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    • 12. 发明申请
    • REDUCTION OF WARPAGE OF MULTILAYERED SUBSTRATE OR PACKAGE
    • 减少多层基板或包装的保修
    • US20150248516A1
    • 2015-09-03
    • US14193004
    • 2014-02-28
    • International Business Machines Corporation
    • Sayuri HadaKeiji Matsumoto
    • G06F17/50
    • G06F17/5081G06F17/5018G06F17/5068G06F17/5077G06F17/5086G06F2217/12Y02P90/265
    • A method that minimizes adjustment of a wiring layer in reducing a warpage of a multilayered substrate and enables location of a part of a wiring layer that needs correction in order to reduce the warpage. The difference in average coefficient of thermal expansion, Δα, varies in a substrate. The method focuses in on the difference in Δα with a great length scale (low frequency) having a relatively significant effect on the warpage compared to the difference in Δα with a smaller length scale (high frequency) and corrects only the difference in Δα with a greater length scale. The distribution of the difference in Δα in a plane of substrate is determined. Then digital filtering is performed to extract only the difference in Δα with a low frequency and the difference in Δα between before and after correction, thereby revealing a part that requires correction.
    • 一种减少布线层的调整以减少多层基板的翘曲的方法,并且能够定位需要校正的布线层的一部分以减少翘曲。 平均热膨胀系数ΔDgα的差在基板中变化。 该方法的重点在于具有较大长度尺度(低频)的差异,与具有较小长度尺度(高频率)的差异具有比较显着的翘曲效应,并且仅纠正差异 in&Dgr;α具有更大的长度尺度。 确定底物平面上的&Dgr;α差异的分布。 然后进行数字滤波,仅提取低频的Dgr;α和校正前后的Dgr;α的差异,从而显示需要校正的部分。
    • 19. 发明授权
    • Reduction of warpage of multilayered substrate or package
    • 降低多层基材或包装的翘曲
    • US09384314B2
    • 2016-07-05
    • US14193004
    • 2014-02-28
    • International Business Machines Corporation
    • Sayuri HadaKeiji Matsumoto
    • H01L21/20G06F17/50
    • G06F17/5081G06F17/5018G06F17/5068G06F17/5077G06F17/5086G06F2217/12Y02P90/265
    • A method that minimizes adjustment of a wiring layer in reducing a warpage of a multilayered substrate and enables location of a part of a wiring layer that needs correction in order to reduce the warpage. The difference in average coefficient of thermal expansion, Δα, varies in a substrate. The method focuses in on the difference in Δα with a great length scale (low frequency) having a relatively significant effect on the warpage compared to the difference in Δα with a smaller length scale (high frequency) and corrects only the difference in Δα with a greater length scale. The distribution of the difference in Δα in a plane of substrate is determined. Then digital filtering is performed to extract only the difference in Δα with a low frequency and the difference in Δα between before and after correction, thereby revealing a part that requires correction.
    • 一种减少布线层的调整以减少多层基板的翘曲的方法,并且能够定位需要校正的布线层的一部分以减少翘曲。 平均热膨胀系数ΔDgα的差在基板中变化。 该方法的重点在于具有较大长度尺度(低频)的差异,与具有较小长度尺度(高频率)的差异具有比较显着的翘曲效应,并且仅纠正差异 in&Dgr;α具有更大的长度尺度。 确定底物平面上的&Dgr;α差异的分布。 然后进行数字滤波,仅提取低频的Dgr;α和校正前后的Dgr;α的差异,从而显示需要校正的部分。