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1. 发明授权

US06913701B2 Method for fabricating integrated LC/ESI device using SMILE, latent masking, and delayed LOCOS techniques 有权
标题翻译：使用SMILE，潜屏蔽和延迟LOCOS技术制造集成LC / ESI器件的方法
公开(公告)号：US06913701B2
公开(公告)日：2005-07-05
申请号：US10687198
申请日：2003-10-16
申请人： James E. Moon , Timothy J. Davis , Gregory J. Galvin , Kevin A. Shaw , Paul C. Waldrop , Sharlene A. Wilson
发明人： James E. Moon , Timothy J. Davis , Gregory J. Galvin , Kevin A. Shaw , Paul C. Waldrop , Sharlene A. Wilson
IPC分类号： G01N37/00 , B01D15/08 , B05B5/00 , B81B1/00 , B81C1/00 , H01L21/302 , H01L21/3065 , H01L21/00
CPC分类号： B05B5/00 , H01J49/0018 , H01J49/167 , Y10S438/942
摘要： Three fundamental and three derived aspects of the present invention are disclosed. The three fundamental aspects each disclose a process sequence that may be integrated in a full process. The first aspect, designated as “latent masking”, defines a mask in a persistent material like silicon oxide that is held abeyant after definition while intervening processing operations are performed. The latent oxide pattern is then used to mask an etch. The second aspect, designated as “simultaneous multi-level etching (SMILE)”, provides a process sequence wherein a first pattern may be given an advanced start relative to a second pattern in etching into an underlying material, such that the first pattern may be etched deeper, shallower, or to the same depth as the second pattern. The third aspect, designated as “delayed LOCOS”, provides a means of defining a contact hole pattern at one stage of a process, then using the defined pattern at a later stage to open the contact holes. The fourth aspect provides a process sequence that incorporates all three fundamental aspects to fabricate an integrated liquid chromatography (LC)/electrospray ionization (ESI) device. The fifth aspect provides a process sequence that incorporates two of the fundamental aspects to fabricate an ESI device. The sixth aspect provides a process sequence that incorporates two of the fundamental aspects to fabricate an LC device. The process improvements described provide increased manufacturing yield and design latitude in comparison to previously disclosed methods of fabrication.
摘要翻译：公开了本发明的三个基本和三个派生方面。三个基本方面各自公开了可以整合到完整过程中的过程序列。第一方面，被指定为“潜屏蔽”，定义了在固定材料（例如氧化硅）中的掩模，该掩模在定义之后被保持为静止，而执行中间处理操作。然后将潜在氧化物图案用于掩模蚀刻。蚀刻（SMILE）“等级同时多个级别

2. 发明授权

US06780336B2 Methods of fabricating MEMS and microfluidic devices using latent masking technique 有权
标题翻译：使用潜屏蔽技术制造MEMS和微流体器件的方法
公开(公告)号：US06780336B2
公开(公告)日：2004-08-24
申请号：US10004463
申请日：2001-11-02
申请人： James E. Moon , Timothy J. Davis , Gregory J. Galvin , Kevin A. Shaw , Paul C. Waldrop , Sharlene A. Wilson
发明人： James E. Moon , Timothy J. Davis , Gregory J. Galvin , Kevin A. Shaw , Paul C. Waldrop , Sharlene A. Wilson
IPC分类号： B81C100
CPC分类号： B05B5/00 , H01J49/0018 , H01J49/167 , Y10S438/942
摘要： Three fundamental and three derived aspects of the present invention are disclosed. The three fundamental aspects each disclose a process sequence that may be integrated in a full process. The first aspect, designated as “latent masking”, defines a mask in a persistent material like silicon oxide that is held abeyant after definition while intervening processing operations are performed. The latent oxide pattern is then used to mask an etch. The second aspect, designated as “simultaneous multi-level etching (SMILE)”, provides a process sequence wherein a first pattern may be given an advanced start relative to a second pattern in etching into an underlying material, such that the first pattern may be etched deeper, shallower, or to the same depth as the second pattern. The third aspect, designated as “delayed LOCOS”, provides a means of defining a contact hole pattern at one stage of a process, then using the defined pattern at a later stage to open the contact holes. The fourth aspect provides a process sequence that incorporates all three fundamental aspects to fabricate an integrated liquid chromatography (LC)/electrospray ionization (ESI) device. The fifth aspect provides a process sequence that incorporates two of the fundamental aspects to fabricate an ESI device. The sixth aspect provides a process sequence that incorporates two of the fundamental aspects to fabricate an LC device. The process improvements described provide increased manufacturing yield and design latitude in comparison to previously disclosed methods of fabrication.
摘要翻译：公开了本发明的三个基本和三个派生方面。三个基本方面各自公开了可以整合到完整过程中的过程序列。第一方面，被指定为“潜屏蔽”，定义了在固定材料（例如氧化硅）中的掩模，该掩模在定义之后被保持为静止，而执行中间处理操作。然后将潜在氧化物图案用于掩模蚀刻。指定为“同时多级蚀刻（SMILE）”的第二方面提供了一种处理顺序，其中在蚀刻到下面的材料中第一图案可相对于第二图案被赋予高级开始，使得第一图案可以是蚀刻成更深，更浅或与第二图案相同的深度。指定为“延迟LOCOS”的第三方面提供了在过程的一个阶段定义接触孔图案的方法，然后在稍后阶段使用限定的图案来打开接触孔。第四方面提供了一个整合三个基本方面来制造液相色谱（LC）/电喷雾离子化（ESI）装置的方法。第五方面提供了一种结合两个基本方面来制造ESI装置的过程序列。第六方面提供了一种结合两个基本方面来制造LC器件的过程序列。与先前公开的制造方法相比，所描述的工艺改进提供了增加的制造产量和设计自由度。

3. 发明授权

US06706200B2 Method for fabricating ESI device using smile and delayed LOCOS techniques 有权
标题翻译：使用微笑和延迟LOCOS技术制造ESI器件的方法
公开(公告)号：US06706200B2
公开(公告)日：2004-03-16
申请号：US10004300
申请日：2001-11-02
申请人： James E. Moon , Timothy J. Davis , Gregory J. Galvin , Kevin A. Shaw , Paul C. Waldrop , Sharlene A. Wilson
发明人： James E. Moon , Timothy J. Davis , Gregory J. Galvin , Kevin A. Shaw , Paul C. Waldrop , Sharlene A. Wilson
IPC分类号： B81B702
CPC分类号： B05B5/00 , H01J49/0018 , H01J49/167 , Y10S438/942
摘要： Three fundamental and three derived aspects of the present invention are disclosed. The three fundamental aspects each disclose a process sequence that may be integrated in a full process. The first aspect, designated as “latent masking”, defines a mask in a persistent material like silicon oxide that is held abeyant after definition while intervening processing operations are performed. The latent oxide pattern is then used to mask an etch. The second aspect, designated as “simultaneous multi-level etching (SMILE)”, provides a process sequence wherein a first pattern may be given an advanced start relative to a second pattern in etching into an underlying material, such that the first pattern may be etched deeper, shallower, or to the same depth as the second pattern. The third aspect, designated as “delayed LOCOS”, provides a means of defining a contact hole pattern at one stage of a process, then using the defined pattern at a later stage to open the contact holes. The fourth aspect provides a process sequence that incorporates all three fundamental aspects to fabricate an integrated liquid chromatography (LC)/electrospray ionization (ESI) device. The fifth aspect provides a process sequence that incorporates two of the fundamental aspects to fabricate an ESI device. The sixth aspect provides a process sequence that incorporates two of the fundamental aspects to fabricate an LC device. The process improvements described provide increased manufacturing yield and design latitude in comparison to previously disclosed methods of fabrication.
摘要翻译：公开了本发明的三个基本和三个派生方面。三个基本方面各自公开了可以整合到完整过程中的过程序列。第一方面，被指定为“潜屏蔽”，定义了在固定材料（例如氧化硅）中的掩模，该掩模在定义之后被保持为静止，而执行中间处理操作。然后将潜在氧化物图案用于掩模蚀刻。指定为“同时多级蚀刻（SMILE）”的第二方面提供了一种处理顺序，其中在蚀刻到下面的材料中第一图案可相对于第二图案被赋予高级开始，使得第一图案可以是蚀刻成更深，更浅或与第二图案相同的深度。指定为“延迟LOCOS”的第三方面提供了在过程的一个阶段定义接触孔图案的方法，然后在稍后阶段使用限定的图案来打开接触孔。第四方面提供了一个整合三个基本方面来制造液相色谱（LC）/电喷雾离子化（ESI）装置的方法。第五方面提供了一种结合两个基本方面来制造ESI装置的过程序列。第六方面提供了一种结合两个基本方面来制造LC器件的过程序列。与先前公开的制造方法相比，所描述的工艺改进提供了增加的制造产量和设计自由度。

4. 发明授权

US06702950B2 Method for fabricating LC device using latent masking and delayed LOCOS techniques 有权
标题翻译：使用潜屏蔽和延迟LOCOS技术制造LC器件的方法
公开(公告)号：US06702950B2
公开(公告)日：2004-03-09
申请号：US10004299
申请日：2001-11-02
申请人： James E. Moon , Timothy J. Davis , Gregory J. Galvin , Kevin A. Shaw , Paul C. Waldrop , Sharlene A. Wilson
发明人： James E. Moon , Timothy J. Davis , Gregory J. Galvin , Kevin A. Shaw , Paul C. Waldrop , Sharlene A. Wilson
IPC分类号： B81C100
CPC分类号： B05B5/00 , H01J49/0018 , H01J49/167 , Y10S438/942
摘要： Three fundamental and three derived aspects of the present invention are disclosed. The three fundamental aspects each disclose a process sequence that may be integrated in a full process. The first aspect, designated as “latent masking”, defines a mask in a persistent material like silicon oxide that is held abeyant after definition while intervening processing operations are performed. The latent oxide pattern is then used to mask an etch. The second aspect, designated as “simultaneous multi-level etching (SMILE)”, provides a process sequence wherein a first pattern may be given an advanced start relative to a second pattern in etching into an underlying material, such that the first pattern may be etched deeper, shallower, or to the same depth as the second pattern. The third aspect, designated as “delayed LOCOS”, provides a means of defining a contact hole pattern at one stage of a process, then using the defined pattern at a later stage to open the contact holes. The fourth aspect provides a process sequence that incorporates all three fundamental aspects to fabricate an integrated liquid chromatography (LC)/electrospray ionization (ESI) device. The fifth aspect provides a process sequence that incorporates two of the fundamental aspects to fabricate an ESI device. The sixth aspect provides a process sequence that incorporates two of the fundamental aspects to fabricate an LC device. The process improvements described provide increased manufacturing yield and design latitude in comparison to previously disclosed methods of fabrication.
摘要翻译：公开了本发明的三个基本和三个派生方面。三个基本方面各自公开了可以整合到完整过程中的过程序列。第一方面，被指定为“潜屏蔽”，定义了在固定材料（例如氧化硅）中的掩模，该掩模在定义之后被保持为静止，而执行中间处理操作。然后将潜在氧化物图案用于掩模蚀刻。指定为“同时多级蚀刻（SMILE）”的第二方面提供了一种处理顺序，其中在蚀刻到下面的材料中第一图案可相对于第二图案被赋予高级开始，使得第一图案可以是蚀刻成更深，更浅或与第二图案相同的深度。指定为“延迟LOCOS”的第三方面提供了在过程的一个阶段定义接触孔图案的方法，然后在稍后阶段使用限定的图案来打开接触孔。第四方面提供了一个整合三个基本方面来制造液相色谱（LC）/电喷雾离子化（ESI）装置的方法。第五方面提供了一种结合两个基本方面来制造ESI装置的过程序列。第六方面提供了一种结合两个基本方面来制造LC器件的过程序列。与先前公开的制造方法相比，所描述的工艺改进提供了增加的制造产量和设计自由度。

5. 发明授权

US06464892B2 Methods of fabricating microelectromechanical and microfluidic devices 有权
公开(公告)号：US06464892B2
公开(公告)日：2002-10-15
申请号：US10003672
申请日：2001-11-02
申请人： James E. Moon , Timothy J. Davis , Gregory J. Galvin , Kevin A. Shaw , Paul C. Waldrop , Sharlene A. Wilson
发明人： James E. Moon , Timothy J. Davis , Gregory J. Galvin , Kevin A. Shaw , Paul C. Waldrop , Sharlene A. Wilson
IPC分类号： H01L2100
CPC分类号： B05B5/00 , H01J49/0018 , H01J49/167 , Y10S438/942
摘要： Three fundamental and three derived aspects of the present invention are disclosed. The three fundamental aspects each disclose a process sequence that may be integrated in a full process. The first aspect, designated as “latent masking”, defines a mask in a persistent material like silicon oxide that is held abeyant after definition while intervening processing operations are performed. The latent oxide pattern is then used to mask an etch. The second aspect, designated as “simultaneous multi-level etching (SMILE)”, provides a process sequence wherein a first pattern may be given an advanced start relative to a second pattern in etching into an underlying material, such that the first pattern may be etched deeper, shallower, or to the same depth as the second pattern. The third aspect, designated as “delayed LOCOS”, provides a means of defining a contact hole pattern at one stage of a process, then using the defined pattern at a later stage to open the contact holes. The fourth aspect provides a process sequence that incorporates all three fundamental aspects to fabricate an integrated liquid chromatography (LC)/electrospray ionization (ESI) device. The fifth aspect provides a process sequence that incorporates two of the fundamental aspects to fabricate an ESI device. The sixth aspect provides a process sequence that incorporates two of the fundamental aspects to fabricate an LC device. The process improvements described provide increased manufacturing yield and design latitude in comparison to previously disclosed methods of fabrication.

6. 发明授权

US06858842B2 Electrospray nozzle and monolithic substrate 有权
标题翻译：电喷雾喷嘴和整体式基板
公开(公告)号：US06858842B2
公开(公告)日：2005-02-22
申请号：US10814207
申请日：2004-03-31
申请人： James E. Moon , Timothy J. Davis , Gregory J. Galvin , Gary A. Schultz , Thomas N. Corso , Stephen Lowes
发明人： James E. Moon , Timothy J. Davis , Gregory J. Galvin , Gary A. Schultz , Thomas N. Corso , Stephen Lowes
IPC分类号： G01N27/62 , B01D15/08 , G01N30/60 , G01N30/72 , G01N37/00 , H01J49/04 , B01D59/44 , H01J49/10
CPC分类号： G01N30/6095 , G01N30/7266 , G01N2030/6013 , H01J49/0018 , H01J49/167 , Y10T436/24 , Y10T436/2575
摘要： An electrospray nozzle system is disclosed. The electrospray portion of the device comprises a substrate defining a channel between an entrance orifice on an injection surface and an exit orifice on an ejection surface, a nozzle defined by a portion recessed from the ejection surface surrounding the exit orifice, and an electrode for application of an electric potential to the substrate to optimize and generate an electrospray; and, optionally, additional electrode(s) to further modify the electrospray. The nozzle system may be utilized alone or as part of a liquid chromatography system.
摘要翻译：公开了一种电喷雾喷嘴系统。该装置的电喷雾部分包括限定喷射表面上的入口孔和喷射表面上的出口之间的通道的基底，由从出射孔周围的喷射表面凹陷的部分限定的喷嘴和用于应用的电极对基板进行电势优化并产生电喷雾; 和可选的附加电极以进一步改变电喷雾。喷嘴系统可以单独使用或作为液相色谱系统的一部分使用。

7. 发明授权

US06800202B2 Integrated monolithic microfabricated electrospray and liquid chromatography system and method 有权
标题翻译：集成的单片微电解电喷雾和液相色谱系统及方法
公开(公告)号：US06800202B2
公开(公告)日：2004-10-05
申请号：US09745629
申请日：2000-12-21
申请人： James E. Moon , Timothy J. Davis , Gregory J. Galvin , Gary A. Schultz , Thomas N. Corso , Stephen Lowes
发明人： James E. Moon , Timothy J. Davis , Gregory J. Galvin , Gary A. Schultz , Thomas N. Corso , Stephen Lowes
IPC分类号： B01D1508
CPC分类号： G01N30/7266 , G01N30/6095 , H01J49/0018 , H01J49/167 , Y10T29/49002 , Y10T436/25375 , Y10T436/255
摘要： An electrospray device, a liquid chromatography device and an electrosprayliquid chromatography system are disclosed. The electrospray device comprises a substrate defining a channel between an entrance orifice on an injection surface and an exit orifice on an ejection surface, a nozzle defined by a portion recessed from the ejection surface surrounding the exit orifice, and an electrode for application of an electric potential to the substrate to optimize and generate an electrospray; and, optionally, additional electrode(s) to further modify the electrospray. The liquid chromatography device comprises a separation substrate defining an introduction channel between an entrance orifice and a reservoir and a separation channel between the reservoir and an exit orifice, the separation channel being populated with separation posts perpendicular to the fluid flow; a cover substrate bonded to the separation substrate to enclose the reservoir and the separation channel adjacent the cover substrate; and, optionally, electrode(s) for application of a electric potential to the fluid. The exit orifice of the liquid chromatography device may be homogeneously interfaced with the entrance orifice of the electrospray device to form an integrated single system. An array of multiple systems may be fabricated in a single monolithic chip for rapid sequential fluid processing and generation of electrospray for subsequent analysis, such as by positioning the exit orifices of the electrospray devices near the sampling orifice of a mass spectrometer.
摘要翻译：公开了电喷雾装置，液相色谱装置和电喷雾液相色谱系统。电喷雾装置包括：基材，其限定在喷射表面上的入口孔与喷射表面上的出口孔之间的通道;由从出射孔周围的喷射表面凹陷的部分限定的喷嘴;以及用于施加电对基板进行优化和产生电喷雾的潜力; 和可选的附加电极以进一步改变电喷雾。所述液相色谱装置包括分隔衬底，所述分离衬底限定入口孔和贮存器之间的引入通道以及所述储存器和出口孔之间的分离通道，所述分离通道具有垂直于所述流体流动的分离柱; 覆盖基板，其结合到分离基板以封闭储存器和与盖基板相邻的分离通道; 和可选地用于向流体施加电势的电极。液相色谱装置的出口可以与电喷雾装置的入口孔均匀地接合，以形成一个集成的单一系统。多个系统的阵列可以制造在单个单片芯片中，用于快速顺序流体处理和产生用于后续分析的电喷雾，例如通过将电喷雾装置的出口孔定位在质谱仪的采样孔附近。

8. 发明授权

US06790354B1 Integrated monolithic microfabricated electrospray and liquid chromatography system and method 有权
标题翻译：集成的单片微电解电喷雾和液相色谱系统及方法
公开(公告)号：US06790354B1
公开(公告)日：2004-09-14
申请号：US09698329
申请日：2000-10-27
申请人： James E. Moon , Timothy J. Davis , Gregory J. Galvin , Gary A. Schultz , Thomas N. Corso , Stephen Lowes
发明人： James E. Moon , Timothy J. Davis , Gregory J. Galvin , Gary A. Schultz , Thomas N. Corso , Stephen Lowes
IPC分类号： B01D1508
CPC分类号： G01N30/6095 , G01N30/7266 , G01N2030/6013 , H01J49/0018 , H01J49/167 , Y10T436/24 , Y10T436/2575
摘要： An electrospray device, a liquid chromatography device and an electrospray-liquid chromatography system are disclosed. The electrospray device comprises a substrate defining a channel between an entrance orifice on an injection surface and an exit orifice on an ejection surface, a nozzle defined by a portion recessed from the ejection surface surrounding the exit orifice, and an electrode for application of an electric potential to the substrate to optimize and generate an electrospray; and, optionally, additional electrode(s) to further modify the electrospray. The liquid chromatography device comprises a separation substrate defining an introduction channel between an entrance orifice and a reservoir and a separation channel between the reservoir and an exit orifice, the separation channel being populated with separation posts perpendicular to the fluid flow; a cover substrate bonded to the separation substrate to enclose the reservoir and the separation channel adjacent the cover substrate; and, optionally, electrode(s) for application of a electric potential to the fluid. The exit orifice of the liquid chromatography device may be homogeneously interfaced with the entrance orifice of the electrospray device to form an integrated single system. An array of multiple systems may be fabricated in a single monolithic chip for rapid sequential fluid processing and generation of electrospray for subsequent analysis, such as by positioning the exit orifices of the electrospray devices near the sampling orifice of a mass spectrometer.
摘要翻译：公开了电喷雾装置，液相色谱装置和电喷雾 - 液相色谱系统。电喷雾装置包括：基材，其限定在喷射表面上的入口孔与喷射表面上的出口孔之间的通道;由从出射孔周围的喷射表面凹陷的部分限定的喷嘴;以及用于施加电对基板进行优化和产生电喷雾的潜力; 和可选的附加电极以进一步改变电喷雾。所述液相色谱装置包括分隔衬底，所述分离衬底限定入口孔和贮存器之间的引入通道以及所述储存器和出口孔之间的分离通道，所述分离通道具有垂直于所述流体流动的分离柱; 覆盖基板，其结合到分离基板以封闭储存器和与盖基板相邻的分离通道; 和可选地用于向流体施加电势的电极。液相色谱装置的出口可以与电喷雾装置的入口孔均匀地接合，以形成一个集成的单一系统。多个系统的阵列可以制造在单个单片芯片中，用于快速顺序流体处理和产生用于后续分析的电喷雾，例如通过将电喷雾装置的出口孔定位在质谱仪的采样孔附近。

9. 发明授权

US06780313B1 Integrated monolithic microfabricated electrospray and liquid chromatography system and method 有权
公开(公告)号：US06780313B1
公开(公告)日：2004-08-24
申请号：US09702955
申请日：2000-10-31
申请人： James E. Moon , Timothy J. Davis , Gregory J. Galvin , Gary A. Schultz , Thomas N. Corso , Stephen Lowes
发明人： James E. Moon , Timothy J. Davis , Gregory J. Galvin , Gary A. Schultz , Thomas N. Corso , Stephen Lowes
IPC分类号： B01D1508
CPC分类号： G01N30/6095 , G01N30/7266 , G01N2030/6013 , H01J49/0018 , H01J49/167 , Y10T436/24 , Y10T436/2575
摘要： An electrospray device, a liquid chromatography device and an electrospray-liquid chromatography system are disclosed. The electrospray device comprises a substrate defining a channel between an entrance orifice on an injection surface and an exit orifice on an ejection surface, a nozzle defined by a portion recessed from the ejection surface surrounding the exit orifice, and an electrode for application of an electric potential to the substrate to optimize and generate an electrospray; and, optionally, additional electrode(s) to further modify the electrospray. The liquid chromatography device comprises a separation substrate defining an introduction channel between an entrance orifice and a reservoir and a separation channel between the reservoir and an exit orifice, the separation channel being populated with separation posts perpendicular to the fluid flow; a cover substrate bonded to the separation substrate to enclose the reservoir and the separation channel adjacent the cover substrate; and, optionally, electrode(s) for application of a electric potential to the fluid. The exit orifice of the liquid chromatography device may be homogeneously interfaced with the entrance orifice of the electrospray device to form an integrated single system. An array of multiple systems may be fabricated in a single monolithic chip for rapid sequential fluid processing and generation of electrospray for subsequent analysis, such as by positioning the exit orifices of the electrospray devices near the sampling orifice of a mass spectrometer.

10. 发明授权

US06432311B1 Integrated monolithic microfabricated electrospray and liquid chromatography system and method 有权
公开(公告)号：US06432311B1
公开(公告)日：2002-08-13
申请号：US09745779
申请日：2000-12-21
申请人： James E. Moon , Timothy J. Davis , Gregory J. Galvin
发明人： James E. Moon , Timothy J. Davis , Gregory J. Galvin
IPC分类号： H01J4910
摘要： An electrospray device, a liquid chromatography device and an electrosprayliquid chromatography system are disclosed. The electrospray device comprises a substrate defining a channel between an entrance orifice on an injection surface and an exit orifice on an ejection surface, a nozzle defined by a portion recessed from the ejection surface surrounding the exit orifice, and an electrode for application of an electric potential to the substrate to optimize and generate an electrospray; and, optionally, additional electrode(s) to further modify the electrospray. The liquid chromatography device comprises a separation substrate defining an introduction channel between an entrance orifice and a reservoir and a separation channel between the reservoir and an exit orifice, the separation channel being populated with separation posts perpendicular to the fluid flow; a cover substrate bonded to the separation substrate to enclose the reservoir and the separation channel adjacent the cover substrate; and, optionally, electrode(s) for application of a electric potential to the fluid. The exit orifice of the liquid chromatography device may be homogeneously interfaced with the entrance orifice of the electrospray device to form an integrated single system. An array of multiple systems may -be fabricated in a single monolithic chip for rapid sequential fluid processing and generation of electrospray for subsequent analysis, such as by positioning the exit orifices of the electrospray devices near the sampling orifice of a mass spectrometer.

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