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    • 11. 发明授权
    • Excimer laser beam irradiation apparatus for optically processing
workpiece
    • 用于光学处理工件的准分子激光束照射装置
    • US5661744A
    • 1997-08-26
    • US512710
    • 1995-08-08
    • Kazuyuki MurakamiHajime NakataniAtsushi SugitatsuTadao MinagawaToshinori YagiKeiko Ito
    • Kazuyuki MurakamiHajime NakataniAtsushi SugitatsuTadao MinagawaToshinori YagiKeiko Ito
    • B23K26/38H05K3/00H05K3/46H01S3/22H01S3/223
    • B23K26/083B23K26/066
    • An excimer laser beam irradiation apparatus capable of processing a workpiece optimally with an excimer irradiation beam even when intensity distribution of the excimer laser beam undergone multiple reflections is non-uniform. A patterning mask has light-transmissive portions for allowing the excimer laser beam to pass through and a reflecting layer for reflecting it. A high reflectivity mirror disposed in opposition to the reflecting layer reflects the excimer laser beam reflected from the reflecting layer toward the patterning mask. An imaging lens images a pattern of the excimer laser beam transmitted through the patterning mask onto a workpiece for irradiation thereof. A workpiece moving mechanism and a mask moving mechanism move the workpiece and the mask moving mechanism, respectively. A control unit controls the workpiece moving mechanism and the mask moving mechanism such that the patterning mask and the workpiece are displaced along a same axis synchronously with each other in a scan moving direction which coincides with a direction in which the excimer laser beam shifts positionally while being reflected between the patterning mask and the reflecting means, for thereby allowing the workpiece to be scanned with the excimer laser beam. The workpiece can be processed uniformly and stably in accordance with a pattern of the patterning mask with high accuracy and reliability.
    • 即使准分子激光束的强度分布发生多次反射也能够用准分子照射光束最佳地处理工件的准分子激光束照射装置是不均匀的。 图形掩模具有用于允许准分子激光束通过的透光部分和用于反射它的反射层。 与反射层相对设置的高反射率反射镜将从反射层反射的准分子激光束朝向图案掩模反射。 成像透镜将通过图案化掩模透射的准分子激光束的图案成像到工件上以进行照射。 工件移动机构和掩模移动机构分别移动工件和掩模移动机构。 控制单元控制工件移动机构和掩模移动机构,使得图案掩模和工件沿着与准分子激光束在位置上移动的方向一致的扫描移动方向沿同一轴线同步地移位,同时 在图案掩模和反射装置之间被反射,从而允许用准分子激光束扫描工件。 可以以高精度和可靠性根据图案化掩模的图案均匀且稳定地加工工件。
    • 12. 发明申请
    • OZONE GENERATOR
    • 臭氧发生器
    • US20140356244A1
    • 2014-12-04
    • US14372460
    • 2012-04-23
    • Takahisa NagayamaHajime NakataniYoshiaki OdaiNoboru Wada
    • Takahisa NagayamaHajime NakataniYoshiaki OdaiNoboru Wada
    • B01J19/08
    • B01J19/088B01J2219/0807C01B13/11C01B2201/12C01B2201/14C01B2201/64C01B2201/76
    • An ozone generating apparatus which is provided with a discharge suppressing member formed of a metal plate and covering an outer circumferential surface of a portion of a dielectric tube facing to a tube sheet, the discharge suppressing member being electrically in contact with a metal tube or the tube sheet, wherein the discharge suppressing member is formed by curling the metal plate longer than a circumferential length of the dielectric tube into a circular shape so as to have an overlapping portion, and by joining together, in the overlapping portion, a part of the metal plate placed outside and a part of the metal plate placed inside, at a near-end portion of the metal plate placed outside in the overlapping portion, and wherein the discharge suppressing member has, on the part of the metal plate placed outside in the overlapping portion, a spring portion.
    • 一种臭氧发生装置,其具有由金属板形成的放电抑制部件,其覆盖面向管板的电介质管的一部分的外周面,所述放电抑制部件与金属管电接触或 其特征在于,所述放电抑制部件是通过使所述金属板比所述电介质管的周长长的方式卷曲成圆形,从而具有重叠部分,并且通过将所述金属板的重叠部分接合在一起, 金属板放置在外侧,金属板的一部分放置在内侧,位于重叠部分外侧的金属板的近端部,并且其中放电抑制构件具有位于外侧的金属板的一部分 重叠部分,弹簧部分。
    • 14. 发明授权
    • Discharge excitation type pulse laser apparatus
    • 放电激励型脉冲激光装置
    • US5708676A
    • 1998-01-13
    • US543987
    • 1995-10-17
    • Yasushi MinamitaniHajime Nakatani
    • Yasushi MinamitaniHajime Nakatani
    • B23H1/00B23H1/02H01S3/038H01S3/097H01S3/0971H01S3/225
    • H01S3/09713H01S3/0384H01S3/225
    • A discharge excitation type pulse laser apparatus includes main discharge electrodes and and an auxiliary discharge electrode. In order to make a voltage pulse applied to the auxiliary discharge electrode rise up steeply without incurring any appreciable time lag, a reactor connected in series to a first charging capacitor is constituted by a first saturable reactor 19 with a second saturable reactor being additionally inserted in series to a second charging capacitor. After stray inductance and resistance components of a switch become minimum, inductance of the saturable reactor is first decreased, which is then followed by decreasing of inductance of the first saturable reactor. Degree of steepness of the voltage rise-up for corona and main discharges can set at high values, respectively, whereby preionization is accelerated to allow the main discharge to occur uniformly. The energy injected into the main discharge is increased. Laser output power and oscillation efficiency are enhanced.
    • 放电激励型脉冲激光装置包括主放电电极和辅助放电电极。 为了使施加到辅助放电电极的电压脉冲上升而不引起任何明显的时间滞后,与第一充电电容器串联连接的电抗器由第一可饱和电抗器19构成,第一可饱和电抗器19另外插入第二可饱和电抗器 串联到第二个充电电容器。 在开关的杂散电感和电阻分量变得最小之后,可饱和电抗器的电感首先降低,随后降低第一饱和电抗器的电感。 电晕和主放电电压上升的陡度分别可以设定为高值,从而加速前置电位以允许主放电均匀地发生。 注入主放电的能量增加。 激光输出功率和振荡效率得到提高。
    • 15. 发明授权
    • Ozone generator
    • 臭氧发生器
    • US09238213B2
    • 2016-01-19
    • US14372460
    • 2012-04-23
    • Takahisa NagayamaHajime NakataniYoshiaki OdaiNoboru Wada
    • Takahisa NagayamaHajime NakataniYoshiaki OdaiNoboru Wada
    • B01J19/08C01B13/11
    • B01J19/088B01J2219/0807C01B13/11C01B2201/12C01B2201/14C01B2201/64C01B2201/76
    • An ozone generating apparatus which is provided with a discharge suppressing member formed of a metal plate and covering an outer circumferential surface of a portion of a dielectric tube facing to a tube sheet, the discharge suppressing member being electrically in contact with a metal tube or the tube sheet, wherein the discharge suppressing member is formed by curling the metal plate longer than a circumferential length of the dielectric tube into a circular shape so as to have an overlapping portion, and by joining together, in the overlapping portion, a part of the metal plate placed outside and a part of the metal plate placed inside, at a near-end portion of the metal plate placed outside in the overlapping portion, and wherein the discharge suppressing member has, on the part of the metal plate placed outside in the overlapping portion, a spring portion.
    • 一种臭氧发生装置,其具有由金属板形成的放电抑制部件,其覆盖面向管板的电介质管的一部分的外周面,所述放电抑制部件与金属管电接触或 其特征在于,所述放电抑制部件是通过使所述金属板比所述电介质管的周长长的方式卷曲成圆形,从而具有重叠部分,并且通过将所述金属板的重叠部分接合在一起, 金属板放置在外侧,金属板的一部分放置在内侧,位于重叠部分外侧的金属板的近端部,并且其中放电抑制构件具有位于外侧的金属板的一部分 重叠部分,弹簧部分。