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    • 14. 发明授权
    • Method of making semiconductor device
    • 制造半导体器件的方法
    • US06790711B2
    • 2004-09-14
    • US10663940
    • 2003-09-17
    • Yoshiharu Takahashi
    • Yoshiharu Takahashi
    • H01L2144
    • H01L23/4334H01L21/4832H01L21/565H01L23/3107H01L23/4951H01L23/49548H01L24/45H01L24/48H01L2224/16H01L2224/16245H01L2224/32245H01L2224/45124H01L2224/45144H01L2224/48095H01L2224/48247H01L2224/73265H01L2924/00014H01L2924/01079H01L2924/15311H01L2924/181H01L2924/18165H05K3/3426H05K3/3436Y02P70/613H01L2924/00H01L2224/05599H01L2924/00012
    • A method of manufacturing a semiconductor device using a lead frame composed of a plate-like body having a non-planar upper surface and a planar under surface. The plate-like body includes a first thin portion for mounting a semiconductor chip with pad electrodes, first thick portions radially arranged for forming lead electrodes respectively corresponding to the pad electrodes of the semiconductor chip, a second thin portion between pairs of the first thick portions, a third thin portion peripherally surrounding the first thick portions, and a second thick portion surrounding the third thin portion. The semiconductor chip and the lead electrodes are sealed to the same surface as all of the thin portions with a resin, after making a connection between the pad electrodes and the lead electrodes with connecting wires. The first, second, and third thin portions are removed by etching so that each of the lead electrodes includes a thin internal lead portion having a connection part on an upper surface side and a thick external electrode portion protruding toward an under surface and forming a connection part. The resin at the underside is substantially co-planar with the under surface of the internal lead portion of the lead electrodes, and the external electrode portion protrudes downward from the underside of the resin layer.
    • 使用由具有非平面上表面和平面下表面的板状体构成的引线框架制造半导体器件的方法。 板状体包括用​​于安装具有焊盘电极的半导体芯片的第一薄部分,径向布置用于形成分别对应于半导体芯片的焊盘电极的引线电极的第一厚部分,第一厚部分对之间的第二薄部分 围绕第一厚部分的第三薄壁部分和围绕第三薄部分的第二厚壁部分。 在利用连接线形成焊盘电极和引线电极之间的连接之后,用树脂将半导体芯片和引线电极密封到与所有薄部分相同的表面。 通过蚀刻去除第一,第二和第三薄部分,使得每个引线电极包括具有在上表面侧上的连接部分的薄内部引线部分和向下表面突出的厚外部电极部分,并形成连接 部分。 下侧的树脂与引线电极的内部引线部的下表面基本共面,外部电极部从树脂层的下侧向下方突出。