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    • 11. 发明授权
    • Method for forming a capacitor of semiconductor device
    • 用于形成半导体器件的电容器的方法
    • US6159792A
    • 2000-12-12
    • US224042
    • 1998-12-30
    • Sang Wook KimDong Myung LeeIk Soo Choi
    • Sang Wook KimDong Myung LeeIk Soo Choi
    • H01L27/06H01L21/02H01L21/311H01L21/8242
    • H01L28/84H01L21/31116H01L27/10852H01L28/91
    • An improved method for forming a capacitor which is capable of increasing cell capacitance is disclosed. The capacitor easily formed a sequential two-step etching processes. The two-step etching include a selectively etching to form the contact hole for exposing an etch stop layer between gate electrodes, and an isotopically dry etching to maximize capacitor surface area without cleaning process after the selectively etching, an interlayer insulating layer being patterned in a manner which produces inner interlayer contact sidewalls having standing wave ripples and removes the exposed etch stop layer. As a result, it is found that the capacitor which is obtained by a simple and easy two-step dry etching exhibits an increased capacitor surface area. Furthermore, it is possible to form the stacked capacitor having sufficiently high storage capacitance without increasing the contact resistance.
    • 公开了一种用于形成能够增加单元电容的电容器的改进方法。 电容器容易形成顺序的两步蚀刻工艺。 两级蚀刻包括选择性蚀刻以形成用于在栅电极之间暴露蚀刻停止层的接触孔和在选择性蚀刻之后不进行清洁处理的电容器表面积最大化的同位素干蚀刻,层间绝缘层被图案化 产生具有驻波波纹的内层间接触侧壁并去除暴露的蚀刻停止层的方式。 结果发现,通过简单且容易的两步干蚀刻获得的电容器表现出增加的电容器表面积。 此外,可以形成具有足够高的存储电容的层叠电容器,而不增加接触电阻。
    • 19. 发明申请
    • METHOD OF PREPARING FLUOROALKYL COMPOUNDS USING RADIATION
    • 使用辐射制备氟代醇化合物的方法
    • US20090260971A1
    • 2009-10-22
    • US12244536
    • 2008-10-02
    • Sang Wook KimMin Goo HurSeung Dae YangKook Hyun Yu
    • Sang Wook KimMin Goo HurSeung Dae YangKook Hyun Yu
    • B01J19/12
    • C07C303/30C07B59/001C07B2200/05C07C29/62C07C309/73C07C31/38
    • Disclosed herein is a method of preparing a fluoroalkyl compound using radiation, including: mixing an alkyl compound having a leaving group with tetrabutylammonium fluoride (TBAF) in the presence of a reaction solvent at room temperature to form a mixed solution (step 1); and applying radiation to the mixed solution while stirring it to prepare a fluoroalkyl compound (step 2). The method of preparing a fluoroalkyl compound using radiation is advantageous in that fluoroalkyl compounds can be easily prepared in a short reaction time at room temperature, in that the method is safe because it is not required to use fluorine gas, which is harmful to the human body, in that the method can be usefully used to prepare fluoroalkyl compounds because the yield of fluoroalkyl compounds obtained using the method is higher than when using conventional SN2 reaction methods, and in that fluorine 18F, which is a radioactive isotope, can be easily introduced into alkyl compounds.
    • 本文公开了使用辐射制备氟烷基化合物的方法,其包括:在室温下,在反应溶剂存在下,将具有离去基团的烷基化合物与四丁基氟化铵(TBAF)混合以形成混合溶液(步骤1)。 并在搅拌下对混合溶液施加辐射以制备氟烷基化合物(步骤2)。 使用辐射制备氟代烷基化合物的方法的优点在于,氟烷基化合物可以在室温下在短的反应时间内容易地制备,因为该方法是安全的,因为不需要使用对人体有害的氟气 因为该方法可用于制备氟烷基化合物,因为使用该方法获得的氟烷基化合物的产率高于使用常规SN2反应方法时的产率,并且可以容易地引入作为放射性同位素的氟18F 转化成烷基化合物。