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    • 12. 发明授权
    • Substrate processing apparatus
    • 基板加工装置
    • US07958898B2
    • 2011-06-14
    • US11864081
    • 2007-09-28
    • Takeshi Yoshida
    • Takeshi Yoshida
    • B08B3/08
    • H01L21/67051H01L21/67017Y10S134/902
    • An substrate processing apparatus includes a substrate holding unit, a process liquid supplying unit, a first guide portion provided around the substrate holding unit for guiding the process liquid scattered from the substrate, a second guide portion provided outside the first guide portion for guiding the process liquid scattered from the substrate, a third guide portion provided outside the second guide portion for guiding the process liquid scattered from the substrate, a first recovery channel provided outside the first guide portion integrally with the first guide portion for recovering the process liquid guided by the second guide portion, a second recovery channel provided outside the first recovery channel integrally with the first guide portion for recovering the process liquid guided by the third guide portion, and a driving mechanism for independently moving up and down the first, second, and third guide portions.
    • 一种基板处理装置,包括基板保持单元,处理液供给单元,设置在基板保持单元周围的用于引导从基板散射的处理液的第一引导部,设置在第一引导部外侧的第二引导部, 从基板散射的液体,设置在第二引导部分外侧的第三引导部分,用于引导从基板散射的处理液体;第一回收通道,与第一引导部分整体设置在第一引导部分的外侧,用于回收由 第二引导部分,与第一引导部分整体设置在第一恢复通道外部的用于回收由第三引导部分引导的处理液体的第二恢复通道,以及用于独立地上下移动第一,第二和第三引导件的驱动机构 部分。
    • 16. 发明授权
    • Liquid ejecting apparatus and transport method
    • 液体喷射装置和输送方法
    • US07758139B2
    • 2010-07-20
    • US12286238
    • 2008-09-29
    • Masahiko YoshidaMichiaki TokunagaTakeshi YoshidaTatsuya Nakano
    • Masahiko YoshidaMichiaki TokunagaTakeshi YoshidaTatsuya Nakano
    • B41J25/308
    • B41J13/0027B41J29/38B41J29/393
    • A liquid ejecting apparatus has a head, a transport mechanism, a memory, and a controller. The head ejects a liquid. The transport mechanism transports a medium in a transport direction with respect to the head in accordance with a target transport amount that is targeted. The memory stores a plurality of correction values, each of the correction values being associated with a relative position between the head and the medium, a range of the relative position to which that correction value is to be applied being associated with that correction value. In the case where a transport using the target transport amount is performed beyond the range of the relative position associated with the correction value that is associated with the relative position before the transport, the controller corrects the target transport amount based on the correction value associated with the relative position before the transport and the correction value associated with the relative position after the transport.
    • 液体喷射装置具有头,输送机构,存储器和控制器。 头部喷出液体。 输送机构根据目标的目标输送量,相对于头部沿运送方向输送介质。 存储器存储多个校正值,每个校正值与头部和介质之间的相对位置相关联,将要与该校正值相关联的该校正值的相对位置的范围。 在使用目标传送量的传输超出与与传送之前的相对位置相关联的校正值相关联的相对位置的范围之外的情况下,控制器基于与相关位置相关联的校正值来校正目标传送量 运输前的相对位置和运输后的相对位置相关的校正值。
    • 20. 发明申请
    • Feedback amplifier circuit operable at low voltage by utilizing switched operational amplifier and chopper modulator
    • 反馈放大器电路通过利用开关运算放大器和斩波调制器在低电压下工作
    • US20080106330A1
    • 2008-05-08
    • US11896899
    • 2007-09-06
    • Takeshi YoshidaYoshihiro MasuiAtsushi IwataKunihiko Gotoh
    • Takeshi YoshidaYoshihiro MasuiAtsushi IwataKunihiko Gotoh
    • H03F3/38
    • H03F3/387H03F3/45475H03F3/45977H03F2200/261H03F2203/45136H03F2203/45212
    • In a feedback amplifier circuit, a first switching device executes an auto-zero operation by inputting a signal outputted from an amplifier to an input terminal of the amplifier during an auto-zero operation interval prior to an amplification interval. A first capacitor accumulates and holds an offset voltage at the output terminal of the amplifier during the auto-zero operation interval, and cancels an offset voltage at the input terminal of the amplifier by an accumulated and held offset voltage during an amplification interval subsequent to the auto-zero operation interval. A second switching device grounds the feedback point of the feedback circuit during the auto-zero operation interval. A second capacitor blocks a DC voltage, and accumulates and holds an offset voltage at an output terminal of the amplifier, and cancels an offset voltage at an input terminal of the amplifier by the accumulated and held offset voltage during an amplification interval.
    • 在反馈放大器电路中,第一开关器件在放大间隔之前的自动归零操作间隔期间,通过将从放大器输出的信号输入到放大器的输入端子来执行自动归零操作。 第一电容器在自动归零操作间隔期间在放大器的输出端积累并保持偏移电压,并且在放大器的输出端之后的放大间隔期间通过累积和保持的偏移电压来消除放大器的输入端的偏移电压 自动归零运行间隔。 第二开关装置在自动归零操作间隔期间将反馈电路的反馈点接地。 第二电容器阻塞DC电压,并且在放大器的输出端累积并保持偏移电压,并且在放大间隔期间通过累积和保持的偏移电压来消除放大器输入端的偏移电压。