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11. 发明授权

US06538722B2 Projection exposure method, projection exposure apparatus, and methods of manufacturing and optically cleaning the exposure apparatus 失效
公开(公告)号：US06538722B2
公开(公告)日：2003-03-25
申请号：US10143952
申请日：2002-05-14
申请人： Yukako Matsumoto , Susumu Mori , Taro Ogata
发明人： Yukako Matsumoto , Susumu Mori , Taro Ogata
IPC分类号： G03B2742
CPC分类号： G03F7/70108 , G03F7/2006 , G03F7/70208 , G03F7/70925
摘要： A laser beam emitted from an exposure laser beam source has a uniform illuminance distribution after passing through a fly-eye lens selected according to the aperture stop. The exposure light is projected onto a reticle on which a predetermined pattern is formed, and the reticle pattern is projected onto a wafer by means of a projection optical system having a pupil filter inserted therein. A cleaning light beam branching off from the exposure light beam is projected through a beam splitter and a total reflection mirror onto the fly-eye lens located at a retraction position. A plane-parallel plate at the retraction position is irradiated with a cleaning light beam. The fly-eye lens and the plane-parallel plate are self-cleansed by the cleaning light beam, so that the transmissivity is kept higher than a predetermined value during standby.

12. 发明授权

US5715037A Scanning exposure apparatus 失效
标题翻译：扫描曝光装置
公开(公告)号：US5715037A
公开(公告)日：1998-02-03
申请号：US615853
申请日：1996-03-12
申请人： Kazuaki Saiki , Susumu Mori , Hiroshi Shirasu
发明人： Kazuaki Saiki , Susumu Mori , Hiroshi Shirasu
IPC分类号： G03F7/20 , G03F9/00 , H01L21/027
CPC分类号： G03F7/70241 , G03F7/70275 , G03F7/70358 , G03F9/00 , G03F9/70
摘要： The present invention provides a scanning exposure apparatus for projecting an image of a pattern area of a mask having a first alignment mark onto a photosensitive substrate disposed on a substrate stage. A second alignment mark is provided on at least one of the photosensitive substrate and the substrate stage. The scanning exposure apparatus includes a plurality of projection optical systems disposed along a predetermined direction and adapted to receive the luminous fluxes passed through the mask and to project elected images of unchanged dimension of the plurality of illuminated regions of the mask onto the substrate. There is provided a mark detection system for detecting the first alignment mark on the mask and the second alignment mark, and at least one of the projection optical systems constitutes a part of the mark detection system.
摘要翻译：本发明提供了一种用于将具有第一对准标记的掩模的图案区域的图像投影到设置在基板台上的感光基板上的扫描曝光装置。在感光基板和基板台的至少一个上设置第二对准标记。扫描曝光装置包括沿着预定方向设置的多个投影光学系统，其适于接收通过掩模的光通量，并将掩模的多个照明区域的未改变尺寸的选定图像投影到基板上。提供了一种用于检测掩模上的第一对准标记和第二对准标记的标记检测系统，并且至少一个投影光学系统构成标记检测系统的一部分。

13. 发明授权

US4943733A Projection optical apparatus capable of measurement and compensation of distortion affecting reticle/wafer alignment 失效
标题翻译：能够测量和补偿影响光罩/晶片对准的失真的投影光学装置
公开(公告)号：US4943733A
公开(公告)日：1990-07-24
申请号：US436745
申请日：1989-11-15
申请人： Susumu Mori , Masato Shibuya
发明人： Susumu Mori , Masato Shibuya
IPC分类号： G03F7/20 , G03F9/00
CPC分类号： G03F7/706 , G03F7/70633 , G03F7/70691 , G03F9/70
摘要： A projection optical apparatus has a projection optical system for projecting an image of a reticle pattern on a stage-mounted semi-conductor wafer and includes a light-emitting surface of the stage. A photoelectric detector receives light from the light-emitting surface through the projection optical system and the reticle. The stage is moved to move a projected image of the light-emitting surface relative to the reticle, and the positional relation between the projected image of the light-emitting surface and the reticle is determined. Numerical apertures of various components of the projection optical apparatus are set for optimal performance.
摘要翻译：投影光学装置具有投影光学系统，用于将分划板图案的图像投影在载置半导体晶片上并且包括该台的发光表面。光电检测器通过投影光学系统和掩模版接收来自发光表面的光。移动舞台以相对于光罩移动发光表面的投影图像，并且确定发光表面和掩模版的投影图像之间的位置关系。设置投影光学装置的各种部件的数值孔径以获得最佳性能。

14. 发明申请

US20150015253A1 AUTOMATED IMAGE ANALYSIS FOR MAGNETIC RESONANCE IMAGING 审中-公开
标题翻译：自动图像分析用于磁共振成像
公开(公告)号：US20150015253A1
公开(公告)日：2015-01-15
申请号：US14248998
申请日：2014-04-09
申请人： Susumu Mori , Michael I. Miller , Jiangyang Zhang , Kenichi Oishi
发明人： Susumu Mori , Michael I. Miller , Jiangyang Zhang , Kenichi Oishi
IPC分类号： G01R33/56
CPC分类号： G01R33/56 , G01R33/5608 , G01R33/56341 , G06T7/0012 , G06T7/11 , G06T7/30 , G06T2207/10088 , G06T2207/30016
摘要： A magnetic resonance imaging (MRI) system, comprising: a magnetic resonance imaging scanner configured to generate a plurality of signals for forming at least one magnetic resonance image of a soft tissue region from a subject under observation, wherein the at least one magnetic resonance image provides at least one integrating feature to facilitate automatic segmentation; a signal processing system in communication with the magnetic resonance imaging scanner to receive the plurality of signals; and a data storage unit in communication with the signal processing system, wherein the data storage unit contains at least one template corresponding to the soft tissue region, wherein the signal processing system is adapted to process the plurality of signals received from the magnetic resonance imaging scanner to automatically perform segmentation for the soft tissue region of the subject under observation by utilizing the at least one template and the at least one integrating feature.
摘要翻译：一种磁共振成像（MRI）系统，包括：磁共振成像扫描器，被配置为产生用于从观察对象形成软组织区域的至少一个磁共振图像的多个信号，其中所述至少一个磁共振图像提供至少一个积分特征以促进自动分割; 信号处理系统，与所述磁共振成像扫描器通信以接收所述多个信号; 以及与所述信号处理系统通信的数据存储单元，其中所述数据存储单元包含与所述软组织区域对应的至少一个模板，其中所述信号处理系统适于处理从所述磁共振成像扫描器接收的所述多个信号通过利用所述至少一个模板和所述至少一个积分特征来自动执行观察对象的软组织区域的分割。

15. 发明授权

US08838201B2 Atlas-based analysis for image-based anatomic and functional data of organism 有权
标题翻译：基于图像的生物体解剖学和功能数据分析
公开(公告)号：US08838201B2
公开(公告)日：2014-09-16
申请号：US13703859
申请日：2011-06-22
申请人： Susumu Mori , Andreia V. Faria , Michael I. Miller , Kenichi Oishi
发明人： Susumu Mori , Andreia V. Faria , Michael I. Miller , Kenichi Oishi
IPC分类号： A61B5/05 , G06T7/00 , A61B6/00 , A61B5/055 , G06K9/20 , G01R33/56 , A61B6/03
CPC分类号： G06K9/2054 , A61B5/055 , A61B6/03 , A61B6/5217 , G01R33/5608 , G06T7/11 , G06T7/149 , G06T2207/10072 , G06T2207/20128 , G06T2207/30016
摘要： A non-invasive imaging system, including an imaging scanner suitable to generate an imaging signal from a tissue region of a subject under observation, the tissue region having at least one anatomical substructure and more than one constituent tissue type; a signal processing system in communication with the imaging scanner to receive the imaging signal from the imaging scanner; and a data storage unit in communication with the signal processing system, wherein the data storage unit is configured to store a parcellation atlas comprising spatial information of the at least one substructure in the tissue region, wherein the signal processing system is adapted to: reconstruct an image of the tissue region based on the imaging signal; parcellate, based on the parcellation atlas, the at least one anatomical substructure in the image; segment the more than one constituent tissue types in the image; and automatically identify, in the image, a portion of the at least one anatomical substructure that correspond to one of the more than one constituent tissue type.
摘要翻译：一种非侵入性成像系统，包括适于从观察对象的组织区域产生成像信号的成像扫描器，所述组织区域具有至少一个解剖学亚结构和多于一种构成组织类型; 与成像扫描仪通信的信号处理系统，以从成像扫描仪接收成像信号; 以及与所述信号处理系统通信的数据存储单元，其中所述数据存储单元被配置为存储包括所述组织区域中的所述至少一个子结构的空间信息的分割图集，其中所述信号处理系统适于：重构基于成像信号的组织区域的图像; 基于分割图谱分析图像中的至少一个解剖学亚结构; 在图像中分割多个组成组织类型; 并且在所述图像中自动识别所述至少一个解剖学亚结构的对应于多于一种构成组织类型之一的部分。

16. 发明申请

US20140181754A1 SYSTEM FOR A THREE-DIMENSIONAL INTERFACE AND DATABASE 审中-公开
标题翻译：三维接口和数据库系统
公开(公告)号：US20140181754A1
公开(公告)日：2014-06-26
申请号：US14129552
申请日：2012-06-28
申请人： Susumu Mori , Michael I. Miller
发明人： Susumu Mori , Michael I. Miller
IPC分类号： G06F3/0484 , G06F3/0481
CPC分类号： G06F3/04842 , G06F3/04815 , G06F16/444 , G06F16/48 , G06T19/00 , G06T2210/41 , G16H50/50
摘要： An embodiment in accordance with the present invention provides a system and method for a three-dimensional interface for interacting with a database. The three-dimensional interface can include an interactive three-dimensional atlas depicting an element of anatomy, machine, device, or other object. Given the three-dimensional nature of the atlas, a user can zoom in on particular areas to view them with more specificity. Different structural points of the anatomy are labeled with names or coordinates, such that the user can select one of the structural points and search a database for information related to that specific structural point. The user can also use specific keywords to search with respect to the specific structural point selected. The three-dimensional interface and atlas are displayed to the user on a computing device that can either house the database within its memory or alternately communicate with the database over a network.
摘要翻译：根据本发明的实施例提供了一种用于与数据库进行交互的三维界面的系统和方法。三维界面可以包括描绘解剖结构，机器，装置或其他对象的元件的交互式三维图集。鉴于地图集的三维性质，用户可以放大特定区域以更具体地查看它们。解剖结构的不同结构点用名称或坐标标记，使得用户可以选择结构点之一并搜索数据库以获得与该特定结构点相关的信息。用户还可以使用特定关键词来搜索所选择的特定结构点。三维界面和图集在计算设备上显示给用户，该计算设备可以将数据库存储在其存储器内，或者通过网络交替地与数据库通信。

17. 发明申请

US20130223716A1 IMAGE SEARCH ENGINE 有权
标题翻译：图像搜索引擎
公开(公告)号：US20130223716A1
公开(公告)日：2013-08-29
申请号：US13824853
申请日：2011-10-25
申请人： Susumu Mori , Michael I. Miller , Kenichi Oishi , Andreia V. Faria
发明人： Susumu Mori , Michael I. Miller , Kenichi Oishi , Andreia V. Faria
IPC分类号： G06T7/00
CPC分类号： G06T7/0014 , A61B5/0013 , A61B5/055 , A61B6/032 , A61B6/501 , A61B6/56 , A61B8/56 , A61B8/565 , G06F17/30247 , G06F19/00 , G06F19/321 , G16H50/70
摘要： An embodiment of the current invention includes a non-invasive imaging system, comprising: an imaging scanner suitable to generate an image representing a tissue region of a subject under observation, the tissue region having at least one substructure and the image comprising a plurality of image voxels; a signal processing system in communication with the imaging scanner to receive the imaging signal from the imaging scanner; and a data storage unit in communication with the signal processing system, wherein the data storage unit is configured to store: an atlas comprising spatial information of the at least one substructure in the tissue region, and a database comprising a plurality of pre-stored medical images representing the tissue region, and wherein the signal processing system is adapted to: identify, based on the atlas and for each of the at least one substructure, a corresponding portion of image voxels in the image; provide a computed quantification of the corresponding portion of image voxels for each of the at least one substructure of the tissue region by performing spatial filtering on the image; and search the database to provide at least one selected medical image from the plurality of pre-stored medical images, the at least one selected medical image having a corresponding quantification that is substantially similar to the computed quantification.
摘要翻译：本发明的一个实施例包括一种非侵入性成像系统，包括：成像扫描仪，其适于产生表示观察对象的组织区域的图像，所述组织区域具有至少一个子结构，并且所述图像包括多个图像体素与成像扫描仪通信的信号处理系统，以从成像扫描仪接收成像信号; 以及与所述信号处理系统通信的数据存储单元，其中所述数据存储单元被配置为存储：包括所述组织区域中的所述至少一个子结构的空间信息的图集，以及包括多个预先存储的医疗表示组织区域的图像，并且其中所述信号处理系统适于：基于所述图集并且针对所述至少一个子结构中的每一个识别所述图像中的图像体素的相应部分; 通过对图像执行空间滤波来提供组织区域的至少一个子结构中的每一个的图像体素的相应部分的计算定量; 并且搜索所述数据库以从所述多个预先存储的医学图像中提供至少一个所选择的医学图像，所述至少一个所选择的医学图像具有与所计算的定量基本相似的相应量化。

18. 发明申请

US20100284595A1 AUTOMATED IMAGE ANALYSIS FOR MAGNETIC RESONANCE IMAGING 有权
标题翻译：自动图像分析用于磁共振成像
公开(公告)号：US20100284595A1
公开(公告)日：2010-11-11
申请号：US12747816
申请日：2009-02-02
申请人： Susumu Mori , Michael I. Miller , Jiangyang Zhang , Kenichi Oishi
发明人： Susumu Mori , Michael I. Miller , Jiangyang Zhang , Kenichi Oishi
IPC分类号： G06K9/00 , A61B5/055
CPC分类号： G01R33/56 , G01R33/5608 , G01R33/56341 , G06T7/0012 , G06T7/11 , G06T7/30 , G06T2207/10088 , G06T2207/30016
摘要： A magnetic resonance imaging (MRI) system, comprising: a magnetic resonance imaging scanner configured to generate a plurality of signals for forming at least one magnetic resonance image of a soft tissue region from a subject under observation, wherein the at least one magnetic resonance image provides at least one integrating feature to facilitate automatic segmentation; a signal processing system in communication with the magnetic resonance imaging scanner to receive the plurality of signals; and a data storage unit in communication with the signal processing system, wherein the data storage unit contains at least one template corresponding to the soft tissue region, wherein the signal processing system is adapted to process the plurality of signals received from the magnetic resonance imaging scanner to automatically perform segmentation for the soft tissue region of the subject under observation by utilizing the at least one template and the at least one integrating feature.
摘要翻译：一种磁共振成像（MRI）系统，包括：磁共振成像扫描器，被配置为产生用于从观察对象形成软组织区域的至少一个磁共振图像的多个信号，其中所述至少一个磁共振图像提供至少一个积分特征以促进自动分割; 信号处理系统，与所述磁共振成像扫描器通信以接收所述多个信号; 以及与所述信号处理系统通信的数据存储单元，其中所述数据存储单元包含与所述软组织区域相对应的至少一个模板，其中所述信号处理系统适于处理从所述磁共振成像扫描器接收的所述多个信号通过利用所述至少一个模板和所述至少一个积分特征来自动执行观察对象的软组织区域的分割。

19. 发明授权

US5625436A Scanning type exposure apparatus and exposure method 失效
标题翻译：扫描式曝光装置和曝光方法
公开(公告)号：US5625436A
公开(公告)日：1997-04-29
申请号：US689691
申请日：1996-08-13
申请人： Masamitsu Yanagihara , Susumu Mori , Tsuyoshi Naraki , Masami Seki , Seiji Miyazaki , Tsuyoshi Narabe , Hiroshi Chiba
发明人： Masamitsu Yanagihara , Susumu Mori , Tsuyoshi Naraki , Masami Seki , Seiji Miyazaki , Tsuyoshi Narabe , Hiroshi Chiba
IPC分类号： G03F7/20 , G03F9/00 , H01L21/027
CPC分类号： G03F7/70275 , G03F7/70241 , G03F7/70258 , G03F7/70358 , G03F7/70858 , G03F7/70883 , G03F9/70
摘要： In a scanning type exposure apparatus for exposing an entire surface of a pattern region on a mask to a substrate by scanning the mask and the substrate with respect to a projection optical system in a predetermined direction with a speed ratio in accordance with a magnification of the projection optical system, there are provided a plurality of illumination optical systems for illuminating respective areas of the pattern region on the mask with respective light fluxes from respective light source; a plurality of projection optical systems arranged so as to correspond to the respective illumination optical systems, the projection optical systems projecting respective images of the areas illuminated by the respective illumination optical systems onto respective projection areas on the substrate; a memory device for obtaining and storing a change of shape of the substrate; a magnification changing device for changing a magnification of at least one of the projection optical systems in accordance with the change of shape of the substrate; and an imaging position changing device for changing the position of said image projected via the at least one projection optical systems in accordance with the change in magnification.
摘要翻译：在扫描型曝光装置中，通过以与所述掩模和所述基板相对于所述投影光学系统的倍率相对于投影光学系统沿预定方向扫描所述掩模上的图案区域的整个表面，提供了多个照明光学系统，用于利用来自各个光源的各个光束照射掩模上的图案区域的各个区域; 多个投影光学系统被布置为对应于各个照明光学系统，所述投影光学系统将由各个照明光学系统照射的区域的各个图像投射到所述基板上的相应的投影区域上; 用于获取和存储基板的形状变化的存储装置; 放大率改变装置，用于根据基板的形状变化来改变至少一个投影光学系统的放大率; 以及成像位置改变装置，用于根据放大率的变化改变经由至少一个投影光学系统投影的所述图像的位置。

20. 发明授权

US5579147A Scanning light exposure apparatus 失效
标题翻译：扫描曝光装置
公开(公告)号：US5579147A
公开(公告)日：1996-11-26
申请号：US354715
申请日：1994-12-06
申请人： Susumu Mori , Tsuyoshi Naraki
发明人： Susumu Mori , Tsuyoshi Naraki
IPC分类号： G03B27/50 , G03F7/20 , H01L21/027 , G02B26/08
CPC分类号： G03F7/7005 , G03F7/70241 , G03F7/70275 , G03F7/70358 , G03F7/70475 , G03F7/70791
摘要： A scanning light exposure apparatus comprises illumination optical systems for radiating light beams to a plurality of sub-areas in a pattern area of a mask, a plurality of projection optical systems arranged along a predetermined direction for projecting erected images of unity magnification of the sub-areas by the light beams transmitted through the mask onto a photo-sensitive substrate, a diaphragm member arranged at a substantially conjugate position to the photo-sensitive substrate in each illumination optical system for limiting a projection area of the sub-area to the photo-sensitive substrate, scanning means for synchronously scanning said mask and said photo-sensitive substrate substantially transversely to the predetermined direction relative to said projection optical systems and diaphragm control means for changing a width of an aperture of each diaphragm member along a direction transverse to the predetermined direction.
摘要翻译：扫描曝光装置包括用于将光束照射到掩模的图案区域中的多个子区域的照明光学系统，沿着预定方向布置的多个投影光学系统，用于投影子像素的单位放大率的竖立图像，通过掩模将光束透射到感光基板上的区域，在每个照明光学系统中布置在与感光基板基本共轭的位置处的光阑部件，用于将子区域的投影面积限制在光敏基片上，敏感基板，用于相对于所述投影光学系统和隔膜控制装置基本横向于预定方向同步扫描所述掩模和所述感光基板的扫描装置，用于沿横向于预定的方向改变每个隔膜部件的孔的宽度方向。

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