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11. 发明授权

US06852560B2 Fabrication of a microchip-based electrospray device 有权
标题翻译：基于微芯片的电喷雾装置的制造
公开(公告)号：US06852560B2
公开(公告)日：2005-02-08
申请号：US10853943
申请日：2004-05-26
申请人： Thomas N. Corso
发明人： Thomas N. Corso
IPC分类号： B81B1/00 , H01L21/00 , H01L21/301 , H01L21/302 , H01L21/46 , H01L21/78
CPC分类号： B81C1/00087 , B81B2201/058 , B81C2201/0142
摘要： A method for fabricating a nozzle of microchip-based electrospray device is disclosed. The method includes using a primary mask to accurately define the nozzle feature including the annulus and the through hole of the electrospray device. A secondary masking step is conducted to pattern the through channel (typical the photoresist would serve as the secondary mask), followed by the defining and etching of the primary mask containing the full nozzle feature. The secondary mask serves to selectively mask given areas of the primary mask for subsequent etching. The through hole feature of the secondary mask aligns over the already patterned primary mask through channel, except that the secondary mask contains a slightly larger through channel diameter. This serves to mask off the annulus, but allowing the silicon through channel to be exposed for etching.
摘要翻译：公开了一种用于制造基于微芯片的电喷雾装置的喷嘴的方法。该方法包括使用主掩模来精确地限定包括电喷雾装置的环形部分和通孔的喷嘴特征。进行二次掩模步骤以对穿通通道进行图案化（典型地，光致抗蚀剂将用作辅助掩模），然后限定和蚀刻含有全喷嘴特征的主掩模。辅助掩模用于选择性地掩蔽初级掩模的给定区域用于随后的蚀刻。辅助掩模的通孔特征通过通道对准已经图案化的初级掩模，不同之处在于次要掩模包含稍大的通道直径。这用于掩盖环形，但允许硅通过沟道暴露以进行蚀刻。

12. 发明授权

US06800202B2 Integrated monolithic microfabricated electrospray and liquid chromatography system and method 有权
标题翻译：集成的单片微电解电喷雾和液相色谱系统及方法
公开(公告)号：US06800202B2
公开(公告)日：2004-10-05
申请号：US09745629
申请日：2000-12-21
申请人： James E. Moon , Timothy J. Davis , Gregory J. Galvin , Gary A. Schultz , Thomas N. Corso , Stephen Lowes
发明人： James E. Moon , Timothy J. Davis , Gregory J. Galvin , Gary A. Schultz , Thomas N. Corso , Stephen Lowes
IPC分类号： B01D1508
CPC分类号： G01N30/7266 , G01N30/6095 , H01J49/0018 , H01J49/167 , Y10T29/49002 , Y10T436/25375 , Y10T436/255
摘要： An electrospray device, a liquid chromatography device and an electrosprayliquid chromatography system are disclosed. The electrospray device comprises a substrate defining a channel between an entrance orifice on an injection surface and an exit orifice on an ejection surface, a nozzle defined by a portion recessed from the ejection surface surrounding the exit orifice, and an electrode for application of an electric potential to the substrate to optimize and generate an electrospray; and, optionally, additional electrode(s) to further modify the electrospray. The liquid chromatography device comprises a separation substrate defining an introduction channel between an entrance orifice and a reservoir and a separation channel between the reservoir and an exit orifice, the separation channel being populated with separation posts perpendicular to the fluid flow; a cover substrate bonded to the separation substrate to enclose the reservoir and the separation channel adjacent the cover substrate; and, optionally, electrode(s) for application of a electric potential to the fluid. The exit orifice of the liquid chromatography device may be homogeneously interfaced with the entrance orifice of the electrospray device to form an integrated single system. An array of multiple systems may be fabricated in a single monolithic chip for rapid sequential fluid processing and generation of electrospray for subsequent analysis, such as by positioning the exit orifices of the electrospray devices near the sampling orifice of a mass spectrometer.
摘要翻译：公开了电喷雾装置，液相色谱装置和电喷雾液相色谱系统。电喷雾装置包括：基材，其限定在喷射表面上的入口孔与喷射表面上的出口孔之间的通道;由从出射孔周围的喷射表面凹陷的部分限定的喷嘴;以及用于施加电对基板进行优化和产生电喷雾的潜力; 和可选的附加电极以进一步改变电喷雾。所述液相色谱装置包括分隔衬底，所述分离衬底限定入口孔和贮存器之间的引入通道以及所述储存器和出口孔之间的分离通道，所述分离通道具有垂直于所述流体流动的分离柱; 覆盖基板，其结合到分离基板以封闭储存器和与盖基板相邻的分离通道; 和可选地用于向流体施加电势的电极。液相色谱装置的出口可以与电喷雾装置的入口孔均匀地接合，以形成一个集成的单一系统。多个系统的阵列可以制造在单个单片芯片中，用于快速顺序流体处理和产生用于后续分析的电喷雾，例如通过将电喷雾装置的出口孔定位在质谱仪的采样孔附近。

13. 发明授权

US06790354B1 Integrated monolithic microfabricated electrospray and liquid chromatography system and method 有权
标题翻译：集成的单片微电解电喷雾和液相色谱系统及方法
公开(公告)号：US06790354B1
公开(公告)日：2004-09-14
申请号：US09698329
申请日：2000-10-27
申请人： James E. Moon , Timothy J. Davis , Gregory J. Galvin , Gary A. Schultz , Thomas N. Corso , Stephen Lowes
发明人： James E. Moon , Timothy J. Davis , Gregory J. Galvin , Gary A. Schultz , Thomas N. Corso , Stephen Lowes
IPC分类号： B01D1508
CPC分类号： G01N30/6095 , G01N30/7266 , G01N2030/6013 , H01J49/0018 , H01J49/167 , Y10T436/24 , Y10T436/2575
摘要： An electrospray device, a liquid chromatography device and an electrospray-liquid chromatography system are disclosed. The electrospray device comprises a substrate defining a channel between an entrance orifice on an injection surface and an exit orifice on an ejection surface, a nozzle defined by a portion recessed from the ejection surface surrounding the exit orifice, and an electrode for application of an electric potential to the substrate to optimize and generate an electrospray; and, optionally, additional electrode(s) to further modify the electrospray. The liquid chromatography device comprises a separation substrate defining an introduction channel between an entrance orifice and a reservoir and a separation channel between the reservoir and an exit orifice, the separation channel being populated with separation posts perpendicular to the fluid flow; a cover substrate bonded to the separation substrate to enclose the reservoir and the separation channel adjacent the cover substrate; and, optionally, electrode(s) for application of a electric potential to the fluid. The exit orifice of the liquid chromatography device may be homogeneously interfaced with the entrance orifice of the electrospray device to form an integrated single system. An array of multiple systems may be fabricated in a single monolithic chip for rapid sequential fluid processing and generation of electrospray for subsequent analysis, such as by positioning the exit orifices of the electrospray devices near the sampling orifice of a mass spectrometer.
摘要翻译：公开了电喷雾装置，液相色谱装置和电喷雾 - 液相色谱系统。电喷雾装置包括：基材，其限定在喷射表面上的入口孔与喷射表面上的出口孔之间的通道;由从出射孔周围的喷射表面凹陷的部分限定的喷嘴;以及用于施加电对基板进行优化和产生电喷雾的潜力; 和可选的附加电极以进一步改变电喷雾。所述液相色谱装置包括分隔衬底，所述分离衬底限定入口孔和贮存器之间的引入通道以及所述储存器和出口孔之间的分离通道，所述分离通道具有垂直于所述流体流动的分离柱; 覆盖基板，其结合到分离基板以封闭储存器和与盖基板相邻的分离通道; 和可选地用于向流体施加电势的电极。液相色谱装置的出口可以与电喷雾装置的入口孔均匀地接合，以形成一个集成的单一系统。多个系统的阵列可以制造在单个单片芯片中，用于快速顺序流体处理和产生用于后续分析的电喷雾，例如通过将电喷雾装置的出口孔定位在质谱仪的采样孔附近。

14. 发明授权

US06787766B2 Integrated monolithic microfabricated dispensing nozzle and liquid chromatography-electrospray system and method 有权
公开(公告)号：US06787766B2
公开(公告)日：2004-09-07
申请号：US10427145
申请日：2003-04-30
申请人： Gary A. Schultz , Thomas N. Corso
发明人： Gary A. Schultz , Thomas N. Corso
IPC分类号： H01J4904
CPC分类号： H01J49/167 , G01N30/6095 , G01N30/7266 , H01J49/0018
摘要： A droplet/electrospray device and a liquid chromatography-electrospray system are disclosed. The droplet/electrospray device comprises a substrate defining a channel between an entrance orifice on an injection surface and an exit orifice on an ejection surface, a nozzle defined by a portion recessed from the ejection surface surrounding the exit orifice, and an electrode for application of an electric potential to the substrate to optimize and generate droplets or an electrospray. A plurality of these electrospray devices can be used in the form of an array of miniaturized nozzles. The liquid chromatography-electrospray device comprises a separation substrate defining an introduction channel between an entrance orifice and a reservoir and a separation channel between the reservoir and an exit orifice, the separation channel being populated with separation posts perpendicular to the fluid flow. A cover substrate is bonded to the separation substrate to enclose the reservoir and the separation channel adjacent the cover substrate. The exit orifice of the liquid chromatography device is homogeneously interfaced with the entrance orifice of the electrospray device to form an integrated single system. Procedures for fabrication of the electrospray devices of the present invention are also disclosed.

15. 发明授权

US06780313B1 Integrated monolithic microfabricated electrospray and liquid chromatography system and method 有权
公开(公告)号：US06780313B1
公开(公告)日：2004-08-24
申请号：US09702955
申请日：2000-10-31
申请人： James E. Moon , Timothy J. Davis , Gregory J. Galvin , Gary A. Schultz , Thomas N. Corso , Stephen Lowes
发明人： James E. Moon , Timothy J. Davis , Gregory J. Galvin , Gary A. Schultz , Thomas N. Corso , Stephen Lowes
IPC分类号： B01D1508
CPC分类号： G01N30/6095 , G01N30/7266 , G01N2030/6013 , H01J49/0018 , H01J49/167 , Y10T436/24 , Y10T436/2575
摘要： An electrospray device, a liquid chromatography device and an electrospray-liquid chromatography system are disclosed. The electrospray device comprises a substrate defining a channel between an entrance orifice on an injection surface and an exit orifice on an ejection surface, a nozzle defined by a portion recessed from the ejection surface surrounding the exit orifice, and an electrode for application of an electric potential to the substrate to optimize and generate an electrospray; and, optionally, additional electrode(s) to further modify the electrospray. The liquid chromatography device comprises a separation substrate defining an introduction channel between an entrance orifice and a reservoir and a separation channel between the reservoir and an exit orifice, the separation channel being populated with separation posts perpendicular to the fluid flow; a cover substrate bonded to the separation substrate to enclose the reservoir and the separation channel adjacent the cover substrate; and, optionally, electrode(s) for application of a electric potential to the fluid. The exit orifice of the liquid chromatography device may be homogeneously interfaced with the entrance orifice of the electrospray device to form an integrated single system. An array of multiple systems may be fabricated in a single monolithic chip for rapid sequential fluid processing and generation of electrospray for subsequent analysis, such as by positioning the exit orifices of the electrospray devices near the sampling orifice of a mass spectrometer.

16. 发明授权

US06891155B2 Dielectric film 有权
标题翻译：电介质膜
公开(公告)号：US06891155B2
公开(公告)日：2005-05-10
申请号：US10246150
申请日：2002-09-17
申请人： Jie Li , Thomas N. Corso , Gary A. Schultz
发明人： Jie Li , Thomas N. Corso , Gary A. Schultz
IPC分类号： G01N27/447 , B32B7/00 , B81B1/00 , G01N30/72 , G01N37/00 , G02B1/11 , H01B3/10 , H01B3/12 , H01B7/282 , H01B17/60 , H01J49/04 , H01L21/306 , H01L29/00 , H01L29/74 , H01L29/76 , H01L29/78
CPC分类号： H01B7/2825 , G01N27/44704 , G01N30/7266 , H01B3/10 , H01B3/12 , H01L21/3143 , H01L21/3145 , H01L21/3146
摘要： A dielectric film is provided which includes a base layer and a capping layer, preferably silicon oxynitride, wherein the film is an effective moisture and ion barrier when disposed between a conductive substrate and a liquid having an electrical potential different than the electrical potential of the substrate.
摘要翻译：提供了一种电介质膜，其包括基底层和覆盖层，优选氮氧化硅，其中当设置在导电衬底和具有不同于衬底的电位的电位的电位的液体之间时，膜是有效的水分和离子屏障。

17. 发明授权

US06811689B2 Microchip electrospray device and column with affinity adsorbents and use of the same 有权
标题翻译： Microchip电喷雾装置和具有亲和吸附剂的柱和使用它们
公开(公告)号：US06811689B2
公开(公告)日：2004-11-02
申请号：US10658006
申请日：2003-09-09
申请人： Sheng Zhang , Xian Huang , Thomas N. Corso , Gary A. Schultz , Simon J. Prosser
发明人： Sheng Zhang , Xian Huang , Thomas N. Corso , Gary A. Schultz , Simon J. Prosser
IPC分类号： B01D1508
CPC分类号： G01N30/6095 , B01D15/3804 , B01J20/28042 , B01J20/285 , B01J20/286 , B01J20/321 , B01J20/3212 , B01J20/3219 , B01J20/3244 , B01J20/3251 , B01J20/3274 , B01J45/00 , B01J2220/52 , B01J2220/54 , B01J2220/58 , B01J2220/82 , G01N30/463 , G01N30/466 , G01N30/482 , G01N30/7266 , G01N2030/528 , H01J49/0018 , H01J49/167
摘要： A microchip-based electrospray ionization device and column with affinity adsorbents is disclosed. The invention includes a microchip array and a capillary tube or alone or attached in combination. At least a portion of the device or column has immobilized affinity adsorbents. Methods for using the device are provided as well for affinity capture of biomolecules to meet the needs for the modern life sciences such as proteomics and drug discover.
摘要翻译：公开了一种基于微芯片的电喷雾离子化装置和具有亲和吸附剂的柱。本发明包括微芯片阵列和毛细管，或单独或组合连接。装置或柱的至少一部分具有固定的亲和吸附剂。还提供了使用该装置的方法用于生物分子的亲和捕获以满足现代生命科学如蛋白质组学和药物发现的需要。

18. 发明授权

US06768107B2 Integrated monolithic microfabricated dispensing nozzle and liquid chromatography-electrospray system and method 有权
公开(公告)号：US06768107B2
公开(公告)日：2004-07-27
申请号：US10426455
申请日：2003-04-30
申请人： Gary A. Schultz , Thomas N. Corso
发明人： Gary A. Schultz , Thomas N. Corso
IPC分类号： H01J4904
CPC分类号： H01J49/167 , G01N30/6095 , G01N30/7266 , H01J49/0018
摘要： A droplet/electrospray device and a liquid chromatography-electrospray system are disclosed. The droplet/electrospray device comprises a substrate defining a channel between an entrance orifice on an injection surface and an exit orifice on an ejection surface, a nozzle defined by a portion recessed from the ejection surface surrounding the exit orifice, and an electrode for application of an electric potential to the substrate to optimize and generate droplets or an electrospray. A plurality of these electrospray devices can be used in the form of an array of miniaturized nozzles. The liquid chromatography-electrospray device comprises a separation substrate defining an introduction channel between an entrance orifice and a reservoir and a separation channel between the reservoir and an exit orifice, the separation channel being populated with separation posts perpendicular to the fluid flow. A cover substrate is bonded to the separation substrate to enclose the reservoir and the separation channel adjacent the cover substrate. The exit orifice of the liquid chromatography device is homogeneously interfaced with the entrance orifice of the electrospray device to form an integrated single system. Procedures for fabrication of the electrospray devices of the present invention are also disclosed.

19. 发明授权

US06633031B1 Integrated monolithic microfabricated dispensing nozzle and liquid chromatography-electrospray system and method 有权
标题翻译：集成的单片微型配料喷嘴和液相色谱 - 电喷雾系统及方法
公开(公告)号：US06633031B1
公开(公告)日：2003-10-14
申请号：US09468535
申请日：1999-12-20
申请人： Gary A. Schultz , Thomas N. Corso
发明人： Gary A. Schultz , Thomas N. Corso
IPC分类号： H01J4904
CPC分类号： H01J49/167 , G01N30/6095 , G01N30/7266 , H01J49/0018
摘要： A droplet/electrospray device and a liquid chromatography-electrospray system are disclosed. The droplet/electrospray device comprises a substrate defining a channel between an entrance orifice on an injection surface and an exit orifice on an ejection surface, a nozzle defined by a portion recessed from the ejection surface surrounding the exit orifice, and an electrode for application of an electric potential to the substrate to optimize and generate droplets or an electrospray. A plurality of these electrospray devices can be used in the form of an array of miniaturized nozzles. The liquid chromatography-electrospray device comprises a separation substrate defining an introduction channel between an entrance orifice and a reservoir and a separation channel between the reservoir and an exit orifice, the separation channel being populated with separation posts perpendicular to the fluid flow. A cover substrate is bonded to the separation substrate to enclose the reservoir and the separation channel adjacent the cover substrate. The exit orifice of the liquid chromatography device is homogeneously interfaced with the entrance orifice of the electrospray device to form an integrated single system. Procedures for fabrication of the electrospray devices of the present invention are also disclosed.
摘要翻译：公开了液滴/电喷雾装置和液相色谱 - 电喷雾系统。液滴/电喷雾装置包括限定喷射表面上的入口和喷射表面上的出口之间的通道的基底，由从出射孔周围的喷射表面凹陷的部分限定的喷嘴，以及用于施加对基板的电位以优化和产生液滴或电喷雾。多个这样的电喷雾装置可以以小型化喷嘴阵列的形式使用。液相色谱 - 电喷雾装置包括分隔衬底，其限定了入口孔和储存器之间的引入通道以及储存器和出口孔之间的分离通道，分离通道具有垂直于流体流动的分离柱。覆盖基板被结合到分离基板以封闭储存器和邻近盖基板的分离通道。液相色谱装置的出口与电喷雾装置的入口孔均匀地接合，形成一个集成的单一系统。还公开了用于制造本发明的电喷雾装置的步骤

20. 发明授权

US06627882B2 Multiple electrospray device, systems and methods 有权
公开(公告)号：US06627882B2
公开(公告)日：2003-09-30
申请号：US09748518
申请日：2000-12-22
申请人： Gary A. Schultz , Thomas N. Corso , Simon J. Prosser
发明人： Gary A. Schultz , Thomas N. Corso , Simon J. Prosser
IPC分类号： H01J4904
CPC分类号： H01J49/167 , H01J49/0018 , H01J49/04
摘要： A microchip-based electrospray device, system, and method of fabrication thereof are disclosed. The electrospray device includes a substrate defining a channel between an entrance orifice on an injection surface and an exit orifice on an ejection surface, a nozzle defined by a portion recessed from the ejection surface surrounding the exit orifice, and an electric field generating source for application of an electric potential to the substrate to optimize and generate an electrospray. A method and system are disclosed to generate multiple electrospray plumes from a single fluid stream that provides an ion intensity as measured by a mass spectrometer that is approximately proportional to the number of electrospray plumes formed for analytes contained within the fluid. A plurality of electrospray nozzle devices can be used in the form of an array of miniaturized nozzles for the purpose of generating multiple electrospray plumes from multiple nozzles for the same fluid stream. This invention dramatically increases the sensitivity of microchip electrospray devices compared to prior disclosed systems and methods.

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