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    • 11. 发明授权
    • Optical system for detecting surface defect and surface defect tester using the same
    • 用于检测表面缺陷的光学系统和使用其的表面缺陷测试仪
    • US06509966B2
    • 2003-01-21
    • US09907713
    • 2001-07-19
    • Takayuki Ishiguro
    • Takayuki Ishiguro
    • G01N2100
    • G01N21/89
    • A defect detection optical system includes a light receiving system including n light receiving elements arranged in a direction perpendicular to a main scan direction, for focusing an image thereon such that the image becomes in the arranging direction of the light receiving elements, in which, when a width of the image focused thereon in the main scan direction is equal to or smaller than the width of the light receiving elements, light reflected from a recessed or protruded defect is swung in the width direction of the light receiving elements and a light receiving area of the light receiving elements is reduced. When the reflection light from the recessed or protruded defect is; swung in sloped portions of the defect, an amount of light received by the light receiving elements is at least reduced, so that two detection signals having levels lower than those when there is no defect are obtained.
    • 缺陷检测光学系统包括:光接收系统,包括沿与主扫描方向垂直的方向布置的n个光接收元件,用于在其上聚焦图像,使得图像变为沿着光接收元件的排列方向,其中,当 在主扫描方向上聚焦在其上的图像的宽度等于或小于光接收元件的宽度,从凹陷或突出缺陷反射的光在光接收元件的宽度方向上摆动,并且光接收面积 的光接收元件。 当凹陷或突出缺陷的反射光是; 在缺陷的倾斜部分摆动,由光接收元件接收的光量至少减小,从而获得具有低于没有缺陷时的水平的两个检测信号。
    • 12. 发明授权
    • Eccentricity tester for head turnout zone of magnetic disk and testing
method thereof
    • 磁盘磁头投射区偏心测试仪及其测试方法
    • US5877857A
    • 1999-03-02
    • US926011
    • 1997-09-09
    • Osamu IshiwataTakayuki IshiguroKeiji Katoh
    • Osamu IshiwataTakayuki IshiguroKeiji Katoh
    • G01B11/24G11B5/54G11B5/55G11B5/82G11B5/84G11B19/04G11B21/10G11B33/10G01B9/02
    • G01B11/2408G11B19/04G11B21/106G11B5/54G11B5/82G11B5/84G11B33/10G11B5/5534
    • The tester and the test method for testing an eccentricity of a head turnout zone of a magnetic disk determine a turnout zone as acceptable or unacceptable by spirally scanning a turnout zone of a magnetic disk with a laser spot by rotating the magnetic disk and continuously moving either the laser spot radially of the magnetic disk or the magnetic disk radially thereof, obtaining a detection signal having amplitude corresponding to an intensity of a scattering light from the magnetic disk irradiated with the laser spot, extracting a first waveform of the detection signal corresponding to an intermediate region between an inside variation region in which an inside boarder line of the turnout zone radially of the magnetic disk by radial movement of the turnout zone caused by an ecentricity of the turnout zone and an outside variation region in which an outside boarder line of the turnout zone radially of the magnetic disk by the radial movement of the turnout zone caused by the eccentricity of the magnetic disk and a second waveform of either the detection signal adjacent to the first waveform and corresponding to the inside variation region or the detection signal adjacent to the first waveform and corresponding to the outside variation region and detecting an eccntricity of the turnout zone on a basis of a positional relation between the first and second waveforms.
    • 用于测试磁盘的磁头转向区域的偏心度的测试器和测试方法通过旋转磁盘来确定通过用激光点螺旋地扫描具有激光光斑的磁盘的投射区域来接受或不可接受的投射区域,并连续移动 磁盘的径向放射状的激光光斑或磁盘的径向地获得具有与激光光点照射的磁盘的散射光的强度对应的振幅的检测信号,提取与该激光光斑对应的检测信号的第一波形 内侧变化区域,其内部变化区域,其中通过轨道出口区域的偏心引起的道岔区域的径向移动,其中径向位于磁盘的迂回区域的内边缘线之间的内侧变化区域和外部变化区域, 由于由偏心引起的岔口区的径向移动,磁盘的径向出射区域 并且对应于与第一波形相邻的内部变化区域或与第一波形相邻的检测信号并且对应于外部变化区域的检测信号的第二波形和检测信号的检测信号的第二波形,并且检测输出区域的响应度 基于第一和第二波形之间的位置关系。
    • 14. 发明授权
    • Radio communication method, radio base station and radio terminal
    • 无线电通信方式,无线基站和无线终端
    • US07039406B2
    • 2006-05-02
    • US10643966
    • 2003-08-20
    • Takayuki IshiguroHiroyuki Ishii
    • Takayuki IshiguroHiroyuki Ishii
    • H04Q7/20
    • H04L1/0021H04L1/0001H04L1/1803H04L1/1812H04L2001/0096H04W24/00H04W36/00H04W88/08
    • In radio communication, the throughput reduction of a whole radio communication system caused by discarding retransmission data at the time of handover is prevented. The system includes a radio terminal for conducting data transmission and reception with a radio base station by executing one or more processes, a process executer in the radio base station for executing processes depending upon a number of processes executed in the radio terminal, and transmitting/receiving data to/from the radio terminal, a handover monitor in the radio base station for monitoring for the occurrence of handover or for the possibility of occurrence of handover in the radio terminal, and a process number controller in the radio base station for controlling the number of processes executed by the process executer according to a result of monitoring conducted by the handover monitor.
    • 在无线通信中,防止在切换时丢弃重发数据导致的整体无线通信系统的吞吐量降低。 该系统包括用于通过执行一个或多个处理与无线电基站进行数据发送和接收的无线电终端,所述无线电基站中的过程执行器用于根据在无线终端中执行的处理的数量执行处理,以及发送/ 向无线电终端接收数据,在无线电基站中用于监视切换的发生或无线电终端中发生切换的可能性的无线电基站中的切换监视器,以及用于控制无线终端中的处理号码控制器 由处理执行器根据切换监视器进行的监视的结果执行的处理的数量。
    • 16. 发明授权
    • Surface defect test method and surface defect tester
    • 表面缺陷测试方法和表面缺陷测试仪
    • US5898491A
    • 1999-04-27
    • US49015
    • 1998-03-27
    • Takayuki IshiguroIzuo HoraiKazuya Tsukada
    • Takayuki IshiguroIzuo HoraiKazuya Tsukada
    • G01N21/93G01N21/95H01L21/66H01L23/544G01N21/88
    • H01L22/34G01N21/93G01N21/9501H01L22/12
    • The surface defect test method and tester according to the invention comprises a sensitivity calibration disk formed with n (n is an integer equal to or larger than 2) false defect rows each including 3 or more false defects each formed in a radial or peripheral direction provided in the peripheral direction of the calibration disk at a predetermined angle pitch. The false defects of each false defect row take in the form of protrusions or recesses having substantially the same size, adjacent ones of the false defects are physically separated by a predetermined distance larger than a width of a laser spot and the false defects of a certain one of the false defect rows are different in size from the false defects of other false defect rows, regulating the detection sensitivity according to a result of the test, producing, from a result of a test of the calibration disk with the regulated detection sensitivity, data relating a level of a detection signal to a size of the false defect as a reference data for determination of the size and obtaining the size of the defect from the level of the detection signal when the disk to be tested on defect on the basis of the reference data for determination of the size.
    • 根据本发明的表面缺陷测试方法和测试仪包括形成有n(n是等于或大于2的整数)的灵敏度校准盘,每个包含3个或更多个假的缺陷行,每个虚假缺陷各自形成在径向或周向上提供 在校准盘的圆周方向上以预定的角度间距。 每个假缺陷行的假缺陷采取具有基本相同尺寸的突起或凹槽的形式,相邻的假缺陷在物理上分开大于激光斑的宽度的预定距离,并且一定的假缺陷 假缺陷行中的一个与其他错误缺陷行的假缺陷大小不同,根据测试结果调节检测灵敏度,从具有调节检测灵敏度的校准盘的测试结果, 将检测信号的电平与虚假缺陷的大小相关联的数据作为参考数据,用于确定尺寸并根据检测信号的电平获得缺陷的大小,当基于 用于确定尺寸的参考数据。
    • 17. 发明授权
    • Sensitivity calibration disk for surface defect tester
    • 表面缺陷测试仪的灵敏度校准盘
    • US5875027A
    • 1999-02-23
    • US048993
    • 1998-03-27
    • Takayuki IshiguroIzuo HoraiKazuya Tsukada
    • Takayuki IshiguroIzuo HoraiKazuya Tsukada
    • G01N21/88G11B5/84G01J1/02
    • G11B5/84G01N21/88
    • A calibration disk for calibrating a sensitivity of a surface defect tester, according to the present invention, comprises n (n is an integer equal to or larger than 2) false defect rows each including 3 or more false defects each formed in a radial or peripheral direction provided in the peripheral direction of the calibration disk at a predetermined angle pitch. The false defects of each false defect row take in the form of protrusions or recesses having substantially the same size, adjacent ones of the false defects are physically separated by a predetermined distance larger than a width of a laser spot and the false defects of a certain one of the false defect rows are different in size from the false defects of other false defect rows.
    • 根据本发明的用于校准表面缺陷测试器的灵敏度的校准盘包括n(n是等于或大于2的整数)的假缺陷行,每个包括3个或更多个在径向或周边形成的假缺陷 方向以预定的角度间距设置在校准盘的圆周方向上。 每个假缺陷行的假缺陷采取具有基本相同尺寸的突起或凹槽的形式,相邻的假缺陷在物理上分开大于激光斑的宽度的预定距离,并且一定的假缺陷 其中一个虚假缺陷行的大小与其他虚假缺陷行的虚假缺陷不同。
    • 18. 发明授权
    • Method and apparatus for inspecting a surface of a substrate
    • 用于检查基板表面的方法和装置
    • US08547545B2
    • 2013-10-01
    • US13210418
    • 2011-08-16
    • Hideaki SasazawaTakayuki IshiguroKiyotaka HorieYu Yanaka
    • Hideaki SasazawaTakayuki IshiguroKiyotaka HorieYu Yanaka
    • G01N21/88G01N21/55G01N21/47
    • G01N21/8851G01N21/95G01N2021/4711G01N2021/556G01N2021/8854G01N2021/8874
    • The present invention provides a method and apparatus for inspecting a surface of a substrate. The apparatus includes: a rotatable stage on which a substrate to be inspected is placed; an inspection optical system having an illumination light source for emitting light to a substrate placed on the stage and a detector for detecting light from the substrate which is irradiated with the light from the illumination light source; an A/D converter for amplifying and A/D converting signals output from the detector in the inspection optical system; and a defect detector for detecting defects in a surface of the substrate by processing signals output from the detector and converted by the A/D converter and classifying the defected defects. The defect detector extracts micro defects in the surface of the substrate by processing the signals output from the detector, and detects linear defects existing discretely in a linear region.
    • 本发明提供一种用于检查基板表面的方法和装置。 该装置包括:可旋转台,放置待检查的基板; 具有用于向放置在载物台上的基板发光的照明光源的检查光学系统和用于检测来自基板的光的检测器,所述检测光照射来自照明光源的光; A / D转换器,用于放大和A / D转换检测光学系统中的检测器输出的信号; 以及缺陷检测器,用于通过处理从检测器输出并由A / D转换器转换并对缺陷缺陷进行分类的信号来检测基板的表面中的缺陷。 缺陷检测器通过处理从检测器输出的信号来提取衬底表面的微缺陷,并检测线性区域中离散存在的线性缺陷。
    • 19. 发明授权
    • Radio communication system, radio terminal, base station, control equipment and communication method
    • 无线电通信系统,无线电终端,基站,控制设备和通信方式
    • US07539173B2
    • 2009-05-26
    • US10443776
    • 2003-05-23
    • Takayuki IshiguroHiroyuki Ishii
    • Takayuki IshiguroHiroyuki Ishii
    • H04B7/212H04J3/00
    • H04W72/02H04W36/18H04W36/30H04W88/12
    • A radio communication system comprises a radio terminal and a plurality of base stations. The base stations communicate with the radio terminal by connecting radio links with mutually different frequencies. The base stations comprise a control signal transmitter configured to transmit control signals in a plurality of control signal time slots included in one frame. The radio terminal comprises a reception time slot determining unit configured to determine reception time slots for receiving the control signals transmitted from the plurality of base stations, from among the plurality of control signal time slots, a control signal receiver configured to receive the control signals in the reception time slots determined by the reception time slot determining unit, and a communication signal transmitter configured to transmit communication signal to the base station in an uplink communication signal time slot other than the control signal time slots.
    • 无线电通信系统包括无线电终端和多个基站。 基站通过连接具有相互不同频率的无线电链路与无线电终端进行通信。 基站包括控制信号发射器,其被配置为在包括在一个帧中的多个控制信号时隙中发送控制信号。 无线终端包括:接收时隙确定单元,被配置为从多个控制信号时隙中确定用于接收从多个基站发送的控制信号的接收时隙,被配置为接收控制信号的控制信号接收器 由接收时隙确定单元确定的接收时隙,以及通信信号发送器,被配置为在控制信号时隙以外的上行链路通信信号时隙中向基站发送通信信号。