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11. 发明授权

US06801358B2 Broad band deep ultraviolet/vacuum ultraviolet catadioptric imaging system 失效
标题翻译：宽带深紫外/真空紫外线反射折射成像系统
公开(公告)号：US06801358B2
公开(公告)日：2004-10-05
申请号：US10352638
申请日：2003-01-27
申请人： David R. Shafer , Yung-Ho Chuang , J. Joseph Armstrong
发明人： David R. Shafer , Yung-Ho Chuang , J. Joseph Armstrong
IPC分类号： G02B1314
CPC分类号： G03F7/70225 , G02B17/08 , G02B17/0812 , G02B17/0856 , G02B17/0892 , G02B17/0896 , G02B21/04 , G02B21/16 , G03F1/84 , G03F7/70275 , G03F7/70483 , G03F7/70616 , G03F7/7065
摘要： A design for inspecting specimens, such as photomasks, for unwanted particles and features such as pattern defects is provided. The system provides no central obscuration, an external pupil for aperturing and Fourier filtering, and relatively relaxed manufacturing tolerances, and is suited for both broad-band bright-field and laser dark field imaging and inspection at wavelengths below 365 nm. In many instances, the lenses used may be fashioned or fabricated using a single material. Multiple embodiments of the objective lensing arrangement are disclosed, all including at least one small fold mirror and a Mangin mirror. The system is implemented off axis such that the returning second image is displaced laterally from the first image so that the lateral separation permits optical receipt and manipulation of each image separately. The objective designs presented have the optical axis of the Mangin mirror image relay at ninety degrees to the optical axis defined by the focusing lenses, or an in-line or straight objective having one ninety degree bend of light rays.
摘要翻译：提供了用于检查样品的设计，例如光掩模，用于不想要的颗粒和诸如图案缺陷的特征。该系统不提供中心遮蔽，用于打开和傅立叶滤波的外部光瞳，以及相对放松的制造公差，并且适用于波长低于365nm的宽带亮场和激光暗场成像和检查。在许多情况下，所使用的透镜可以使用单一材料来制造或制造。公开了物镜设计的多个实施例，全部包括至少一个小折叠镜和Mangin镜。系统离轴实现，使得返回的第二图像从第一图像横向移位，使得横向分离允许分别对每个图像进行光学接收和操纵。所提出的目标设计具有与由聚焦透镜限定的光轴90度的Mangin镜像继电器的光轴，或具有一个九十度光线弯曲的直列或直线物镜。

12. 发明授权

US5717518A Broad spectrum ultraviolet catadioptric imaging system 失效
标题翻译：广谱紫外线反射影像系统
公开(公告)号：US5717518A
公开(公告)日：1998-02-10
申请号：US681528
申请日：1996-07-22
申请人： David R. Shafer , Yung-Ho Chuang , Bin-Ming B. Tsai
发明人： David R. Shafer , Yung-Ho Chuang , Bin-Ming B. Tsai
IPC分类号： G01N21/33 , G02B13/14 , G02B17/08 , G02B21/16 , G03C5/16 , G03F1/84 , G03F3/00 , G03F7/20 , H04N5/225 , G02B1/00 , G02B17/00
CPC分类号： G03F7/70225 , G02B13/143 , G02B17/0808 , G02B17/0856 , G02B17/0892 , G02B21/16 , G03F1/84 , G03F7/70216 , G03F7/70275 , G03F7/70616 , G03F7/7065
摘要： An ultraviolet (UV) catadioptric imaging system, with broad spectrum correction of primary and residual, longitudinal and lateral, chromatic aberrations for wavelengths extending into the deep UV (as short as about 0.16 .mu.m), comprises a focusing lens group with multiple lens elements that provide high levels of correction of both image aberrations and chromatic variation of aberrations over a selected wavelength band, a field lens group formed from lens elements with at least two different refractive materials, such as silica and a fluoride glass, and a catadioptric group including a concave reflective surface providing most of the focusing power of the system and a thick lens providing primary color correction in combination with the focusing lens group. The field lens group is located near the intermediate image provided by the focusing lens group and functions to correct the residual chromatic aberrations. The system is characterized by a high numerical aperture (typ. greater than 0.7) and a large flat field (with a size on the order of 0.5 mm). The broad band color correction allows a wide range of possible UV imaging applications at multiple wavelengths.
摘要翻译：紫外线（UV）反折射成像系统，对于延伸到深紫外线（短至约0.16μm）的波长的主要和残留的纵向和横向色差的广谱校正包括具有多个透镜元件的聚焦透镜组其提供了在所选波长带上的像差的两个像差和色度变化的高水平校正，由具有至少两种不同折射材料的透镜元件形成的场透镜组，例如二氧化硅和氟化物玻璃，以及包括提供系统的大部分聚焦功能的凹面反射表面以及与聚焦透镜组组合地提供原色校正的厚透镜。场透镜组位于由聚焦透镜组提供的中间图像附近，并且用于校正残余色差。该系统的特征在于高数值孔径（典型值大于0.7）和大平坦场（尺寸约为0.5毫米）。宽带色彩校正允许在多个波长下的广泛范围的可能的UV成像应用。

13. 发明申请

US20110116077A1 EUV High Throughput Inspection System For Defect Detection On Patterned EUV Masks, Mask Blanks, And Wafers 有权
标题翻译： EUV高通量检测系统，用于在图案化的EUV面罩，面罩空白和晶圆上进行缺陷检测
公开(公告)号：US20110116077A1
公开(公告)日：2011-05-19
申请号：US12812950
申请日：2010-06-18
申请人： Yung-Ho Chuang , Richard W. Solarz , David R. Shafer , Bing-Ming Benjamin Tsai , David L. Brown
发明人： Yung-Ho Chuang , Richard W. Solarz , David R. Shafer , Bing-Ming Benjamin Tsai , David L. Brown
IPC分类号： G01N21/956
CPC分类号： G01N21/95 , G01N21/8806 , G01N21/9501 , G01N21/956 , G01N2021/95676 , G01N2201/068 , G03F1/84 , G03F7/70616 , H05G2/008
摘要： Inspection of EUV patterned masks, blank masks, and patterned wafers generated by EUV patterned masks requires high magnification and a large field of view at the image plane. An EUV inspection system can include a light source directed to an inspected surface, a detector for detecting light deflected from the inspected surface, and an optic configuration for directing the light from the inspected surface to the detector. In particular, the detector can include a plurality of sensor modules. Additionally, the optic configuration can include a plurality of mirrors that provide magnification of at least 100× within an optical path less than 5 meters long. In one embodiment, the optical path is approximately 2-3 meters long.
摘要翻译：对EUV图案化掩模，空白掩模和由EUV图案化掩模生成的图案化晶片的检查需要高倍率和在图像平面上的大视场。 EUV检查系统可以包括指向检查表面的光源，用于检测从被检查表面偏转的光的检测器和用于将来自被检查表面的光引导到检测器的光学配置。特别地，检测器可以包括多个传感器模块。另外，光学配置可以包括在小于5米长的光路内提供至少100倍的放大倍数的多个反射镜。在一个实施例中，光路大约2-3米长。

14. 发明授权

US07679842B2 High performance catadioptric imaging system 有权
标题翻译：高性能反射折射成像系统
公开(公告)号：US07679842B2
公开(公告)日：2010-03-16
申请号：US11543519
申请日：2006-10-04
申请人： David R. Shafer , Yung-Ho Chuang , J. Joseph Armstrong
发明人： David R. Shafer , Yung-Ho Chuang , J. Joseph Armstrong
IPC分类号： G02B9/00
CPC分类号： G02B17/0892 , G02B17/0812 , G02B17/0856 , G02B21/04 , G03F7/70225 , G03F7/70341
摘要： A reduced size catadioptric objective and system is disclosed. The objective may be employed with light energy having a wavelength in the range of approximately 190 nanometers through the infrared light range. Elements are less than 100 mm in diameter. The objective comprises a focusing lens group configured to receive the light energy, at least one field lens oriented to receive focused light energy from the focusing lens group and provide intermediate light energy, and a Mangin mirror arrangement positioned to receive the intermediate light energy from the field lens and form controlled light energy for transmission to a specimen. The Mangin mirror arrangement imparts controlled light energy with a numerical aperture in excess of 0.65 and up to approximately 0.90, and the design may be employed in various environments.
摘要翻译：公开了一种减小尺寸的反射折射物镜和系统。该目的可以通过红外光范围具有在约190纳米范围内的波长的光能。元件的直径小于100毫米。该目的包括被配置为接收光能的聚焦透镜组，至少一个取向为从聚焦透镜组接收聚焦光能并提供中间光能的场透镜，以及设置成接收来自光源的中间光能并且形成用于传输到样本的受控光能。芒格镜配置赋予数值孔径超过0.65并且高达约0.90的受控光能，并且该设计可以用于各种环境中。

15. 发明授权

US07633675B2 Catadioptric imaging system employing immersion liquid for use in broad band microscopy 有权
标题翻译：使用浸没液的反射折射成像系统用于宽带显微镜
公开(公告)号：US07633675B2
公开(公告)日：2009-12-15
申请号：US11999558
申请日：2007-12-05
申请人： J. Joseph Armstrong , Yung-Ho Chuang , David R. Shafer
发明人： J. Joseph Armstrong , Yung-Ho Chuang , David R. Shafer
IPC分类号： G02B17/08
CPC分类号： G03F7/70341 , G02B17/023 , G02B17/0808 , G02B17/0812 , G02B17/0856 , G02B17/0892 , G02B21/02 , G02B21/04 , G02B21/33 , G03F7/70225
摘要： A reduced size catadioptric inspection system employing a catadioptric objective and immersion substance is disclosed. The objective may be employed with light energy having a wavelength in the range of approximately 190 nanometers through the infrared light range, and can provide numerical apertures in excess of 0.9. Elements are less than 100 millimeters in diameter and may fit within a standard microscope. The objective comprises a focusing lens group, a field lens, a Mangin mirror arrangement, and an immersion substance or liquid between the Mangin mirror arrangement and the specimen. A variable focal length optical system for use with the objective in the catadioptric inspection system is also disclosed.
摘要翻译：公开了一种使用反射折射物镜和浸没物质的缩小尺寸反射折射检查系统。该目的可以通过红外光范围具有在约190纳米范围内的波长的光能，并且可以提供超过0.9的数值孔径。元素的直径小于100毫米，并且可以适合标准显微镜。该目的包括聚焦透镜组，场透镜，Mangin镜布置以及Mangin镜布置和样品之间的浸没物质或液体。还公开了用于反射折射检查系统中的目的的可变焦距光学系统。

16. 发明申请

US20080247035A1 Catadioptric imaging system employing immersion liquid for use in broad band microscopy 有权
标题翻译：使用浸没液的反射折射成像系统用于宽带显微镜
公开(公告)号：US20080247035A1
公开(公告)日：2008-10-09
申请号：US11999558
申请日：2007-12-05
申请人： J. Joseph Armstrong , Yung-Ho Chuang , David R. Shafer
发明人： J. Joseph Armstrong , Yung-Ho Chuang , David R. Shafer
IPC分类号： G02B17/08
CPC分类号： G03F7/70341 , G02B17/023 , G02B17/0808 , G02B17/0812 , G02B17/0856 , G02B17/0892 , G02B21/02 , G02B21/04 , G02B21/33 , G03F7/70225
摘要： A reduced size catadioptric inspection system employing a catadioptric objective and immersion substance is disclosed. The objective may be employed with light energy having a wavelength in the range of approximately 190 nanometers through the infrared light range, and can provide numerical apertures in excess of 0.9. Elements are less than 100 millimeters in diameter and may fit within a standard microscope. The objective comprises a focusing lens group, a field lens, a Mangin mirror arrangement, and an immersion substance or liquid between the Mangin mirror arrangement and the specimen. A variable focal length optical system for use with the objective in the catadioptric inspection system is also disclosed.
摘要翻译：公开了一种使用反射折射物镜和浸没物质的缩小尺寸反射折射检查系统。该目的可以通过红外光范围具有在约190纳米范围内的波长的光能，并且可以提供超过0.9的数值孔径。元素的直径小于100毫米，并且可以适合标准显微镜。该目的包括聚焦透镜组，场透镜，Mangin镜布置以及Mangin镜布置和样品之间的浸没物质或液体。还公开了用于反射折射检查系统中的目的的可变焦距光学系统。

17. 发明授权

US07423805B2 Ultra-broadband UV microscope imaging system with wide range zoom capability 有权
标题翻译：超宽带紫外显微镜成像系统具有广泛的变焦能力
公开(公告)号：US07423805B2
公开(公告)日：2008-09-09
申请号：US10958242
申请日：2004-10-04
申请人： David R. Shafer , Yung-Ho Chuang , Bin-Ming B. Tsai
发明人： David R. Shafer , Yung-Ho Chuang , Bin-Ming B. Tsai
IPC分类号： G02B15/14
CPC分类号： G02B17/0896 , G02B17/023 , G02B17/0808 , G02B17/0812 , G02B17/0856 , G02B17/086 , G02B17/0892 , G02B21/16 , G03F1/84 , G03F7/70225 , G03F7/70275 , G03F7/70616 , G03F7/7065
摘要： An ultra-broadband ultraviolet (UV) catadioptric imaging microscope system with wide-range zoom capability. The microscope system, which comprises a catadioptric lens group and a zooming tube lens group, has high optical resolution in the deep UV wavelengths, continuously adjustable magnification, and a high numerical aperture. The system integrates microscope modules such as objectives, tube lenses and zoom optics to reduce the number of components, and to simplify the system manufacturing process. The preferred embodiment offers excellent image quality across a very broad deep ultraviolet spectral range, combined with an all-refractive zooming tube lens. The zooming tube lens is modified to compensate for higher-order chromatic aberrations that would normally limit performance.
摘要翻译：超宽带紫外（UV）反折射成像显微镜系统，具有广泛的变焦能力。包括反射折射透镜组和变焦管透镜组的显微镜系统在深UV波长，连续可调放大倍数和高数值孔径中具有高的光学分辨率。该系统集成了诸如目标，管镜和变焦光学的显微镜模块，以减少部件数量，并简化系统制造过程。优选实施例在非常广泛的深紫外光谱范围内提供优异的图像质量，与全折射变焦管透镜组合。变焦管镜头被修改以补偿通常会限制性能的高阶色差。

18. 发明授权

US07307783B2 Catadioptric imaging system employing immersion liquid for use in broad band microscopy 有权
标题翻译：使用浸没液的反射折射成像系统用于宽带显微镜
公开(公告)号：US07307783B2
公开(公告)日：2007-12-11
申请号：US10812111
申请日：2004-03-29
申请人： J. Joseph Armstrong , Yung-Ho Chuang , David R. Shafer
发明人： J. Joseph Armstrong , Yung-Ho Chuang , David R. Shafer
IPC分类号： G02B17/08
CPC分类号： G03F7/70341 , G02B17/023 , G02B17/0808 , G02B17/0812 , G02B17/0856 , G02B17/0892 , G02B21/02 , G02B21/04 , G02B21/33 , G03F7/70225
摘要： A reduced size catadioptric inspection system employing a catadioptric objective and immersion substance is disclosed. The objective may be employed with light energy having a wavelength in the range of approximately 190 nanometers through the infrared light range, and can provide numerical apertures in excess of 0.9. Elements are less than 100 millimeters in diameter and may fit within a standard microscope. The objective comprises a focusing lens group, a field lens, a Mangin mirror arrangement, and an immersion substance or liquid between the Mangin mirror arrangement and the specimen. A variable focal length optical system for use with the objective in the catadioptric inspection system is also disclosed.
摘要翻译：公开了一种使用反射折射物镜和浸没物质的缩小尺寸反射折射检查系统。该目的可以通过红外光范围具有在约190纳米范围内的波长的光能，并且可以提供超过0.9的数值孔径。元素的直径小于100毫米，并且可以适合标准显微镜。该目的包括聚焦透镜组，场透镜，Mangin镜布置以及Mangin镜布置和样品之间的浸没物质或液体。还公开了用于反射折射检查系统中的目的的可变焦距光学系统。

19. 发明授权

US07136234B2 Broad band DUV, VUV long-working distance catadioptric imaging system 有权
公开(公告)号：US07136234B2
公开(公告)日：2006-11-14
申请号：US11033218
申请日：2005-01-10
申请人： David R. Shafer , Yung-Ho Chuang
发明人： David R. Shafer , Yung-Ho Chuang
IPC分类号： G02B21/10 , G02B21/12 , G02B17/00
CPC分类号： G02B17/0892 , G02B13/143 , G02B13/22 , G02B17/0808 , G02B17/086
摘要： A high performance objective having very small central obscuration, an external pupil for apertureing and Fourier filtering, loose manufacturing tolerances, large numerical aperture, long working distance, and a large field of view is presented. The objective is preferably telecentric. The design is ideally suited for both broad-band bright-field and laser dark field imaging and inspection at wavelengths in the UV to VUV spectral range.

20. 发明授权

US06801357B2 Ultra-broadband UV microscope imaging system with wide range zoom capability 失效
标题翻译：超宽带紫外显微镜成像系统具有广泛的变焦能力
公开(公告)号：US06801357B2
公开(公告)日：2004-10-05
申请号：US10282592
申请日：2002-10-29
申请人： David R. Shafer , Yung-Ho Chuang , Bin-Ming B. Tsai
发明人： David R. Shafer , Yung-Ho Chuang , Bin-Ming B. Tsai
IPC分类号： G02B1514
CPC分类号： G02B17/0896 , G02B17/023 , G02B17/0808 , G02B17/0812 , G02B17/0856 , G02B17/086 , G02B17/0892 , G02B21/16 , G03F1/84 , G03F7/70225 , G03F7/70275 , G03F7/70616 , G03F7/7065
摘要： An ultra-broadband ultraviolet (UV) catadioptric imaging microscope system with wide-range zoom capability. The microscope system, which comprises a catadioptric lens group and a zooming tube lens group, has high optical resolution in the deep UV wavelengths, continuously adjustable magnification, and a high numerical aperture. The system integrates microscope modules such as objectives, tube lenses and zoom optics to reduce the number of components, and to simplify the system manufacturing process. The preferred embodiment offers excellent image quality across a very broad deep ultraviolet spectral range, combined with an all-refractive zooming tube lens. The zooming tube lens is modified to compensate for higher-order chromatic aberrations that would normally limit performance.
摘要翻译：超宽带紫外（UV）反折射成像显微镜系统，具有广泛的变焦能力。包括反射折射透镜组和变焦管透镜组的显微镜系统在深UV波长，连续可调放大倍数和高数值孔径中具有高的光学分辨率。该系统集成了诸如目标，管镜和变焦光学的显微镜模块，以减少部件数量，并简化系统制造过程。优选实施例在非常广泛的深紫外光谱范围内提供优异的图像质量，与全折射变焦管透镜组合。变焦管镜头被修改以补偿通常会限制性能的高阶色差。

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