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    • 6. 发明授权
    • Method for determining the doping profile of a partially activated doped semiconductor region
    • 用于确定部分激活的掺杂半导体区域的掺杂分布的方法
    • US08817262B2
    • 2014-08-26
    • US13689540
    • 2012-11-29
    • IMECKatholieke Universiteit Leuven
    • Janusz Bogdanowicz
    • G01N21/55H01L21/66G01N21/17
    • G01N21/55G01N21/1717G01N2021/1719G01N2021/1725G01N2021/1731H01L22/12
    • A method is disclosed for determining the inactive doping concentration of a semiconductor region using a PMOR method. In one aspect, the method includes providing two semiconductor regions having substantially the same known as-implanted concentration but known varying junction depths. The method includes determining on one of these semiconductor regions the as-implanted concentration. The semiconductor regions are then partially activated. PMOR measures are then performed on the partially activated semiconductor regions to measure (a) the signed amplitude of the reflected probe signal as function of junction depth and (b) the DC probe reflectivity as function of junction depth. The method includes extracting from these measurements the active doping concentration and then calculating the inactive doping concentration using the determined total as-implanted concentration and active doping concentration. The method may also include extracting thermal diffusivity, refraction index, absorption coefficient, and/or SRHF lifetime from these measurements.
    • 公开了一种使用PMOR方法确定半导体区域的非活性掺杂浓度的方法。 在一个方面,该方法包括提供具有基本相同的已知植入浓度但是已知的变化的结深度的两个半导体区域。 该方法包括在这些半导体区域中的一个上确定注入的浓度。 然后半导体区域被部分激活。 然后对部分激活的半导体区域执行PMOR测量,以测量(a)反射探测信号的符号振幅作为结深度的函数,以及(b)DC探针反射率作为结深度的函数。 该方法包括从这些测量中提取有源掺杂浓度,然后使用确定的总注入浓度和有源掺杂浓度来计算非活性掺杂浓度。 该方法还可以包括从这些测量中提取热扩散率,折射率,吸收系数和/或SRHF寿命。
    • 8. 发明申请
    • OPTICAL SENSOR FOR DETERMINING THE CONCENTRATION OF AN ANALYTE
    • 用于确定分析仪浓度的光学传感器
    • US20110105867A1
    • 2011-05-05
    • US12741350
    • 2008-10-31
    • Peter SchultzArkady AmosovNatalia IzvarinaSergey Kravetz
    • Peter SchultzArkady AmosovNatalia IzvarinaSergey Kravetz
    • A61B5/1455
    • G01N21/49A61B5/0059A61B5/14532A61B5/1455A61B5/7239G01N21/1717G01N2021/1725
    • A method and apparatus for non-invasively determining a concentration of glucose in a subject using optical excitation and detection is provided. The method includes emitting an exciter beam (B1) to irradiate a portion (130) of tissue of the subject, causing physical and chemical changes in the surface, and causing an initial CPU back scattering (D1) of light. The method further includes periodically emitting a probe beam (B2) which irradiates the portion of tissue and causes periodic back scatterings (D2) of light. The initial and periodic back scatterings are detected and converted into electrical signals of at least the amplitude, frequency or decay time of the physical and chemical changes, the back scatterings being modulated by the physical and chemical changes. By differentiating over time at least one of the amplitude, frequency or decay time of the physical and chemical changes, the concentration of glucose may be determined.
    • 提供了使用光学激发和检测非侵入性地确定受试者中葡萄糖浓度的方法和装置。 该方法包括发射激发光束(B1)以照射被检体的组织的一部分(130),引起表面的物理和化学变化,并引起光的初始CPU反向散射(D1)。 该方法还包括周期性地发射照射组织部分并产生光的周期性后向散射(D2)的探针束(B2)。 初始和周期性后向散射被检测并转换成至少物理和化学变化的振幅,频率或衰减时间的电信号,后向散射由物理和化学变化调制。 通过随时间推移物理和化学变化的幅度,频率或衰减时间中的至少一个,可以确定葡萄糖的浓度。
    • 9. 发明授权
    • Apparatus and method for noise reduction in modulated optical reflectance metrology system
    • 调制光学反射计量系统中降噪的装置和方法
    • US07920265B1
    • 2011-04-05
    • US12182060
    • 2008-07-29
    • Alan George
    • Alan George
    • G01N21/00
    • G01N21/1717G01N21/274G01N2021/1725
    • In a modulated optical reflectance (MOR) system, a laser noise suppression technique utilizes a reference beam split optically from a probe laser prior to injection of a beam from the probe laser into an MOR signal path. The reference beam and a probe beam reflected from the sample are sent to first and second detectors, which produce first and second signals. A signal combiner receives the second signal at a first input and produces a combiner signal that corresponds to a difference between signals applied to the first and a second input. A level balancer receives the first signal and a signal derived from the combiner signal and produces a balancer output that is coupled to the second input of the signal combiner. The combination of the balancer output and the second signal tends to cancel out an average value of the second signal from the combiner signal.
    • 在调制光反射(MOR)系统中,激光噪声抑制技术利用在将探针激光束的光束注入到MOR信号路径之前从探针激光器光学分离的参考光束。 将参考光束和从样本反射的探测光束发送到产生第一和第二信号的第一和第二检测器。 信号组合器在第一输入处接收第二信号,并产生对应于施加到第一和第二输入的信号之间的差的组合器信号。 电平平衡器接收第一信号和从组合器信号导出的信号,并产生耦合到信号组合器的第二输入端的平衡器输出。 平衡器输出和第二信号的组合倾向于抵消来自组合器信号的第二信号的平均值。