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    • 13. 发明申请
    • SELF-ASSEMBLY STRUCTURES USED FOR FABRICATING PATTERNED MAGNETIC MEDIA
    • 用于制作图形磁介质的自组装结构
    • US20110215070A1
    • 2011-09-08
    • US13108515
    • 2011-05-16
    • Thomas R. AlbrechtXiao Z. WuHenry Hung Yang
    • Thomas R. AlbrechtXiao Z. WuHenry Hung Yang
    • B29C33/42B05D5/12
    • G11B5/855B82Y10/00G11B5/743G11B5/82G11B5/865
    • Methods of defining servo patterns and data patterns for forming patterned magnetic media are described. For one method, a lithographic process is performed to define a servo pattern in servo regions on a substrate. The lithographic process also defines a first data pattern in data regions of the substrate. The first data pattern is then transferred to (i.e., etched into) the data regions. Self-assembly structures are then formed on the data pattern in the data regions to define a second data pattern. The servo pattern is then transferred to the servo regions and the second data pattern is transferred to the data regions. Thus, the servo pattern is defined through lithographic processes while the data pattern is defined by a combination of lithographic processes and self-assembly.
    • 描述了定义用于形成图案化磁性介质的伺服图案和数据图案的方法。 对于一种方法,执行光刻处理以在衬底上的伺服区域中定义伺服图案。 光刻工艺还定义了衬底的数据区域中的第一数据模式。 然后将第一数据模式转移到(即蚀刻)数据区。 然后在数据区域中的数据模式上形成自组装结构以定义第二数据模式。 然后将伺服模式传送到伺服区域,并将第二数据模式传送到数据区域。 因此,通过光刻工艺定义伺服图案,同时通过光刻工艺和自组装的组合来定义数据图案。
    • 14. 发明授权
    • Fabricating magnetic recording media on patterned seed layers
    • 在图案种子层上制造磁记录介质
    • US07776388B2
    • 2010-08-17
    • US11850165
    • 2007-09-05
    • Elizabeth DobiszDavid MarguliesOlav HellwigXiao Z. Wu
    • Elizabeth DobiszDavid MarguliesOlav HellwigXiao Z. Wu
    • B05D5/12C23F1/02
    • G11B5/82B82Y10/00G11B5/743G11B5/746G11B5/855
    • Patterned media and associated methods of fabrication are provided in which vertical magnetic grains are grown on a patterned seed layer. The patterned seed layer includes a matrix of islands of a first seed material. Each island of first seed material is separated from other islands by a region of second seed material. The first seed material is selected to initiate growth of magnetic material, and the second seed material is selected to initiate growth of non-magnetic material. Subsequently, magnetic material is grown on the first seed material and non-magnetic material is grown on the second seed material. Deposition may be simultaneously. The magnetic and non-magnetic materials form well-defined vertical columns over the first and second seed materials respectively. Thus, each island behaves as an isolated magnetic unit, which switches independently from its neighbor units, which are magnetically separated by the non-magnetic material.
    • 提供了图案化的介质和相关联的制造方法,其中在图案种子层上生长垂直磁性颗粒。 图案化种子层包括第一种子材料的岛的基质。 第一种子材料的每个岛通过第二种子材料的区域与其他岛屿分离。 选择第一种子材料以引发磁性材料的生长,并且选择第二种子材料以引发非磁性材料的生长。 随后,在第一种子材料上生长磁性材料,并且在第二种子材料上生长非磁性材料。 沉积可能同时进行。 磁性和非磁性材料分别在第一种子材料和第二种子材料上形成明确的垂直柱。 因此,每个岛作为孤立的磁性单元,其独立地从其相邻单元切换,其被非磁性材料磁分离。
    • 17. 发明申请
    • SELF-ASSEMBLY STRUCTURES USED FOR FABRICATING PATTERNED MAGNETIC MEDIA
    • 用于制作图形磁介质的自组装结构
    • US20090166321A1
    • 2009-07-02
    • US11964680
    • 2007-12-26
    • Thomas R. AlbrechtXiao Z. WuHenry Hung Yang
    • Thomas R. AlbrechtXiao Z. WuHenry Hung Yang
    • B44C1/22
    • G11B5/855B82Y10/00G11B5/743G11B5/82G11B5/865
    • Methods of defining servo patterns and data patterns for forming patterned magnetic media are described. For one method, a lithographic process is performed to define a servo pattern in servo regions on a substrate. The lithographic process also defines a first data pattern in data regions of the substrate. The first data pattern is then transferred to (i.e., etched into) the data regions. Self-assembly structures are then formed on the data pattern in the data regions to define a second data pattern. The servo pattern is then transferred to the servo regions and the second data pattern is transferred to the data regions. Thus, the servo pattern is defined through lithographic processes while the data pattern is defined by a combination of lithographic processes and self-assembly.
    • 描述了定义用于形成图案化磁性介质的伺服图案和数据图案的方法。 对于一种方法,执行光刻处理以在衬底上的伺服区域中定义伺服图案。 光刻工艺还定义了衬底的数据区域中的第一数据模式。 然后将第一数据模式转移到(即蚀刻)数据区。 然后在数据区域中的数据模式上形成自组装结构以定义第二数据模式。 然后将伺服模式传送到伺服区域,并将第二数据模式传送到数据区域。 因此,通过光刻工艺定义伺服图案,而数据图案由光刻工艺和自组装的组合来定义。