形状记忆合金线圈（1,2）），驱动的第一或第二形状记忆合金线圈（1,2）被加热和压缩以使驱动构件（3）沿轴向移动，并且设置到驱动构件（3）的磁体（9a，9b）是磁性固定在锁定位置，从而固定并保持在轴向。

16. 发明授权

US07466065B2 Bimorph switch, bimorph switch manufacturing method, electronic circuitry and electronic circuitry manufacturing method 有权
标题翻译：双压电开关，双压电晶片开关制造方法，电子电路和电子电路制造方法
公开(公告)号：US07466065B2
公开(公告)日：2008-12-16
申请号：US11504381
申请日：2006-08-15
申请人： Hirokazu Sanpei , Jun Mizuno , Masazumi Yasuoka , Humikazu Takayanagi , Takehisa Takoshima , Masaru Miyazaki , Masayoshi Esashi
发明人： Hirokazu Sanpei , Jun Mizuno , Masazumi Yasuoka , Humikazu Takayanagi , Takehisa Takoshima , Masaru Miyazaki , Masayoshi Esashi
IPC分类号： H01L29/00 , H01L41/08 , H03H11/24
CPC分类号： H01H61/00 , H01H1/0036 , H01H2061/006
摘要： A bimorph switch electrically connecting a traveling contact and a fixed contact. The switch comprises a substrate having a front face, a rear face, and a through hole penetrating from the front face to the rear face; a fixed contact extending from an edge portion of the aperture of the through hole towards the inside of the aperture; and a bimorph section holding the traveling contact at a position facing the aperture and driving the traveling contact. One end of the bimorph section may be formed on a silicon oxide layer formed on a front face of the substrate.
摘要翻译：电动连接行走触点和固定触点的双压电晶片开关。开关包括具有前表面，后表面和从前表面到后表面穿透的通孔的基板; 从所述通孔的孔的边缘部分朝向所述孔的内部延伸的固定接触; 以及将移动接触件保持在面对孔径的位置并驱动行驶接触件的双压电晶片部分。双晶片部分的一端可以形成在形成在基板的正面上的氧化硅层上。

17. 发明授权

US07170216B2 Bimorph switch, bimorph switch manufacturing method, electronic circuitry and electronic circuitry manufacturing method 有权
标题翻译：双压电开关，双压电晶片开关制造方法，电子电路和电子电路制造方法
公开(公告)号：US07170216B2
公开(公告)日：2007-01-30
申请号：US11040502
申请日：2005-01-21
申请人： Hirokazu Sanpei , Jun Mizuno , Masazumi Yasuoka , Humikazu Takayanagi , Takehisa Takoshima , Masaru Miyazaki , Masayoshi Esashi
发明人： Hirokazu Sanpei , Jun Mizuno , Masazumi Yasuoka , Humikazu Takayanagi , Takehisa Takoshima , Masaru Miyazaki , Masayoshi Esashi
IPC分类号： H01L23/00 , H01H59/00
CPC分类号： H01H61/00 , H01H1/0036 , H01H2061/006
摘要： A bimorph switch electrically connecting a traveling contact and a fixed contact. The switch comprises a substrate having a front face, a rear face, and a through hole penetrating from the front face to the rear face; a fixed contact extending from an edge portion of the aperture of the through hole towards the inside of the aperture; and a bimorph section holding the traveling contact at a position facing the aperture and driving the traveling contact. One end of the bimorph section may be formed on a silicon oxide layer formed on a front face of the substrate.
摘要翻译：电动连接行走触点和固定触点的双压电晶片开关。开关包括具有前表面，后表面和从前表面到后表面穿透的通孔的基板; 从所述通孔的孔的边缘部分朝向所述孔的内部延伸的固定接触; 以及将移动接触件保持在面对孔径的位置并驱动行驶接触件的双压电晶片部分。双晶片部分的一端可以形成在形成在基板的正面上的氧化硅层上。

18. 发明申请

US20060074372A1 Active capillary 审中-公开
标题翻译：活性毛细管
公开(公告)号：US20060074372A1
公开(公告)日：2006-04-06
申请号：US10536056
申请日：2003-11-17
申请人： Yoichi Haga , Masayoshi Esashi , Takashi Mineta , Yuta Muyari
发明人： Yoichi Haga , Masayoshi Esashi , Takashi Mineta , Yuta Muyari
IPC分类号： B01L3/00
CPC分类号： A61M25/0054 , A61M25/0138 , A61M2025/0042
摘要： Catheter of such a structure that Ti—Ni superelastic allow (SEA) tube has its outside covered with thin-film silicone rubber tube. The SEA tube at part whose flexion is desired is wrought to cut off multiple grooves (crenas) with thin joints left. The covering with the silicone rubber tube is effected without the use of its front end portion in the covering. When a negative pressure is applied to physiological saline placed therein, the front end portion works as a valve, and the silicone rubber tube at the wrought part yields inward so that flexion of the catheter occurs at that part.
摘要翻译：这种Ti-Ni超弹性允许（SEA）管的结构的导管的外部覆盖有薄膜硅橡胶管。需要屈曲的部分的SEA管可以切割出多个凹槽（crenas），并留下细小的接缝。使用硅橡胶管的覆盖物不用其在覆盖物中的前端部分实现。当对其中放置的生理盐水施加负压时，前端部分起到阀的作用，并且锻造部分的硅橡胶管向内产生，从而导致导管的屈曲发生在该部分。

19. 发明申请

US20060033389A1 Driving mechanism and micro-mirror device provided with the same 失效
标题翻译：驱动机构和微镜装置相同
公开(公告)号：US20060033389A1
公开(公告)日：2006-02-16
申请号：US11201316
申请日：2005-08-11
申请人： Masayoshi Esashi , Naoki Kikuchi , Rogerio Mizuno , Masanori Maeda , Satoshi Karasawa
发明人： Masayoshi Esashi , Naoki Kikuchi , Rogerio Mizuno , Masanori Maeda , Satoshi Karasawa
IPC分类号： H02K7/00 , G02B7/198
CPC分类号： H02N1/008 , G02B26/0841 , H02K2201/18
摘要： A driving mechanism configured to turn a plate member with respect to a frame member around a predetermined turning axis includes a pair of supporting members supporting the plate member, a pair of actuators provided on both sides with respect to the turning axis and on the same surface side of the plate member. Each of the actuators includes a fixed electrode unit fixed to the frame member and a movable electrode unit fixed to the plate member. The fixed electrode unit includes a substrate, a pair of fixed comb electrodes provided on both surface sides of the substrate. The movable electrode unit includes a pair of movable comb electrodes, each of which engages with the corresponding fixed comb electrode with a gap therebetween. Both pairs of the fixed comb electrode and the corresponding movable comb electrode are configured such that a voltage can be applied therebetween independently.
摘要翻译：相对于框架构件围绕预定转动轴线转动板状构件的驱动机构包括支撑板构件的一对支撑构件，设置在相对于转动轴线的两侧和相同表面上的一对致动器侧板。每个致动器包括固定到框架构件的固定电极单元和固定到板构件的可动电极单元。固定电极单元包括基板，设置在基板的两个表面侧上的一对固定梳电极。可动电极单元包括一对可动梳状电极，每一个可动梳状电极与对应的固定梳状电极接合，并在其间具有间隙。固定梳状电极和对应的可动梳状电极的两对被配置成可以独立地施加电压。

20. 发明授权

US06584843B2 Gyroscope and input unit using the same 失效
标题翻译：陀螺仪和输入单元使用相同
公开(公告)号：US06584843B2
公开(公告)日：2003-07-01
申请号：US09862554
申请日：2001-05-22
申请人： Munemitsu Abe , Masayoshi Esashi
发明人： Munemitsu Abe , Masayoshi Esashi
IPC分类号： G01P904
CPC分类号： G01C19/5607
摘要： A gyroscope includes a tuning fork, which includes a plurality of tines formed of a conductive material and a supporting portion; an upper glass substrate and a lower glass substrate which sandwich the tuning fork; drive electrodes which are provided on each of the upper and the lower glass substrates in such a manner that parts of the drive electrodes oppose the tines and the remaining parts protrude from the tines, the drive electrodes being capacitively coupled to the tines and driving the tines in a direction parallel to the substrates; and detection electrodes which are capacitively coupled to the tines, and which detect displacements of the tines in a direction perpendicular to the vibrating direction of the tines.
摘要翻译：陀螺仪包括音叉，音叉包括由导电材料形成的多个尖齿和支撑部分; 夹着音叉的上玻璃基板和下玻璃基板; 驱动电极，其设置在上部玻璃基板和下部玻璃基板中的每一个上，使得驱动电极的一部分与尖齿相对，其余部分从齿突出，驱动电极电容耦合到齿并驱动尖齿在平行于基板的方向上; 以及与电位耦合到尖齿的检测电极，并且检测尖齿在与尖齿的振动方向垂直的方向上的位移。

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