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11. 发明申请

US20130284097A1 GAS DISTRIBUTION MODULE FOR INSERTION IN LATERAL FLOW CHAMBERS 审中-公开
标题翻译：气体分配模块，用于在侧向流动阀中插入
公开(公告)号：US20130284097A1
公开(公告)日：2013-10-31
申请号：US13785454
申请日：2013-03-05
申请人： Joseph M. Ranish , Mehmet Tugrul Samir
发明人： Joseph M. Ranish , Mehmet Tugrul Samir
IPC分类号： B05B3/00
CPC分类号： B05B3/00 , C23C16/45578 , C23C16/45589 , C23C16/481 , C23C16/52 , H01L21/67115
摘要： Embodiments of the invention generally relate to apparatus for and methods of depositing material on a substrate. The apparatus generally include a process chamber having a process gas region therein. Process gas is introduced into the process gas region through a process gas inlet. The chamber also includes lamps positioned outside the chamber to thermally decompose the process gas onto the substrate surface. The process chamber also includes at least one movable gas diffuser adapted to provide process gas to the surface of the substrate to effect a uniform deposition of material on the substrate surface. The methods generally include flowing a process gas parallel to a surface of a substrate, and thermally decomposing the process gas on the substrate. Additional process gas is provided through a movable gas diffuser to the surface of the substrate in a predetermined distribution to effect a uniform deposition on the substrate surface.
摘要翻译：本发明的实施例一般涉及用于在衬底上沉积材料的装置和方法。该装置通常包括其中具有工艺气体区域的处理室。工艺气体通过工艺气体入口引入工艺气体区域。该室还包括位于室外的灯，以将工艺气体热分解到衬底表面上。处理室还包括至少一个可移动的气体扩散器，其适用于向衬底的表面提供工艺气体，以使材料均匀地沉积在衬底表面上。所述方法通常包括使工艺气体平行于衬底的表面流动，并且热分解衬底上的工艺气体。通过可移动气体扩散器以预定的分布将额外的工艺气体提供到衬底的表面，以在衬底表面上实现均匀的沉积。

12. 发明申请

US20090086401A1 ELECTROSTATIC CHUCK APPARATUS 审中-公开
标题翻译：静电卡装置
公开(公告)号：US20090086401A1
公开(公告)日：2009-04-02
申请号：US11864288
申请日：2007-09-28
申请人： Tugrul Samir , Terry Bluck , Dennis Grimard
发明人： Tugrul Samir , Terry Bluck , Dennis Grimard
IPC分类号： H01L21/683 , H01L21/67 , H02N13/00
CPC分类号： H01L21/6831
摘要： An electrostatic chuck includes an angled conduit, or an angled laser drilled passage, through which a heat transfer gas is provided. A segment of the angled conduit and/or the angled laser drilled passage extends along an axis different from an axis of the electric field generated to hold a substrate to the chuck, thereby minimizing plasma arcing and backside gas ionization. A first plug may be inserted into the conduit, wherein a segment of a first exterior channel thereof extends along an axis different from an axis of the electric field. A first and second plug may be inserted into a ceramic sleeve which extends through at least one of the dielectric member and the electrode. Finally, the surface of the dielectric member may comprise embossments arranged at radial distances from the center of the dielectric member so as to improve heat transfer and gas distribution.
摘要翻译：静电卡盘包括成角度的导管或成角度的激光钻孔通道，通过该通道提供传热气体。成角度的管道和/或成角度的激光钻孔通道的一段沿着不同于将基板保持在卡盘上的电场的轴线不同的轴线延伸，从而最小化等离子体电弧放电和背侧气体电离。第一塞子可以插入导管中，其中第一外部通道的一段沿着不同于电场的轴线的轴线延伸。第一和第二插头可以插入延伸穿过电介质构件和电极中的至少一个的陶瓷套管中。最后，电介质构件的表面可以包括布置在离电介质构件的中心的径向距离处的凸起，以便改善传热和气体分布。

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