会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 14. 发明授权
    • Piezoelectric/electrostrictive device and method for manufacturing the same
    • 压电/电致伸缩器件及其制造方法
    • US07441317B2
    • 2008-10-28
    • US11273828
    • 2005-11-15
    • Takaaki KoizumiHirofumi Yamaguchi
    • Takaaki KoizumiHirofumi Yamaguchi
    • H01L41/22H01L41/187
    • H01L41/314H01L41/0973H01L41/43Y10T29/42
    • A piezoelectric/electrostrictive device is provided, including a substrate, an electrode layer adhering to the surface of the substrate, and a piezoelectric/electrostrictive layer adhering to the electrode layer. The electrode layer is deformed by high-temperature creep. A method for manufacturing the piezoelectric/electrostrictive device is provided including a step of cooling the piezoelectric/electrostrictive device, after firing, at a temperature decreasing rate of at least the rate of natural cooling. The cooling step includes a sub-step of holding the piezoelectric/electrostrictive device at a constant holding temperature that is lower than the firing temperature. The holding temperature is within a range of temperatures at which high-temperature creep occurs in the metal of the electrode layer so that residual stress in the piezoelectric/electrostrictive layer can be reduced.
    • 提供一种压电/电致伸缩器件,包括基片,附着于基片表面的电极层,以及附着在电极层上的压电/电致伸缩层。 电极层由高温蠕变变形。 提供一种压电/电致伸缩器件的制造方法,其特征在于,以至少自然冷却速度的降温速度,在烧成后对压电/电致伸缩器件进行冷却的工序。 冷却步骤包括将压电/电致伸缩装置保持在低于烧制温度的恒定保持温度的子步骤。 保持温度在电极层的金属中发生高温蠕变的温度的范围内,能够降低压电/电致伸缩层的残留应力。