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    • 1. 发明申请
    • Defect review system and method
    • 缺陷审查制度和方法
    • US20050094136A1
    • 2005-05-05
    • US10977144
    • 2004-10-28
    • James XuKen Lee
    • James XuKen Lee
    • G01N21/21G01N21/47G01N21/95G01N21/956G01N21/88
    • G01N21/956G01N21/21G01N21/47G01N21/8806G01N21/9501G01N2021/8825
    • A defect review system includes a stage, a light source, a turning mirror, and a ring of collectors. The stage supports and moves an article for inspection, the article having a surface. The light source provides light. The turning mirror turns the light toward the surface at an oblique incident angle whereby the light illuminates a spot on the surface and the light scatters from the spot. The ring of collectors is adapted to collect scattering light. A method of reviewing surface of a wafer is disclosed. The method provides a dark-field mode of operation adapted to inspect the surface by illuminating a spot on the surface at an oblique angle and collecting scattering light from the surface. Further, the method provides a bright-field mode of operation adapted to inspect the surface by illuminating a spot on the surface at a normal angle to examine the reflecting light.
    • 缺陷检查系统包括舞台,光源,转向镜和收集器圈。 舞台支持并移动文章进行检查,文章具有表面。 光源提供光。 转向镜以倾斜的入射角将光朝向表面转动,由此光照射表面上的斑点,并且光从点散射。 收集器的环适用于收集散射光。 公开了一种检查晶片表面的方法。 该方法提供了适于通过以倾斜角照射表面上的斑点并从表面收集散射光来检查表面的暗场模式。 此外,该方法提供适于通过以正常角度照射表面上的斑点来检查表面以检查反射光的明场操作模式。
    • 2. 发明申请
    • Surface inspection method
    • 表面检查方法
    • US20050105791A1
    • 2005-05-19
    • US10977138
    • 2004-10-28
    • Ken LeeJames Xu
    • Ken LeeJames Xu
    • G01N21/47G01N21/95G01N21/956G06K9/00
    • G01N21/956G01N21/47G01N21/9501
    • A method of inspecting surface of an article is disclosed. A first mode of operation and a second mode of operation are provided. The first mode of operation is adapted for inspection of surface of an unpatterned article. The second mode of operation is adapted for inspection of surface of a patterned article. A switching means is provided to switch between the first mode of operation and the second mode of operation. In the first mode, the surface is scanned in a spiral pattern to identify defect location in a first resolution. Then, the defect location is scanned in a raster pattern identify defect location in a second resolution. In the second mode, the surface is scanned in a spiral pattern, raster pattern, or both to obtain pixel values. The pixel values are compared to reference pixels to identify defect location or to classify the defect.
    • 公开了一种检查制品表面的方法。 提供了第一操作模式和第二操作模式。 第一种操作模式用于检查未图案的物品的表面。 第二操作模式适用于检查图案制品的表面。 提供切换装置以在第一操作模式和第二操作模式之间切换。 在第一模式中,以螺旋图案扫描表面以在第一分辨率中识别缺陷位置。 然后,以光栅图案扫描缺陷位置,以第二分辨率识别缺陷位置。 在第二模式中,以螺旋图案,光栅图案或二者扫描表面以获得像素值。 将像素值与参考像素进行比较以识别缺陷位置或对缺陷进行分类。
    • 3. 发明申请
    • Surface inspection system
    • 表面检查系统
    • US20050094864A1
    • 2005-05-05
    • US10977084
    • 2004-10-28
    • James XuKen Lee
    • James XuKen Lee
    • G01N21/47G01N21/95G01N21/956G06K9/00
    • G01N21/9501G01N21/474G01N21/956
    • An inspection system includes a stage, a light source, and a light collection subsystem is disclosed. The stage supports an article for inspection, the article having a surface. The light source provides light impinging on and scattering from an illumination area of the surface. The light collection system includes a plurality of collectors arranged generally in a semi-spherical layout such that each collector collects at least a portion of the scattering light at a collection polar angle and a collection azimuthal angle that are unique relative to collection polar angle and collection azimuthal angle of other collectors. The collectors are arranged in three rings of collectors. The inspection system includes a plurality of channels where each collector of the light collection subsystem is associated with a channel. The inspection system includes a processor connected to the channels. The processor is adapted to process information from the channels.
    • 公开了一种包括舞台,光源和光收集子系统的检查系统。 舞台支持用于检查的物品,该物品具有表面。 光源提供光照射并从表面的照明区域散射。 光收集系统包括通常以半球形布置布置的多个收集器,使得每个收集器收集散射光的至少一部分,其收集极角和收集方位角相对于收集极角而是独特的,并且收集 其他收集器的方位角。 收藏家被安排在三圈收藏家。 检查系统包括多个通道,其中光收集子系统的每个收集器与通道相关联。 检查系统包括连接到通道的处理器。 处理器适于处理来自信道的信息。
    • 4. 发明申请
    • Three Dimensional Data Compression
    • 三维数据压缩
    • US20130187915A1
    • 2013-07-25
    • US13355364
    • 2012-01-20
    • Ken LeeXin Hou
    • Ken LeeXin Hou
    • G06T17/00
    • G06T9/001G06T17/20
    • Described are computer-based methods and apparatuses, including computer program products, for compressing three dimensional data of a scene. Data is received comprising (i) three dimensional data of a scene, and (ii) depth data associated with the three dimensional data. A triangle mesh is generated based on the three dimensional data, the triangle mesh comprising a plurality of triangles, each triangle including three vertices and three edges connecting the three vertices. For each edge in the triangle mesh, a metric is calculated for the edge based on data from the depth data associated with the edge, a length of the edge, and a curvature of the edge. A set of edges is collapsed based on a metric associated with each edge in the set of edges to generate a compressed triangle mesh.
    • 描述了用于压缩场景的三维数据的基于计算机的方法和装置,包括计算机程序产品。 接收数据包括(i)场景的三维数据,和(ii)与三维数据相关联的深度数据。 基于三维数据生成三角形网格,三角形网格包括多个三角形,每个三角形包括连接三个顶点的三个顶点和三个边。 对于三角形网格中的每个边缘,基于与边缘相关联的深度数据,边缘的长度和边缘的曲率的数据计算边缘的度量。 基于与该组边缘中的每个边缘相关联的度量来折叠一组边缘以生成压缩三角形网格。
    • 8. 发明授权
    • Magnetic array for sputtering system
    • 用于溅射系统的磁阵列
    • US06402903B1
    • 2002-06-11
    • US09499092
    • 2000-02-04
    • Mingwei JiangKen LeeGil Lavi
    • Mingwei JiangKen LeeGil Lavi
    • C23C1435
    • H01J37/3452H01J37/3408
    • A plasma sputtering system is disclosed, along with methods of sputtering and methods of arranging an array of magnets disposed within the sputtering system. An embodiment of the sputtering system includes a vacuum chamber. A rotating magnetron is disposed in the vacuum chamber. A target is positioned between the magnetron and a substrate upon which material from the target is to be deposited. The magnetron includes an array of pairs of oppositely poled permanent magnets. A closed loop magnetic path extends between the pairs of oppositely poled magnets of the array. The magnetic path includes an inturn region proximate to an axis of rotation of the magnetron and at least two (e.g., five) indent regions.
    • 公开了等离子体溅射系统,以及溅射方法以及布置在溅射系统内的磁体阵列的布置方法。 溅射系统的一个实施例包括真空室。 旋转磁控管设置在真空室中。 目标物位于磁控管与要沉积靶材的材料之间。 磁控管包括一对相对极化的永磁体的阵列。 闭环磁路在阵列的相对极化的磁体对之间延伸。 磁路包括靠近磁控管和至少两个(例如五个)凹陷区域的旋转轴线的内部区域。
    • 10. 发明授权
    • System and method for efficient diagnostic analysis of ophthalmic examinations
    • 眼科检查有效诊断分析的系统和方法
    • US07818041B2
    • 2010-10-19
    • US11175410
    • 2005-07-07
    • Young KimKen LeeImran Noor Chaudhri
    • Young KimKen LeeImran Noor Chaudhri
    • A61B5/05
    • G16H80/00A61B8/10G06F19/00
    • A digital medical diagnostic system according to the present invention enables ophthalmologists to view patient and other images remotely to diagnose various conditions. The system includes at least one modality, one or more viewing stations, and an image server. The modality generates patient images associated with examinations, while the image server retrieves and processes information from the modalities. The image server may accommodate modalities utilizing different interfaces and/or formats. The viewing stations enable remote access to the images via a network (e.g., Internet), where the image server provides the interface for a user in the form of screens or web pages for security and viewing of information. The system enables an ophthalmologist or other medical personnel to view and/or manipulate one or more images to enhance diagnosis of patient examinations.
    • 根据本发明的数字医疗诊断系统使眼科医生可以远程查看患者和其他图像以诊断各种状况。 该系统包括至少一个模态,一个或多个观察站和图像服务器。 该模式产生与检查相关的患者图像,而图像服务器从模态检索和处理信息。 图像服务器可以适应利用不同接口和/或格式的模式。 观看站允许经由网络(例如,因特网)远程访问图像,其中图像服务器以用于安全和查看信息的屏幕或网页的形式为用户提供界面。 该系统使眼科医生或其他医务人员能够观察和/或操纵一个或多个图像以增强患者检查的诊断。