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    • 11. 发明申请
    • Surface inspection method
    • 表面检查方法
    • US20050105791A1
    • 2005-05-19
    • US10977138
    • 2004-10-28
    • Ken LeeJames Xu
    • Ken LeeJames Xu
    • G01N21/47G01N21/95G01N21/956G06K9/00
    • G01N21/956G01N21/47G01N21/9501
    • A method of inspecting surface of an article is disclosed. A first mode of operation and a second mode of operation are provided. The first mode of operation is adapted for inspection of surface of an unpatterned article. The second mode of operation is adapted for inspection of surface of a patterned article. A switching means is provided to switch between the first mode of operation and the second mode of operation. In the first mode, the surface is scanned in a spiral pattern to identify defect location in a first resolution. Then, the defect location is scanned in a raster pattern identify defect location in a second resolution. In the second mode, the surface is scanned in a spiral pattern, raster pattern, or both to obtain pixel values. The pixel values are compared to reference pixels to identify defect location or to classify the defect.
    • 公开了一种检查制品表面的方法。 提供了第一操作模式和第二操作模式。 第一种操作模式用于检查未图案的物品的表面。 第二操作模式适用于检查图案制品的表面。 提供切换装置以在第一操作模式和第二操作模式之间切换。 在第一模式中,以螺旋图案扫描表面以在第一分辨率中识别缺陷位置。 然后,以光栅图案扫描缺陷位置,以第二分辨率识别缺陷位置。 在第二模式中,以螺旋图案,光栅图案或二者扫描表面以获得像素值。 将像素值与参考像素进行比较以识别缺陷位置或对缺陷进行分类。
    • 12. 发明授权
    • Fixing device for securing a heat sink to a CPU module
    • 用于将散热器固定到CPU模块的固定装置
    • US5959350A
    • 1999-09-28
    • US83863
    • 1998-05-21
    • Ken LeeRichard LeeStanley Chen
    • Ken LeeRichard LeeStanley Chen
    • H01L23/40H01L23/34H05K9/00
    • H01L23/4093H01L2924/0002
    • A fixing device for securing a heat sink to a CPU module includes a base plate, two elastic side plates respectively extending from two distal ends of the base plate, two curved portions formed between the base plate and the two elastic side plates for increasing elasticity of the fixing device when the two elastic side plates are expanded outward with respect to a central axis therebetween, two hooks respectively formed at free ends of the elastic side plates for securing to a backplane of the CPU module thereby sandwiching the heat sink between the fixing device and the CPU module, and two is engagement tabs respectively formed on the elastic side plates for allowance of an external tool to release the fixing device from the CPU module.
    • 用于将散热器固定到CPU模块的固定装置包括基板,分别从基板的两个远端延伸的两个弹性侧板,形成在基板和两个弹性侧板之间的两个弯曲部分,用于增加弹性 当两个弹性侧板相对于它们之间的中心轴线向外扩张时,固定装置分别形成有两个钩子,它们分别形成在弹性侧板的自由端,用于固定到CPU模块的背板,从而将散热片夹在固定装置 和CPU模块,两个是分别形成在弹性侧板上的接合突片,用于允许外部工具从CPU模块释放固定装置。
    • 17. 发明申请
    • Surface inspection system
    • 表面检查系统
    • US20050094864A1
    • 2005-05-05
    • US10977084
    • 2004-10-28
    • James XuKen Lee
    • James XuKen Lee
    • G01N21/47G01N21/95G01N21/956G06K9/00
    • G01N21/9501G01N21/474G01N21/956
    • An inspection system includes a stage, a light source, and a light collection subsystem is disclosed. The stage supports an article for inspection, the article having a surface. The light source provides light impinging on and scattering from an illumination area of the surface. The light collection system includes a plurality of collectors arranged generally in a semi-spherical layout such that each collector collects at least a portion of the scattering light at a collection polar angle and a collection azimuthal angle that are unique relative to collection polar angle and collection azimuthal angle of other collectors. The collectors are arranged in three rings of collectors. The inspection system includes a plurality of channels where each collector of the light collection subsystem is associated with a channel. The inspection system includes a processor connected to the channels. The processor is adapted to process information from the channels.
    • 公开了一种包括舞台,光源和光收集子系统的检查系统。 舞台支持用于检查的物品,该物品具有表面。 光源提供光照射并从表面的照明区域散射。 光收集系统包括通常以半球形布置布置的多个收集器,使得每个收集器收集散射光的至少一部分,其收集极角和收集方位角相对于收集极角而是独特的,并且收集 其他收集器的方位角。 收藏家被安排在三圈收藏家。 检查系统包括多个通道,其中光收集子系统的每个收集器与通道相关联。 检查系统包括连接到通道的处理器。 处理器适于处理来自信道的信息。
    • 18. 发明授权
    • System and method for transporting and sputter coating a substrate in a sputter deposition system
    • 用于在溅射沉积系统中传输和溅射涂覆基底的系统和方法
    • US06406598B2
    • 2002-06-18
    • US09866114
    • 2001-05-25
    • Ke Ling LeeMikhail MazurKen LeeRobert M. Martinson
    • Ke Ling LeeMikhail MazurKen LeeRobert M. Martinson
    • C23C1432
    • C23C14/566C23C14/042
    • A plasma sputtering system is described. A substrate handling system thereof places an unprocessed substrate (e.g., an optical disk), an inner mask, and an outer mask onto a tray in a loadlock of the sputtering system, and then seals the access opening to the loadlock. The substrate and the masks are moved on the tray to a sputtering chamber where the substrate is sputter coated. The substrate handing system removes the processec substrate and accompanying inner and outer masks from the tray in the loadlock to an external substrate change station, where the processed substrate is removed from the masks, which are still gripped by the substrate handling system. Another unprocessed disk is placed on the inner mask and within the outer mask, and the sequence repeats. The substrate handling system only contacts the masks on surfaces thereof that are not subjected to direct sputter deposition.
    • 描述了等离子体溅射系统。 其基板处理系统将未处理的基板(例如,光盘),内部掩模和外部掩模放置在溅射系统的负载锁定器的托盘上,然后将进入开口密封到负载锁。 衬底和掩模在托盘上移动到溅射室,其中衬底被溅射涂覆。 基板处理系统将处理基板和伴随的内外掩模从负载锁中的托盘移除到外部基板更换台,其中处理的基板从掩模移除,该基板仍然被基板处理系统夹紧。 另一个未处理的盘被放置在内部掩模上并且在外部掩模内,并且序列重复。 基板处理系统仅与未经受直接溅射沉积的表面上的掩模接触。
    • 19. 发明授权
    • System and method for handling and masking a substrate in a sputter deposition system
    • 用于在溅射沉积系统中处理和掩蔽衬底的系统和方法
    • US06264804B1
    • 2001-07-24
    • US09547522
    • 2000-04-12
    • Ke Ling LeeMikhail MazurKen LeeRobert M. Martinson
    • Ke Ling LeeMikhail MazurKen LeeRobert M. Martinson
    • C23C1432
    • C23C14/566C23C14/042
    • A substrate handling system auxiliary to a plasma sputtering system is described. The substrate handling system inserts an unprocessed substrate (e.g., an optical disk), an inner mask, and an outer mask into a loadlock of the sputtering system, and then seals the access opening to the loadlock. The substrate and the masks then are moved to a sputtering chamber where the substrate is coated by sputtering. Subsequently, the substrate handling system moves a processed substrate, and its accompanying inner mask and an outer mask, from the loadlock to an external disk change station, where the processed substrate is removed from the masks, which are still gripped by the substrate handling system. Subsequently, another unprocessed disk is placed on the inner mask and within the outer mask, and the sequence repeats. The substrate handling system only contacts the masks on surfaces thereof that are not subjected to direct sputter deposition, so that the masks can be gripped without causing particulate contamination. A coated surface of the inner mask and outer mask has numerous asperities to trap sputtered material and reduce contamination.
    • 描述了辅助于等离子体溅射系统的衬底处理系统。 基板处理系统将未处理的基板(例如,光盘),内部掩模和外部掩模插入到溅射系统的负载锁中,然后将进入开口密封到负载锁。 然后将衬底和掩模移动到通过溅射涂覆衬底的溅射室。 随后,基板处理系统将经处理的基板及其伴随的内掩模和外掩模从负载锁移动到外部盘更换台,其中处理的基板从掩模移除,其仍被基板处理系统夹持 。 随后,将另一个未处理的盘放置在内部掩模上并在外部掩模内,并重复该序列。 基板处理系统仅与未经受直接溅射沉积的表面上的掩模接触,从而可以抓住掩模而不引起颗粒污染。 内罩和外罩的涂覆表面具有许多凹凸以捕获溅射材料并减少污染。
    • 20. 发明授权
    • Tilt-up concrete form brace
    • 倾斜混凝土支架
    • US08186645B2
    • 2012-05-29
    • US10121125
    • 2002-04-11
    • Scott ShawDale Robert HaslemKen LeeSteve WilburClifford D. Bennett
    • Scott ShawDale Robert HaslemKen LeeSteve WilburClifford D. Bennett
    • E04G17/00
    • E04G13/00E04G17/14
    • A brace for use in tilt-up construction is disclosed. The brace includes a bottom surface and a vertical side surface. The bottom surface of the brace is affixed to a permanent horizontal surface (e.g., a slab) in a manner that allows the brace to be removed without damaging the permanent horizontal surface. The vertical side surface of the brace is attached to a concrete pour form. The bottom surface of the brace is affixed to the permanent horizontal surface using an adhesive. Alternatively, a shoe is attached to the permanent horizontal surface and the brace sits in the shoe. A flange is releasably securable with the brace to batter the form when the flange is place in contact therewith. Alternatively, the shoe has an upwardly extending inclined ramp that is operable to orient the brace so that the vertical side surface of the brace is disposed at a battering angle to batter the form.
    • 公开了用于倾斜结构的支架。 支架包括底面和垂直侧面。 支架的底表面以允许支架移除而不损坏永久水平表面的方式固定到永久水平表面(例如,板)。 支架的垂直侧表面附着​​在混凝土浇注形式上。 支柱的底面使用粘合剂固定在永久水平表面上。 或者,鞋附接到永久水平表面,并且支架位于鞋中。 当凸缘与其接触时,凸缘可释放地固定在支架上以使其成形。 或者,鞋具有向上延伸的倾斜斜坡,其可操作以使支架定向,使得支架的垂直侧表面以压扁角度设置以打击该形状。