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    • 13. 发明申请
    • Variable capacitor and manufacturing method thereof
    • 可变电容器及其制造方法
    • US20070025050A1
    • 2007-02-01
    • US11504677
    • 2006-08-16
    • Takeaki ShimanouchiMasahiko ImaiTadashi Nakatani
    • Takeaki ShimanouchiMasahiko ImaiTadashi Nakatani
    • H01G5/00H01G7/00
    • H01G5/16H01G5/011H01G5/015
    • A lower movable electrode 35, having line sections 35a, 35a on both ends and a capacitor section 35b in the center, and an upper movable electrode 37, having line sections 37a, 37a on both ends and a capacitor section 37b in the center, are placed so that the capacitor sections 35b, 37b face each other, and drive electrodes of lower-movable-electrode actuators 27a, 27b, 27c, 27d driving the lower movable electrode 35 and upper-movable-electrode actuators 29a, 29b, 29c, 29d driving the upper movable electrode 37 are electrically separated from the lower movable electrode 35 and upper movable electrode 37. These actuators 27a to 27d and/or 29a to 29d move the lower movable electrode 35 and/or upper movable electrode 37 to adjust the distance between both capacitor sections 35b, 37b, and control the electrostatic capacity.
    • 在两端具有线路部分35a,35a和中心的电容器部分35b的下部可动电极35以及两端线路部分37a,37a和电容器部分37的上部可动电极37 b放置成使得电容器部分35b,37b彼此面对,并且驱动下部可动电极35和上部的可动电极致动器27a,27b,27c,27d的驱动电极 驱动上可动电极37的可动电极致动器29a,29b,29c,29d与下可动电极35和上可动电极37电气分离。 这些致动器27a至27d和/或29a至29d移动下部可动电极35和/或上部可动电极37,以调节两个电容器部分35b,37b之间的距离,并控制静电电容。
    • 15. 发明申请
    • Variable capacitor and method of making the same
    • 可变电容器及其制作方法
    • US20100246088A1
    • 2010-09-30
    • US12662177
    • 2010-04-05
    • Takeaki ShimanouchiMasahiko ImaiSatoshi Ueda
    • Takeaki ShimanouchiMasahiko ImaiSatoshi Ueda
    • H01G7/06B05D5/12
    • H01G5/18H01G5/38
    • A capacitor manufacturing method provides variable capacitors whose capacitances remain stable under the influence of temperature change. Such a variable capacitor includes a fixed electrode, a movable electrode film facing the fixed electrode, and an anchor portion that provides partial connection between the fixed electrode and the movable electrode film. For making this variable capacitor, a first electrode is formed to serve as the fixed electrode. Then, an anchor portion is formed on the fixed electrode, and a sacrifice film is formed to cover the fixed electrode but partially expose the anchor portion. A second electrode is formed on the sacrifice film to serve as the movable electrode film, bonded to the anchor portion. Finally, the sacrifice film is removed.
    • 电容器制造方法提供了可变电容器,其电容在温度变化的影响下保持稳定。 这种可变电容器包括固定电极,与固定电极相对的可动电极膜,以及在固定电极和可动电极膜之间提供部分连接的锚固部分。 为了制造该可变电容器,形成第一电极用作固定电极。 然后,在固定电极上形成锚定部,并且形成牺牲膜以覆盖固定电极,但是部分地露出锚定部。 在牺牲膜上形成第二电极,作为可动电极膜,结合到锚定部。 最后,牺牲片被去除。