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11. 发明授权

US5370951A Frame-supported pellicle for protection of photolithographic mask 失效
标题翻译：框架支撑防护薄膜，用于保护光刻掩模
公开(公告)号：US5370951A
公开(公告)日：1994-12-06
申请号：US7525
申请日：1993-01-22
申请人： Yoshihiro Kubota , Meguru Kashida , Yuichi Hamada , Hirofumi Kishita , Shinichi Sato , Kouichi Yamaguchi
发明人： Yoshihiro Kubota , Meguru Kashida , Yuichi Hamada , Hirofumi Kishita , Shinichi Sato , Kouichi Yamaguchi
IPC分类号： C08L83/04 , C08K5/5435 , C09J183/14 , G03F1/62 , H01L21/027 , G03F9/00
CPC分类号： G03F1/64 , C09J183/14 , Y10T428/31544
摘要： An improvement is proposed in a frame-supported pellicle, i.e. a thin transparent film of a polymeric resin adhesively bonded to a frame member, used for dust-proof protection of a photomask in a photolithographic patterning work for the manufacture of electronic devices. The improvement comprises using, as the adhesive, an organopolysiloxane-based composition which comprises (a) a perfluoroalkyl-containing diorganopolysiloxane having at least two vinyl groups per molecule, (b) an organohydrogenpolysiloxane having at least one epoxy group and (c) a platinum catalyst for promoting the hydrosilation reaction between (a) and (b). As compared with conventional adhesives, a quite good adhesive bonding strength can be obtained with this adhesive even when the membrane is made from a fluorocarbon group-containing polymeric resin and the adhesive layer obtained therefrom is highly resistant against ultraviolet irradiation to ensure a long serviceable life of the pellicle.
摘要翻译：在用于电子设备的制造的光刻图案化工作中，在框架支撑的防护薄膜中提出了一种改进的粘合方式粘合到框架构件上的聚合物树脂透明薄膜，用于光掩模的防尘保护。该改进包括使用基于有机聚硅氧烷的组合物作为粘合剂，其包含（a）每分子具有至少两个乙烯基的含全氟烷基的二有机聚硅氧烷，（b）具有至少一个环氧基的有机氢聚硅氧烷和（c）铂促进（a）和（b）之间硅氢化反应的催化剂。与常规粘合剂相比，即使膜由含碳氟化合物基团的聚合物树脂制成并且由其获得的粘合剂层也能够高度耐紫外线照射，从而可以获得相当好的粘合强度，以确保长的使用寿命的防护薄膜。

12. 发明授权

US06436586B1 Pellicle with a filter and method for production thereof 有权
标题翻译：具有过滤器的防护薄膜及其制造方法
公开(公告)号：US06436586B1
公开(公告)日：2002-08-20
申请号：US09544333
申请日：2000-04-06
申请人： Takashi Matsuoka , Yuichi Hamada , Meguru Kashida
发明人： Takashi Matsuoka , Yuichi Hamada , Meguru Kashida
IPC分类号： G03F114
CPC分类号： G03F1/64 , G03F7/70933 , G03F7/70983
摘要： There is disclosed a pellicle having a pellicle frame with at least one vent for controlling atmospheric pressure and a filter attached so as to cover the vent, wherein it takes 5 minutes to 180 minutes, to restore a pellicle film swelled during a step of attaching the pellicle to the exposure original plate under atmospheric pressure of 760 mmHg followed by reducing atmospheric pressure to 500 mmHg and keeping the pressure, to the original state and a method for producing it, and a pellicle with a filter having a pellicle frame with at least one vent for controlling atmospheric pressure wherein all over the inner surface of the filter attached so as to cover said vent is impregnated with a resin, and 50% by volume or more of the filter is impregnated therewith. There can be provided a pellicle with a filter having both of impurity-trapping performance and ventilating performance, and a method for producing it, and a pellicle with a filter having ventilating performance wherein impurities can be fixed without being released even under violent airflow such as air blow or the like and finer impurities can be trapped, with keeping ventilating performance.
摘要翻译：公开了一种防护薄膜组件，其具有至少一个用于控制大气压力的通风口的防护薄膜组件框架和附着以覆盖通风口的过滤器，其中需要5分钟至180分钟，以恢复在附接步骤期间膨胀的防护薄膜组件将防护薄膜组件暴露在760mmHg的大气压下的原版上，随后将大气压降至500mmHg，并将压力保持在原始状态，及其制备方法，以及具有过滤器的防护薄膜组件，该防护薄膜组件框架具有至少一个用于控制大气压力的排气口，其中，将覆盖所述通气口的过滤器的内表面全部浸渍在树脂中，并且浸渍50体积％以上的过滤器。可以提供一种带有具有杂质捕获性能和通气性能的过滤器的防护薄膜及其制造方法，以及具有通风性能的过滤器的防护薄膜组件，其中即使在暴力气流下即使固定也不会释放杂质，例如吹气等，并且可以捕获更细的杂质，同时保持通风性能。

13. 发明授权

US5723860A Frame-supported pellicle for photomask protection 失效
标题翻译：框架保护膜防护薄膜
公开(公告)号：US5723860A
公开(公告)日：1998-03-03
申请号：US673257
申请日：1996-06-28
申请人： Yuichi Hamada , Meguru Kashida
发明人： Yuichi Hamada , Meguru Kashida
IPC分类号： G02F1/1333 , G03F1/64 , H01L21/027 , H01J5/02
CPC分类号： G03F1/64 , Y10T428/249985
摘要： Proposed is an improvement in a frame-supported pellicle, which is a device for dust-proof protection of a photomask used in the photolithographic patterning works in the manufacture of fine electronic devices, consisting of a rigid pellicle frame, a highly transparent membrane of a plastic resin spread over and adhesively bonded to one end surface of the pellicle frame in a slack-free fashion and a layer of a pressure-sensitive adhesive formed on the other end surface of the pellicle frame to facilitate mounting of the frame-supported pellicle on the surface of a photomask and to secure the same at the correct position. The improvement comprises forming the layer of the pressure-sensitive adhesive on the end surface of the pellicle frame to have an outwardly convex surface, for example, in the form of a barrel vault instead of the flat surface in the prior art so that the troubles in the prior art due to occurrence of air gaps between the surface of the adhesive layer and the surface of the photomask unavoidable in mounting of the conventional frame-supported pellicle can be prevented to ensure completely air-tight sealing thereby. The adverse influence on the pellicle membrane due to the air-tightness of sealing by the pressure difference between the outer and inner surfaces can be overcome by providing a penetrating opening for air escape in the pellicle frame covered with a filter sheet.
摘要翻译：提出了框架支撑防护薄膜的改进，该防护薄膜组件是用于制造精细电子装置的光刻图案工艺中使用的光掩模的防尘保护装置，其由刚性防护薄膜框架，高透明度的膜塑料树脂铺展并以无松弛的方式粘附在防护薄膜组件框架的一个端面上，并且形成在防护膜框架的另一端表面上的压敏粘合剂层，以便将框架支撑的防护薄膜组件安装在光掩模的表面并将其固定在正确的位置。改进之处在于，在防护薄膜组件框架的端面上形成压敏粘合剂层以具有向外凸起的表面，例如以现有技术中的平坦表面为例，而不是平坦表面，从而使故障在现有技术中，由于在粘合剂层的表面与常规的框架支撑的防护薄膜组件的安装中不可避免的光掩模的表面之间的气隙的发生，可以防止由此发生完全不透气的密封。可以通过在被过滤片覆盖的防护薄膜组件框架中设置用于空气逸出的穿透开口来克服由于外表面和内表面之间的压力差导致的密封气密性对防护薄膜的不利影响。

14. 发明授权

US5965294A Hydrogen absorbing alloy electrode 失效
标题翻译：吸氢合金电极
公开(公告)号：US5965294A
公开(公告)日：1999-10-12
申请号：US916364
申请日：1997-08-22
申请人： Yuichi Hamada , Yoshihiro Kubota , Hiroto Sugahara
发明人： Yuichi Hamada , Yoshihiro Kubota , Hiroto Sugahara
IPC分类号： H01M4/24 , H01M4/80 , H01M4/40
CPC分类号： H01M4/242 , H01M4/808 , Y02P70/54 , Y10S420/90
摘要： Provided is a hydrogen absorbing alloy electrode having on a conductive support surface a hydrogen absorbing alloy layer which comprises a hydrogen absorbing alloy powder capable of absorbing and desorbing hydrogen electrochemically and a binder; with the hydrogen absorbing alloy layer having a surface coated spotwise with an amorphous water-repelling fluoropolymer at a total coverage of 0.001 mg/cm.sup.2 to 5 mg/cm.sup.2, wherein a solution of the fluoropolymer in a solvent having a boiling point of 50.degree.-110.degree. C. is spray-coated on the alloy layer surface.
摘要翻译：提供一种吸氢合金电极，其在导电支撑表面上具有吸氢合金层，该吸氢合金层包括能够电化学吸附和解吸氢的吸氢合金粉末和粘合剂; 其中吸氢合金层的表面涂覆有无定形斥水性含氟聚合物，总覆盖度为0.001mg / cm 2至5mg / cm 2，其中氟聚合物在沸点为50℃的溶剂中的溶液， 110℃喷涂在合金层表面上。

15. 发明授权

US09134331B2 Analyzer, sample transportation method, and computer program product 有权
标题翻译：分析仪，样品运输方式和计算机程序产品
公开(公告)号：US09134331B2
公开(公告)日：2015-09-15
申请号：US12399461
申请日：2009-03-06
申请人： Yuichi Hamada , Daigo Fukuma , Masaharu Shibata
发明人： Yuichi Hamada , Daigo Fukuma , Masaharu Shibata
IPC分类号： G01N35/02 , G01N35/00
CPC分类号： G01N35/0092 , Y10T436/114165
摘要： An analyzer comprising: a first measurement unit for measuring samples; a second measurement unit for measuring samples; a transportation device for transporting samples to the first measurement unit and the second measurement unit; prior sample measurement instructor for instructing to measure a predetermined sample prior to the other samples; and a transportation controller for controlling the transportation device to reserve the transportation of the other samples to the second measurement unit and to perform the other transportation operation, when the prior sample measurement instructor has instructed to measure the predetermined sample by the second measurement unit prior to the other samples, is disclosed. A sample transportation method and a computer program product are also disclosed.
摘要翻译：一种分析器，包括：用于测量样品的第一测量单元; 用于测量样品的第二测量单元; 用于将样品运送到第一测量单元和第二测量单元的运送装置; 用于指示在其他样品之前测量预定样品的先前样品测量指导者; 以及运送控制器，用于控制所述运送装置，以将所述其他样品运送到所述第二测量单元并执行所述其他运输操作，当所述现有样品测量指导者已经指示在所述第二测量单元之前测量所述预定样品时，披露了其他样品。还公开了一种样品运送方法和计算机程序产品。

16. 发明授权

US08883078B2 Sample testing system and transporting apparatus 有权
标题翻译：样品测试系统和运输设备
公开(公告)号：US08883078B2
公开(公告)日：2014-11-11
申请号：US12645930
申请日：2009-12-23
申请人： Yuichi Hamada , Daigo Fukuma
发明人： Yuichi Hamada , Daigo Fukuma
IPC分类号： G01N35/04 , G01N35/10 , G01N35/02 , G01N35/00
CPC分类号： G01N35/02 , G01N35/00603 , G01N35/0092 , G01N35/021 , G01N35/026 , G01N2035/0415 , G01N2035/0462 , G01N2035/0465 , G01N2035/0472 , Y10T436/113332 , Y10T436/114998
摘要： A sample testing system comprising: a test unit for loading and testing a sample contained in the sample container accommodated in the rack; a rack storage for storing the rack accommodating the sample container from which the sample has been loaded into the test unit; and a transporting part, configured to transport the rack in a first direction and in a second direction that is a reverse direction of the first direction, for transporting the rack in the first direction to the rack storage and transporting the rack stored in the rack storage in the second direction to a sample loading position at which the sample is loaded from the rack into the test unit, is disclosed. A transporting apparatus is also disclosed.
摘要翻译：一种样本测试系统，包括：用于加载和测试容纳在所述架子中的样本容器中的样本的测试单元; 一个架子存储装置，用于将容纳样本容器的架子容纳在样品容器中，该样品容器从样品容器中装载到测试单元中; 以及运送部，其被构造成沿着与所述第一方向相反的方向的第一方向和第二方向运送所述齿条，用于将所述齿条沿所述第一方向运送到所述齿条存储器，并且运送存储在所述齿条存储部在第二方向上，将样品从架架装载到测试单元中的样品装载位置。还公开了一种输送装置。

17. 发明授权

US08262994B2 Analyzer 有权
公开(公告)号：US08262994B2
公开(公告)日：2012-09-11
申请号：US13324810
申请日：2011-12-13
申请人： Yuichi Hamada , Masaharu Shibata , Daigo Fukuma
发明人： Yuichi Hamada , Masaharu Shibata , Daigo Fukuma
IPC分类号： G01N33/00
CPC分类号： G01N35/04 , G01N35/0095 , G01N35/026 , Y10T436/113332 , Y10T436/114165 , Y10T436/119163
摘要： An analyzer comprising: a first specimen holder configured to hold a plurality of first specimen containers; a conveying assembly for conveying the first specimen containers held in the first specimen holder; a second specimen holder arranged at a position higher than an upper end of the first specimen containers held in the first specimen holder; a holder moving assembly for moving the second specimen holder so as to pass the upper side of at least one of the first specimen containers held in the first specimen holder; a container transferring assembly for transferring at least one of the first specimen containers from the first specimen holder to the second specimen holder; and a controller for controlling the holder moving assembly and the container transferring assembly, is disclosed.

18. 发明申请

US20110244558A1 SAMPLE ANALYZER AND INFORMATION WRITING METHOD 有权
标题翻译：样本分析仪和信息写作方法
公开(公告)号：US20110244558A1
公开(公告)日：2011-10-06
申请号：US13076007
申请日：2011-03-30
申请人： Yuichi Hamada , Daigo Fukuma
发明人： Yuichi Hamada , Daigo Fukuma
IPC分类号： C12M1/34 , G01N33/00
CPC分类号： G01N35/00663 , G01N1/31 , G01N15/14 , G01N35/00712 , G01N35/00732 , G01N2035/00673 , G01N2035/00772 , G01N2035/00782 , G01N2035/00811 , G01N2035/00851 , G01N2035/009 , G01N2035/0091 , Y10T436/11
摘要： A sample analyzer comprising: a reagent container set section for setting a reagent container; a reader/writer configured to read out an information from the recording medium attached to the reagent container set in the reagent container set section and configured to write an information on the recording medium; a writing instruction section configured to issue an instruction to write the information on the recording medium; and a controller configured to control the reader/writer to write the information on the recording medium attached to the reagent container set in the reagent container set section if the kind information read out from the recording medium indicates the specific reagent and the writing instruction section has issued the writing instruction. Also, a method of writing information on a recording medium attached to a reagent container.
摘要翻译：一种样品分析装置，其特征在于，包括：试剂容器设定部，其设置试剂容器; 读取器/写入器，被配置为从安装在试剂容器组部分中的试剂容器的记录介质读出信息，并将其配置为在记录介质上写入信息; 写入指令部，被配置为发出在所述记录介质上写入所述信息的指令; 以及控制器，其被配置为如果从记录介质读出的种类信息指示特定试剂并且写入指令部分具有如下信息，则控制读取器/写入器将信息写入安装在试剂容器集部分中的试剂容器上的记录介质上发出书面指示。另外，在附着于试剂容器的记录介质上写入信息的方法。

19. 发明授权

US08026023B2 Lithographic pellicle 有权
标题翻译：平版影像
公开(公告)号：US08026023B2
公开(公告)日：2011-09-27
申请号：US12414854
申请日：2009-03-31
申请人： Yuichi Hamada
发明人： Yuichi Hamada
IPC分类号： G03F1/14
CPC分类号： G03F1/64
摘要： A lithographic pellicle is provided that includes a pellicle frame, a pellicle film stretched over one end face of the pellicle frame via a pellicle film adhesive, and an exposure master plate adhesive provided on the other end face, wherein corners formed between a pellicle film adhesion face and exposure master plate adhesion face of the pellicle frame and inside and outside faces of the frame are subjected to C chamfering, and the chamfer dimension on the exposure master plate adhesion face is greater than C0.35 (mm) but no greater than C0.55 (mm).
摘要翻译：提供了一种平版印刷防护薄膜组件，其包括防护薄膜组件框架，通过防护薄膜粘合剂在防护薄膜框架的一个端面上延伸的防护薄膜组件和设置在另一端面上的曝光主板粘合剂，其中在防护薄膜粘附防尘薄膜组件框架的表面和曝光母板粘合面和框架的内外表面进行C倒角，曝光母板粘合面上的倒角尺寸大于C0.35（mm）但不大于C0 .55（mm）。

20. 发明申请

US20100330609A1 ANALYSIS APPARATUS AND ANALYSIS METHOD 有权
标题翻译：分析装置和分析方法
公开(公告)号：US20100330609A1
公开(公告)日：2010-12-30
申请号：US12875913
申请日：2010-09-03
申请人： Takaaki Nagai , Yuichi Hamada , Masaharu Shibata
发明人： Takaaki Nagai , Yuichi Hamada , Masaharu Shibata
IPC分类号： C12Q1/02 , C12M1/34
CPC分类号： G01N35/026 , G01N35/0092 , G01N35/0095 , G01N2035/00326 , G01N2035/0412 , G01N2035/0484 , Y10T436/114165
摘要： This analysis apparatus includes a transporter transporting the specimens to the first measurement unit and the second measurement unit, and a control portion so controlling the transporter as to transport a first specimen container, stored in the rack, storing a first specimen to the first measurement unit and as to transport a second specimen container, stored in the rack along with the first specimen container, storing a second specimen to the second measurement unit.
摘要翻译：这种分析装置包括将样本运送到第一测量单元和第二测量单元的运送器，以及控制部分，其控制运送器运送存储在架子中的第一样本容器，将第一样本存储到第一测量单元以及与第一样本容器一起运送存储在架子中的第二样本容器，将第二样本存储到第二测量单元。

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