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    • 12. 发明授权
    • Electronic element including ferroelectric substance film and method of manufacturing the same
    • 电子元件包括铁电体膜及其制造方法
    • US07858959B2
    • 2010-12-28
    • US12149962
    • 2008-05-12
    • Masao KondoKazuaki Kurihara
    • Masao KondoKazuaki Kurihara
    • H01L29/72
    • G02F1/0553H01L21/28291H01L29/516H01L29/78391
    • A laminated film structure, method of manufacturing, and a preferable electronic element using the structure. The effective polarization into the electric field can be realized in the direction of crystal axis by enhancing the crystal property and alignment property of the ferroelectric substance film formed through epitaxial growth with reference to the plane alignment of semiconductor substrate. After the yttrium stabilized zirconium film and a film of the rock salt structure are sequentially formed with epitaxial growth on a semiconductor substrate, the ferroelectric substance film of simple Perovskite structure is also formed with epitaxial growth. The ferroelectric substance film can improve the crystal property and alignment property thereof by rotating the plane for 45 degrees within the plane for the crystal axis of the yttrium stabilized zirconium.
    • 叠层膜结构,制造方法以及使用该结构的优选的电子元件。 参照半导体衬底的平面取向,通过增强通过外延生长形成的铁电体物质膜的晶体特性和取向性能,可以在晶轴的方向上实现电场的有效极化。 在半导体衬底上依次形成钇稳定的锆膜和岩盐结构的薄膜外延生长后,外延生长也形成简单的钙钛矿结构的铁电物质膜。 铁素体膜可以通过在钇稳定化锆的晶轴的平面内旋转45度的平面来提高其结晶性和取向性。
    • 16. 发明授权
    • Capacitor and method for fabricating the same, and semiconductor device and method for fabricating the same
    • 电容器及其制造方法,半导体器件及其制造方法
    • US06974985B2
    • 2005-12-13
    • US09960398
    • 2001-09-24
    • Masaki KurasawaKazuaki KuriharaKenji Maruyama
    • Masaki KurasawaKazuaki KuriharaKenji Maruyama
    • H01L27/105H01L21/02H01L21/8246H01L27/108
    • H01L28/55H01L28/91
    • The semiconductor device comprises: a memory cell transistor formed on a semiconductor substrate 10; insulation films 22, 30 covering the memory cell transistor; a buffer structure 40 formed on the insulation film; and a capacitor including a lower electrode 42 formed on the buffer structure 40 and electrically connected to the source/drain diffused layer 20; a capacitor dielectric film 44 formed on the lower electrode 42, and formed of a perovskite ferroelectric material having a smaller thermal expansion coefficient than that of the buffer structure 40 and having a crystal oriented substantially perpendicular to a surface of the lower electrode 42. The buffer structure for mitigating the influence of the stress from the substrate is formed below the lower electrode, whereby a polarization direction of the capacitor dielectric film can be made parallel with a direction of an electric field applied between the upper electrode and the lower electrode. An intrinsic polarization of the ferroelectric film can be utilized as it is.
    • 半导体器件包括:形成在半导体衬底10上的存储单元晶体管; 覆盖存储单元晶体管的绝缘膜22,30; 形成在绝缘膜上的缓冲结构40; 以及电容器,包括形成在缓冲结构40上并电连接到源/漏扩散层20的下电极42; 形成在下部电极42上的电容电介质膜44,由与缓冲结构体40的热膨胀系数相比具有较小的热膨胀系数的钙钛矿型铁电体材料形成,并具有大致垂直于下部电极42的表面取向的晶体。 用于减轻来自基板的应力的影响的缓冲结构形成在下电极的下方,由此可以使电容器电介质膜的极化方向与施加在上电极和下电极之间的电场的方向平行。 可以直接利用铁电体膜的固有极化。
    • 19. 发明申请
    • TURBOCOMPRESSOR AND TURBOREFRIGERATOR
    • 涡轮增压器和涡轮发电机
    • US20130039746A1
    • 2013-02-14
    • US13578838
    • 2011-02-17
    • Kazuaki Kurihara
    • Kazuaki Kurihara
    • F01D15/12
    • F04D25/02F04D17/122F04D25/06F04D25/0606F04D25/163F04D29/624
    • Provided is a turbocompressor (4) having a drive part (12) generating rotational power, an impeller (22a) to which the rotational power of the drive part (12) is transmitted to rotate, a plurality of gears (31, 32) transmitting the rotational power of the drive part (12) to the impeller (22a), and a drive part casing (13) in which the drive part (12) is installed. This turbocompressor (4) includes an impeller casing (22e) installed around the impeller (22a), and a gear casing (33) configured to be formed independently of the impeller casing (22e) and the drive part casing (13), to couple the impeller casing (22e) and the drive part casing (13), and to form an accommodation space (33a) in which the plurality of gears (31, 32) are accommodated. With this configuration, in manufacturing the turbocompressor, a working process can be simplified and working labor and cost can be reduced.
    • 本发明提供一种具有产生旋转动力的驱动部(12)的涡轮压缩机(4),驱动部(12)的旋转动力传递到其上的旋转叶轮(22a),传递多个齿轮 驱动部件(12)到叶轮(22a)的旋转动力以及安装有驱动部件(12)的驱动部件壳体(13)。 该涡轮压缩机(4)包括安装在叶轮(22a)周围的叶轮壳体(22e)和与叶轮壳体(22e)和驱动部件壳体(13)独立形成的齿轮箱(33) 叶轮壳体(22e)和驱动部件壳体(13),并且形成容纳多个齿轮(31,32)的容置空间(33a)。 通过这样的结构,在制造涡轮压缩机的情况下,能够简化工作过程,能够降低劳动力和成本。