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11. 发明授权

US5179499A Multi-dimensional precision micro-actuator 失效
标题翻译：多维精密微致动器
公开(公告)号：US5179499A
公开(公告)日：1993-01-12
申请号：US868102
申请日：1992-04-14
申请人： Noel C. MacDonald , Jun J. Yao
发明人： Noel C. MacDonald , Jun J. Yao
IPC分类号： B81C1/00 , G01Q60/16 , H01H1/00 , H01H59/00 , H02N1/00
CPC分类号： H02N1/008 , B82Y35/00 , G01Q10/04 , H01H1/0094 , H01H2001/0068 , H01H2001/0078
摘要： Mechanically movable microstructure fabricated from a single crystal such as silicon and actuator structures for providing a high degree of controlled, precision motion of nanometer-scale.
摘要翻译：由诸如硅和致动器结构的单晶制造的机械可移动微结构，用于提供纳米级的高度受控精密运动。

12. 发明授权

US06417743B1 Micro electromechanical isolator 有权
标题翻译：微机电隔离器
公开(公告)号：US06417743B1
公开(公告)日：2002-07-09
申请号：US09400125
申请日：1999-09-21
申请人： Robert E. Mihailovich , Jun J. Yao
发明人： Robert E. Mihailovich , Jun J. Yao
IPC分类号： H03H900
CPC分类号： H03H9/462
摘要： The present invention relates to a micro electromechanical (MEM) isolator in which an input signal induces an output signal by means of electrically insulating mechanical motion. The MEM isolator device comprises a dielectric moveable platform suspended above a substrate by flexible beams. A drive and a control capacitor each have one electrode supported by the platform and one electrode supported by the substrate. Coupling between electrical and mechanical energies is achieved by providing an input signal to the drive capacitor to induce platform motion. When the input signal is fed to the drive capacitor, it actuates electrostatic motion of the platform resulting in a change in the value of the control capacitance. The change in the control capacitance is converted via a simple electronics circuit into an output that mirrors the input but is electrically isolated therefrom. The advantages of such a device include simple electrical isolation provided by the dielectric platform, built in signal-debounce inherent to the structure mechanics, and economical integration with silicon integrated circuits.
摘要翻译：本发明涉及一种微机电（MEM）隔离器，其中输入信号通过电绝缘的机械运动来感应输出信号。 MEM隔离器装置包括通过柔性梁悬挂在衬底上的介电可移动平台。驱动器和控制电容器各自具有由平台支撑的一个电极和由基板支撑的一个电极。通过向驱动电容器提供输入信号以引起平台运动来实现电和机械能之间的耦合。当输入信号被馈送到驱动电容器时，它致动平台的静电运动，导致控制电容值的变化。控制电容的变化通过简单的电子电路转换成反映输入的输出，但与之电隔离。这种器件的优点包括由介电平台提供的简单的电隔离，内置于结构力学固有的信号去抖动，以及与硅集成电路的经济集成。

13. 发明授权

US5578976A Micro electromechanical RF switch 失效
标题翻译：微机电RF开关
公开(公告)号：US5578976A
公开(公告)日：1996-11-26
申请号：US493445
申请日：1995-06-22
申请人： Jun J. Yao
发明人： Jun J. Yao
IPC分类号： H01H1/20 , H01H59/00 , H01P1/10 , H01H57/00
CPC分类号： H01H59/0009 , H01H1/20
摘要： A micro electromechanical RF switch is fabricated on a substrate using a suspended microbeam as a cantilevered actuator arm. From an anchor structure, the cantilever arm extends over a ground line and a gapped signal line that comprise microstrips on the substrate. A metal contact formed on the bottom of the cantilever arm remote from the anchor is positioned facing the signal line gap. An electrode atop the cantilever arm forms a capacitor structure above the ground line. The capacitor structure may include a grid of holes extending through the top electrode and cantilever arm to reduce structural mass and the squeeze damping effect during switch actuation. The switch is actuated by application of a voltage on the top electrode, which causes electrostatic forces to attract the capacitor structure toward the ground line so that the metal contact closes the gap in the signal line. The switch functions from DC to at least 4 GHz with an electrical isolation of -50 dB and an insertion loss of 0.1 dB at 4 GHz. A low temperature fabrication process allows the switch to be monolithically integrated with microwave and millimeter wave integrated circuits (MMICs). The RF switch has applications in telecommunications, including signal routing for microwave and millimeter wave IC designs, MEMS impedance matching networks, and band-switched tunable filters for frequency-agile communications.
摘要翻译：使用悬臂微束作为悬臂式致动器臂，在基板上制造微机电RF开关。从锚结构中，悬臂在地线和覆盖信号线上延伸，该信号线在衬底上包括微带。形成在远离锚固件的悬臂的底部上的金属接触件被定位成面对信号线间隙。悬臂上方的电极在地线上方形成电容器结构。电容器结构可以包括延伸穿过顶部电极和悬臂的孔格栅，以减少开关致动期间的结构质量和挤压阻尼效应。通过在顶部电极上施加电压来致动开关，这导致静电力将电容器结构吸引到接地线，使得金属触点闭合信号线中的间隙。该开关从DC到至少4 GHz，电隔离为-50 dB，在4 GHz时插入损耗为0.1 dB。低温制造工艺允许开关与微波和毫米波集成电路（MMIC）单片集成。 RF开关具有电信应用，包括用于微波和毫米波IC设计的信号路由，MEMS阻抗匹配网络和用于频率敏捷通信的带通可调谐滤波器。

14. 发明授权

US06803755B2 Microelectromechanical system (MEMS) with improved beam suspension 失效
标题翻译：具有改进的束悬浮的微机电系统（MEMS）
公开(公告)号：US06803755B2
公开(公告)日：2004-10-12
申请号：US10001412
申请日：2001-10-25
申请人： Patrick C. Herbert , Jeffrey R. Annis , Jun J. Yao , Winfred L. Morris , Henric Larsson , Richard D. Harris , Robert J. Kretschmann
发明人： Patrick C. Herbert , Jeffrey R. Annis , Jun J. Yao , Winfred L. Morris , Henric Larsson , Richard D. Harris , Robert J. Kretschmann
IPC分类号： G01R3302
CPC分类号： H03H9/462 , B81B3/0072 , B81B2201/032 , B81B2203/0109 , B81B2203/051
摘要： In a MEMS device employing a beam supported by transverse arms, potential bowing of the transverse arms caused by fabrication processes, temperature or local self-heating from resistive losses is accommodated by flexible terminations of the transverse arms. Alternatively, this bowing is controlled so as to provide selective biasing to the beam or mechanical advantage in the sensing of beam motion.
摘要翻译：在使用由横臂支撑的光束的MEMS装置中，通过制造工艺引起的横向臂的电位弯曲，来自电阻损耗的温度或局部自加热由横向臂的柔性端接来适应。或者，该弯曲被控制以便在光束运动的感测中提供对光束的选择偏置或机械优点。

15. 发明授权

US6074890A Method of fabricating suspended single crystal silicon micro electro mechanical system (MEMS) devices 失效
标题翻译：制造悬浮单晶硅微机电系统（MEMS）器件的方法
公开(公告)号：US6074890A
公开(公告)日：2000-06-13
申请号：US4683
申请日：1998-01-08
申请人： Jun J. Yao , Sangtae Park
发明人： Jun J. Yao , Sangtae Park
IPC分类号： B81B3/00 , H01H59/00 , H01L21/00
CPC分类号： B81C1/00484 , B81B2203/0118 , B81B2203/0307 , B81B2203/0315 , H01H2001/0078 , H01H59/0009
摘要： A method of fabricating MEMS devices having a master/slave structure in which the motion of a signal device is slaved to a control device through the fabrication of a mechanical coupler. The preferred fabrication uses a backside dry etch to release the suspended MEMS devices and mechanical coupler.
摘要翻译：一种制造具有主/从结构的MEMS器件的方法，其中信号器件的运动通过机械耦合器的制造被驱动到控制器件。优选的制造使用背面干蚀刻来释放悬置的MEMS器件和机械耦合器。

16. 发明授权

US5397904A Transistor microstructure 失效
标题翻译：晶体管微结构
公开(公告)号：US5397904A
公开(公告)日：1995-03-14
申请号：US906873
申请日：1992-07-02
申请人： Susanne C. Arney , Noel C. MacDonald , Jun J. Yao
发明人： Susanne C. Arney , Noel C. MacDonald , Jun J. Yao
IPC分类号： H01L29/06 , H01L29/423 , H01L29/73 , H01L29/786
CPC分类号： H01L29/0665 , B82Y10/00 , H01L29/0673 , H01L29/42384 , H01L29/7317 , H01L29/78654 , H01L29/78696
摘要： A method for isolating transistors and a microstructure for providing isolation for transistors includes a beam located on a substrate. The beam is formed from the same material as the substrate, preferably single crystal silicon, and is released so as to be suspended in the cavity and spaced apart from the substrate. The beam is supported in the cavity by a cantilever structure or by spaced pedestals, or both. One or more transistors are fabricated in the beam, and are thus isolated from the substrate and may be isolated from each other if desired. Contact beams may also be provided to contact the transistor electrodes for interconnection of adjacent transistors or connection of the transistors to electrical circuitry on the substrate. The contact beams also provide mechanical support for the beams.Multiple beams in side-by-side arrays or stacked arrays may be provided.
摘要翻译：用于隔离晶体管的方法和用于提供晶体管隔离的微结构包括位于衬底上的光束。光束由与衬底相同的材料形成，优选为单晶硅，并且被释放以便悬挂在空腔中并与衬底间隔开。梁通过悬臂结构或间隔开的支座或两者支撑在腔体中。一个或多个晶体管制造在光束中，并且因此与衬底隔离，并且如果需要可以彼此隔离。还可以提供接触光束以接触晶体管电极，用于相邻晶体管的互连或将晶体管连接到衬底上的电路。接触梁还为梁提供机械支撑。可以提供并排阵列或堆叠阵列中的多个光束。

17. 发明授权

US07346981B2 Method for fabricating microelectromechanical system (MEMS) devices 有权
标题翻译：用于制造微机电系统（MEMS）装置的方法
公开(公告)号：US07346981B2
公开(公告)日：2008-03-25
申请号：US10453031
申请日：2003-06-02
申请人： Robert L. Borwick, III , Philip A. Stupar , Jeffrey F. DeNatale , Jun J. Yao , Sangtae Park
发明人： Robert L. Borwick, III , Philip A. Stupar , Jeffrey F. DeNatale , Jun J. Yao , Sangtae Park
IPC分类号： H05K3/10
CPC分类号： H02N1/008 , Y10T29/49117 , Y10T29/49126 , Y10T29/49155
摘要： A process for fabricating a MEMS device comprises the steps of depositing and patterning on one side of a wafer a layer of material having a preselected electrical resistivity; bonding a substrate to the one side of the wafer using an adhesive bonding agent, the substrate overlying the patterned layer of material; selectively removing portions of the wafer from the side opposite the one side to define stationary and movable MEMS elements; and selectively removing the adhesive bonding agent to release the movable MEMS element, at least a portion of the layer of material being disposed so as to be attached to the movable MEMS element.
摘要翻译：制造MEMS器件的方法包括以下步骤：在晶片的一侧上沉积和图案化具有预选电阻率的材料层; 使用粘合剂将衬底粘合到晶片的一侧，所述衬底覆盖所述图案化材料层; 选择性地从一侧相反的一侧去除晶片的部分以限定静止和可移动的MEMS元件; 并且选择性地去除所述粘合剂粘合剂以释放所述可移动MEMS元件，所述材料层的至少一部分被设置成附接到所述可移动MEMS元件。

18. 发明授权

US6159385A Process for manufacture of micro electromechanical devices having high electrical isolation 失效
公开(公告)号：US6159385A
公开(公告)日：2000-12-12
申请号：US75008
申请日：1998-05-08
申请人： Jun J. Yao , Robert J. Anderson
发明人： Jun J. Yao , Robert J. Anderson
IPC分类号： B81C1/00 , B81B3/00 , H01L27/12 , H01P11/00 , B44C1/22 , C03C15/00 , C03C25/68 , H01L21/00
CPC分类号： B81C1/00484 , B81B2203/0118 , B81C2201/0108 , B81C2201/014 , B81C2201/019
摘要： The present invention relates to a fabrication process relating to a fabrication process for manufacture of micro-electromechanical (MEM) devices such as cantilever supported beams. This fabrication process requires only two lithographic masking steps and offers moveable electromechanical devices with high electrical isolation. A preferred embodiment of the process uses electrically insulating glass substrate as the carrier substrate and single crystal silicon as the MEM component material. The process further includes deposition of an optional layer of insulating material such as silicon dioxide on top of a layer of doped silicon grown on a silicon substrate. The silicon dioxide is epoxy bonded to the glass substrate to create a silicon--silicon dioxide-epoxy-glass structure. The silicon is patterned using anisotropic plasma dry etching techniques. A second patterning then follows to pattern the silicon dioxide layer and an oxygen plasma etch is performed to undercut the epoxy film and to release the silicon MEM component. This two-mask process provides single crystal silicon MEMs with electrically isolated MEM component. Retaining silicon dioxide insulating material in selected areas mechanically supports the MEM component.

19. 发明授权

US5235187A Methods of fabricating integrated, aligned tunneling tip pairs 失效
标题翻译：整合，对齐的隧道提花对的方法
公开(公告)号：US5235187A
公开(公告)日：1993-08-10
申请号：US868138
申请日：1992-04-14
申请人： Susanne C. Arney , Noel C. MacDonald , Jun J. Yao
发明人： Susanne C. Arney , Noel C. MacDonald , Jun J. Yao
IPC分类号： G01B7/34 , B81B1/00 , B81B3/00 , G01B7/00 , G01N37/00 , G01Q20/04 , G01Q60/16 , G01Q70/12 , G01Q70/14 , H01J37/28 , H02N1/00
CPC分类号： H02N1/008 , B82Y35/00 , G01Q20/04 , G01Q60/16 , Y10S977/874
摘要： Self-aligned, opposed, nanometer dimension tips are fabricated in pairs, one of each pair being located on a movable, single crystal beam, with the beam being movable in three dimensions with respect to a substrate carrying the other tip of a pair. Motion of one tip with respect to the other is controlled or sensed by transducers formed on the supporting beams. Spring means in each beam allow axial motion of the beam. The tips and beams are fabricated from single crystal silicon substrate, and the tips may be electrically isolated from the substrate by fabricating insulating segments in the beam structure.
摘要翻译：自对准的，相对的，纳米尺寸的尖端成对制造，每对中的一个位于可移动的单晶束上，其中光束可相对于承载一对的另一个尖端的基板在三维空间中移动。一个尖端相对于另一个尖端的运动由形成在支撑梁上的换能器控制或感测。每个梁中的弹簧装置允许梁的轴向运动。尖端和光束由单晶硅衬底制成，并且尖端可以通过在梁结构中制造绝缘段而与衬底电隔离。

20. 发明授权

US07612423B2 Signal-carrying flexure structure for micro-electromechanical devices 失效
标题翻译：用于微机电装置的信号承载挠曲结构
公开(公告)号：US07612423B2
公开(公告)日：2009-11-03
申请号：US11218082
申请日：2005-08-31
申请人： Jun J. Yao
发明人： Jun J. Yao
IPC分类号： H01L29/78
CPC分类号： H02N1/006
摘要： A signal-carrying flexure structure for a MEM device comprises at least two conductive flexure segments having respective cross-sectional areas, and at least one crosspiece affixed to the flexure segments to operatively couple the segments together such that the flexure segments and crosspiece form a single flexure structure. The resulting flexure structure's spring constant is less than that of a solid flexure having a comparable total cross-sectional area, while its resistance is approximately equal to that of the solid flexure.
摘要翻译：用于MEM装置的信号承载挠曲结构包括至少两个具有相应截面面积的导电弯曲部分，以及固定到挠曲部分的至少一个横档，以将该部分可操作地连接在一起，使得挠曲部分和横档形成单个弯曲结构。所产生的弯曲结构的弹簧常数小于具有相当的总横截面积的固体挠曲的弹簧常数，而其电阻近似等于固体挠曲的电阻。

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