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11. 发明申请

US20060185795A1 Anodized substrate support 有权
标题翻译：阳极氧化的底物支持
公开(公告)号：US20060185795A1
公开(公告)日：2006-08-24
申请号：US11406136
申请日：2006-04-18
申请人： Soo Choi , Beom Park , Quanyuan Shang , Robert Greene , John White , Dong-Kil Yim , Chung-Hee Park , Kam Law
发明人： Soo Choi , Beom Park , Quanyuan Shang , Robert Greene , John White , Dong-Kil Yim , Chung-Hee Park , Kam Law
IPC分类号： H01L21/306 , C23C16/00 , H05H1/24
CPC分类号： H01J37/32082 , C23C16/4581 , C25D11/04 , C25D11/16 , C25D11/18
摘要： A substrate support and method for fabricating the same are provided. In one embodiment of the invention, a substrate support includes an electrically conductive body having a substrate support surface that is covered by an electrically insulative coating. At least a portion of the coating centered on the substrate support surface has a surface finish of between about 80 to about 200 micro-inches. In another embodiment, a substrate support includes an anodized aluminum body having a surface finish on the portion of the body adapted to support a substrate thereon of between about 80 to about 200 micro-inches.
摘要翻译：提供了一种基板支撑件及其制造方法。在本发明的一个实施例中，衬底支撑件包括具有由电绝缘涂层覆盖的衬底支撑表面的导电体。以基板支撑表面为中心的涂层的至少一部分具有介于约80至约200微英寸之间的表面光洁度。在另一个实施例中，衬底支撑件包括阳极化铝体，其在主体部分上具有表面光洁度，其适于将基底支撑在约80至约200微英寸之间。

12. 发明申请

US20060185587A1 Methods and apparatus for reducing ink conglomerates during inkjet printing for flat panel display manufacturing 审中-公开
标题翻译：用于在用于平板显示器制造的喷墨印刷期间减少墨水聚集体的方法和装置
公开(公告)号：US20060185587A1
公开(公告)日：2006-08-24
申请号：US11061122
申请日：2005-02-18
申请人： Quanyuan Shang , Fan Sze , John White
发明人： Quanyuan Shang , Fan Sze , John White
IPC分类号： B05C11/00
CPC分类号： B41J2/17509 , B05B9/03 , B41J2/175 , B41J2/195
摘要： In a first aspect, an apparatus is provided for reducing an ink conglomerate during flat panel display manufacturing. The apparatus includes (1) an inkjet head adapted to dispense ink onto a substrate during inkjet printing; (2) an ink reservoir adapted to store ink for inkjet printing and supply the ink to the inkjet head; and (3) a conglomerate-reducing device adapted to break apart conglomerates in the ink before the ink reaches the inkjet head. Numerous other aspects are provided.
摘要翻译：在第一方面，提供一种用于在平板显示器制造期间减少墨水聚集体的装置。该设备包括（1）喷墨头，用于在喷墨打印期间将油墨分配到基底上; （2）适于存储用于喷墨印刷的油墨并将油墨供应到喷墨头的油墨储存器; 和（3）聚集物减少装置，其适于在墨水到达喷墨头之前分离墨中的聚集体。提供了许多其他方面。

13. 发明申请

US20060109290A1 Methods and apparatus for a high resolution inkjet fire pulse generator 失效
公开(公告)号：US20060109290A1
公开(公告)日：2006-05-25
申请号：US11238637
申请日：2005-09-29
申请人： Bassam Shamoun , Eugene Mirro , Janusz Jozwiak , Quanyuan Shang , Shinichi Kurita , John White
发明人： Bassam Shamoun , Eugene Mirro , Janusz Jozwiak , Quanyuan Shang , Shinichi Kurita , John White
IPC分类号： B41J29/38
CPC分类号： B41J3/407 , B41J2/04505 , B41J2/04541 , B41J2/04581 , B41J2/04588 , B41J2/0459 , B41J2/04593 , B41J2/125 , B41J3/28 , B41J3/543 , B41J25/001 , B41J25/003 , B41J25/005 , B41J29/15 , B41J29/393
摘要： The invention provides methods, systems, and drivers for controlling an inkjet printing system. The driver may include logic including a processor, memory coupled to the logic, and a fire pulse generator circuit coupled to the logic. The fire pulse generator may include a connector to facilitate coupling the driver to a print head. The fire pulse generator circuit may also include a fixed current source circuit adapted to generate a fire pulse with a constant slew rate that facilitates easy adjustment of ink drop size. The logic is adapted to receive an image and to convert the image to an image data file. The image data file is adapted to be used by the driver to trigger the print head to deposit ink into pixel wells on a substrate as the substrate is moved in a print direction. Numerous other aspects are disclosed.

14. 发明申请

US20060092218A1 Methods and apparatus for inkjet printing 审中-公开
标题翻译：喷墨打印的方法和装置
公开(公告)号：US20060092218A1
公开(公告)日：2006-05-04
申请号：US11019929
申请日：2004-12-22
申请人： John White , Fan Sze , Quanyuan Shang , Shinichi Kurita , Hongbin Ji , Janusz Jozwiak , Inchen Huang , Emanual Beer
发明人： John White , Fan Sze , Quanyuan Shang , Shinichi Kurita , Hongbin Ji , Janusz Jozwiak , Inchen Huang , Emanual Beer
IPC分类号： B41J2/15
CPC分类号： B41J25/003 , B41J3/407 , B41J3/543 , G02F1/1303 , G02F1/133516
摘要： In a first aspect, a system is provided for inkjet printing. The system includes (1) at least one apparatus for inkjet printing having (a) a first inkjet print head including a first plurality of nozzles adapted to selectively dispense a first ink; (b) a second inkjet print head including a second plurality of nozzles adapted to selectively dispense a second ink; and (c) a set including the first and second print heads arranged such that the set is adapted to dispense the first and second inks into respective adjacent color wells of a display pixel on a substrate during a printing pass; and (2) a stage adapted to support the substrate and transport the substrate below the at least one apparatus for inkjet printing during the printing pass. Numerous other aspects are provided.
摘要翻译：在第一方面，提供一种用于喷墨打印的系统。该系统包括（1）至少一种用于喷墨打印的设备，其具有（a）第一喷墨打印头，其包括适于选择性地分配第一墨的第一多个喷嘴; （b）第二喷墨打印头，包括适于选择性地分配第二墨的第二多个喷嘴; 以及（c）包括第一和第二打印头的组合，其被布置成使得该组适于在打印通过期间将第一和第二墨水分配到基板上的显示像素的相应相邻色阱中; 和（2）适于在印刷过程中支撑基材并将基底输送到用于喷墨印刷的至少一个装置下方的载物台。提供了许多其他方面。

15. 发明申请

US20050255253A1 Apparatus and methods for curing ink on a substrate using an electron beam 审中-公开
标题翻译：使用电子束在基板上固化油墨的装置和方法
公开(公告)号：US20050255253A1
公开(公告)日：2005-11-17
申请号：US11061121
申请日：2005-02-18
申请人： John White , Fan Sze , Quanyuan Shang , Shinichi Kurita , Hongbin Ji , Janusz Jozwiak , Inchen Huang , Emanuel Beer
发明人： John White , Fan Sze , Quanyuan Shang , Shinichi Kurita , Hongbin Ji , Janusz Jozwiak , Inchen Huang , Emanuel Beer
IPC分类号： B05D1/00 , B05D3/04 , B05D3/06 , B41J2/01 , B41J11/00 , B41M7/00 , C08F2/46
CPC分类号： B41J11/0015 , B05D3/0486 , B05D3/068 , B41M7/0072 , B41M7/0081
摘要： In a first aspect, a method of curing ink on a substrate is provided. The method includes the steps of (1) placing a substrate on a support stage of an ink curing chamber; and (2) scanning an electron beam over a surface of the substrate within the ink curing chamber so as to cure ink present on the substrate. Numerous other aspects are provided.
摘要翻译：在第一方面，提供一种在基板上固化油墨的方法。该方法包括以下步骤：（1）将基板放置在油墨固化室的支撑台上; 和（2）在油墨固化室内的基板的表面上扫描电子束，以固化存在于基板上的油墨。提供了许多其他方面。

16. 发明申请

US20050224181A1 Method and apparatus for in-situ film stack processing 失效
标题翻译：用于原位膜堆叠处理的方法和装置
公开(公告)号：US20050224181A1
公开(公告)日：2005-10-13
申请号：US10821723
申请日：2004-04-08
申请人： Walter Merry , Quanyuan Shang , John White
发明人： Walter Merry , Quanyuan Shang , John White
IPC分类号： B44C1/22 , C23F1/00 , G02F20060101 , H01J37/32 , H01L21/302
CPC分类号： H01J37/3244 , H01J37/32357 , H01J37/32522 , H01J37/32788 , H01J2237/3325 , H01J2237/334
摘要： Embodiments of a cluster tool, processing chamber and method for processing a film stack are provided. In one embodiment, a method for in-situ etching of silicon and metal layers of a film stack is provided that includes the steps of etching an upper metal layer of the film stack in a processing chamber to expose a portion of an underlying silicon layer, and etching a trench in the silicon layer without removing the substrate from the processing chamber. The invention is particularly useful for thin film transistor fabrication for flat panel displays.
摘要翻译：提供了一种用于处理薄膜叠层的集群工具，处理室和方法的实施例。在一个实施例中，提供了一种用于原位蚀刻膜堆叠的硅和金属层的方法，其包括以下步骤：在处理室中蚀刻膜堆叠的上金属层以暴露下层硅层的一部分，并且在硅层中蚀刻沟槽而不从处理室移除衬底。本发明对于平板显示器的薄膜晶体管制造特别有用。

17. 发明申请

US20060109296A1 Methods and apparatus for inkjet printing color filters for displays 审中-公开
标题翻译：用于显示器的喷墨打印彩色滤光片的方法和装置
公开(公告)号：US20060109296A1
公开(公告)日：2006-05-25
申请号：US11238632
申请日：2005-09-29
申请人： Bassam Shamoun , Janusz Jozwiak , Quanyuan Shang , Shinichi Kurita , John White
发明人： Bassam Shamoun , Janusz Jozwiak , Quanyuan Shang , Shinichi Kurita , John White
IPC分类号： B41J2/015
CPC分类号： B41J3/407 , B41J2/04505 , B41J2/04541 , B41J2/04581 , B41J2/04588 , B41J2/0459 , B41J2/04593 , B41J2/125 , B41J3/543 , B41J25/003 , B41J25/005 , B41J29/15 , B41J29/393
摘要： The invention provides methods, systems, and drivers for controlling an inkjet printing system. The driver may include logic including a processor, memory coupled to the logic, and a fire pulse generator circuit coupled to the logic. The fire pulse generator includes a connector to facilitate coupling the driver to a print head. The logic is adapted to receive an image and to convert the image to an image data file. The image data file is adapted to be used by the driver to trigger the print head to deposit ink into pixel wells on a substrate as the substrate is moved in a print direction. Numerous other aspects are disclosed.
摘要翻译：本发明提供了用于控制喷墨打印系统的方法，系统和驱动程序。驱动器可以包括逻辑，其包括处理器，耦合到逻辑的存储器和耦合到逻辑的触发脉冲发生器电路。火灾脉冲发生器包括一个连接器以便于驱动器与打印头的连接。该逻辑适于接收图像并将图像转换为图像数据文件。图像数据文件适于由驱动器使用，以在基板沿着打印方向移动时触发打印头将墨水沉积在基板上的像素孔中。公开了许多其他方面。

18. 发明申请

US20060092436A1 Methods and apparatus for inkjet printing of color filters for displays 审中-公开
标题翻译：用于显示器的彩色滤光片的喷墨打印的方法和装置
公开(公告)号：US20060092436A1
公开(公告)日：2006-05-04
申请号：US11061148
申请日：2005-02-18
申请人： John White , Fan Sze , Quanyuan Shang , Shinichi Kurita , Hongbin Ji , Janusz Jozwiak , Inchen Huang , Emanuel Beer
发明人： John White , Fan Sze , Quanyuan Shang , Shinichi Kurita , Hongbin Ji , Janusz Jozwiak , Inchen Huang , Emanuel Beer
IPC分类号： G06K15/02
CPC分类号： B41J3/407 , B41J2/04505 , B41J2/04541 , B41J2/04581 , B41J2/04588 , B41J2/0459 , B41J2/04593 , B41J2/125 , B41J3/28 , B41J3/543 , B41J25/001 , B41J25/003 , B41J25/005 , B41J29/15 , B41J29/393
摘要： Methods and apparatus are provided wherein data representative of an image is received, the data being indicative of a plurality of theoretical ink jetting drop positions. The data may be converted into an image data file, the image data file being indicative of a plurality of actual physical ink jetting drop positions, each physical ink jetting drop position corresponding to a theoretical ink jetting drop position. A print system may be controlled based on the image data file, wherein the actual physical ink jetting drop positions may each be selected based upon being within a predefined percentage of a print resolution in a printing direction of a corresponding one of the theoretical ink jetting drop positions.
摘要翻译：提供了方法和装置，其中接收到表示图像的数据，该数据表示多个理论喷墨滴落位置。数据可以被转换为图像数据文件，图像数据文件指示多个实际物理喷墨滴落位置，每个物理喷墨滴下位置对应于理论喷墨滴落位置。可以基于图像数据文件来控制打印系统，其中可以基于理论喷墨滴的相应一个的打印方向上的打印分辨率的预定百分比内的每一个来选择实际物理喷墨落下位置职位

19. 发明申请

US20070070107A1 Methods and systems for inkjet drop positioning 失效
标题翻译：喷墨定位方法和系统
公开(公告)号：US20070070107A1
公开(公告)日：2007-03-29
申请号：US11238636
申请日：2005-09-29
申请人： Bassam Shamoun , Janusz Jozwiak , Eugene Mirro , Quanyuan Shang , Shinichi Kurita , John White
发明人： Bassam Shamoun , Janusz Jozwiak , Eugene Mirro , Quanyuan Shang , Shinichi Kurita , John White
IPC分类号： B41J29/38
CPC分类号： B41J29/393
摘要： Methods and apparatus for inkjet inkjet drop positioning are provided. A first method includes determining an intended deposition location of an ink drop on a substrate, depositing the ink drop on the substrate using an inkjet printing system, detecting a deposited location of the deposited ink drop on the substrate, comparing the deposited location to the intended location, determining a difference between the deposited location and the intended location, and compensating for the difference between the deposited location and the intended location by adjusting a parameter of an inkjet printing system. Numerous other aspects are provided.
摘要翻译：提供喷墨喷墨滴定位的方法和装置。第一种方法包括确定墨滴在基底上的预期沉积位置，使用喷墨印刷系统将墨滴沉积在基底上，检测沉积的墨滴在基底上的沉积位置，将沉积位置与预期的位置进行比较确定存放位置与预期位置之间的差异，以及通过调整喷墨打印系统的参数来补偿存放位置与预期位置之间的差异。提供了许多其他方面。

20. 发明申请

US20060156975A1 Integrated apparatus of substrate treatment for manufacturing of color filters by inkjet printing systems 审中-公开
标题翻译：用于通过喷墨印刷系统制造滤色器的基板处理的集成设备
公开(公告)号：US20060156975A1
公开(公告)日：2006-07-20
申请号：US11180364
申请日：2005-07-13
申请人： Fan Sze , Quanyuan Shang , John White
发明人： Fan Sze , Quanyuan Shang , John White
IPC分类号： B05D5/12 , B05C5/00 , B05B7/06
CPC分类号： G02F1/133516 , G02F1/133512
摘要： Embodiments of the invention describe an apparatus and a method for treating a substrate of flat panel display is provided. In one embodiment, an inkjet printing system for a substrate of flat panel display comprises a chemical compound application assembly that applies chemical compound(s) on the substrate of flat panel display, a stage that supports the substrate of flat panel display and a stage positioning system that moves the stage, and an inkjet printing module that dispenses inkjet on the substrate of flat panel display. In another embodiment, a processing system for a substrate of flat panel display comprises a chemical compound application assembly that applies chemical compound(s) on the substrate of flat panel display wherein the chemical compound application assembly has a chemical compound applicator whose width substantially spans the width of the substrate of flat panel display, and a stage that supports the substrate of flat panel display and a stage positioning system that moves the stage. In another embodiment, a method of processing a substrate of flat panel display comprises depositing a layer comprising a chemical compound on the surface of a substrate of flat panel display by a chemical compound application assembly, whose width spans substantially the width of the substrate of flat panel display, of a processing system, and then inkjetting at least three colors on the substrate of flat panel display by an inkjet printing module of the processing system.
摘要翻译：本发明的实施例提供了一种用于处理平板显示器的基板的设备和方法。在一个实施例中，用于平板显示器的基板的喷墨打印系统包括在平板显示器的基板上施加化学化合物的化合物施加组件，支撑平板显示器的基板的台阶和平台定位移动台的系统以及在平板显示器的基板上分配喷墨的喷墨打印模块。在另一个实施例中，一种用于平板显示器的基板的处理系统包括化学化合物应用组件，该化合物施用组件在平板显示器的基板上施加化学化合物，其中化合物施用组件具有化学复合施用器，其宽度基本上跨越平板显示器的基板的宽度，以及支撑平板显示器的基板的台和使台阶移动的台架定位系统。在另一个实施例中，一种处理平板显示器的基板的方法包括通过化学化合物施加组件在平板显示器的基板的表面上沉积包含化合物的层，其宽度基本上跨过平面的基板的宽度面板显示器，然后通过处理系统的喷墨打印模块在平板显示器的基板上喷墨至少三种颜色。

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