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11. 发明授权

US5984501A Super-precision positioning system 失效
标题翻译：超精密定位系统
公开(公告)号：US5984501A
公开(公告)日：1999-11-16
申请号：US823213
申请日：1997-03-24
申请人： Katsura Tomotaki , Shinichi Nomura , Heung Chul Shin
发明人： Katsura Tomotaki , Shinichi Nomura , Heung Chul Shin
IPC分类号： B23Q5/28 , B23Q16/00 , G05D3/00 , H01L21/68 , H01L41/09
CPC分类号： H02N2/021 , H02N2/06
摘要： A positioning system comprises a feeding mechanism having three or more feeding units disposed in a moving direction of a moving body. Each of the feeding units has first and second moving elements for clamping and unclamping the moving body, feeding the moving body in the moving direction from an initial position to a target position, and returning the moving body to the initial position. A memory device stores preselected phase and amplitude values of the first and second moving elements. A calculating device calculates phase and amplitude command values for the first and second moving elements based on the phase and amplitude values stored in the memory device. An output device outputs driving command values to the first and second moving elements based on the calculation result of the calculating device. A control device controls the feeding units to clamp the moving body by all of the feeding units after the moving body has been moved to the target position.
摘要翻译：定位系统包括具有沿移动体的移动方向设置的三个或更多个进给单元的进给机构。每个馈送单元具有用于夹紧和松开移动体的第一和第二移动元件，将移动体沿着移动方向从初始位置馈送到目标位置，并将移动体返回到初始位置。存储器件存储第一和第二移动元件的预选相位和振幅值。计算装置基于存储在存储装置中的相位和幅度值来计算第一和第二移动元件的相位和幅度指令值。输出装置基于计算装置的计算结果向第一和第二移动元件输出驱动指令值。在移动体移动到目标位置之后，控制装置控制进给单元将所有进给单元夹紧移动体。

12. 发明授权

US5760510A Magnetic bearing device 失效
标题翻译：磁轴承装置
公开(公告)号：US5760510A
公开(公告)日：1998-06-02
申请号：US500539
申请日：1995-07-11
申请人： Shinichi Nomura , Toshiharu Kogure
发明人： Shinichi Nomura , Toshiharu Kogure
IPC分类号： F16C32/04 , F16C39/06 , H02K7/09
CPC分类号： F16C32/0455
摘要： A magnetic bearing device comprises a rotor, electromagnets, radial direction displacement sensors, and a control circuit for controlling an exciting current of the electromagnets in accordance with a signal from the radial direction displacement sensors to magnetically levitate the rotor. The control circuit comprises a position detecting circuit, a calculator, a PID operating part, a phase inverter and power amplifiers. A CPU analyzes the displacement of the rotor at the time of rotation on the basis of a sensor signal issued from the position detecting circuit to supply a correction signal obtained as a result of analysis to the calculator. A magnetic force is thus generated which offsets the oscillation of the rotor for each of the frequency components and is supplied to the electromagnets. The magnetic bearing device is capable of inhibiting displacement components of the rotor other than a first order component in the rotation frequency of the rotor.
摘要翻译：磁性轴承装置包括转子，电磁体，径向位移传感器和用于根据来自径向位移传感器的信号控制电磁体的励磁电流的磁控浮动磁控浮动的控制电路。控制电路包括位置检测电路，计算器，PID操作部分，相位逆变器和功率放大器。 CPU根据从位置检测电路发出的传感器信号分析旋转时的转子的位移，以向计算器提供作为分析结果而获得的校正信号。因此产生磁力，其抵消每个频率分量的转子的振荡，并将其提供给电磁体。磁性轴承装置能够抑制转子的位移分量，而不是转子旋转频率中的一阶分量。

13. 发明申请

US20130324352A1 CARRIER 有权
标题翻译：承运人
公开(公告)号：US20130324352A1
公开(公告)日：2013-12-05
申请号：US13985460
申请日：2012-02-28
申请人： Shinichi Nomura , Takaaki Kawashima , Hirotaka Shiratori , Masabumi Nishigaya
发明人： Shinichi Nomura , Takaaki Kawashima , Hirotaka Shiratori , Masabumi Nishigaya
IPC分类号： F16H57/08
CPC分类号： F16H57/082 , F16H57/0025
摘要： A carrier is implemented which is capable of reducing the number of parts and the number of bonding steps. The carrier includes a pair of holding members that hold from both sides in an axial direction L a pinion shaft supporting a pinion gear. A first holding member as one of the pair of holding members includes a coupling portion extending in the axial direction L toward a second holding member as the other holding member. The second holding member is a disc-like member, and has an external outer peripheral gear integrally formed in its outer peripheral portion. The coupling portion is bonded to a coupling bonding portion provided on a radially inner side R1 of the outer peripheral gear in the second holding member.
摘要翻译：实现能够减少部件数量和结合步骤数量的载体。载体包括一对保持构件，其从轴向方向L的两侧保持支撑小齿轮的小齿轮轴。作为一对保持构件中的一个的第一保持构件包括沿着轴向方向L朝向作为另一保持构件的第二保持构件延伸的联接部。第二保持构件是盘状构件，并且其外周部一体地形成有外周外周齿轮。联接部分接合到设置在第二保持构件中的外周齿轮的径向内侧R1上的联接接合部分。

14. 发明申请

US20110121767A1 MOTOR DRIVER CIRCUIT AND VACUUM PUMP HAVING THE MOTOR DRIVER CIRCUIT 有权
标题翻译：具有电机驱动电路的电机驱动电路和真空泵
公开(公告)号：US20110121767A1
公开(公告)日：2011-05-26
申请号：US12737089
申请日：2009-06-01
申请人： Shinichi Nomura , Ulrich Schroder
发明人： Shinichi Nomura , Ulrich Schroder
IPC分类号： H02P3/14
CPC分类号： H02P3/18 , F04B49/06 , F04D19/042 , F04D25/0606 , F04D27/00 , H02P27/08
摘要： Provided are a compact and low-cost motor driver circuit capable of achieving an appropriate brake time and restraining heat generated by a regenerative resistance within a specific temperature range without employing a regenerative resistance having a greater capacity, a heat sink, or a FAN generating a larger volume of air, and a vacuum pump having the motor driver circuit.Regenerative current is controlled so that a speed characteristic gradually approaches inclination “a” from inclination “b” depending on the motor speed in the initial stage of regeneration. In addition, a limit is set not to pass further current when the regenerative current reaches a maximum brake current value Iset—brake—max. As stated above, when the motor is braked, control is performed so that the initial brake current value at the maximum rated speed is set low and the brake current is increased as the rotational speed decelerates.
摘要翻译：提供了一种紧凑且低成本的电动机驱动电路，其能够实现适当的制动时间并且在特定温度范围内抑制由再生电阻产生的热而不使用具有较大容量的再生电阻，散热器或FAN产生较大体积的空气，以及具有马达驱动电路的真空泵。控制再生电流使得速度特性根据在再生的初始阶段中的电动机速度从倾斜度“b”逐渐接近倾斜度“a”。此外，当再生电流达到最大制动电流值Iset-brake-max时，限制设定为不通过进一步的电流。如上所述，当马达被制动时，执行控制，使得最大额定转速下的初始制动电流值被设定为低，并且制动电流随着转速减速而增加。

15. 发明授权

US07679238B2 Driving apparatus for hybrid vehicle 有权
标题翻译：混合动力汽车的驱动装置
公开(公告)号：US07679238B2
公开(公告)日：2010-03-16
申请号：US10590974
申请日：2005-04-27
申请人： Shinichi Nomura , Yasuo Yamaguchi , Takeshi Inuzuka
发明人： Shinichi Nomura , Yasuo Yamaguchi , Takeshi Inuzuka
IPC分类号： H02K7/10
CPC分类号： B60K6/365 , B60K1/02 , B60K6/387 , B60K6/405 , B60K6/48 , B60L11/14 , F16D25/0638 , Y02T10/6221 , Y02T10/70 , Y02T10/7077
摘要： A driving apparatus includes a transmission mechanism portion; a motor housed in a motor housing located at an engine side of the transmission mechanism portion; and a clutch interposed between an engine output shaft and an input shaft of the transmission mechanism portion, wherein: a secondary side of the clutch, which is connected to the input shaft, is configured by a cover; a rotor of the motor is integrally connected to the cover, which is the secondary side of the clutch; a stator of the motor is fixed to the motor housing; a front hub positioned at the engine side of the cover is rotatably supported at a front wall member of the motor housing; and a rear hub positioned at the transmission mechanism portion side of the cover is rotatably supported at a rear wall member of the motor housing.
摘要翻译：驱动装置包括传动机构部分; 容纳在位于所述变速机构部的发动机侧的马达壳体中的马达; 以及插入在所述变速机构部的发动机输出轴与输入轴之间的离合器，其中：与所述输入轴连接的所述离合器的二次侧由盖构成; 马达的转子与作为离合器的次级侧的盖一体连接; 电动机的定子固定在电动机壳体上; 位于盖的发动机侧的前轮毂可旋转地支撑在电动机壳体的前壁构件上; 并且位于盖的变速机构部分侧的后轮毂被可旋转地支撑在电动机壳体的后壁构件上。

16. 发明申请

US20070108857A1 Driving apparatus for hybrid vehicle 有权
标题翻译：混合动力汽车的驱动装置
公开(公告)号：US20070108857A1
公开(公告)日：2007-05-17
申请号：US10590974
申请日：2005-04-27
申请人： Shinichi Nomura , Yasuo Yamaguchi , Takeshi Inuzuka
发明人： Shinichi Nomura , Yasuo Yamaguchi , Takeshi Inuzuka
IPC分类号： H02K7/10
CPC分类号： B60K6/365 , B60K1/02 , B60K6/387 , B60K6/405 , B60K6/48 , B60L11/14 , F16D25/0638 , Y02T10/6221 , Y02T10/70 , Y02T10/7077
摘要： A driving apparatus includes a transmission mechanism portion; a motor housed in a motor housing located at an engine side of the transmission mechanism portion; and a clutch interposed between an engine output shaft and an input shaft of the transmission mechanism portion, wherein: a secondary side of the clutch, which is connected to the input shaft, is configured by a cover; a rotor of the motor is integrally connected to the cover, which is the secondary side of the clutch; a stator of the motor is fixed to the motor housing; a front hub positioned at the engine side of the cover is rotatably supported at a front wall member of the motor housing; and a rear hub positioned at the transmission mechanism portion side of the cover is rotatably supported at a rear wall member of the motor housing.
摘要翻译：驱动装置包括传动机构部分; 容纳在位于所述变速机构部的发动机侧的马达壳体中的马达; 以及插入在所述变速机构部的发动机输出轴与输入轴之间的离合器，其中：与所述输入轴连接的所述离合器的二次侧由盖构成; 马达的转子与作为离合器的次级侧的盖一体连接; 电动机的定子固定在电动机壳体上; 位于盖的发动机侧的前轮毂可旋转地支撑在电动机壳体的前壁构件上; 并且位于盖的变速机构部分侧的后轮毂被可旋转地支撑在电动机壳体的后壁构件上。

17. 发明申请

US20060090849A1 Substrate processing apparatus 审中-公开
标题翻译：基板加工装置
公开(公告)号：US20060090849A1
公开(公告)日：2006-05-04
申请号：US11293257
申请日：2005-12-05
申请人： Kazuyuki Toyoda , Atsuhiko Suda , Issei Makiguchi , Tsutomu Tanaka , Sadayuki Suzuki , Shinichi Nomura , Mitsunori Takeshita
发明人： Kazuyuki Toyoda , Atsuhiko Suda , Issei Makiguchi , Tsutomu Tanaka , Sadayuki Suzuki , Shinichi Nomura , Mitsunori Takeshita
IPC分类号： C23F1/00
CPC分类号： H01L21/67178 , C23C16/54 , H01L21/67766 , H01L21/67781
摘要： A substrate processing apparatus comprises a substrate transfer section, a plurality of modules and a first substrate transfer robot provided in the substrate transfer section and capable of transferring substrates to the plurality of modules. The plurality of modules are piled up, separately from one another, in a vertical direction. Each of the plurality of modules are detachably mounted to the substrate transfer section and includes a substrate processing chamber, an intermediate chamber, a first gate valve disposed between the substrate processing chamber and the intermediate chamber, a second gate valve disposed between the intermediate chamber and the substrate transfer section, and a second substrate transfer robot disposed in the intermediate chamber. Preferably, the substrate processing chamber further comprises a second intermediate chamber having a substrate holder therein and disposed between the intermediate chamber and the substrate transfer section, and a third gate valve disposed between the second intermediate chamber and the substrate transfer section.
摘要翻译：基板处理装置包括基板转印部，多个模块和设置在基板转印部中并能够将基板传送到多个模块的第一基板传送机械手。多个模块在垂直方向彼此分开堆叠。多个模块中的每一个可拆卸地安装到基板传送部分，并且包括基板处理室，中间室，设置在基板处理室和中间室之间的第一闸阀，设置在中间室和第二闸阀之间的第二闸阀基板传送部分和设置在中间室中的第二基板传送机器人。优选地，衬底处理室还包括第二中间室，其中具有衬底保持器，并设置在中间室和衬底转移部之间，以及设置在第二中间室和衬底转移部之间的第三闸阀。

18. 发明授权

US5454921A Electrolytic combined processing machine 失效
标题翻译：电解组合加工机
公开(公告)号：US5454921A
公开(公告)日：1995-10-03
申请号：US121233
申请日：1993-09-14
申请人： Toshiharu Kogure , Katsura Tomotaki , Shinichi Nomura
发明人： Toshiharu Kogure , Katsura Tomotaki , Shinichi Nomura
IPC分类号： B23H5/06 , B23H7/30 , B24B7/22 , B24B37/005 , B24B49/04 , B24B7/00 , C25F7/00
CPC分类号： B24B37/005 , B23H5/06 , B24B49/04 , B24B7/22 , B23H7/30
摘要： An electrolytic combined processing machine includes a grinding wheel spaced apart from and facing a workpiece, a current switching circuit for switching a coarse grinding to a fine grinding of the workpiece by the grinding wheel, and an infeed switching circuit for switching the infeed speed of an infeed table which allows the grinding wheel to relatively approach the workpiece. The switching operation is based on a measurement result obtained from a size measuring unit which measures a processing amount of the workpiece. During fine grinding, the infeed speed of the grinding wheel is the same as the speed of a passivation coating film generated on the workpiece. Workpieces, particularly of brittle materials, can be processed in a state of less processing distortion with improved surface roughness, flatness and efficiency.
摘要翻译：一种电解组合处理机包括与工件间隔开并面对工件的砂轮，用于通过砂轮将粗磨削切换到工件精磨的电流切换电路，以及用于切换工件的进给速度的进给开关电路进给台允许砂轮相对接近工件。切换操作基于从测量工件的处理量的尺寸测量单元获得的测量结果。在细磨时，砂轮的进刀速度与在工件上产生的钝化涂膜的速度相同。特别是脆性材料的工件可以在较少的加工变形的状态下进行加工，具有改善的表面粗糙度，平整度和效率。

19. 发明授权

US5256965A Quality inspecting method and apparatus for detecting defects in magnetic disks by dividing a plurality of concentric tracks into numbered sectors 失效
标题翻译：用于通过将多个同心轨道分成编号扇区来检测磁盘中的缺陷的质量检查方法和装置
公开(公告)号：US5256965A
公开(公告)日：1993-10-26
申请号：US731744
申请日：1991-07-16
申请人： Shinichi Nomura
发明人： Shinichi Nomura
IPC分类号： G11B5/09 , G01R33/12 , G11B5/012 , G11B5/84 , G11B19/12 , G11B20/18 , G11B33/10 , G01N27/82
CPC分类号： G11B33/10 , G01R33/1207 , G11B20/1816 , G11B19/12 , G11B5/012 , Y10S5/904
摘要： A magnetic disk inspection apparatus for recording and reproducing inspection signals onto and from each track on a magnetic disk, in which the inspection signals are recorded and reproduced automatically without a manual operation onto and from the magnetic disk, the maximum value is detected from the reproduction signals on the basis of the sampling signal, the average value of the maximum values is calculated for each sector, the difference between the average values in the same sector number of the adjacent tracks is determined, the change ratio based on this difference is calculated and quality of the magnetic disk is judged on the basis of this change ratio.
摘要翻译：一种磁盘检查装置，用于在磁盘上从每个磁道上记录和再现检查信号，其中检查信号在没有手动操作到磁盘的情况下自动记录和再现，从再现中检测最大值基于采样信号的信号，对于每个扇区计算最大值的平均值，确定相邻轨道的相同扇区号中的平均值之间的差，计算基于该差的变化率，基于该变化率来判断磁盘的质量。

20. 发明授权

US5132252A Method for fabricating semiconductor devices that prevents pattern contamination 失效
标题翻译：用于制造防止图案污染的半导体器件的方法
公开(公告)号：US5132252A
公开(公告)日：1992-07-21
申请号：US343456
申请日：1989-04-25
申请人： Hidehiko Shiraiwa , Hisatsugu Shirai , Nobuhiro Takahashi , Shinichi Nomura
发明人： Hidehiko Shiraiwa , Hisatsugu Shirai , Nobuhiro Takahashi , Shinichi Nomura
IPC分类号： H01L21/68 , H01L21/027 , H01L21/30 , H01L23/544
CPC分类号： H01L23/544 , H01L2223/54453 , H01L2223/5446 , H01L2924/0002 , Y10S148/028
摘要： A method for preventing contamination caused by residues of etched off patterns etched by photolithographic etching. A considerable amount of small contamination spots on a semiconductor chip are found to be caused by tiny residues of etched off patterns. These residues are formed primarily around the periphery of device areas and mark patterns when their outsides are etched off. The occurence of such residues of etching is increased by anisotropic etching. These residues are dislodged by succeeding steps of the pattern making process, and disperse over the substrate causing small contamination spots. To avoid the detrimental effects of the etching residues, the edges of the mark patterns and device areas are covered with an edge cover which is formed in a step to following the pattern etching process.

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