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    • 17. 发明授权
    • Sample inspection apparatus and sample inspection method
    • 样品检验仪器和样品检验方法
    • US5960106A
    • 1999-09-28
    • US413704
    • 1995-03-30
    • Hideo TsuchiyaToru TojoMitsuo TabataToshiyuki WatanabeEiichi Kobayashi
    • Hideo TsuchiyaToru TojoMitsuo TabataToshiyuki WatanabeEiichi Kobayashi
    • G01N21/88G01N21/93G01N21/956G03F1/84G06T1/00G06T7/00H01L21/027G06K9/00
    • G06T7/0006G06T2207/30148
    • In a method of inspecting a sample on which a pattern relating to fabrication of a semiconductor device is formed, there are provided a light radiation unit, an acquiring unit, a storage unit, a template, a calculation unit, a correction unit, a defect detection unit and an output unit. Pinhole shape data to be detected of the pattern is stored in the template. The calculation unit calculates the degree of coincidence between the pinhole shape data stored in the template and the measured image data stored in the storage unit in units of a predetermined amount of data. The correction unit corrects a portion of the measured image data corresponding to a value of the degree of coincidence exceeding a second predetermined value in units of the predetermined amount of data, when the degree of coincidence obtained by the calculation unit has exceeded a first predetermined value, thereby correcting the portion of the measured image data including the detected pinhole. The defect detection unit detects a defect in the pattern on the basis of the corrected measured image data portion including the pinhole, which is obtained by the correcting unit, and the measured image data.
    • 在形成有与半导体器件的制造有关的图案的样品的检查方法中,设置有光照单元,获取单元,存储单元,模板,计算单元,校正单元,缺陷 检测单元和输出单元。 要检测的图案的针孔形状数据存储在模板中。 计算单元以预定量的数据为单位计算存储在模板中的针孔形状数据与存储在存储单元中的测量图像数据之间的一致度。 当由计算单元获得的一致度已经超过第一预定值时,校正单元以与预定数据量为单位对应的符合度超过第二预定值的值的部分测量图像数据进行校正 从而校正包括检测到的针孔的测量图像数据的部分。 缺陷检测单元基于由校正单元获得的包括针孔的校正的测量图像数据部分和测量的图像数据来检测图案中的缺陷。
    • 20. 发明授权
    • Figure pattern generating apparatus for detecting pattern defects
    • 用于检测图案缺陷的图形生成装置
    • US5577171A
    • 1996-11-19
    • US25317
    • 1993-03-02
    • Tooru AraiToshiyuki WatanabeHideo Tsuchiya
    • Tooru AraiToshiyuki WatanabeHideo Tsuchiya
    • G01N21/956G06K15/00
    • G01N21/95607
    • There is provided a pattern generating apparatus in which a figure analyzer analyzes cell data relating to an input figure, figure unfolding sections unfold each basic figure into a figure pattern, the figure unfolding sections are connected in series with pattern memories, the figure unfolding sections and pattern memories are connected in a parallel form to a distribution controller which effects the control operation to cause the figure unfolding sections to effect the unfolding processes for each basic figure unit or each unit obtained by dividing an excessively large figure exceeding a preset threshold value into preset areas, and a readout section having a logical sum circuit for combining partial figure patterns of respective areas from the pattern memories into a single figure pattern outputs the pattern as an output in synchronism with scanning of the input figure.
    • 提供了一种图形生成装置,其中图形分析器分析与输入图形相关的单元数据,图形展开部分将每个基本图形展开成图形图案,图形展开部分与图案存储器串联连接,图形展开部分和 图案存储器以并行形式连接到分配控制器,分配控制器执行控制操作以使图形展开部分对每个基本图形单元或通过将超过预设阈值的过大的图划分为预设的单位获得的每个单位进行展开处理 区域和具有逻辑和电路的读出部分,用于将来自图案存储器的各个区域的部分图形图案组合为单个图形模式,与输入图形的扫描同步地输出该图案作为输出。