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11. 发明授权

US08459114B2 Multi-axis capacitive accelerometer 有权
标题翻译：多轴电容式加速度计
公开(公告)号：US08459114B2
公开(公告)日：2013-06-11
申请号：US12550394
申请日：2009-08-30
申请人： Yu-Wen Hsu , Hsin-Tang Chien , Sheah Chen
发明人： Yu-Wen Hsu , Hsin-Tang Chien , Sheah Chen
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , G01P15/18 , G01P2015/0814 , G01P2015/082 , G01P2015/0831
摘要： A multi-axis capacitive accelerometer is disclosed. A first mass is disposed and held by an anchor supported by a substrate, wherein the first mass is asymmetrically suspended on the anchor by means of two cantilevers, so that the first mass rotates about a rotation axis, for sensing the acceleration in a first direction perpendicular to the substrate. A second mass is disposed in the first mass and suspended on the first mass by means of a set of springs to sense the acceleration in a second direction parallel to the substrate. Furthermore, a third mass can be disposed in the second mass, wherein the third mass is suspended on the second mass by means of another set of springs to sense the acceleration in a third direction. The first direction, the second direction and the third direction are mutually orthogonal to each other.
摘要翻译：公开了一种多轴电容加速度计。第一质量块被由衬底支撑的锚固件设置和保持，其中第一质量块通过两个悬臂不对称地悬挂在锚固件上，使得第一质量块围绕旋转轴线旋转，以感测第一方向上的加速度垂直于衬底。第二质量块通过一组弹簧设置在第一质量体中并悬挂在第一质量块上，以在平行于衬底的第二方向上感测加速度。此外，第三质量可以设置在第二质量块中，其中通过另一组弹簧将第三质量块悬挂在第二质量块上以感测在第三方向上的加速度。第一方向，第二方向和第三方向相互正交。

12. 发明申请

US20100122579A1 MULTI-AXIS CAPACITIVE ACCELEROMETER 有权
标题翻译：多轴电容式加速度计
公开(公告)号：US20100122579A1
公开(公告)日：2010-05-20
申请号：US12618791
申请日：2009-11-16
申请人： Yu-Wen Hsu , Sheah Chen , Hsin-Tang Chien
发明人： Yu-Wen Hsu , Sheah Chen , Hsin-Tang Chien
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , G01P15/18 , G01P2015/0814 , G01P2015/082 , G01P2015/0831
摘要： A multi-axis accelerometer is consisted of a substrate with sensing electrodes and a structure layer. The structure layer includes anchor bases fixed on the substrate. A first proof mass is disposed over the substrate and has a first opening and a second opening symmetric to each other. The first proof mass is suspended to the anchor bases. Fixed sensing blocks are disposed on the substrate, and capacitors are formed between each fixed sensing block and the first proof mass for sensing acceleration along two in-plane directions. A second proof mass and a third proof mass are disposed in the first opening and the second opening and are asymmetrically suspended. Separate electrodes are disposed on the substrate and form two differential capacitors with the second proof mass and the third proof mass for sensing the out-of-plane acceleration.
摘要翻译：多轴加速度计由具有感测电极和结构层的基板组成。结构层包括固定在基底上的锚定基底。第一检测质量体设置在基板上方并且具有彼此对称的第一开口和第二开口。第一个质量悬浮在锚基上。固定感测块设置在基板上，并且电容器形成在每个固定感测块和第一检测质量块之间，用于沿着两个面内方向感测加速度。在第一开口和第二开口中设置第二检测质量块和第三检验质量块，并且不对称地悬挂。单独的电极设置在基板上并形成具有第二检测质量的两个差分电容器和用于感测平面外加速度的第三检测质量块。

13. 发明授权

US09563102B2 Signal processing method of multiple mirco-electro-mechanical system (MEMS) devices and combo MEMS device applying the method 有权
标题翻译：多微电子机电系统（MEMS）器件的信号处理方法和应用该方法的组合MEMS器件
公开(公告)号：US09563102B2
公开(公告)日：2017-02-07
申请号：US14676216
申请日：2015-04-01
申请人： Yu-Wen Hsu , Ying-Che Lo , Lu-Po Liao , Chia-Yu Wu
发明人： Yu-Wen Hsu , Ying-Che Lo , Lu-Po Liao , Chia-Yu Wu
IPC分类号： G02F2/00 , G01C19/5712 , B81B7/00 , G01C19/5776
CPC分类号： G02F2/00 , B81B7/008 , G01C19/5776
摘要： This invention provides a signal processing method of multiple micro-electro-mechanical system devices. The signal processing method includes: providing at least two MEMS devices; applying driving or modulating signals of different frequencies to the MEMS devices such that the MEMS devices generate respective MEMS signals with respective frequencies; and combining the MEMS signals with respective frequencies into one or more multi-frequency signals and outputting the multi-frequency signals, wherein a number of the multi-frequency signals is less than a number of the MEMS signals with respective frequencies. This invention also provides a combo MEMS device integrating two or more MEMS devices and two or more vibration sources.
摘要翻译：本发明提供了一种多个微机电系统装置的信号处理方法。信号处理方法包括：提供至少两个MEMS器件; 将不同频率的信号驱动或调制到MEMS器件，使得MEMS器件以相应的频率产生相应的MEMS信号; 以及将所述MEMS信号与各个频率组合成一个或多个多频信号并输出所述多频信号，其中所述多频信号的数目小于具有相应频率的多个MEMS信号。本发明还提供集成两个或多个MEMS器件和两个或更多个振动源的组合MEMS器件。

14. 发明申请

US20160131679A1 MIRCO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICE 有权
标题翻译：微电子机械系统（MEMS）设备
公开(公告)号：US20160131679A1
公开(公告)日：2016-05-12
申请号：US14535022
申请日：2014-11-06
申请人： Yu-Wen Hsu , Shih-Chieh Lin , Chia-Yu Wu
发明人： Yu-Wen Hsu , Shih-Chieh Lin , Chia-Yu Wu
IPC分类号： G01P15/08
CPC分类号： G01P15/125 , G01P2015/0845 , H01L29/84
摘要： The invention provides a MEMS device. The MEMS device includes: a substrate; a proof mass, including at least two slots, each of the slots including an inner space and an opening, the inner space being relatively closer to a center area of the proof mass than the opening; at least two anchors located in the corresponding slots and connected to the substrate; at least two linkages located in the corresponding slots and connected to the corresponding anchors; and a multi-dimensional spring structure for assisting a multi-dimensional movement of the proof mass, the multi-dimensional spring structure surrounding a periphery of the proof mass, and connected to the substrate through the linkages and the anchors. The multi-dimensional spring structure includes first and second springs for assisting an out-of-plane movement and an in-plane movement of the proof mass.
摘要翻译：本发明提供一种MEMS装置。 MEMS器件包括：衬底; 包括至少两个槽的检验质量块，每个槽包括内部空间和开口，所述内部空间比所述开口相对更靠近所述检验质量块的中心区域; 至少两个锚定件，位于相应的槽中并连接到基板上; 至少两个连杆位于相应的槽中并连接到相应的锚固件上; 以及用于辅助检测质量块的多维运动的多维弹簧结构，围绕证明物质的周边的多维弹簧结构，并且通过连接件和锚固件连接到基底。该多维弹簧结构包括第一和第二弹簧，用于辅助防弹块的平面外移动和平面内移动。

15. 发明申请

US20150260593A1 MIRCO-ELECTRO-MECHANICAL SYSTEM PRESSURE SENSOR AND MANUFACTURING METHOD THEREOF 审中-公开
标题翻译：微电子机械系统压力传感器及其制造方法
公开(公告)号：US20150260593A1
公开(公告)日：2015-09-17
申请号：US14329111
申请日：2014-07-11
申请人： Yu-Wen Hsu , Chia-Yu Wu , Shih-Chieh Lin , Shih-Ting Lin
发明人： Yu-Wen Hsu , Chia-Yu Wu , Shih-Chieh Lin , Shih-Ting Lin
IPC分类号： G01L9/00 , B81B7/00 , B81C1/00
CPC分类号： G01L9/0072 , B81B2201/0264 , B81C1/00309 , G01L19/0618
摘要： The invention provides a micro-electro-mechanical system pressure sensor. The micro-electro-mechanical system pressure sensor includes: a substrate, including at least one conductive wiring; a membrane disposed above the substrate to form a semi-open chamber between the membrane and the substrate, the semi-open chamber having an opening to receive an external pressure; and a cap, disposed above the membrane and forming an enclosed space with the membrane, the cap including a top electrode corresponding to the membrane and at least one portion of the membrane forming a bottom electrode, wherein the top and bottom electrodes form a sensing capacitor to sense the external pressure.
摘要翻译：本发明提供一种微机电系统压力传感器。微电子机械系统压力传感器包括：基板，包括至少一个导电布线; 膜，设置在所述基板上方以在所述膜和所述基板之间形成半开放室，所述半开放室具有用于接收外部压力的开口; 以及帽，其设置在所述膜的上方并与所述膜形成封闭空间，所述盖包括对应于所述膜的顶部电极和形成底部电极的所述膜的至少一部分，其中所述顶部和底部电极形成感测电容器感觉外部压力。

16. 发明申请

US20130167635A1 MICRO-ELECTRO-MECHANICAL-SYSTEM DEVICE WITH OSCILLATING ASSEMBLY 有权
标题翻译：具有振荡装置的微电子机械系统装置
公开(公告)号：US20130167635A1
公开(公告)日：2013-07-04
申请号：US13459270
申请日：2012-04-30
申请人： Chung-Yuan Su , Chao-Ta Huang , Shih-Chieh Lin , Yu-Wen Hsu
发明人： Chung-Yuan Su , Chao-Ta Huang , Shih-Chieh Lin , Yu-Wen Hsu
IPC分类号： G01C19/56
CPC分类号： G01C19/5747
摘要： A micro-electro-mechanical-system (MEMS) device comprising two proof masses disposed in the first frame, such that the MEMS device with oscillating assemblies senses the angular velocity in the two axes, respectively. The MEMS device with oscillating assemblies further comprises a lever structure and two oscillating assemblies connecting at two opposite ends of the lever structure, such that the oscillating assemblies move in opposite directions synchronously. The MEMS device with oscillating assemblies further comprises a spring assembly connected between the proof mass and a movable electrode, restricting the proof mass to drive the movable electrode to only move in a specific direction.
摘要翻译：一种微电子机械系统（MEMS）装置，包括设置在第一框架中的两个检验质量块，使得具有振荡组件的MEMS装置分别感测两个轴中的角速度。具有摆动组件的MEMS装置还包括杠杆结构和在杠杆结构的两个相对端处连接的两个摆动组件，使得摆动组件沿相反方向同步地移动。具有振荡组件的MEMS装置还包括连接在检验质量块和可动电极之间的弹簧组件，限制了证明物质以驱动可移动电极仅沿特定方向移动。

17. 发明申请

US20130160544A1 READING CIRCUIT OF GYROSCOPE 有权
标题翻译：阅读电路
公开(公告)号：US20130160544A1
公开(公告)日：2013-06-27
申请号：US13430685
申请日：2012-03-26
申请人： Yu-Wen Hsu , Sheng-Ren Chiu , Lu-Po Liao , Shih-Ting Lin
发明人： Yu-Wen Hsu , Sheng-Ren Chiu , Lu-Po Liao , Shih-Ting Lin
IPC分类号： G01C19/56
CPC分类号： G01C19/5776
摘要： A reading circuit of a gyroscope is provided. The reading circuit includes a driving unit, a high pass filter, a signal processing unit, and a low pass filter. The driving unit generates a resonance signal for a resonator of the gyroscope and generates a demodulation signal for the signal processing unit. The signal processing unit provides a modulation signal to a Coriolis accelerometer of the gyroscope. An input terminal of the high pass filter receives an output signal of the Coriolis accelerometer. The signal processing unit processes and demodulates an output of the high pass filter according to the demodulation signal and outputs a demodulation result to the low pass filter.
摘要翻译：提供陀螺仪的读取电路。读取电路包括驱动单元，高通滤波器，信号处理单元和低通滤波器。驱动单元产生用于陀螺仪的谐振器的谐振信号，并产生信号处理单元的解调信号。信号处理单元向陀螺仪的科里奥利加速度计提供调制信号。高通滤波器的输入端接收科里奥利加速度计的输出信号。信号处理单元根据解调信号对高通滤波器的输出进行处理和解调，并向低通滤波器输出解调结果。

18. 发明申请

US20110101994A1 Calibration Apparatus And Method For Capacitive Sensing Devices 有权
标题翻译：电容传感器件的校准装置和方法
公开(公告)号：US20110101994A1
公开(公告)日：2011-05-05
申请号：US12645473
申请日：2009-12-22
申请人： Yu-Wen Hsu , Lu-Po Liao , Chieh-Ling Hsiao , Yu-Chun Hsu
发明人： Yu-Wen Hsu , Lu-Po Liao , Chieh-Ling Hsiao , Yu-Chun Hsu
IPC分类号： G01R35/00 , G01R1/02
CPC分类号： G01D5/24 , G01D18/00
摘要： A calibration apparatus and method for a capacitive sensing device, in which a calibration capacitor device connects to the capacitive sensing device which is connected to an integration circuit that generates a voltage output and a latch output, a transforming circuit transforms a sensitivity calibration parameter into a pair of corresponding analog signal outputs, and an offset calibration parameter into a corresponding analog signal output, at least two first switches between the pair of corresponding analog signal outputs and a fixed potential according to system clock's levels, and at least a third switch switches between the corresponding analog signal output and another fixed potential according to the system clock's levels. The apparatus determines the switch between the pair of signal outputs according to the latch output.
摘要翻译：一种用于电容感测装置的校准装置和方法，其中校准电容器装置连接到连接到产生电压输出和锁存输出的积分电路的电容感测装置，变换电路将灵敏度校准参数转换成一对相应的模拟信号输出和偏移校准参数转换成对应的模拟信号输出，在对对应的模拟信号输出对之间的至少两个第一开关和根据系统时钟电平的固定电位，并且至少第三开关在相应的模拟信号输出和另一个固定电位根据系统时钟的电平。该装置根据锁存输出确定一对信号输出之间的切换。

19. 发明授权

US09733269B2 Micro-electro-mechanical system (MEMS) device with multi-dimensional spring structure and frame 有权
公开(公告)号：US09733269B2
公开(公告)日：2017-08-15
申请号：US14535022
申请日：2014-11-06
申请人： Yu-Wen Hsu , Shih-Chieh Lin , Chia-Yu Wu
发明人： Yu-Wen Hsu , Shih-Chieh Lin , Chia-Yu Wu
IPC分类号： G01P15/125 , H01L29/84 , G01P15/08
CPC分类号： G01P15/125 , G01P2015/0845 , H01L29/84
摘要： The invention provides a MEMS device. The MEMS device includes: a substrate; a proof mass, including at least two slots, each of the slots including an inner space and an opening, the inner space being relatively closer to a center area of the proof mass than the opening; at least two anchors located in the corresponding slots and connected to the substrate; at least two linkages located in the corresponding slots and connected to the corresponding anchors; and a multi-dimensional spring structure for assisting a multi-dimensional movement of the proof mass, the multi-dimensional spring structure surrounding a periphery of the proof mass, and connected to the substrate through the linkages and the anchors. The multi-dimensional spring structure includes first and second springs for assisting an out-of-plane movement and an in-plane movement of the proof mass.

20. 发明授权

US08857259B2 Reading circuit of gyroscope 有权
标题翻译：陀螺仪阅读电路
公开(公告)号：US08857259B2
公开(公告)日：2014-10-14
申请号：US13430685
申请日：2012-03-26
申请人： Yu-Wen Hsu , Sheng-Ren Chiu , Lu-Po Liao , Shih-Ting Lin
发明人： Yu-Wen Hsu , Sheng-Ren Chiu , Lu-Po Liao , Shih-Ting Lin
IPC分类号： G01C19/56
CPC分类号： G01C19/5776
摘要： A reading circuit of a gyroscope is provided. The reading circuit includes a driving unit, a high pass filter, a signal processing unit, and a low pass filter. The driving unit generates a resonance signal for a resonator of the gyroscope and generates a demodulation signal for the signal processing unit. The signal processing unit provides a modulation signal to a Coriolis accelerometer of the gyroscope. An input terminal of the high pass filter receives an output signal of the Coriolis accelerometer. The signal processing unit processes and demodulates an output of the high pass filter according to the demodulation signal and outputs a demodulation result to the low pass filter.
摘要翻译：提供陀螺仪的读取电路。读取电路包括驱动单元，高通滤波器，信号处理单元和低通滤波器。驱动单元产生用于陀螺仪的谐振器的谐振信号，并产生信号处理单元的解调信号。信号处理单元向陀螺仪的科里奥利加速度计提供调制信号。高通滤波器的输入端接收科里奥利加速度计的输出信号。信号处理单元根据解调信号对高通滤波器的输出进行处理和解调，并向低通滤波器输出解调结果。

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