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    • 14. 发明申请
    • SUPERCRITICAL DRYING METHOD AND SUPERCRITICAL DRYING SYSTEM
    • 超临界干燥方法和超临界干燥系统
    • US20120048304A1
    • 2012-03-01
    • US13029776
    • 2011-02-17
    • Yukiko KITAJIMAHiroshi TOMITAHidekazu HAYASHIHisashi OKUCHIYohei SATO
    • Yukiko KITAJIMAHiroshi TOMITAHidekazu HAYASHIHisashi OKUCHIYohei SATO
    • B08B3/00
    • H01L21/67034H01L21/02101
    • According to an embodiment, a supercritical drying method includes: introducing a semiconductor substrate of which a surface is wet with a supercritical displacement solvent into a chamber; supplying a first supercritical fluid being based on first carbon dioxide to the chamber; supplying a second supercritical fluid which is based on second carbon dioxide to the chamber, after the supplying of the first supercritical fluid; and lowering an inside pressure of the chamber to gasify the second supercritical fluid and to discharge the gasified second supercritical fluid from the chamber. The first carbon dioxide is generated by recovering and recycling the carbon dioxide discharged from the chamber. The second carbon dioxide contains no supercritical displacement solvent or contains the supercritical displacement solvent in a concentration lower than that in the first carbon dioxide.
    • 根据一个实施方案,超临界干燥方法包括:将超临界位移溶剂表面被湿润的半导体衬底引入腔室; 将基于第一二氧化碳的第一超临界流体供应到所述室; 在供应第一超临界流体之后,向腔室供应基于第二二氧化碳的第二超临界流体; 并且降低所述室的内部压力以使所述第二超临界流体气化并从所述室排出所述气化的第二超临界流体。 第一种二氧化碳是通过回收和循环从室排出的二氧化碳产生的。 第二种二氧化碳不含超临界置换溶剂,或含有浓度低于第一种二氧化碳浓度的超临界置换溶剂。
    • 17. 发明申请
    • PRODUCTION METHOD OF NANOIMPRINT FILM, DISPLAY DEVICE, AND LIQUID CRYSTAL DISPLAY DEVICE
    • 纳米薄膜的制造方法,显示装置和液晶显示装置
    • US20100291317A1
    • 2010-11-18
    • US12735298
    • 2008-11-07
    • Takao ImaokuTokio TaguchiHidekazu HayashiKazuhiko Tsuda
    • Takao ImaokuTokio TaguchiHidekazu HayashiKazuhiko Tsuda
    • B29C59/16
    • G02B1/118B29C59/046B29C2035/0827B29C2059/023B29C2791/001B29K2105/243G02B5/208
    • A method is disclosed for efficiently producing a nanoimprint film with high-accurately formed nanostructures even if a base on which the nanoimprint film is formed is capable of absorbing UV light. The production method of at least one embodiment of the present invention is a production method of a nanoimprint film formed on a base, the nanoimprint film having a surface with nanosized protrusions and recesses formed thereon. In at least one embodiment, the production method includes a first step of applying a UV-curable resin on a base containing a UV-absorbing component to form a film; a second step of irradiating the film with UV light from a top-side surface of the film to form a semi-cured film; a third step of imprinting nanosized protrusions and recesses on the semi-cured film to form a film having a surface with protrusions and recesses formed thereon; and a fourth step of curing the film with protrusions and recesses to form a nanoimprint film.
    • 公开了一种用于有效地制造具有高精度形成的纳米结构的纳米压印膜的方法,即使形成有纳米压印膜的基底能够吸收紫外光。 本发明的至少一个实施方式的制造方法是在基材上形成的纳米压印膜的制造方法,其中,纳米压印膜具有在其上形成有纳米尺寸的突起和凹部的表面。 在至少一个实施方案中,制备方法包括在包含UV吸收组分的基底上施加UV可固化树脂以形成膜的第一步骤; 第二步骤,用来自薄膜顶面的UV光照射薄膜,形成半固化薄膜; 在半固化膜上印刷纳米尺寸的突起和凹部的第三步骤,以形成具有形成在其上的突起和凹部的表面的膜; 以及用突起和凹部固化膜以形成纳米压印膜的第四步骤。