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    • 12. 发明授权
    • Method of manufacturing RFID
    • 制造RFID的方法
    • US07122087B2
    • 2006-10-17
    • US10985934
    • 2004-11-12
    • Naoya KandaKosuke InoueMadoka MinagawaShigeharu Tsunoda
    • Naoya KandaKosuke InoueMadoka MinagawaShigeharu Tsunoda
    • B32B37/00
    • G06K19/0775G06K19/07745G06K19/07749H01L2224/16225H01L2224/16227H01L2224/16238H01L2224/81191H01L2224/81395H01L2924/01079
    • There is a method of manufacturing an RFID, in which a semiconductor chip with a memory is bonded to an antenna, so that the information recorded in the memory can be transmitted through the antenna. In the RFID, a PET film, a PEN film, or a sheet of paper is used as the base material of the antenna. The method includes: aligning the semiconductor chip with gold bumps relative to the antenna, in which a metal foil formed of an aluminum or an aluminum alloy is adhered to the base material, including a polyethylene terephthalate or a polyethylene naphthalate; pressing the semiconductor chip to the antenna; and applying ultrasonic waves under an ambient temperature lower than the glass transition temperature of the polyethylene terephthalate or the polyethylene naphthalate, to thereby bond the gold bumps and the metal foil. Thus, the method suppresses the deformation of the antenna.
    • 存在制造RFID的方法,其中具有存储器的半导体芯片被结合到天线,使得可以通过天线发送记录在存储器中的信息。 在RFID中,使用PET膜,PEN膜或纸张作为天线的基材。 该方法包括:将半导体芯片与相对于天线的金凸块对准,其中由铝或铝合金形成的金属箔粘附到包括聚对苯二甲酸乙二醇酯或聚萘二甲酸乙二醇酯的基材上; 将半导体芯片按压到天线; 并在低于聚对苯二甲酸乙二醇酯或聚萘二甲酸乙二醇酯的玻璃化转变温度的环境温度下施加超声波,从而结合金凸块和金属箔。 因此,该方法抑制天线的变形。
    • 20. 发明授权
    • Process for preparing superconductive wiring board
    • 制备超导布线板的工艺
    • US4913769A
    • 1990-04-03
    • US228297
    • 1988-08-04
    • Naoya KandaTakayoshi SowaTetsuya YamazakiHiroaki Okudaira
    • Naoya KandaTakayoshi SowaTetsuya YamazakiHiroaki Okudaira
    • H01L39/24
    • H01L39/2464Y10S505/816Y10S505/82
    • The present invention relates to an element comprising a superconductive material or a wiring formation technique. In a thin film wiring board in which a superconductive material is used as a conductor, annealing should be conducted at a high temperature in an oxygen atmosphere after formation of a film in order to convert the conductor portion into a superconductive material, which makes it necessary to use an inorganic oxide as the insulating film. This brought about a problem that the etching of the second and subsequent insulation layers causes a damage to the wiring and insulation layer provided thereunder.In the present invention, an over-etching preventing layer is provided on a wiring layer provided under the second and subsequent insulation layers in order to solve the problem in question.The present invention brings about an effect of realizing the formation of a multi-layered wiring layer by making use of a superconductive material.
    • 本发明涉及一种包括超导材料或布线形成技术的元件。 在其中使用超导材料作为导体的薄膜布线板中,在形成膜之后,应在氧气氛中在高温下进行退火,以便将导体部分转换为超导材料,这使得它成为必要 使用无机氧化物作为绝缘膜。 这导致了第二和随后的绝缘层的蚀刻对其上提供的布线和绝缘层造成损坏的问题。 在本发明中,为了解决上述问题,在设置在第二绝缘层及其后的绝缘层的布线层上设置防过蚀层。 本发明通过利用超导材料产生实现多层布线层的形成的效果。