会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 19. 发明授权
    • Detector optics for charged particle beam inspection system
    • 用于带电粒子束检测系统的检测器光学器件
    • US07122795B2
    • 2006-10-17
    • US10833949
    • 2004-04-27
    • N. William Parker
    • N. William Parker
    • G01N23/00
    • H01J37/28H01J37/244
    • A charged particle beam column for substrate inspection includes detector optics with high secondary electron detection efficiency combined with minimal distortion of the charged particle beam. One embodiment of the detector optics includes a symmetrizing electrode configured with a secondary electron detector to produce a generally cylindrically symmetric electric field about the optical axis of the column. Control electrodes may be used for screening the charged particle beam from the secondary electron detector and for controlling the electric field at the surface of the substrate. In some embodiments, the control electrodes are cylindrically symmetric about the optical axis; whereas in other embodiments, the cylindrical symmetry of one or more control electrodes is broken in order to improve the secondary electron detection efficiency.
    • 用于基板检查的带电粒子束柱包括具有高二次电子检测效率的结合最小带电粒子束失真的检测器光学器件。 检测器光学器件的一个实施例包括配置有二次电子检测器的对称电极,以围绕色谱柱的光轴产生大致圆柱形的对称电场。 控制电极可用于筛选来自二次电子检测器的带电粒子束并用于控制衬底表面处的电场。 在一些实施例中,控制电极围绕光轴圆柱对称; 而在其他实施例中,为了提高二次电子检测效率,一个或多个控制电极的圆柱对称性被破坏。