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    • 11. 发明申请
    • Semiconductor device
    • 半导体器件
    • US20050179133A1
    • 2005-08-18
    • US10975448
    • 2004-10-29
    • Tomio IwasakiHiroshi Moriya
    • Tomio IwasakiHiroshi Moriya
    • H01L27/10H01L21/8246H01L23/48H01L27/112
    • H01L27/11206H01L27/112
    • A semiconductor device provided with a mechanism for recording information is intended to provide a highly reliable one time programmable memory and to provide one time programmable memories at a high yield. In a one time programmable memory, a state in which the electrical resistance is high is varied to another state in which it is low by silicifying a metal with silicon and matching the high resistance state (a metal/silicon separated state) and the low resistance state (a silicide state) to 0 and 1, respectively, wherein there is used an underlayer material which reduces the interfacial energy in the interface with the silicide layer, which constitutes the low resistance state.
    • 设置有用于记录信息的机构的半导体器件旨在提供高度可靠的一次可编程存储器,并以高产量提供一次可编程存储器。 在一次可编程存储器中,电阻高的状态通过用硅硅化硅并匹配高电阻状态(金属/硅分离状态)和低电阻而变化到另一个低电位的状态 状态(硅化物状态)分别为0和1,其中使用降低与构成低电阻状态的硅化物层的界面中的界面能的底层材料。
    • 13. 发明授权
    • Semiconductor device
    • 半导体器件
    • US07608899B2
    • 2009-10-27
    • US11936443
    • 2007-11-07
    • Tomio IwasakiHiroshi MoriyaHideo MiuraShuji Ikeda
    • Tomio IwasakiHiroshi MoriyaHideo MiuraShuji Ikeda
    • H01L29/76H01L29/94
    • H01L21/823462H01L21/28097H01L21/28185H01L21/28194H01L21/28518H01L21/31604H01L21/823412H01L27/1085H01L27/10873H01L29/045H01L29/4908H01L29/4975H01L29/513H01L29/516H01L29/517H01L29/78696
    • Diffusion layers 2-5 are formed on a silicon substrate 1, and gate dielectric films 6, 7 and gate lectrodes 8, 9 are formed on these diffusion layers 2-5 so as to be MOS transistors. Zirconium oxide or hafnium oxide is used as a major component of gate dielectric films 6, 7. Gate dielectric films 6, 7 are formed, for example, by CVD. As substrate 1, there is used one of which the surface is (111) crystal face so as to prevent diffusion of oxygen into silicon substrate 1 or gate electrodes 8, 9. In case of using a substrate of which the surface is (111) crystal face, diffusion coefficient of oxygen is less than 1/100 of the case in which a silicon substrate of which the surface is (001) crystal face is used, and oxygen diffusion is controlled. Thus, oxygen diffusion is controlled, generation of leakage current is prevented and properties are improved. There is realized a semiconductor device having high reliability and capable of preventing deterioration of characteristics concomitant to miniaturization.
    • 在硅衬底1上形成扩散层2-5,并且在这些扩散层2-5上形成栅极电介质膜6,7和栅极放电层8,9作为MOS晶体管。 氧化锆或氧化铪被用作栅极电介质膜6,7的主要成分。例如通过CVD形成栅极绝缘膜6,7。 作为基板1,使用表面为(111)晶面的其中之一,以防止氧扩散到硅基板1或栅电极8,9中。在使用其表面为(111)的基板的情况下, 在使用表面为(001)晶面的硅衬底的情况下,氧的扩散系数小于氧的扩散系数的1/100,并且控制氧扩散。 因此,控制氧扩散,防止漏电流的产生,提高性能。 实现了具有高可靠性并且能够防止伴随小型化的特性劣化的半导体器件。