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11. 发明授权

US5298975A Combined scanning force microscope and optical metrology tool 失效
标题翻译：组合扫描力显微镜和光学计量工具
公开(公告)号：US5298975A
公开(公告)日：1994-03-29
申请号：US767300
申请日：1991-09-27
申请人： Henri A. Khoury , Calvin K. Chi , Joachim G. Clabes , Philip C. D. Hobbs , Laszlo Landstein , Martin P. O'Boyle , Hemantha K. Wickramasinghe , Sandra K. Wolterman
发明人： Henri A. Khoury , Calvin K. Chi , Joachim G. Clabes , Philip C. D. Hobbs , Laszlo Landstein , Martin P. O'Boyle , Hemantha K. Wickramasinghe , Sandra K. Wolterman
IPC分类号： G01B7/34 , G01B7/00 , G01B11/00 , G01B11/02 , G01B11/30 , G01B21/02 , G01B21/30 , G01M11/00 , G01N37/00 , G01Q20/02 , G01Q20/04 , G01Q30/02 , G01Q60/24 , G03F7/20 , G01B11/04
CPC分类号： G03F7/70633 , B82Y35/00 , G01B11/02 , G01Q20/02 , G01Q30/025 , Y10S977/87
摘要： An integrated scanning force microprobe and optical microscopy metrology system is disclosed, that measures the depth and width of a trench in a sample. The probe remains fixed while the sample is moved relative to the probe. The system detects the proximity of the probe to a sample and to the side walls of the trench, providing output signals indicating the vertical and transverse relationship of the probe to the sample. The system adjusts the relative position of the sample vertically and transversely as a function of the output signals. Variety of probes can be used with this system to detect the depth and width of the trench. The probe should have at least one protuberance extending down to sense the bottom of the trench. The tip of the probe can have Lateral protuberances that can extend in opposite directions (across the width of the trench) from the probe to detect the side walls of the trench. Forces on the protuberances are measured to determine the depth and the location of the side walls of the trench.
摘要翻译：公开了一种集成的扫描力微探针和光学显微术测量系统，其测量样品中的沟槽的深度和宽度。当样品相对于探针移动时，探针保持固定。系统检测探头与样品和沟槽侧壁的接近度，提供指示探针与样品的垂直和横向关系的输出信号。该系统根据输出信号垂直和横向地调整样本的相对位置。该系统可以使用各种探头来检测沟槽的深度和宽度。探针应具有向下延伸的至少一个突起以感测沟槽的底部。探针的尖端可以具有横向突起，其可以从探针沿相反方向（跨越沟槽的宽度）延伸以检测沟槽的侧壁。测量突起上的力以确定沟槽的侧壁的深度和位置。

12. 发明授权

US5294806A Optical submicron aerosol particle detector 失效
标题翻译：光学亚微米气溶胶颗粒检测器
公开(公告)号：US5294806A
公开(公告)日：1994-03-15
申请号：US17214
申请日：1993-02-12
申请人： John S. Batchelder , Donald M. DeCain , Philip C. D. Hobbs
发明人： John S. Batchelder , Donald M. DeCain , Philip C. D. Hobbs
IPC分类号： G01N15/10 , G01N15/02 , G01N15/14 , G01N21/21 , G01N21/47 , G01N21/94 , G01N15/06
CPC分类号： G01N15/0205 , G01N21/94 , G01N15/1434 , G01N2015/0238 , G01N2015/145
摘要： A particle detector that determines the presence of particles in an enclosed volume includes a laser that directs an optical beam to a beam splitter that produces first and second beams. An optical system directs the first beam into the enclosed volume. A detector is positioned adjacent the volume in order to receive back scattered optical energy arising from a particle in the volume encountering the first beam. The back scattered optical energy and the second beam are optically combined so as to overlap in a region and in the overlap region the back scattered optical energy and second beam are in the same state of focus, of the same polarization and are substantially parallel. A detector located at the overlap region produces an electrical signal indicative of the intensity of the back scattered light. A signal processor analyzes the electrical signal to determine the presence of the particle.
摘要翻译：确定封闭体积中颗粒的存在的粒子检测器包括将光束引导到产生第一和第二光束的分束器的激光器。光学系统将第一光束引导到封闭的体积中。检测器邻近体积定位，以便接收从遇到第一光束的体积中的颗粒产生的反向散射的光能。后散射光能和第二光束被光学组合以便在区域中重叠，并且在重叠区域中，后散射光能和第二光束处于相同偏振的相同聚焦状态并且基本平行。位于重叠区域的检测器产生指示背散射光强度的电信号。信号处理器分析电信号以确定颗粒的存在。

13. 发明授权

US06259712B1 Interferometer method for providing stability of a laser 有权
标题翻译：用于提供激光器稳定性的干涉仪方法
公开(公告)号：US06259712B1
公开(公告)日：2001-07-10
申请号：US09164881
申请日：1998-10-01
申请人： Donald Michael DeCain , Philip C. D. Hobbs , Keith Randal Pope
发明人： Donald Michael DeCain , Philip C. D. Hobbs , Keith Randal Pope
IPC分类号： H01S313
CPC分类号： H01S5/0687
摘要： An interferometric method for providing stability of a laser is enabled by way of utilization of a novel optical interferometric measurement apparatus. The method can enable locking of a laser to a cavity in a bandwidth limited only by propagation delays in the cavity and the tuning behavior of the laser.
摘要翻译：用于提供激光器稳定性的干涉测量方法通过利用新颖的光学干涉测量装置来实现。该方法可以使激光器在仅由腔内的传播延迟和激光器的调谐行为限制的带宽内锁定到空腔。

14. 发明授权

US5343290A Surface particle detection using heterodyne interferometer 失效
标题翻译：使用外差干涉仪进行表面粒子检测
公开(公告)号：US5343290A
公开(公告)日：1994-08-30
申请号：US897198
申请日：1992-06-11
申请人： John S. Batchelder , Donald M. DeCain , Philip C. D. Hobbs , Marc A. Taubenblatt
发明人： John S. Batchelder , Donald M. DeCain , Philip C. D. Hobbs , Marc A. Taubenblatt
IPC分类号： G01B9/02 , G01B11/30 , G01J9/04 , G01N21/47 , G01N21/88 , G01N21/93 , G01N21/94 , G01N21/95 , G01N21/956 , H01L21/66
CPC分类号： G01N21/94 , G01J9/04 , G01N2021/8822 , G01N21/47 , G01N21/9501
摘要： A heterodyne interferometer is combined with darkfield surface particle detection for improved surface particle detection sensitivity. The probe beam and the reference beam have different wavelengths. The reference beam may either be a real reference beam or a virtual reference beam. The probe beam may be incident at the surface at either a grazing angle or at an angle substantially normal to the surface. The real reference beam is incident at the surface at a grazing angle. The detection may either be conventional heterodyne detection or a combination of heterodyne and Lloyd's mirror detection.
摘要翻译：外差干涉仪与暗场表面颗粒检测相结合，提高表面颗粒检测灵敏度。探测光束和参考光束具有不同的波长。参考光束可以是真实参考光束或虚拟参考光束。探针光束可以以掠射角度或基本上垂直于表面的角度入射在表面处。实际参考光束以掠射角入射在表面。检测可以是常规外差检测或外差和劳合镜检测的组合。

15. 发明授权

US5220403A Apparatus and a method for high numerical aperture microscopic examination of materials 失效
标题翻译：高数值孔径显微镜检查材料的仪器和方法
公开(公告)号：US5220403A
公开(公告)日：1993-06-15
申请号：US954282
申请日：1992-09-30
申请人： John S. Batchelder , Philip C. D. Hobbs , Marc A. Taubenblatt
发明人： John S. Batchelder , Philip C. D. Hobbs , Marc A. Taubenblatt
IPC分类号： G01J3/42 , G01J3/44 , G01J9/02 , G01N21/35 , G01N21/95 , G02B3/00 , G02B21/00
CPC分类号： G01N21/9505 , G02B21/0016 , G02B3/00 , G01J2003/421 , G01J2009/0207 , G01J3/44 , G01N2021/1725 , G01N2021/1782 , G01N2021/8822 , G01N21/3563 , G01N21/359 , G01N2201/0638 , G01N2201/1087
摘要： Apparatus and a method for performing high resolution optical imaging in the near infrared of internal features of semiconductor wafers uses an optical device made from a material having a high index of refraction and held in very close proximity to the wafer. The optical device may either be a prism or a plano-convex lens. The plano-convex lens may be held in contact with the wafer or separated from the wafer via an air bearing or an optical coupling fluid to allow the sample to be navigated beneath the lens. The lens may be used in a number of optical instruments such as a bright field microscope, a Schlieren microscope, a dark field microscope, a Linnik interferometer, a Raman spectroscope and an absorption spectroscope.
摘要翻译：在半导体晶片的内部特征的近红外线中执行高分辨率光学成像的装置和方法使用由具有高折射率的材料制成的光学装置，并且保持非常靠近晶片。光学器件可以是棱镜或平凸透镜。平凸透镜可以保持与晶片接触或通过空气轴承或光耦合流体与晶片分离，以允许样品在透镜下面导航。透镜可以用于许多光学仪器，例如明视野显微镜，Schlieren显微镜，暗视野显微镜，Linnik干涉仪，拉曼光谱仪和吸收光谱仪。

16. 发明授权

US07853105B2 Coupling element alignment using waveguide fiducials 有权
标题翻译：使用波导基准的耦合元件对准
公开(公告)号：US07853105B2
公开(公告)日：2010-12-14
申请号：US12424833
申请日：2009-04-16
申请人： Russell A. Budd , Punit Chiniwalla , Philip C. D. Hobbs , Frank R. Libsch
发明人： Russell A. Budd , Punit Chiniwalla , Philip C. D. Hobbs , Frank R. Libsch
IPC分类号： G02B6/26 , G02B6/42 , G02B6/10
CPC分类号： G02B6/42 , G02B6/30 , G02B6/3885 , G02B6/4214 , G02B6/423 , G02B6/4292
摘要： An optical assembly includes a waveguide assembly and an optical coupling element. The waveguide assembly includes a core, a cladding portion, and, preferably, at least two waveguide core fiducials, the at least two waveguide core fiducials and the core being lithographically formed substantially simultaneously in a substantially coplanar layer. The core and the at least two waveguide core fiducials are formed in a predetermined relationship with the cladding portion. The optical coupling element (for example, a lens array or mechanical transfer (MT) ferrule), includes an optical element and, preferably, at least two alignment features associated with the optical element, the at least two alignment features being mated with the at least two waveguide core fiducials to accurately position the optical element with respect to the core in an X-Y plane. A method of alignment is also provided.
摘要翻译：光学组件包括波导组件和光耦合元件。波导组件包括芯，包层部分，并且优选地至少两个波导芯基准，所述至少两个波导芯基准和芯基本上在基本共面的层中基本上同时地形成。芯和至少两个波导芯基准与包层部分形成预定的关系。光学耦合元件（例如，透镜阵列或机械转移（MT）套圈）包括光学元件，并且优选地包括与光学元件相关联的至少两个对准特征，所述至少两个对准特征与所述光学元件配合至少两个波导芯基准准确地将光学元件相对于芯在XY平面中定位。还提供了一种对准方法。

17. 发明授权

US07542643B2 Coupling element alignment using waveguide fiducials 失效
标题翻译：使用波导基准的耦合元件对准
公开(公告)号：US07542643B2
公开(公告)日：2009-06-02
申请号：US12141556
申请日：2008-06-18
申请人： Russell A. Budd , Punit Chiniwalla , Philip C. D. Hobbs , Frank R. Libsch
发明人： Russell A. Budd , Punit Chiniwalla , Philip C. D. Hobbs , Frank R. Libsch
IPC分类号： G02B6/26 , G02B6/42 , G02B6/10
CPC分类号： G02B6/42 , G02B6/30 , G02B6/3885 , G02B6/4214 , G02B6/423 , G02B6/4292
摘要： An optical assembly includes a waveguide assembly and an optical coupling element. The waveguide assembly includes a core, a cladding portion, and, preferably, at least two waveguide core fiducials, the at least two waveguide core fiducials and the core being lithographically formed substantially simultaneously in a substantially coplanar layer. The core and the at least two waveguide core fiducials are formed in a predetermined relationship with the cladding portion. The optical coupling element (for example, a lens array or mechanical transfer (MT) ferrule), includes an optical element and, preferably, at least two alignment features associated with the optical element, the at least two alignment features being mated with the at least two waveguide core fiducials to accurately position the optical element with respect to the core in an X-Y plane A method of alignment is also provided.
摘要翻译：光学组件包括波导组件和光耦合元件。波导组件包括芯，包层部分，并且优选地至少两个波导芯基准，所述至少两个波导芯基准和芯基本上在基本共面的层中基本上同时地形成。芯和至少两个波导芯基准与包层部分形成预定的关系。光学耦合元件（例如，透镜阵列或机械转移（MT）套圈）包括光学元件，并且优选地包括与光学元件相关联的至少两个对准特征，所述至少两个对准特征与所述光学元件配合至少两个波导芯基准，以在XY平面中相对于芯精确地定位光学元件还提供了对准方法。

18. 发明授权

US07421160B1 Coupling element alignment using waveguide fiducials 有权
标题翻译：使用波导基准的耦合元件对准
公开(公告)号：US07421160B1
公开(公告)日：2008-09-02
申请号：US11733406
申请日：2007-04-10
申请人： Russell A. Budd , Punit Chiniwalla , Philip C. D. Hobbs , Frank R. Libsch
发明人： Russell A. Budd , Punit Chiniwalla , Philip C. D. Hobbs , Frank R. Libsch
IPC分类号： G02B6/32 , G02B6/26 , G02B6/42 , G02B6/10
CPC分类号： G02B6/42 , G02B6/30 , G02B6/3885 , G02B6/4214 , G02B6/423 , G02B6/4292
摘要： An optical assembly includes a waveguide assembly and an optical coupling element. The waveguide assembly includes a core, a cladding portion, and, preferably, at least two waveguide core fiducials, the at least two waveguide core fiducials and the core being lithographically formed substantially simultaneously in a substantially coplanar layer. The core and the at least two waveguide core fiducials are formed in a predetermined relationship with the cladding portion. The optical coupling element (for example, a lens array or mechanical transfer (MT) ferrule), includes an optical element and, preferably, at least two alignment features associated with the optical element, the at least two alignment features being mated with the at least two waveguide core fiducials to accurately position the optical element with respect to the core in an X-Y plane. A method of alignment is also provided.
摘要翻译：光学组件包括波导组件和光耦合元件。波导组件包括芯，包层部分，并且优选地至少两个波导芯基准，所述至少两个波导芯基准和芯基本上在基本共面的层中基本上同时地形成。芯和至少两个波导芯基准与包层部分形成预定的关系。光学耦合元件（例如，透镜阵列或机械转移（MT）套圈）包括光学元件，并且优选地包括与光学元件相关联的至少两个对准特征，所述至少两个对准特征与所述光学元件配合至少两个波导芯基准准确地将光学元件相对于芯在XY平面中定位。还提供了一种对准方法。

19. 发明申请

US20080180340A1 Waveguide Coupling Devices 审中-公开
标题翻译：波导耦合器件
公开(公告)号：US20080180340A1
公开(公告)日：2008-07-31
申请号：US11669267
申请日：2007-01-31
申请人： Philip C. D. Hobbs , Frank R. Libsch
发明人： Philip C. D. Hobbs , Frank R. Libsch
IPC分类号： H01Q13/00 , G01B9/02
CPC分类号： G02B6/107 , G02B6/12004
摘要： An optoelectronic device includes a substrate having a surface, a metallic coupling structure deposited on the surface of the substrate, the metallic coupling structure having a port and a waveguide interface portion with at least two waveguide interface portion sides, and a dielectric waveguide, the dielectric waveguide having a coupling interface portion deposited adjacent the at least two waveguide interface portion sides of the waveguide interface portion of the metallic coupling structure. It is possible to form high speed, CMOS-process-compatible, low power optical-electrical and electrical-optical conversion devices (i.e. optical detectors, modulators, and frequency mixer's) on the top of the semiconductor chip, after the rest of the wiling has been laid down.
摘要翻译：光电器件包括具有表面的基片，沉积在基片表面上的金属耦合结构，具有端口的金属耦合结构和具有至少两个波导接口部分侧面的波导接口部分和介质波导，介电波导波导，其具有与金属耦合结构的波导接口部分的至少两个波导界面部分侧相邻地沉积的耦合界面部分。在半导体芯片的顶部可以形成高速，CMOS工艺兼容的低功率光电和电光转换器件（即光检测器，调制器和混频器）已经下定决心

20. 发明授权

US06449382B1 Method and system for recapturing a trajectory of an object 有权
标题翻译：用于重新捕获物体轨迹的方法和系统
公开(公告)号：US06449382B1
公开(公告)日：2002-09-10
申请号：US09300999
申请日：1999-04-28
申请人： Arthur Charles Ciccolo , Philip C. D. Hobbs , Howard E. Sachar
发明人： Arthur Charles Ciccolo , Philip C. D. Hobbs , Howard E. Sachar
IPC分类号： G06K900
CPC分类号： G06K9/32 , G06K9/209 , G06T7/292 , G06T2207/30241
摘要： The present invention is in the field of sensor fusion, and discloses in one embodiment a method for extracting the trajectories of moving objects from an assembly of low-resolution sensors, whose spatial relationships are initially unknown, except that their fields of view are known to overlap so as to form a continuous coverage region, which may be much larger than the field of view of any individual sensor. Segments of object trajectories may be extracted from the data of each sensor, and then stitched together to reconstruct the trajectories of the objects. The stitching process also allows determination of the spatial relationships between the sensors, so that from initially knowing little or nothing about the sensor arrangement or the paths of the objects, both may be reconstructed unambiguously.
摘要翻译：本发明在传感器融合领域，并且在一个实施例中公开了一种用于从空间关系最初未知的低分辨率传感器的组件中提取移动物体的轨迹的方法，除了它们的视野已知重叠以便形成连续的覆盖区域，其可以比任何单个传感器的视场大得多。可以从每个传感器的数据中提取物体轨迹的部分，然后缝合在一起以重建对象的轨迹。缝合过程还允许确定传感器之间的空间关系，使得从关于传感器布置或物体的路径的初步了解很少或没有知道，两者可以被明确地重建。

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