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11. 发明授权

US08498078B2 Magnetic head with flared write pole having multiple tapered regions 有权
标题翻译：具有多个锥形区域的具有扩口写入磁极的磁头
公开(公告)号：US08498078B2
公开(公告)日：2013-07-30
申请号：US12634533
申请日：2009-12-09
申请人： Donald G. Allen , Liubo Hong , Aron Pentek , Thomas J. A. Roucoux , Sue S. Zhang , Yi Zheng
发明人： Donald G. Allen , Liubo Hong , Aron Pentek , Thomas J. A. Roucoux , Sue S. Zhang , Yi Zheng
IPC分类号： G11B5/147 , G11B5/187
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/31
摘要： Methods for fabrication of tapered magnetic poles with a non-magnetic front bump layer. A magnetic pole may have a plurality of tapered surfaces at or near an air bearing surface (ABS), wherein a thickness of the write pole increases in a direction away from the ABS. A non-magnetic front bump layer may be formed on one or more of the tapered surfaces of the magnetic pole at a distance from the ABS. The front bump layer may increase the separation distance between a shield layer and the magnetic pole near the tapered surface, thereby improving the performance of the write head.
摘要翻译：用非磁性前凸块层制造锥形磁极的方法。磁极可以在空气轴承表面（ABS）处或附近具有多个锥形表面，其中写入极的厚度在远离ABS的方向上增加。可以在与ABS相距一定距离处的磁极的一个或多个锥形表面上形成非磁性前凸块层。前凸块层可以增加在锥形表面附近的屏蔽层和磁极之间的间隔距离，从而提高写入头的性能。

12. 发明授权

US08451562B2 Method for manufacturing a magnetic write head having a wrap around trailing magnetic shield with a tapered side gap 有权
标题翻译：一种用于制造磁头的方法，该写磁头具有带有锥形侧面间隙的后磁屏蔽的包裹
公开(公告)号：US08451562B2
公开(公告)日：2013-05-28
申请号：US12766769
申请日：2010-04-23
申请人： Aron Pentek , Yi Zheng
发明人： Aron Pentek , Yi Zheng
IPC分类号： G11B5/127
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/315 , G11B5/3163 , Y10T428/1171
摘要： A magnetic write head having write pole and a wrap-around-trailing magnetic shield having side portions that are separated from the write pole by tapered non-magnetic side gap layers. The tapered non-magnetic side gap layers provide a non-magnetic side gap width that increases with increasing distance from the ABS, thereby providing optimal protection against adjacent track interference at the ABS while minimizing write field loss to the shield in regions away from the ABS.
摘要翻译：具有写磁极的磁写头和卷绕后磁屏蔽，其具有通过锥形非磁性侧间隙层与写极分离的侧部。锥形非磁性侧间隙层提供随着与ABS的距离的增加而增加的非磁性侧间隙宽度，从而为ABS提供最佳保护，以防止相邻的轨道干涉，同时最小化远离ABS的区域对屏蔽的写入场损失。

13. 发明授权

US08451560B2 Magnetic head with flared write pole with multiple non-magnetic layers thereover 有权
标题翻译：磁头带有多个非磁性层的扩口写磁极
公开(公告)号：US08451560B2
公开(公告)日：2013-05-28
申请号：US12634480
申请日：2009-12-09
申请人： Liubo Hong , Aron Pentek , Yi Zheng
发明人： Liubo Hong , Aron Pentek , Yi Zheng
IPC分类号： G11B5/11 , G11B5/187 , G11B5/23
CPC分类号： G11B5/1278 , G11B5/23 , G11B5/3116 , G11B5/315 , G11B5/3163 , Y10T428/1171
摘要： Methods for fabrication of tapered magnetic poles with a non-magnetic front bump layer. A magnetic pole may have a tapered surface at or near an air bearing surface (ABS), wherein a thickness of the write pole increases in a direction away from the ABS. A non-magnetic front bump layer may be formed on the tapered surface of the magnetic pole and away from the ABS. The front bump layer may increase the separation distance between a shield layer and the magnetic pole near the tapered surface, thereby improving the performance of the write head.
摘要翻译：用非磁性前凸块层制造锥形磁极的方法。磁极可以在空气轴承表面（ABS）处或附近具有锥形表面，其中写入极的厚度在远离ABS的方向上增加。可以在磁极的锥形表面上远离ABS形成非磁性前凸块层。前凸块层可以增加在锥形表面附近的屏蔽层和磁极之间的间隔距离，从而提高写入头的性能。

14. 发明授权

US08422168B2 Magnetic write head having a self-aligned side wrap-around shield with multi-angle slanted bump 有权
标题翻译：具有具有多角度倾斜凸起的自对准侧包绕屏蔽的磁性写头
公开(公告)号：US08422168B2
公开(公告)日：2013-04-16
申请号：US12343709
申请日：2008-12-24
申请人： Wen-Chien David Hsiao , Aron Pentek , Sue Siyang Zhang , Yi Zheng
发明人： Wen-Chien David Hsiao , Aron Pentek , Sue Siyang Zhang , Yi Zheng
IPC分类号： G11B5/127
CPC分类号： G11B5/1278 , G11B5/112 , G11B5/3116 , G11B5/3146 , G11B5/315 , G11B5/3163
摘要： A method for forming a magnetic write head having a trailing shield with a tapered and stepped, self aligned trailing magnetic shield. The shield has a tapered portion that tapers away from the write pole as it extends away from the ABS. This tapered portion helps to channel flux to the pole tip portion of the shield, while preventing the loss of write field to the shield. The stepped portion of the shield further helps to prevent the loss of write field and also defines a secondary throat height of the shield that can be accurately located relative to the air bearing surface.
摘要翻译：一种用于形成具有带有锥形和阶梯式自对准拖尾磁屏蔽的后挡板的磁写头的方法。屏蔽件具有锥形部分，当锥形部分远离ABS延伸时，该锥形部分从写入柱逐渐变细。该锥形部分有助于将通量传导到屏蔽的极端部分，同时防止对屏蔽件的写入场的损失。护罩的台阶部分还有助于防止写入场的损失，并且还限定可相对于空气轴承表面精确定位的护罩的次级喉部高度。

15. 发明申请

US20130020204A1 MAGNETIC WRITE HEAD HAVING AN ELECTROPLATED WRITE POLE WITH A LEADING EDGE TAPER 审中-公开
标题翻译：具有导线边缘的电镀写入磁头的磁头
公开(公告)号：US20130020204A1
公开(公告)日：2013-01-24
申请号：US13187381
申请日：2011-07-20
申请人： Donald G. Allen , Liubo Hong , Aron Pentek , Thomas J. A. Roucoux , Junsheng Yang , Yi Zheng , Qiping Zhong , Honglin Zhu
发明人： Donald G. Allen , Liubo Hong , Aron Pentek , Thomas J. A. Roucoux , Junsheng Yang , Yi Zheng , Qiping Zhong , Honglin Zhu
IPC分类号： G11B5/127 , C25D7/00 , C23F1/04 , C25D5/02
CPC分类号： C25D5/022 , C25D5/48 , G11B5/3116 , G11B5/3163
摘要： A method for manufacturing a magnetic write head having a tapered leading edge. The method includes depositing a sacrificial non-magnetic layer to a thickness that is at least as great as the thickness of the write pole to be formed. The sacrificial non-magnetic layer is then masked and ion milled so as to form a tapered edge on the sacrificial non-magnetic layer that extends through the thickness of the non-magnetic fill layer. A magnetic material is then deposited and planarized by chemical mechanical polishing. The remaining magnetic material forms the entirety of the magnetic write pole so that there is no need to deposit additional magnetic layers further construct the write pole.
摘要翻译：一种用于制造具有锥形前缘的磁写头的方法。该方法包括将牺牲非磁性层沉积至至少与待形成的写极的厚度一样大的厚度。然后对牺牲非磁性层进行掩模和离子研磨，以在牺牲非磁性层上形成延伸穿过非磁性填充层的厚度的锥形边缘。然后通过化学机械抛光沉积和平坦化磁性材料。剩余的磁性材料形成整个磁性写入磁极，使得不需要沉积另外的磁性层进一步构造写入极。

16. 发明授权

US08189292B2 Method for manufacturing a magnetic write head having a write pole with a trailing edge taper using a Rieable hard mask 有权
标题翻译：一种使用可重构硬掩模制造具有后缘锥形的写极的磁写头的方法
公开(公告)号：US08189292B2
公开(公告)日：2012-05-29
申请号：US12343723
申请日：2008-12-24
申请人： Aron Pentek , Sue Siyang Zhang , Yi Zheng
发明人： Aron Pentek , Sue Siyang Zhang , Yi Zheng
IPC分类号： G11B5/127
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163
摘要： A method for manufacturing a magnetic write head having a write pole with a tapered, stepped trailing edge. The method includes depositing a magnetic write pole material over a substrate, and then forming a magnetic step structure over the magnetic write pole material. A mask structure is then formed, which includes a multilayer hard mask formed over the magnetic write pole material and the magnetic step structure. An ion milling process is then performed to remove a portion of the write pole material to define a write pole. A non-magnetic material can be deposited and ion milling performed to form non-magnetic side gap layer at the sides of the write pole. A multi-step reactive ion milling process can then be performed to remove the remaining hard mask from over the write pole.
摘要翻译：一种用于制造磁头的方法，该写磁头具有带锥形的阶梯式后缘的写极。该方法包括将磁性写入磁极材料沉积在衬底上，然后在磁性写入磁极材料上形成磁性阶梯结构。然后形成掩模结构，其包括形成在磁性写入磁极材料和磁性步骤结构之上的多层硬掩模。然后执行离子铣削工艺以去除写入极材料的一部分以限定写入极。可以沉积非磁性材料并进行离子铣削以在写入极的两侧形成非磁性侧隙层。然后可以执行多步反应离子研磨过程，以从写极上去除剩余的硬掩模。

17. 发明授权

US08108985B2 Method for manufacturing a perpendicular magnetic write head 有权
标题翻译：用于制造垂直磁写头的方法
公开(公告)号：US08108985B2
公开(公告)日：2012-02-07
申请号：US11934687
申请日：2007-11-02
申请人： Yi Zheng , Yimin Hsu , Wen-Chien David Hsiao , Ming Jiang , Aron Pentek , Sue Siyang Zhang , Edward Hin Pong Lee , Hung-Chin Guthrie , Ning Shi , Vladimir Nikitin , Prabodh Ratnaparkhi , Yinshi Liu
发明人： Yi Zheng , Yimin Hsu , Wen-Chien David Hsiao , Ming Jiang , Aron Pentek , Sue Siyang Zhang , Edward Hin Pong Lee , Hung-Chin Guthrie , Ning Shi , Vladimir Nikitin , Prabodh Ratnaparkhi , Yinshi Liu
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3166 , G11B5/112 , G11B5/1278 , G11B5/3116 , G11B5/3146 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052 , Y10T428/11 , Y10T428/1186
摘要： A method for manufacturing a magnetic write head for perpendicular magnetic recording. The method includes forming a write pole, and then depositing a refill layer. A mask structure can be formed over the writ pole and refill layer, the mask structure being configured to define a stitched pole. An ion milling or reactive ion milling can then be performed to remove portions of the refill layer that are not protected by the mask structure. Then a magnetic material can be deposited to form a stitched write pole that defines a secondary flare point. The stitched pole can also be self aligned with an electrical lapping guide in order to accurately locate the front edge of the secondary flare point relative to the air bearing surface of the write head.
摘要翻译：一种用于制造用于垂直磁记录的磁写头的方法。该方法包括形成写极，然后沉积补充层。掩模结构可以形成在写极和再填充层上，掩模结构被配置为限定缝合极。然后可以执行离子铣或反应离子研磨以去除未被掩模结构保护的部分填充层。然后可以沉积磁性材料以形成限定二次闪光点的缝合写入极。缝合的杆也可以与电动研磨引导件自对准，以便相对于写入头的空气轴承表面精确地定位二次扩张点的前边缘。

18. 发明申请

US20110132869A1 MAGNETIC WRITE HEAD MANUFACTURED BY DAMASCENE PROCESS PRODUCING A TAPERED WRITE POLE WITH A NON-MAGNETIC STEP AND NON-MAGNETIC BUMP 有权
标题翻译：由具有非磁性步进和非磁性制动的带状刀片制造的大型制造工艺制造的磁性写头
公开(公告)号：US20110132869A1
公开(公告)日：2011-06-09
申请号：US12634490
申请日：2009-12-09
申请人： Liubo Hong , Aron Pentek , Yi Zheng
发明人： Liubo Hong , Aron Pentek , Yi Zheng
IPC分类号： G11B5/31
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , G11B5/3146 , G11B5/315 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for manufacturing a magnetic write head having a non-magnetic step layer, non-magnetic bump at the front of the non-magnetic step layer and a write pole with a tapered trailing edge. The tapered portion of the trailing edge of the write pole is formed by a two step process that allows the write pole taper to be formed with greater accuracy and repeatability than would be possible using a single step taper process. An alternative method is also described on how to make a non-magnetic bump structure with adjustable bump throat height prior to Damascene side shield gap formation in a Damascene wrap around shield head.
摘要翻译：一种用于制造具有非磁性步骤层，非磁性阶梯层前面的非磁性凸起和具有锥形后缘的写入磁极的磁性写入头的方法。写柱的后缘的锥形部分通过两步法形成，其允许以比使用单步骤锥形工艺可能的更高的精度和重复性形成写柱锥度。还描述了一种替代方法，该方法还描述了如何制造具有可调凸起喉部高度的非磁性凸块结构，然后在镶嵌在屏蔽头周围的大马士革侧面屏蔽间隙形成。

19. 发明申请

US20100155363A1 METHOD FOR MANUFACTURING A MAGNETIC WRITE HEAD HAVING A WRITE POLE WITH A TRAILING EDGE TAPER USING A RIEABLE HARD MASK 有权
标题翻译：使用可弯曲硬掩模制造具有跟踪边缘的磁头的磁头写入头的方法
公开(公告)号：US20100155363A1
公开(公告)日：2010-06-24
申请号：US12343723
申请日：2008-12-24
申请人： Aron Pentek , Sue Siyang Zhang , Yi Zheng
发明人： Aron Pentek , Sue Siyang Zhang , Yi Zheng
IPC分类号： B44C1/22
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163
摘要： A method for manufacturing a magnetic write head having a write pole with a tapered, stepped trailing edge. The method includes depositing a magnetic write pole material over a substrate, and then forming a magnetic step structure over the magnetic write pole material. A mask structure is then formed, which includes a multilayer hard mask formed over the magnetic write pole material and the magnetic step structure. An ion milling process is then performed to remove a portion of the write pole material to define a write pole. A non-magnetic material can be deposited and ion milling performed to form non-magnetic side gap layer at the sides of the write pole. A multi-step reactive ion milling process can then be performed to remove the remaining hard mask from over the write pole.
摘要翻译：一种用于制造磁头的方法，该写磁头具有带锥形的阶梯式后缘的写极。该方法包括将磁性写入磁极材料沉积在衬底上，然后在磁性写入磁极材料上形成磁性阶梯结构。然后形成掩模结构，其包括形成在磁性写入磁极材料和磁性步骤结构之上的多层硬掩模。然后执行离子铣削工艺以去除写入极材料的一部分以限定写入极。可以沉积非磁性材料并进行离子铣削以在写入极的两侧形成非磁性侧隙层。然后可以执行多步反应离子研磨过程，以从写极上去除剩余的硬掩模。

20. 发明授权

US07506431B2 Method of manufacturing a perpendicular magnetic write head having a wrap-around trailing shield and a concave trailing edge main pole 有权
标题翻译：制造具有环绕后挡板和凹后缘主极的垂直磁写头的方法
公开(公告)号：US07506431B2
公开(公告)日：2009-03-24
申请号：US11744022
申请日：2007-05-03
申请人： Wen-Chien David Hsiao , Yimin Hsu , Vladimir Nikitin , Aron Pentek , Yi Zheng
发明人： Wen-Chien David Hsiao , Yimin Hsu , Vladimir Nikitin , Aron Pentek , Yi Zheng
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3163 , G11B5/3116 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for manufacturing a magnetic write head for perpendicular magnetic recording. The method allows the write head to be formed with a write pole having a concave trailing edge. The method further allows the amount of concavity of the trailing edge to be accurately and carefully controlled both within a wafer and between wafers. A write pole is formed using a mask that includes a hard mask, a RIEable layer and an endpoint detection layer. A layer of non-magnetic material (ALD layer) is deposited, and then, an ion milling process is used to remove a portion of the ALD layer disposed over the write pole and mask. A reactive ion etch process is performed to remove the RIEable layer leaving the ALD layer to form non-magnetic side walls with upper portions that extend above the write pole. Another ion milling is then performed, preferably at an angle relative to normal, such that shadowing from the upper portions of the non-magnetic side walls causes the ion milling to form the write pole with a concave trailing edge.
摘要翻译：一种用于制造用于垂直磁记录的磁写头的方法。该方法允许写头形成有具有凹形后缘的写入极。该方法还允许在晶片内和晶片之间精确地和仔细地控制后缘的凹陷量。使用包括硬掩模，RIEable层和端点检测层的掩模形成写入极。沉积一层非磁性材料（ALD层），然后使用离子铣削工艺去除设置在写入极和掩模上的ALD层的一部分。执行反应离子蚀刻工艺以去除离开ALD层的RIEable层以形成非磁性侧壁，其上部在写极上方延伸。然后进行另一个离子铣削，优选以相对于法线成一角度，使得来自非磁性侧壁的上部的阴影使得离子铣削形成具有凹形后缘的写入极。

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