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    • 14. 发明授权
    • Optimally staged cryopump
    • 最佳分阶段低温泵
    • US5001903A
    • 1991-03-26
    • US470069
    • 1990-01-25
    • Philip A. LessardThomas Dunn
    • Philip A. LessardThomas Dunn
    • F04B37/08
    • F04B37/08Y10S417/901
    • A cryopump having at least two temperature stages for pumping gases at their optimal temperatures. A first embodiment has a third temperature stage that is surrounded by and separated from the second temperature stage which is surrounded by and separated from the first temperature stage. Adsorbent placed on the second and third stages are operated at different temperatures to prevent gases with higher critical mobility temperatures from becoming immobilized at the entrance of pores and wells along the surface of the adsorbent. Another embodiment has at least a second stage, a temperature sensor, and a heater to maintain the second stage temperature at optimal level for the gas being pumped.
    • 具有至少两个温度级的低温泵,用于在最佳温度下泵送气体。 第一实施例具有被从第一温度段包围和分离的第二温度段包围和分离的第三温度级。 放置在第二和第三级上的吸附剂在不同温度下操作,以防止具有较高临界迁移率温度的气体在沿着吸附剂表面的孔和孔的入口处被固定。 另一实施例具有至少第二级,温度传感器和加热器,以将第二级温度保持在被泵送气体的最佳水平。
    • 15. 发明授权
    • Vacuum system with molecular flow line
    • 具有分子流线的真空系统
    • US4860546A
    • 1989-08-29
    • US230573
    • 1988-08-10
    • John T. HarvellPhilip A. Lessard
    • John T. HarvellPhilip A. Lessard
    • B01D8/00F04B37/08
    • F04B37/08B01D8/00Y10S417/901
    • In a vacuum system having a load lock cooperating with a work chamber, a flow line is connected between the cryopump of the load lock and the work chamber. The flow line passes noncondensible gases which are not absorbed by the cryopump of the load lock to the work chamber 12 for absorption by the cryopump of the work chamber. Alternatively, the flow line is connected between the load lock cryopump and the cryopump of the work chamber for directly passing the noncondensible gases to the work chamber cryopump. The flow line prevents buildup of noncondensible gases within the cryopump of the load lock. The flow line may include baffles to damp pressure surges during cryopumping of the load lock. A control valve connected to the flow line allows operator control of the passing of noncondensible gases from the load lock cryopump to the work chamber or to the work chamber cryopump through the flow line. The dimensions of the flow line provide molecular flow of the noncondensible gases.
    • 在具有与工作室协作的负载锁定的真空系统中,流线连接在负载锁的低温泵和工作室之间。 流动管线通过不被负载锁的低温泵吸收到工作室12中的非冷凝气体,以便被工作室的低温泵吸收。 或者,流动管线连接在负载锁定低温泵和工作室的低温泵之间,用于将不可冷凝气体直接传递到工作室低温泵。 流动管线可防止在负载锁的低温泵内产生不可冷凝气体。 流动管线可以包括挡板,以在加载锁的低温泵送期间减轻压力冲击。 连接到流动管线的控制阀允许操作者通过流动管线控制不可冷凝气体从负载锁定低温泵通到工作室或工作室低温泵。 流线的尺寸提供了不凝性气体的分子流。