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    • 12. 发明申请
    • Depositing a pinned layer structure in a self-pinned spin valve
    • 在自锁自旋阀中沉积钉扎层结构
    • US20050180112A1
    • 2005-08-18
    • US10782208
    • 2004-02-18
    • Daniele MauriAlexander Zeltser
    • Daniele MauriAlexander Zeltser
    • G11B5/39H05K7/20
    • B82Y25/00B82Y10/00G11B5/3906G11B2005/3996
    • The pinned layer structure in a self-pinned spin valve is deposited using a DC aligning field. The deposition of each of the Reference and Keeper layer in the pinned layer occurs within two different polarity DC aligning fields. Thus, a first portion of the Reference layer is deposited with a DC alignment field of a first polarity, i.e., either positive or negative, and a second portion of the Reference layer is deposited in a DC alignment field of opposite polarity. The Keeper layer is similarly deposited, with a first portion of the Keeper layer deposited in a first polarity DC alignment field and the second portion deposited in the opposite polarity DC alignment field. By splitting the deposition of the Reference and Keeper layers into portions using DC aligning fields the pinned layer structure is highly repeatable while providing a good thickness uniformity of the structure.
    • 使用直流对准场沉积自锁自旋阀中的钉扎层结构。 参考和守护层中的每一个在被钉扎层中的沉积发生在两个不同极性的直流对准场内。 因此,参考层的第一部分被沉积有第一极性的DC对准场,即正或负,并且参考层的第二部分沉积在相反极性的DC对准场中。 Keeper层类似地沉积,Keeper层的第一部分沉积在第一极性DC对准场中,而第二部分沉积在相反极性的DC对准场中。 通过使用直流对准场将参考和守恒分层的沉积分裂成部分,钉扎层结构是高度可重复的,同时提供了良好的结构厚度均匀性。
    • 14. 发明授权
    • Optical programmable matrix processor
    • 光学可编程矩阵处理器
    • US08325403B1
    • 2012-12-04
    • US12395737
    • 2009-03-02
    • Michael MeshMichael LaorAlexander Zeltser
    • Michael MeshMichael LaorAlexander Zeltser
    • G02F3/00
    • G02F3/028
    • A bit-matrix processor including a pair of optoelectronic matrices and a controller for causing the matrices to perform Boolean Matrix transforms to perform logical operations, wherein Boolean logical equivalents include logical AND to replace element-wise multiplication, and logical OR instead of summation. According to one embodiment, the processor includes an optical source matrix for receiving input binary data; a passive optical replicator for replicating a pattern on the optical source matrix and projecting it onto a Spatial Light Modulator (SLM); a database loading device for loading data onto the SLM thereby to perform logical AND with the optical source matrix data; an integrating device for integrating light from the SLM onto a photodiode matrix; and an output signal processing device.
    • 包括一对光电矩阵的位矩阵处理器和用于使矩阵执行布尔矩阵变换以执行逻辑运算的控制器,其中布尔逻辑等价物包括逻辑“与”以代替逐位乘法,逻辑“否”而不是求和。 根据一个实施例,处理器包括用于接收输入二进制数据的光源矩阵; 用于在光源矩阵上复制图案并将其投影到空间光调制器(SLM)上的无源光学复制器; 用于将数据加载到SLM上的数据库加载装置,从而与光源矩阵数据执行逻辑AND; 用于将来自SLM的光集成到光电二极管矩阵上的积分装置; 和输出信号处理装置。
    • 16. 发明申请
    • CPP read sensor having constrained current paths made of lithographically-defined conductive vias with surrounding oxidized metal sublayers
    • CPP读取传感器具有由具有周围的氧化金属子层的光刻定义的导电通孔制成的约束电流路径
    • US20080024937A1
    • 2008-01-31
    • US11496604
    • 2006-07-31
    • Hardayal Singh GillJordan Asher KatineAlexander Zeltser
    • Hardayal Singh GillJordan Asher KatineAlexander Zeltser
    • G11B5/33G11B5/127
    • G11B5/398B82Y25/00B82Y40/00G01R33/093G11B5/3906G11B5/3983H01F41/306H01F41/308Y10T29/49046Y10T29/49052
    • Current-perpendicular-to-plane (CPP) read sensors having constrained current paths made of lithographically-defined conductive vias with surrounding oxidized metal sublayers, and methods of making the same, are disclosed. In one illustrative example, at least part of a sensor stack structure which includes an electrically conductive spacer layer is formed. A metal (e.g. Ta) sublayer is then deposited over and adjacent the spacer layer, followed by one of an oxidation process, a nitridation process, and an oxynitridation process, to produce an insulator (e.g. TaOx) from the metal sublayer. The metal sublayer deposition and oxidation/nitridation/oxynitridation processes are repeated as necessary to form the insulator with a suitable thickness. Next, a resist structure which exposes one or more portions of the insulator is formed over the insulator. With the resist structure in place, exposed insulator materials are removed by etching to form one or more apertures through the insulator down to the spacer layer. Electrically conductive materials are subsequently deposited within the one or more apertures to form one or more lithographically-defined conductive vias of a current-constraining structure. Advantageously, the lithographically-defined conductive vias increase the current density of the read sensor in the region of the sensing layers to thereby simultaneously increase its resistance and magnetoresistance. With use of the process of oxidation, nitridation, or oxynitridation on each metal sublayer, degradation of the spacer layer is reduced or eliminated such that the desirable soft magnetics of the sensing layers in the read sensor are maintained.
    • 公开了具有由具有周围氧化金属子层的光刻定义的导电通孔制成的约束电流路径的电流垂直平面(CPP)读取传感器及其制造方法。 在一个说明性示例中,形成包括导电间隔层的传感器堆叠结构的至少一部分。 然后将金属(例如Ta)子层沉积在间隔层上并与其相邻,随后是氧化工艺,氮化工艺和氧氮化工艺中的一种,以从金属子层产生绝缘体(例如TaO x)。 根据需要重复金属亚层沉积和氧化/氮化/氧氮化处理以形成具有合适厚度的绝缘体。 接下来,在绝缘体上形成露出绝缘体的一个或多个部分的抗蚀剂结构。 在抗蚀剂结构就位的情况下,通过蚀刻去除暴露的绝缘体材料,以形成穿过绝缘体的一个或多个孔向下到间隔层。 导电材料随后沉积在一个或多个孔内以形成电流约束结构的一个或多个光刻定义的导电通孔。 有利地,光刻定义的导电通孔增加读取传感器在感测层的区域中的电流密度,从而同时增加其电阻和磁阻。 通过使用在每个金属子层上的氧化,氮化或氧氮化的过程,间隔层的劣化被减少或消除,使得保持读取传感器中感测层的期望的软磁性。
    • 17. 发明申请
    • Magnetic sensing devices having an insulator structure with a plurality of oxidized, nitrided, or oxynitrided sublayers and methods of making the same
    • 具有多个氧化,氮化或氧氮化亚层的绝缘体结构的磁感测装置及其制造方法
    • US20070047153A1
    • 2007-03-01
    • US11219107
    • 2005-09-01
    • Alexander Zeltser
    • Alexander Zeltser
    • G11B5/33G11B5/127
    • G11B5/3909B82Y10/00B82Y25/00B82Y40/00G01R33/093G11B5/3163G11B5/3906H01F10/3254H01F10/3272H01F10/3281H01F41/18H01F41/303H01F41/325Y10T29/49043Y10T29/49044
    • A magnetic sensing device for use in a magnetic head includes a sensor stack structure having a sensing layer structure and an insulator structure formed adjacent the sensing layer structure. The insulator structure includes a plurality of oxidized metallic sublayers, a plurality of nitrided metallic sublayers, or a plurality of oxynitrided metallic sublayers. The insulator structure may be a capping layer structure of a giant magnetoresistance sensor or, alternatively, a tunnel barrier layer structure of a tunneling magnetoresistance sensor or a magnetic random access memory. Advantageously, each treated metallic sublayer is sufficiently uniformly treated so as to increase the magnetoresistive effect and improve soft magnetic properties of the magnetic sensing device. A method for use in forming the magnetic sensing device of the present application includes the steps of forming a sensor stack structure which includes a sensing layer structure; depositing a metallic layer; performing, on the metallic layer, either an oxidation, nitridation, or oxynitridation process; and repeating the steps of depositing and performing one or more times to thereby form an insulator structure.
    • 用于磁头的磁感测装置包括具有传感层结构的传感器堆叠结构和邻近传感层结构形成的绝缘体结构。 绝缘体结构包括多个氧化金属子层,多个氮化金属子层或多个氮氧化金属子层。 绝缘体结构可以是巨磁阻传感器的封盖层结构,或者是隧道磁阻传感器或磁随机存取存储器的隧道势垒层结构。 有利地,每个经处理的金属子层被充分均匀地处理,以增加磁阻效应并改善磁感测装置的软磁特性。 用于形成本申请的磁感测装置的方法包括以下步骤:形成包括感测层结构的传感器堆叠结构; 沉积金属层; 在金属层上进行氧化,氮化或氧氮化处理; 并重复沉积和执行一次或多次以形成绝缘体结构的步骤。