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    • 14. 发明申请
    • SEMICONDUCTOR DEVICE
    • 半导体器件
    • US20090166746A1
    • 2009-07-02
    • US12342453
    • 2008-12-23
    • Junichi MitaniSatoshi NakaiKazushi Fujita
    • Junichi MitaniSatoshi NakaiKazushi Fujita
    • H01L21/762H01L27/088G06F17/50
    • H01L21/823456H01L21/823412H01L27/0207H01L27/088H01L2924/0002H01L2924/00
    • A semiconductor device has a first and a second active regions of a first conductivity type disposed on a semiconductor substrate, a third and a fourth active regions of a second conductivity type disposed on the semiconductor substrate, the second and the fourth active regions having sizes larger than those of the first and the third active regions respectively, a first electroconductive pattern disposed adjacent to the first active region and having a first width, a second electroconductive pattern disposed adjacent to the second active region and having a second width larger than the first width, a third electroconductive pattern disposed adjacent to the third active region and having a third width; and a fourth electroconductive pattern disposed adjacent to the fourth active region and having a fourth width smaller than the third width.
    • 半导体器件具有设置在半导体衬底上的第一导电类型的第一和第二有源区,设置在半导体衬底上的第二导电类型的第三和第四有源区,第二和第四有源区的尺寸较大 分别设置为与第一有源区域相邻并且具有第一宽度的第一导电图案,与第二有源区域相邻设置并且具有大于第一宽度的第二宽度的第二导电图案 第三导电图案,其布置成与所述第三有源区相邻并且具有第三宽度; 以及第四导电图案,其布置成与所述第四有源区相邻并且具有小于所述第三宽度的第四宽度。
    • 16. 发明授权
    • Method for making magnetrons
    • 制造磁控管的方法
    • US06729926B2
    • 2004-05-04
    • US10020766
    • 2001-12-12
    • Noriyuki MuraoKazuki MikiSatoshi NakaiSetsuo HasegawaNoriyuki Okada
    • Noriyuki MuraoKazuki MikiSatoshi NakaiSetsuo HasegawaNoriyuki Okada
    • H01J914
    • H01J23/165H01J2223/16H01J2225/50H01J2225/587
    • A magnetron has an anode cylinder, a plurality of vanes arranged radially within the anode cylinder, a magnetic piece disposed at an open end section of the anode cylinder, an anode vacuum container including a metal container disposed to cover an upper surface of the magnetic piece, a cathode disposed along a central axis of the vacuum container, and an antenna externally discharging microwaves. The magnetic piece and the metal container are placed, in that order, on a shelf formed inwardly on a thin end section projecting from the open end section of the anode cylinder. When tightly welding the thin end section, a predetermined number of projections, projecting inwardly from the thin end section of the anode cylinder, loosely secure an outer perimeter bend of the metal container. The metal container is then accurately tightly welded to the anode cylinder without the metal container shifting off-center.
    • 磁控管具有阳极筒,在阳极筒内径向设置的多个叶片,设置在阳极筒的开口端部的磁性片,阳极真空容器,其包括设置成覆盖磁性片的上表面的金属容器 ,沿着真空容器的中心轴设置的阴极和从外部排出微波的天线。 磁片和金属容器依次放置在从阳极圆筒的开口端突出的薄端部分上向内形成的搁板上。 当紧密焊接薄端部时,从阳极筒的薄端部向内突出的预定数量的突起松动地固定金属容器的外周弯曲部。 然后将金属容器准确地紧密地焊接到阳极筒,而不会使金属容器偏离中心。
    • 19. 发明授权
    • Uniform gas flow CVD apparatus
    • 均匀气流CVD装置
    • US5188058A
    • 1993-02-23
    • US902661
    • 1992-06-22
    • Satoshi Nakai
    • Satoshi Nakai
    • C30B25/14C23C16/44C23C16/455C23C16/48H01L21/205H01L21/31
    • C23C16/45565C23C16/455C23C16/45508C23C16/45519C23C16/481
    • A CVD apparatus comprising a reaction chamber in which reaction gas is supplied from above the substrate supported on the susceptor plate and exhausted uniformly from a plurality of circumferentially spaced gas exits, and infrared light heats the substrate from below the substrate via an infrared light transparent window arranged between the source of infrared light and the susceptor plate. A second infrared light transparent window with a central opening is arranged between the first infrared light transparent window and the susceptor plate. Nitrogen gas or an inert gas is supplied from a portion between the first and second infrared light transparent windows and flows through a plurality of circumferentially spaced gas passages arranged at the juncture of the susceptor plate and the peripheral wall of the reaction chamber to the gas exits. The gas passages are coordinated with the gas exits so that the flow of the reaction gas is less disturbed by the flow of the second gas.
    • 一种CVD装置,包括反应室,其中反应气体从支撑在基座板上的基板的上方供应并从多个周向间隔开的气体出口均匀排出,并且红外光通过红外光透明窗从基板下方加热基板 布置在红外光源和基座板之间。 具有中央开口的第二红外透光窗设置在第一红外光透明窗和基座板之间。 氮气或惰性气体从第一和第二红外光透明窗口之间的部分供应,并且流过布置在基座板和反应室的周壁的接合处的多个周向隔开的气体通道到气体出口 。 气体通道与气体出口协调,使得反应气体的流动受到第二气体的流动的干扰较小。
    • 20. 发明授权
    • Semiconductor device
    • 半导体器件
    • US07910957B2
    • 2011-03-22
    • US12342453
    • 2008-12-23
    • Junichi MitaniSatoshi NakaiKazushi Fujita
    • Junichi MitaniSatoshi NakaiKazushi Fujita
    • H01L23/52
    • H01L21/823456H01L21/823412H01L27/0207H01L27/088H01L2924/0002H01L2924/00
    • A semiconductor device has a first and a second active regions of a first conductivity type disposed on a semiconductor substrate, a third and a fourth active regions of a second conductivity type disposed on the semiconductor substrate, the second and the fourth active regions having sizes larger than those of the first and the third active regions respectively, a first electroconductive pattern disposed adjacent to the first active region and having a first width, a second electroconductive pattern disposed adjacent to the second active region and having a second width larger than the first width, a third electroconductive pattern disposed adjacent to the third active region and having a third width; and a fourth electroconductive pattern disposed adjacent to the fourth active region and having a fourth width smaller than the third width.
    • 半导体器件具有设置在半导体衬底上的第一导电类型的第一和第二有源区,设置在半导体衬底上的第二导电类型的第三和第四有源区,第二和第四有源区的尺寸较大 分别设置为与第一有源区域相邻并且具有第一宽度的第一导电图案,与第二有源区域相邻设置并且具有大于第一宽度的第二宽度的第二导电图案 第三导电图案,其布置成与所述第三有源区相邻并且具有第三宽度; 以及第四导电图案,其布置成与所述第四有源区相邻并且具有小于所述第三宽度的第四宽度。