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    • 12. 发明申请
    • OPTICAL FILM THICKNESS METER AND THIN FILM FORMING APPARATUS PROVIDED WITH OPTICAL FILM THICKNESS METER
    • 光学薄膜厚度计和薄膜形成装置的光学薄膜厚度计
    • US20120105872A1
    • 2012-05-03
    • US13381032
    • 2010-06-29
    • Kyokuyo SaiYohei HinataYoshiyuki OtakiYousong Jiang
    • Kyokuyo SaiYohei HinataYoshiyuki OtakiYousong Jiang
    • G01B11/28
    • G01B11/06C23C14/34C23C14/547G01B11/0625
    • An optical film thickness meter capable of measurement of an optical film thickness and spectroscopic characteristics with high accuracy and a thin film forming apparatus provided with the optical film thickness meter are provided. The optical film thickness meter includes a light projector (11), a reflection mirror (17), a light receiver (19), and a monochromator (20), and the reflection mirror (17) has a reflection surface disposed substantially perpendicularly to the optical axis of measurement light on the side opposite to an actual substrate (S) with respect to an incident direction of the measurement light. Also, the actual substrate (9) is disposed having a predetermined inclination angle (α) with respect to the optical axis of the measurement light. The measurement light (outgoing light and reflection light) passes through the actual substrate (S) twice, whereby a change amount in transmissivity (light amount) can be increased, and control accuracy of film thickness measurement can be improved. Also, occurrence of a measurement error caused by a difference in transmission positions can be prevented, and since the measurement light which has not passed through the measurement substrate twice along a predetermined path is no longer detected on the light receiver (19) side, the optical film thickness and spectroscopic characteristics can be measured with high accuracy.
    • 提供了能够高精度地测量光学膜厚度和光谱特性以及设置有光学膜厚计的薄膜形成装置的光学膜厚计。 光学薄膜厚度计包括光投影仪(11),反射镜(17),光接收器(19)和单色仪(20),反射镜(17)具有基本垂直于 相对于测量光的入射方向与实际基板(S)相反的一侧的测量光的光轴。 此外,实际的基板(9)相对于测量光的光轴具有预定的倾斜角(α)。 测量光(出射光和反射光)通过实际基板(S)两次,从而可以提高透射率(光量)的变化量,并且可以提高膜厚测量的控制精度。 此外,可以防止由于发送位置的差异而引起的测量误差的发生,并且由于在光接收器(19)侧不再检测未沿着预定路径通过测量基板的测量光两次, 可以高精度地测量光学膜厚度和光谱特性。
    • 17. 发明申请
    • OPTICAL FILM THICKNESS MEASURING DEVICE AND THIN FILM FORMING APPARATUS USING THE OPTICAL FILM THICKNESS MEASURING DEVICE
    • 光学薄膜厚度测量装置和薄膜形成装置使用光学薄膜厚度测量装置
    • US20140016139A1
    • 2014-01-16
    • US13823527
    • 2012-02-15
    • Kyokuyo SaiYousong JiangKenji Ozawa
    • Kyokuyo SaiYousong JiangKenji Ozawa
    • G01B11/06
    • G01B11/0691C23C14/0078C23C14/505C23C14/547G01B11/0625
    • An optical film thickness measuring device, enabling direct measurement of a film thickness of a product in real time accurately without a monitor substrate, includes: a projector, a light receiver, inner beam splitters disposed in a base substrate holder to reflect a measurement beam to a base substrate, an inner optical reflector that totally reflects a measurement beam from the closest inner beam splitter, external beam splitters the measurement beam from the inner beam splitters toward the light receiver, and an outer optical reflector that reflects the measurement beam from the optical reflector toward the light receiver. The measurement beam reflected by the inner beam splitters and the inner optical reflector is passed through the base substrate and then reflected by the external beam splitters and the outer optical reflector to be guided to the light receiver, so that the measurement beam is received by the light receiver.
    • 一种光学膜厚度测量装置,能够在没有监视器基板的情况下实时精确地直接测量产品的膜厚度,包括:投影仪,光接收器,设置在基板保持器中的内分束器,以将测量光束反射到 基底基板,全反射来自最近内分束器的测量光束的内部光学反射器,外部光束将测量光束从内部分束器分离到光接收器,以及外部光学反射器,其将测量光束从光学 反射器朝向光接收器。 由内分束器和内部光学反射器反射的测量光束通过基底基板,然后被外部分束器和外部光学反射器反射,以被引导到光接收器,使得测量光束被 光接收机。