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    • 12. 发明授权
    • Semiconductor device and method of manufacturing the same
    • 半导体装置及其制造方法
    • US06690043B1
    • 2004-02-10
    • US09717039
    • 2000-11-22
    • Koji UsudaShinichi Takagi
    • Koji UsudaShinichi Takagi
    • H01L310328
    • H01L29/78696H01L29/1054H01L29/66742H01L29/78681H01L29/78687
    • A semiconductor device comprises a base substrate, an insulating film formed on the substrate, an undoped first and lattice-relaxed semiconductor layer formed on the insulating film, a second semiconductor layer having a tensile strain and formed on the first semiconductor layer, and a MISFET formed on the second semiconductor layer. Since the MISFET is formed in a strained Si layer, electrons are prevented from scattering in a channel region, improving the electron mobility. Furthermore, since the MISFET is formed in a thin SOI layer having a thickness of 100 nm or less, it is possible to reduce a parasitic capacitance in addition to the improvement of the electron mobility. As a result, the MISFET excellent in drivability can be obtained.
    • 半导体器件包括基底基板,形成在基板上的绝缘膜,形成在绝缘膜上的未掺杂的第一和晶格弛豫半导体层,具有拉伸应变并形成在第一半导体层上的第二半导体层,以及MISFET 形成在第二半导体层上。 由于MISFET形成在应变Si层中,所以防止电子在沟道区域中散射,提高电子迁移率。 此外,由于MISFET形成在厚度为100nm以下的薄SOI层中,除了改善电子迁移率之外,还可以减小寄生电容。 结果,可以获得驾驶性优异的MISFET。
    • 14. 发明授权
    • DNA base sequencer
    • DNA碱基测序仪
    • US5744097A
    • 1998-04-28
    • US621888
    • 1996-03-26
    • Hiroaki MachidaYuusuke MiyazakiShinichi TakagiYoshinori Mishina
    • Hiroaki MachidaYuusuke MiyazakiShinichi TakagiYoshinori Mishina
    • G01N21/64C07H21/04C12M1/00C12Q1/68G01N27/447G01N33/50G01N15/06C12N15/00G01N33/00
    • G01N27/44743Y10T436/143333
    • The improved DNA base sequencer comprising an electrophoresis plate having a gel electrolyte layer held between two glass plates, one of which is partially cut away on the top edge in the direction of width, an assay compartment for accommodating said electrophoresis plate in a vertically erect position, a lower reservoir of a buffer solution in which the lower part of the gel electrolyte layer in the electrophoresis plate is to be immersed, an upper reservoir of a buffer solution in which the upper part of said electrolyte layer is to be immersed, photoexciting laser light applying means by which laser light is emitted from a lateral side of the electrophoresis plate in such a way that it crosses the lanes in said plate at right angles, and fluorescence detecting means by which the fluorescence emitted from a DNA fragment illuminated with the laser light is picked up and converted to an electric signal, and the apparatus is characterized in that a sharkstoothcomb made of a water-swellable material is inserted from the top edge of said electrophoresis plate into the space between the two glass plates, either the top or bottom edge of said sharkstoothcomb being provided with a plurality of teeth which are each tapered from the root toward the tip. Using this apparatus, samples can be easily and yet positively injected at specified lane positions on the gel electrolyte layer.
    • 改进的DNA碱基测序仪包括电泳板,该电泳板具有保持在两个玻璃板之间的凝胶电解质层,其中一个玻璃板在宽度方向上的顶部边缘部分地被切除;测定室,用于将所述电泳板容纳在垂直竖立位置 将要浸渍电泳板中的凝胶电解质层的下部的缓冲溶液的下部储存器,要浸渍所述电解质层的上部的缓冲溶液的上部储存器,光激发 光照射装置,其从电泳板的侧面以这样的方式从激光垂直方向穿过所述板中的通道;以及荧光检测装置,从激光照射的DNA片段发出的荧光 光拾取并转换为电信号,该装置的特征在于,由水膨胀制成的鲨鱼架 将能量材料从所述电泳板的顶部边缘插入到两个玻璃板之间的空间中,所述鲨鱼架的顶部或底部边缘设置有多个齿,其从根部朝向尖端逐渐变细。 使用该装置,可以在凝胶电解质层上的特定泳道位置容易且积极地注入样品。
    • 15. 发明授权
    • Method of measuring the bent shape of a movable mirror of an exposure
apparatus
    • 测量曝光装置的可动反射镜的弯曲形状的方法
    • US5473435A
    • 1995-12-05
    • US338170
    • 1994-11-09
    • Takashi MasuyukiKenji NishiShinichi Takagi
    • Takashi MasuyukiKenji NishiShinichi Takagi
    • G01B11/30G03F7/20G01B11/00
    • G03F7/70591G01B11/306G03F7/70425G03F7/70633G03F7/70716G03F7/70725
    • A method of measuring a bent shape of a movable mirror of an exposure apparatus, which includes:a two-dimensionally movable stage;a movable mirror provided to the stage;a position measurement device for radiating a light beam onto the movable mirror, and measuring a position of the stage using the light beam reflected by the movable mirror;an illumination optical system for illuminating a mask; anda projection optical system for forming an image on the mask on a photosensitive substrate placed on the stage, includes:the first step of stepping the stage along array coordinates on the basis of a measured value of the position measurement device;the second/step of sequentially exposing first and second measurement marks on the photosensitive substrate, so that images of at least two first measurement marks and images of at least two second measurement marks substantially overlap each other, the mask having the first and second measurement marks;the third step of measuring differences between positions of the images of the first and second measurement marks; andthe fourth step of calculating a bent shape of the movable mirror on the basis of the differences between the positions of the images of the first and second measurement marks.
    • 一种测量曝光装置的可动反射镜的弯曲形状的方法,包括:二维可移动台; 提供到舞台的可移动镜; 位置测量装置,用于将光束照射到可移动反射镜上,以及使用由可移动反射镜反射的光束测量舞台的位置; 用于照明面罩的照明光学系统; 以及投影光学系统,用于在放置在平台上的感光基板上的掩模上形成图像,包括:基于位置测量装置的测量值沿着阵列坐标步进台的第一步骤; 在感光基板上依次曝光第一和第二测量标记的第二/步骤,使得至少两个第一测量标记的图像和至少两个第二测量标记的图像基本上彼此重叠,该掩模具有第一和第二测量标记 ; 测量第一和第二测量标记的图像的位置之间的差异的第三步骤; 以及基于第一和第二测量标记的图像的位置之间的差异来计算可移动反射镜的弯曲形状的第四步骤。
    • 17. 发明申请
    • SEMICONDUCTOR WAFER, SEMICONDUCTOR DEVICE, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
    • 半导体晶体管,半导体器件及制造半导体器件的方法
    • US20110018033A1
    • 2011-01-27
    • US12934233
    • 2009-03-26
    • Mitsuru TakenakaShinichi TakagiMasahiko HataOsamu Ichikawa
    • Mitsuru TakenakaShinichi TakagiMasahiko HataOsamu Ichikawa
    • H01L29/205H01L21/283H01L29/78H01L21/3205
    • H01L29/7787H01L21/28264H01L29/205H01L29/517H01L29/66462H01L29/66522H01L29/78648H01L29/78681
    • It is an objective of the present invention to form a favorable interface between an oxide layer and a group 3-5 compound semiconductor using a practical and simple method.Provided is a semiconductor wafer comprising a first semiconductor layer that is a group 3-5 compound not containing arsenic and that lattice matches or pseudo-lattice matches with InP; and a second semiconductor layer that is formed to contact the first semiconductor layer, is a group 3-5 compound semiconductor layer that lattice matches or pseudo-lattice matches with InP, and can be selectively oxidized relative to the first semiconductor layer. Also provided is a semiconductor device comprising a first semiconductor layer that is a group 3-5 compound not containing arsenic and that lattice matches or pseudo-lattice matches with InP; an oxide layer formed by selectively oxidizing, relative to the first semiconductor layer, at least a portion of a second semiconductor layer that is a group 3-5 compound formed to contact the first semiconductor layer and that lattice matches or pseudo-lattice matches with InP; and a control electrode that adds an electric field to a channel formed in the first semiconductor layer.
    • 本发明的目的是使用实用和简单的方法在氧化物层和3-5族化合物半导体之间形成良好的界面。 提供了包括第一半导体层的半导体晶片,其是不含砷的组3-5化合物,并且晶格匹配或伪晶格与InP匹配; 和形成为与第一半导体层接触的第二半导体层是与InP晶格匹配或伪晶格匹配的组3-5化合物半导体层,并且可相对于第一半导体层选择性地氧化。 还提供了一种半导体器件,其包括第一半导体层,其是不含砷的组3-5化合物,并且晶格匹配或伪晶格与InP匹配; 通过相对于第一半导体层选择性地氧化形成为与第一半导体层接触的组3-5化合物的第二半导体层的至少一部分,并且晶格匹配或伪晶格匹配的InP形成的氧化物层 ; 以及将电场与形成在第一半导体层中的沟道相加的控制电极。