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    • 11. 发明授权
    • Superconducting magnet abnormality detection and protection apparatus
    • 超导磁体异常检测和保护装置
    • US5502613A
    • 1996-03-26
    • US87417
    • 1993-07-08
    • Toshio SaitohTeruhiro TakizawaNaoki MakiTakashi KobayashiMasayuki ShibataKen YoshiokaTadasi SonobeFumio Suzuki
    • Toshio SaitohTeruhiro TakizawaNaoki MakiTakashi KobayashiMasayuki ShibataKen YoshiokaTadasi SonobeFumio Suzuki
    • B60L13/04B61B13/08H01F6/02H02H7/00
    • H02H7/001B60L13/04B60L2200/26
    • A superconducting magnet abnormality detection and protection apparatus is for early and surely detecting abnormality in superconducting coils mounted on a vehicle and protecting the superconducting coils. Magnetic flux detecting devices are mounted inside an outer vessel, which is a vacuum container of a superconducting magnet, so as to be opposite to the superconducting coil. Voltages induced in the magnetic flux detecting devices are detected. Voltage signals are led to a decision device. By monitoring the change of the voltage signals with time in a comparing judgment device, it is determined whether there is an abnormality. If there is an abnormality, an alarm indicator informs of an abnormal state, and a protection device takes protection measures such as interruption of the current of the superconducting magnet. Owing to such configuration, heat does not penetrate from the outside into the superconducting coil via instrumentation lead wires of the magnetic flux detecting devices. Magnitudes of vibration and displacement of the superconducting coil can be detected without contacting the superconducting coil. By always monitoring these signals, it becomes possible to early detect an abnormality in the superconducting coil and protect it.
    • 超导磁体异常检测和保护装置用于早期且可靠地检测安装在车辆上的超导线圈的异常并保护超导线圈。 磁通检测装置安装在作为超导磁体的真空容器的外部容器内,以与超导线圈相对。 检测在磁通检测装置中感应的电压。 电压信号被引导到决策设备。 通过在比较判断装置中监视电压信号随时间的变化,确定是否存在异常。 如果发生异常,报警指示灯会发出异常状态,保护装置会采取保护措施,例如中断超导磁体的电流。 由于这样的结构,热量不会通过磁通检测装置的检测引线从外部渗入超导线圈。 可以在不接触超导线圈的情况下检测超导线圈的振动和位移大小。 通过始终监视这些信号,可以及早检测超导线圈中的异常并进行保护。
    • 12. 发明授权
    • Superconducting energy storage device
    • 超导储能装置
    • US4920095A
    • 1990-04-24
    • US223640
    • 1988-07-25
    • Yukio IshigakiTadasi Sonobe
    • Yukio IshigakiTadasi Sonobe
    • H01F6/00H02J15/00
    • H01F6/00H02J15/00Y02E40/67Y10S336/01Y10S505/88
    • A superconducting energy storage device for storing electric power in superconducting magnets in the form of magnetic energy. The superconducting magnets are include a superconducting toroidal magnet and a superconducting solenoid magnet arranged to be inscribed in the inside of the superconducting toroidal magnet, the magnets being connected electrically in series to each other. Further, the superconducting magnets include a plurality of units, each of which is formed as a combination of the aforementioned toroidal and solenoid superconducting magnets, the units being piled up in the axial direction of the superconducting solenoid magnet. In the thus arranged device, electromagnetic force generated in the superconducting magnets can be supported without the necessity of firm bed rock, thereby eliminating the limitation in conditions of location of the energy storage device. Further, the plurality of energy storage units can be arranged effectively so that space can be saved.
    • 一种超导能量存储装置,用于以磁能的形式存储超导磁体中的电力。 超导磁体包括超导环形磁体和布置成内接在超导环形磁体内部的超导螺线管磁体,磁体彼此串联电连接。 此外,超导磁体包括多个单元,每个单元形成为上述环形和螺线管超导磁体的组合,该单元沿着超导螺线管磁体的轴向方向堆积。 在这样布置的装置中,可以支撑在超导磁体中产生的电磁力,而不需要牢固的床垫,从而消除了储能装置的位置限制。 此外,可以有效地布置多个能量存储单元,从而可以节省空间。
    • 17. 发明授权
    • Microwave-excited plasma processing apparatus
    • 微波激发等离子体处理装置
    • US5162633A
    • 1992-11-10
    • US372716
    • 1989-06-27
    • Tadasi SonobeKazuo SuzukiTakuya FukudaMichio Ohue
    • Tadasi SonobeKazuo SuzukiTakuya FukudaMichio Ohue
    • C23C14/34C23C16/511C23F4/00H01J37/32H01L21/205H01L21/302H01L21/3065H01L21/31H05B6/80
    • H01J37/32678H01J37/32192H01J37/32238H01J37/32697H05B6/80
    • The present invention relates to a plasma treatment apparatus for making plasma surface processing of a specimen such as thin-film formation, etching, sputtering or plasma oxidation by use of plasma produced through microwave discharge. In a specimen chamber provided with a specimen table for holding at least one specimen thereon, a microwave is introduced from a direction intersecting a magnetic line of force so as to propagate in the longitudinal direction of an ECR region or in a direction along the plane of the ECR region. Since the microwave is introduced from the transverse direction of the specimen chamber, the provision of a microwave introducing window at an upper portion of the specimen chamber is not required and hence a counter electrode for applying an electric field to the specimen can be disposed at the upper portion of the specimen chamber, thereby making it possible to apply a uniform electric field to the specimen so that the specimen is subjected to a uniform treatment.
    • 本发明涉及一种等离子体处理装置,其用于通过使用通过微波放电产生的等离子体来进行诸如薄膜形成,蚀刻,溅射或等离子体氧化等试样的等离子体表面处理。 在设置有用于保持至少一个样本的样本台的样本室中,从与磁力线相交的方向引入微波,以沿ECR区域的纵向方向或沿着ECR区域的平面的方向传播微波 ECR地区。 由于微波从试样室的横向导入,因此不需要在试样室的上部设置微波导入窗,因此可以在试样室的上部设置用于向试样施加电场的对电极 从而能够对试样施加均匀的电场,使样品经受均匀的处理。