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    • 19. 发明申请
    • METHOD FOR ADJUSTING VAPOR-PHASE GROWTH APPARATUS
    • 调节蒸汽相生长装置的方法
    • US20160083846A1
    • 2016-03-24
    • US14779715
    • 2014-03-18
    • TAIYO NIPPON SANSO CORPORATION
    • Shuuichi KOSEKI
    • C23C16/46C23C16/52C23C14/54
    • C23C16/46C23C14/541C23C16/52
    • The present invention provides a method of adjusting vapor-phase growth apparatuses in which the individual difference of a heater-set temperature and a surface temperature of substrate-mounted plate among the vapor-phase growth apparatuses is eliminated. The method of adjusting vapor-phase growth apparatuses of the present invention includes a thermocouple-location-adjusting step, in which the relative location of a thermocouple (17) and a heater (15) is adjusted so that the change amount of the surface temperature of a substrate-mounted plate (7) with respect to the change amount in the heater-set temperature reaches a predetermined value, and a temperature-control-value-correcting step, in which the thermocouple (17) is disposed at the location adjusted in the thermocouple-location-adjusting step, the surface temperature of the substrate-mounted plate (7) is obtained when the substrate-mounted plate (7) is heated by the heater (15) in accordance with a prescribed temperature-set value, and a temperature-control value with respect to a temperature-set value is corrected on the basis of the difference between the temperature-set value at this time and the surface temperature of the substrate-mounted plate (7).
    • 本发明提供了一种调整气相生长装置的方法,其中消除了气相生长装置中的基板安装板的加热器设定温度和表面温度的个体差异。 本发明的气相生长装置的调整方法包括:热电偶位置调整步骤,其中,调整热电偶(17)和加热器(15)的相对位置,使得表面温度 相对于加热器设定温度的变化量的基板安装板(7)达到预定值,以及温度控制值校正步骤,其中将热电偶(17)设置在调整的位置 在热电偶位置调整步骤中,当基板安装板(7)根据规定的温度设定值被加热器(15)加热时,获得基板安装板(7)的表面温度, 并且基于此时的温度设定值与基板安装板(7)的表面温度之差来校正温度设定值的温度控制值。