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    • 13. 发明授权
    • Surface acoustic wave resonator with an interdigital transducer divided into regions having a different fixed pitch
    • 具有叉指换能器的表面声波谐振器被分成具有不同固定间距的区域
    • US06946932B2
    • 2005-09-20
    • US10679480
    • 2003-10-07
    • Michiaki TakagiYoshio MaedaTakashi YamazakiKeigo Iizawa
    • Michiaki TakagiYoshio MaedaTakashi YamazakiKeigo Iizawa
    • H01L41/09H01L41/18H03H9/02H03H9/145H03H9/25H03H9/64
    • H03H9/25H03H9/02551H03H9/14582
    • In a substrate in which a reflection coefficient γ of a surface acoustic wave per electrode is small, the invention obtains a Q value or a CI value level, which is equivalent to or higher than that of a related art product, at a device size which is equivalent to the related art product which addresses the problem that the size of a surface acoustic wave resonator becomes larger. A surface acoustic wave resonator includes one interdigital transducer to excite a surface acoustic wave in a propagation direction x on a piezoelectric plate and a pair of reflectors arranged on both sides thereof in the propagation direction. The interdigital transducer is divided into three regions. The electrode fingers of the interdigital transducer of each region are formed at a fixed pitch which differs within 2%. The surface acoustic wave resonator possesses a single peak response. The form in which a vibration displacement envelope amplitude in the interdigital transducer region is normalized is a form which takes a maximum value 1 at the center position, which smoothly takes a value in a range of 0.33 to 0.53 at a position ¼ from both ends, and which smoothly takes a value in a range of 0.048 to 0.177 at positions at both ends.
    • 在每个电极的表面声波的反射系数γ小的基板中,本发明以如下装置尺寸获得与现有技术产品相同或更高的Q值或CI值电平 相当于解决声表面波谐振器的尺寸变大的问题的现有技术的产品。 表面声波谐振器包括一个叉指式换能器,以在压电板上的传播方向x上激发表面声波,并且在传播方向的两侧布置一对反射器。 叉指换能器分为三个区域。 每个区域的叉指换能器的电极指以固定的间距形成,其在2%内不同。 表面声波谐振器具有单峰响应。 叉指换能器区域中的振动位移包络振幅被归一化的形式是在中心位置处取最大值1的形式,在两端的位置¼平滑地取0.33〜0.53的范围内的值, 并且在两端的位置平滑地获得0.048〜0.177的范围的值。
    • 15. 发明授权
    • Surface acoustic wave device and communications apparatus using the same
    • 声表面波装置及使用其的通信装置
    • US06856218B2
    • 2005-02-15
    • US10329445
    • 2002-12-27
    • Takashi YamazakiKeigo IizawaShigeo Kanna
    • Takashi YamazakiKeigo IizawaShigeo Kanna
    • H03H9/02H03H9/25H03H9/64
    • H03H9/25H03H9/02543
    • The invention provides an in-plane rotational ST-cut SAW resonator that is formed of an in-plane rotational ST-cut crystal plate having Eulerian angles of (0°, 113° to 135°, and ±(40° to 49°)). The in-plane rotational ST-cut SAW resonator can include an interdigital transducer (IDT) electrode for exciting a Rayleigh wave on the main surface. The ratio Lt/Pt of the electrode width Lt and the interelectrode pitch Pt of the IDT electrode is 0.5 or more and 0.65 or less. Accordingly, a reduction in the fluctuation in resonance frequency relative to the variations in an IDT electrode of a surface acoustic wave device by using the in-plane rotated ST-cut crystal plate around the Z′-axis can be achieved.
    • 本发明提供一种面内旋转ST切割SAW谐振器,其由具有(0°,113°至135°和±(40°至49°))的欧拉角的平面内旋转ST切割晶体板形成, )。 平面内旋转ST切割SAW谐振器可以包括用于激励主表面上的瑞利波的叉指式换能器(IDT)电极。 电极宽度Lt的比率Lt / Pt和IDT电极的电极间间距Pt为0.5以上且0.65以下。 因此,通过使用围绕Z'轴的平面内旋转的ST切割晶体板,可以实现相对于声表面波器件的IDT电极的变化的共振频率的波动的减小。