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11. 发明申请

US20120244725A1 HEAT TREATMENT METHOD AND HEAT TREATMENT APPARATUS FOR HEATING SUBSTRATE BY IRRADIATING SUBSTRATE WITH LIGHT 有权
标题翻译：热处理方法和热处理装置通过用光照射基板加热基板
公开(公告)号：US20120244725A1
公开(公告)日：2012-09-27
申请号：US13417498
申请日：2012-03-12
申请人： Kazuhiko FUSE , Shinichi KATO , Kenichi YOKOUCHI
发明人： Kazuhiko FUSE , Shinichi KATO , Kenichi YOKOUCHI
IPC分类号： H01L21/263 , F27B9/36
CPC分类号： H01L21/2253 , F27B17/0025 , H01L21/02694 , H01L21/26513 , H01L21/2686 , H01L21/324 , H01L21/67115 , H01L21/67248 , H01L21/68707 , H01L21/68742
摘要： First irradiation which causes an emission output from a flash lamp to reach its maximum value over a time period in the range of 1 to 20 milliseconds is performed to increase the temperature of a front surface of a semiconductor wafer from a preheating temperature to a target temperature for a time period in the range of 1 to 20 milliseconds. This achieves the activation of the impurities. Subsequently, second irradiation which gradually decreases the emission output from the maximum value over a time period in the range of 3 to 50 milliseconds is performed to maintain the temperature of the front surface within a ±25° C. range around the target temperature for a time period in the range of 3 to 50 milliseconds. This prevents the occurrence of process-induced damage while suppressing the diffusion of the impurities.
摘要翻译：执行使闪光灯的发射输出在1至20毫秒的范围内达到其最大值的第一次照射，以将半导体晶片的前表面的温度从预热温度升高到目标温度在1到20毫秒的范围内的时间段。这实现了杂质的活化。随后，进行从3-50毫秒的范围内的最大值的最大值逐渐降低的第二次照射，将前表面的温度保持在目标温度±25℃左右的范围内时间段在3到50毫秒的范围内。这防止了杂质的扩散抑制了工艺引起的损伤的发生。

12. 发明授权

US07795886B2 Surface voltmeter 有权
标题翻译：表面电压表
公开(公告)号：US07795886B2
公开(公告)日：2010-09-14
申请号：US12076887
申请日：2008-03-25
申请人： Motohiro Kono , Toshikazu Kitajima , Kazuhiko Fuse , Yoshiyuki Nakazawa
发明人： Motohiro Kono , Toshikazu Kitajima , Kazuhiko Fuse , Yoshiyuki Nakazawa
IPC分类号： G01R31/302
CPC分类号： G01R29/12
摘要： In a surface voltmeter (1), a surface voltage on a measurement area on a semiconductor substrate (9) on which an insulating film is formed is measured while applying light to the measurement area. With this operation, a voltage induced on a main body of the substrate (9) by charge which is charged on a surface of the insulating film is balanced out. Consequently, it is possible to measure a surface voltage on the measurement area with high accuracy. Since an electrode wiring (164) used for application of an electrode voltage to an electrode (12) extends from the electrode (12) in a direction away from the substrate (9) along a vibration direction, it is possible to prevent influences of noises caused by vibration of the electrode wiring (164) in vibrating the electrode (12) and to measure the surface voltage on the measurement area more accurately.
摘要翻译：在表面电压计（1）中，在对测量区域施加光的同时测量在其上形成有绝缘膜的半导体衬底（9）上的测量区域上的表面电压。通过该操作，平衡了在基板（9）的主体上通过充电在绝缘膜的表面上的电荷感应的电压。因此，可以高精度地测量测量区域上的表面电压。由于用于向电极（12）施加电极电压的电极配线（164）沿着振动方向从离开基板（9）的方向从电极（12）延伸，所以可以防止噪声的影响由电极布线（164）振动电极（12）的振动引起的，并且更准确地测量测量区域上的表面电压。

13. 发明授权

US07598746B2 Surface voltmeter and surface voltage measurement method 失效
标题翻译：表面电压表和表面电压测量方法
公开(公告)号：US07598746B2
公开(公告)日：2009-10-06
申请号：US11715846
申请日：2007-03-09
申请人： Motohiro Kono , Kazuhiko Fuse , Yoshiyuki Nakazawa
发明人： Motohiro Kono , Kazuhiko Fuse , Yoshiyuki Nakazawa
IPC分类号： G01R29/12
CPC分类号： G01R29/12
摘要： A surface voltmeter has a stage having a conductive surface, a vibrating electrode, a vibration part, and an elevation mechanism. While vibrating the vibrating electrode, displacement current from the conductive surface is acquired. A control part controls electrode voltage so that the displacement current becomes a value specified by a computer, and acquires a relationship between the displacement current and the electrode voltage while changing the displacement current. Acquisition of the relationship is performed a plurality of times while changing distance between the vibrating electrode and an object, the electrode voltage which is independent from the distance between the vibrating electrode and the object is obtained as reference voltage, and surface voltage on the object is obtained on the basis of the reference voltage. This makes it possible to remove effects of stray capacitances between the vibrating electrode and other constituent elements therearound from measurement, and easily perform higher-precision measurement.
摘要翻译：表面电压表具有导电表面的阶段，振动电极，振动部分和升降机构。在振动电极振动的同时，获得来自导电表面的位移电流。控制部件控制电极电压，使得位移电流变为由计算机指定的值，并且在改变位移电流的同时获取位移电流和电极电压之间的关系。在改变振动电极和物体之间的距离的同时进行关系的获取，获得与振动电极和物体之间的距离无关的电极电压作为参考电压，并且物体上的表面电压为基于参考电压获得。这样可以消除振动电极与测量之外的其他构成元件之间的杂散电容的影响，并且容易进行更高精度的测量。

14. 发明申请

US20070216418A1 Surface voltmeter and surface voltage measurement method 失效
标题翻译：表面电压表和表面电压测量方法
公开(公告)号：US20070216418A1
公开(公告)日：2007-09-20
申请号：US11715846
申请日：2007-03-09
申请人： Motohiro Kono , Kazuhiko Fuse , Yoshiyuki Nakazawa
发明人： Motohiro Kono , Kazuhiko Fuse , Yoshiyuki Nakazawa
IPC分类号： G01R29/12
CPC分类号： G01R29/12
摘要： A surface voltmeter comprises a stage having a conductive surface, a vibrating electrode, a vibration part, and an elevation mechanism. While vibrating the vibrating electrode, displacement current from the conductive surface is acquired. A control part controls electrode voltage so that the displacement current becomes a value specified by a computer, and acquires a relationship between the displacement current and the electrode voltage while changing the displacement current. Acquisition of the relationship is performed a plurality of times while changing distance between the vibrating electrode and an object, the electrode voltage which is independent from the distance between the vibrating electrode and the object is obtained as reference voltage, and surface voltage on the object is obtained on the basis of the reference voltage. This makes it possible to remove effects of stray capacitances between the vibrating electrode and other constituent elements therearound from measurement, and easily perform higher-precision measurement.
摘要翻译：表面电压计包括具有导电表面的台，振动电极，振动部分和升降机构。在振动电极振动的同时，获得来自导电表面的位移电流。控制部件控制电极电压，使得位移电流变为由计算机指定的值，并且在改变位移电流的同时获取位移电流和电极电压之间的关系。在改变振动电极和物体之间的距离的同时进行关系的获取，获得与振动电极和物体之间的距离无关的电极电压作为参考电压，并且物体上的表面电压为基于参考电压获得。这样可以消除振动电极与测量之外的其他构成元件之间的杂散电容的影响，并且容易进行更高精度的测量。

15. 发明授权

US06364692B1 Water proof connector 失效
标题翻译：防水连接器
公开(公告)号：US06364692B1
公开(公告)日：2002-04-02
申请号：US09583326
申请日：2000-05-31
申请人： Yasushi Okayasu , Osamu Taniuchi , Hitoshi Okumura , Kazuhiko Fuse
发明人： Yasushi Okayasu , Osamu Taniuchi , Hitoshi Okumura , Kazuhiko Fuse
IPC分类号： H01R1120
CPC分类号： H01R13/5219
摘要： A watertight connector is provided to create a reduced degree of connection resistance. The connector includes a female housing 20 to be connected with a male housing 10. A seal 30 is provided on the front surface of the female housing 20, and is held by a seal holder 40. The seal holder 40 presses the seal 30 against the front surface of an accommodating portion 11 to adhere the seal 30 to front opening ends of cavities 13 before the housings 10, 20 are connected with each other. Thereafter, tabs 23 penetrate the seal 30, and the seal 30 adheres to the outer surfaces of the tabs 23 to provide sealing between the cavities 13. Accordingly, during the connection of the housings 10, 20, resistance resulting from the sealing between the cavities 13 is only sliding-contact resistance created between the outer surfaces of the tabs 23 and the seal member 30.
摘要翻译：提供防水连接器以产生较小的连接电阻。连接器包括与阳壳体10连接的阴壳体20.密封件30设置在阴壳体20的前表面上并由密封件保持器40保持。密封件保持器40将密封件30压靠在阴壳体20上。容纳部分11的前表面，以在壳体10,20彼此连接之前将密封件30粘附到空腔13的前开口端。此后，突片23穿过密封件30，并且密封件30粘附到突片23的外表面，以在腔体13之间提供密封。因此，在壳体10,20的连接期间，由腔体之间的密封产生的阻力 13只是在突片23的外表面和密封件30之间产生的滑动接触电阻。

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