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    • 12. 发明申请
    • SEMICONDUCTOR MANUFACTURING APPARATUS
    • 半导体制造设备
    • US20120325796A1
    • 2012-12-27
    • US13528504
    • 2012-06-20
    • Atsushi KOBAYASHIKazuyuki MIURAAkira YASUMURO
    • Atsushi KOBAYASHIKazuyuki MIURAAkira YASUMURO
    • F27D11/00
    • H01J37/32467H01J37/32522H01J37/32532
    • A semiconductor manufacturing apparatus is capable of reducing power consumption. The semiconductor manufacturing apparatus 1 includes a processing chamber 2 that has a top surface 2a and forms a processing space S therein; a mounting table 3 provided in the processing space S; an upper electrode 20 provided above the mounting table 3 to face the mounting table 3; heaters 35 and 36 provided around the upper electrode 20 and below the top surface 2a of the processing chamber 2 and configured to heat the upper electrode 20; and a heat insulating unit 50, mounted on the top surface 2a of the processing chamber 2, having a plate-shaped member 51 and a heat insulating member 52 that is provided on one main surface 51a of the plate-shaped member 51.
    • 半导体制造装置能够降低功耗。 半导体制造装置1包括具有顶面2a并在其中形成处理空间S的处理室2; 设置在处理空间S中的安装台3; 设置在安装台3上方以面向安装台3的上部电极20; 设置在上电极20周围并位于处理室2的上表面2a的下方的加热器35和36,并被构造成加热上电极20; 以及安装在处理室2的上表面2a上的隔热单元50,其具有设置在板状构件51的一个主表面51a上的板状构件51和隔热构件52。
    • 16. 发明授权
    • Recording/reproducing device
    • 记录/再现装置
    • US06785745B2
    • 2004-08-31
    • US10069071
    • 2002-06-17
    • Atsushi IsshikiKazuyuki Miura
    • Atsushi IsshikiKazuyuki Miura
    • G06F300
    • G11B20/10G11B19/04G11B19/26G11B19/28G11B2020/10916
    • A recording/playback apparatus includes an upper control unit which transmits a composite command, which includes a real processing command and a virtual command, to a disk device. The disk device performs a process until a point of time when an operation cannot be continued unless the virtual command is changed to the real processing command to be operated beforehand. Instead of standing by after the real processing command is completed, the disk device can voluntarily operate beforehand in response to the virtual command, while selecting an optimum seek speed or disk rotation speed. The recording/playback apparatus can thus maintain the continuity of continuous data and perform an optimum operation in accordance with an expected performance while switching speeds of seek and disk rotation in detail.
    • 记录/重放装置包括向盘设备发送包括实际处理命令和虚拟命令的复合命令的上位控制单元。 磁盘设备执行一个处理,直到操作不能继续的时间点,除非虚拟命令改变为预先操作的实际处理命令。 而不是在实际处理命令完成后站立,所以在选择最佳寻道速度或盘旋转速度的同时,磁盘装置可以响应虚拟命令预先自动操作。 因此,记录/重放装置可以保持连续数据的连续性,并且在查找和盘旋转的速度更详细地切换时,根据预期的性能执行最佳操作。