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11. 发明授权

US06909975B2 Integrated absolute and differential pressure transducer 有权
标题翻译：集成的绝对和差压传感器
公开(公告)号：US06909975B2
公开(公告)日：2005-06-21
申请号：US10721817
申请日：2003-11-24
申请人： Paul Dozoretz , Youfan Gu , Garry Holcomb , Ole Wenzel
发明人： Paul Dozoretz , Youfan Gu , Garry Holcomb , Ole Wenzel
IPC分类号： G01L13/00 , G01L27/00 , G01F23/14 , G01L9/12
CPC分类号： G01L13/00 , G01L15/00 , G01L27/005
摘要： A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide virtual absolute pressure measurements over a wide range of pressures on a single integrated scale.
摘要翻译：一种方法和装置集成了差压测量和绝对压力测量，以在单个集成度量表上的宽范围的压力下提供虚拟绝对压力测量。

12. 发明授权

US06361607B1 Apparatus for controlling polymerized teos build-up in vacuum pump lines 有权
公开(公告)号：US06361607B1
公开(公告)日：2002-03-26
申请号：US09782105
申请日：2001-02-12
申请人： Paul Dozoretz , Youfan Gu
发明人： Paul Dozoretz , Youfan Gu
IPC分类号： C23C1600
摘要： A TEOS trap for controlling TEOS polymerization from reaction furnace effluent in a vacuum pump line a SiO2 CVD process includes a molecular species-selective flow impeding medium that adsorbs and retains TEOS and water molecules from the effluent long enough to consume substantially all the water molecules in TEOS hydrolysis reactions while allowing non-hydrolyzed TEOS, ethylene, and other gaseous byproducts to pass through the trap and retaining solid and liquid phase SiO2-rich TEOS polymers formed by the hydrolysis reactions in the trap for subsequent removal and disposal. The molecular species-selective flow impeding medium has a plurality of adsorption surfaces to make a surface density that performs the TEOS and water flow impeding function and solid and liquid phase TEOS polymer trapping function.

13. 发明授权

US06197119B1 Method and apparatus for controlling polymerized teos build-up in vacuum pump lines 有权
标题翻译：用于控制真空泵管道中聚合聚合物积聚的方法和装置
公开(公告)号：US06197119B1
公开(公告)日：2001-03-06
申请号：US09250928
申请日：1999-02-18
申请人： Paul Dozoretz , Youfan Gu
发明人： Paul Dozoretz , Youfan Gu
IPC分类号： C23C1600
CPC分类号： H01J37/32844 , B01D5/0036 , C23C16/4412 , Y02C20/30 , Y10S438/905
摘要： A TEOS trap for controlling TEOS polymerization from reaction furnace effluent in a vacuum pump line a SiO2 CVD process includes a molecular species-selective flow impeding medium that adsorbs and retains TEOS and water molecules from the effluent long enough to consume substantially all the water molecules in TEOS hydrolysis reactions while allowing non-hydrolyzed TEOS, ethylene, and other gaseous byproducts to pass through the trap and retaining solid and liquid phase SiO2-rich TEOS polymers formed by the hydrolysis reactions in the trap for subsequent removal and disposal. The molecular species-selective flow impeding medium has a plurality of adsorption surfaces to make a surface density that performs the TEOS and water flow impeding fuction and solid and liquid phase TEOS polymer trapping function.
摘要翻译：用于在真空泵管线中控制来自反应炉流出物的TEOS聚合的TEOS捕集器，SiO 2 CVD工艺包括分子种类选择性流阻碍介质，其吸附并保留来自流出物的TEOS和水分子足够长以消耗基本上所有的水分子 TEOS水解反应，同时允许非水解的TEOS，乙烯和其他气态副产物通过捕集阱并保留通过水解反应形成的固体和液相SiO 2富集的TEOS聚合物，以便随后的去除和处置。分子种类选择性流阻碍介质具有多个吸附表面，以形成执行TEOS和水流阻碍功能的表面密度以及固相和液相TEOS聚合物捕集功能。

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