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11. 发明授权

US06512631B2 Broad-band deep ultraviolet/vacuum ultraviolet catadioptric imaging system 有权
标题翻译：宽带深紫外/真空紫外线反射折射成像系统
公开(公告)号：US06512631B2
公开(公告)日：2003-01-28
申请号：US09349036
申请日：1999-07-07
申请人： David R. Shafer , Yung-Ho Chuang , J. Joseph Armstrong
发明人： David R. Shafer , Yung-Ho Chuang , J. Joseph Armstrong
IPC分类号： G02B1314
CPC分类号： G03F7/70225 , G02B17/08 , G02B17/0812 , G02B17/0856 , G02B17/0892 , G02B17/0896 , G02B21/04 , G02B21/16 , G03F1/84 , G03F7/70275 , G03F7/70483 , G03F7/70616 , G03F7/7065
摘要： A design for inspecting specimens, such as photomasks, for unwanted particles and features such as pattern defects is provided. The system provides no central obscuration, an external pupil for aperturing and Fourier filtering, and relatively relaxed manufacturing tolerances, and is suited for both broad-band bright-field and laser dark field imaging and inspection at wavelengths below 365 nm. In many instances, the lenses used may be fashioned or fabricated using a single material. Multiple embodiments of the objective lensing arrangement are disclosed, all including at least one small fold mirror and a Mangin mirror. The system is implemented off axis such that the returning second image is displaced laterally from the first image so that the lateral separation permits optical receipt and manipulation of each image separately. The objective designs presented have the optical axis of the Mangin mirror image relay at ninety degrees to the optical axis defined by the focusing lenses, or an in-line or straight objective having one ninety degree bend of light rays.
摘要翻译：提供了用于检查样品的设计，例如光掩模，用于不想要的颗粒和诸如图案缺陷的特征。该系统不提供中心遮蔽，用于打开和傅立叶滤波的外部光瞳，以及相对放松的制造公差，并且适用于波长低于365nm的宽带亮场和激光暗场成像和检查。在许多情况下，所使用的透镜可以使用单一材料来制造或制造。公开了物镜设计的多个实施例，全部包括至少一个小折叠镜和Mangin镜。系统离轴实现，使得返回的第二图像从第一图像横向移位，使得横向分离允许分别对每个图像进行光学接收和操纵。所提出的目标设计具有与由聚焦透镜限定的光轴90度的Mangin镜像继电器的光轴，或具有一个九十度光线弯曲的直列或直线物镜。

12. 发明授权

US06313467B1 Broad spectrum ultraviolet inspection methods employing catadioptric imaging 有权
标题翻译：使用反射折射成像的广谱紫外线检测方法
公开(公告)号：US06313467B1
公开(公告)日：2001-11-06
申请号：US09596540
申请日：2000-06-16
申请人： David R. Shafer , Yung-Ho Chuang , Bin-Ming B. Tsai
发明人： David R. Shafer , Yung-Ho Chuang , Bin-Ming B. Tsai
IPC分类号： G01N2164
CPC分类号： G03F7/70225 , G02B13/143 , G02B17/0808 , G02B17/0856 , G02B17/0892 , G02B21/16 , G03F1/84 , G03F7/70216 , G03F7/70275 , G03F7/70616 , G03F7/7065
摘要： An ultraviolet (UV) catadioptric imaging system, with broad spectrum correction of primary and residual, longitudinal and lateral, chromatic aberrations for wavelengths extending into the deep UV (as short as about 0.16 &mgr;m), comprises a focusing lens group with multiple lens elements that provide high levels of correction of both image aberrations and chromatic variation of aberrations over a selected wavelength band, a field lens group formed from lens elements with at least two different refractive materials, such as silica and a fluoride glass, and a catadioptric group including a concave reflective surface providing most of the focusing power of the system and a thick lens providing primary color correction in combination with the focusing lens group. The field lens group is located near the intermediate image provided by the focusing lens group and functions to correct the residual chromatic aberrations. The system is characterized by a high numerical aperture (typ. greater than 0.7) and a large flat field (with a size on the order of 0.5 mm). The broad band color correction allows a wide range of possible UV imaging applications at multiple wavelengths.
摘要翻译：紫外线（UV）反折射成像系统具有对延伸到深紫外（短至约0.16μm）的波长的初级和残留，纵向和横向色差的广谱校正，包括具有多个透镜元件的聚焦透镜组，提供对所选波长带上的像差的两个像差和色度变化的高水平校正，由具有至少两种不同折射材料的透镜元件形成的场透镜组，例如二氧化硅和氟化物玻璃，以及包括提供系统的大部分聚焦功能的凹面反射表面以及与聚焦透镜组组合提供原色校正的厚透镜。场透镜组位于由聚焦透镜组提供的中间图像附近，并且用于校正残余色差。该系统的特征在于高数值孔径（典型值大于0.7）和大平坦场（尺寸约为0.5毫米）。宽带色彩校正允许在多个波长下的广泛范围的可能的UV成像应用。

13. 发明授权

US4331390A Monocentric optical systems 失效
标题翻译：单中心光学系统
公开(公告)号：US4331390A
公开(公告)日：1982-05-25
申请号：US82814
申请日：1979-10-09
申请人： David R. Shafer
发明人： David R. Shafer
IPC分类号： G02B17/08 , G02B17/00
CPC分类号： G02B17/0856 , G02B17/08 , G02B17/0884
摘要： The systems comprise a transmissive shell and a mirror. The surfaces of the shell and the mirror are monocentric; that is, spherical and have the same center of curvature. Both the object and image planes are located in front of and spaced away from the transmissive shell.Single optical element systems comprise a transmissive shell with the mirror and the back surface of the shell being coincidence. These elements may be used as laser beam focusers, beam divergers and collimators.Unit relay systems for use in super accurate microcircuit printing are disclosed. Parameters are given for a monochromatic diffraction limited f/2 system in the ultraviolet.A single element monocentric catadiotric system is disclosed, which is corrected for 3rd and 5th order spherical aberration and all field aberrations except Petzval curvature. A two-element version can cover very wide fields of view with good performance at speeds as fast as f/0.6. More complicated designs are also discussed with correction for chromatic aberration and chromatic variation of aberrations. An unobscured 30.degree..times.120.degree. strip field design and an infra-red system are also disclosed.
摘要翻译：该系统包括透射壳和反射镜。壳和镜子的表面是单中心的; 即球面并具有相同的曲率中心。物体和图像平面均位于透射壳体的前面并与之隔开。单个光学元件系统包括具有反射镜的透射壳体和壳体的后表面是重合的。这些元件可以用作激光束聚焦器，光束分束器和准直器。公开了用于超精密微电路印刷的单元继电器系统。参考紫外线中的单色衍射限制f / 2系统。公开了一种单元件单中心猫式电视系统，其被修正为3和5阶球面像差以及除Petzval曲率之外的所有场像差。双元素版本可以覆盖非常广泛的视野，具有良好的性能，速度与f / 0.6一样快。还讨论了像差的色差和色度变化校正的更复杂的设计。还披露了一个视野开阔的30°×120°带状场设计和红外线系统。

14. 发明授权

US4272152A Unit magnification relay systems 失效
标题翻译：单位放大继电器系统
公开(公告)号：US4272152A
公开(公告)日：1981-06-09
申请号：US84745
申请日：1979-10-15
申请人： David R. Shafer
发明人： David R. Shafer
IPC分类号： G02B13/00 , G02B13/26 , G02B17/00 , G02B17/08
CPC分类号： G02B17/0852 , G02B13/00 , G02B13/26 , G02B17/008
摘要： The radii of two concave and two convex mirrors have the same absolute value. The two concave mirrors are placed back to back and have a central aperture. The two convex mirrors face the concave mirrors and also have a central aperture. An image at the apex of one of the convex mirrors will be imaged at unit magnification at the vertex of the other convex mirror if the spacing between the concave and convex mirrors is 0.866 times the absolute value of their radius. This system is corrected for all aberrations except astigmatism. Astigmatism is corrected by a double convex thin lens at the intermediate image at the vertices of the concave mirrors. Petzval curvature introduced by the field lens may be corrected by plano-concave lenses near the object and image planes. Alternatively identical shell lenses may be placed on either side of the intermediate image to correct for both astigmatism and Petzval curvature. The lenses may be achromatic doublets to correct for chromatic variation of field aberrations. The mirrors may be formed on the outer surfaces of transparent objects for stability and convenience. High indices of refraction of the transparent objects increase the f number speed of the systems.
摘要翻译：两个凹面和两个凸面的半径具有相同的绝对值。两个凹面镜背靠背放置并具有中心孔。两个凸面镜面向凹面镜并且还具有中心孔。如果凹面和反射镜之间的间距是其半径绝对值的0.866倍，则在其中一个凸面镜的顶点处的图像将以单位放大倍率在另一个凸面镜的顶点成像。对于除散光之外的所有像差，该系统被校正。在凹面镜的顶点处的中间图像处通过双凸透镜来校正散光。通过场透镜引入的Petzval曲率可以通过物体和图像平面附近的平凹透镜来校正。或者，相同的外壳透镜可以放置在中间图像的任一侧上，以校正散光和佩兹瓦曲率。透镜可以是消色差双曲线以校正场像差的色度变化。为了稳定性和方便起见，反射镜可以形成在透明物体的外表面上。透明物体的高折射率提高了系统的f数速度。

15. 发明授权

US4205902A Laser beam expander 失效
标题翻译：激光束扩张器
公开(公告)号：US4205902A
公开(公告)日：1980-06-03
申请号：US950646
申请日：1978-10-12
申请人： David R. Shafer
发明人： David R. Shafer
IPC分类号： G02B17/06 , G02B27/09
CPC分类号： G02B27/0983 , G02B19/0023 , G02B19/0033 , G02B27/09 , G02B27/0911
摘要： An inexpensive laser beam expander including a first mirror system comprising an off axis section of a Schwarzschild telescope system with a first, convex spherical mirror and a second, concave spherical mirror, having a first common center of curvature, the input laser beam being incident on the first mirror and reflected therefrom to the second mirror, the second mirror forming a real image at a first image point; and a second mirror system comprising a backwards Schwarzschild telescope system including a third, convex mirror and a fourth, concave mirror, having a second common center of curvature, the second system being such that parallel incident light striking the fourth concave mirror and reflected to the third convex mirror will form a virtual image behind the third convex mirror at a second image point, the second system disposed so that the second image point coincides with the first image point whereby the third convex mirror intersects the light reflected from the second concave mirror and reflects it to the fourth concave mirror, the fourth concave mirror providing a collimated output beam which is expanded.
摘要翻译：一种廉价的激光束扩张器，其包括第一镜系统，该第一镜系统包括具有第一凸球面镜的Schwarzschild望远镜系统的偏轴部分和具有第一共同曲率中心的第二凹球面镜，所述输入激光束入射到所述第一反射镜并从其反射到所述第二反射镜，所述第二反射镜在第一图像点处形成真实图像; 以及第二镜系统，包括向后施瓦茨木尔望远镜系统，该系统包括具有第二公共曲率中心的第三凸面镜和第四凹面镜，所述第二系统使得平行的入射光射入第四凹面镜并被反射到第三凸面镜将在第二图像点形成第三凸面镜后面的虚像，第二系统设置成使得第二图像点与第一图像点重合，由此第三凸面镜与从第二凹面镜反射的光相交，将其反射到第四凹面镜，第四凹面镜提供被展开的准直的输出光束。

16. 发明授权

US4179192A Laser fusion optical system 失效
标题翻译：激光融合光学系统
公开(公告)号：US4179192A
公开(公告)日：1979-12-18
申请号：US825662
申请日：1977-08-18
申请人： David R. Shafer
发明人： David R. Shafer
IPC分类号： B23K26/06 , G02B5/10 , G02B17/06 , G21K1/06 , H01S3/00 , H05H1/22
CPC分类号： G02B19/008 , B23K26/06 , B23K26/0604 , B23K26/0619 , B23K26/064 , B23K26/0643 , B23K26/0665 , G02B19/0023 , G02B19/0047 , G02B5/10 , G21B1/23 , G21K1/06 , H01S3/005
摘要： A laser optical system which includes a mirror system for forming a mirror cavity, a laser target disposed in this cavity, a plurality of focused laser beams directed into the cavity, and the mirror system being so arranged that each of the laser beams is reflected off the walls of the cavity a plurality of times prior to being focused on the laser target to thereby heat the target to a very high temperature.
摘要翻译：一种激光光学系统，其包括用于形成镜腔的镜系统，设置在该空腔中的激光对象，多个聚焦的激光束被引导到空腔中，并且所述镜系统被布置成使得每个激光束被反射在聚焦在激光靶之前多次将腔的壁进行多次，从而将靶加热到非常高的温度。

17. 发明申请

US20110116077A1 EUV High Throughput Inspection System For Defect Detection On Patterned EUV Masks, Mask Blanks, And Wafers 有权
标题翻译： EUV高通量检测系统，用于在图案化的EUV面罩，面罩空白和晶圆上进行缺陷检测
公开(公告)号：US20110116077A1
公开(公告)日：2011-05-19
申请号：US12812950
申请日：2010-06-18
申请人： Yung-Ho Chuang , Richard W. Solarz , David R. Shafer , Bing-Ming Benjamin Tsai , David L. Brown
发明人： Yung-Ho Chuang , Richard W. Solarz , David R. Shafer , Bing-Ming Benjamin Tsai , David L. Brown
IPC分类号： G01N21/956
CPC分类号： G01N21/95 , G01N21/8806 , G01N21/9501 , G01N21/956 , G01N2021/95676 , G01N2201/068 , G03F1/84 , G03F7/70616 , H05G2/008
摘要： Inspection of EUV patterned masks, blank masks, and patterned wafers generated by EUV patterned masks requires high magnification and a large field of view at the image plane. An EUV inspection system can include a light source directed to an inspected surface, a detector for detecting light deflected from the inspected surface, and an optic configuration for directing the light from the inspected surface to the detector. In particular, the detector can include a plurality of sensor modules. Additionally, the optic configuration can include a plurality of mirrors that provide magnification of at least 100× within an optical path less than 5 meters long. In one embodiment, the optical path is approximately 2-3 meters long.
摘要翻译：对EUV图案化掩模，空白掩模和由EUV图案化掩模生成的图案化晶片的检查需要高倍率和在图像平面上的大视场。 EUV检查系统可以包括指向检查表面的光源，用于检测从被检查表面偏转的光的检测器和用于将来自被检查表面的光引导到检测器的光学配置。特别地，检测器可以包括多个传感器模块。另外，光学配置可以包括在小于5米长的光路内提供至少100倍的放大倍数的多个反射镜。在一个实施例中，光路大约2-3米长。

18. 发明授权

US07679842B2 High performance catadioptric imaging system 有权
标题翻译：高性能反射折射成像系统
公开(公告)号：US07679842B2
公开(公告)日：2010-03-16
申请号：US11543519
申请日：2006-10-04
申请人： David R. Shafer , Yung-Ho Chuang , J. Joseph Armstrong
发明人： David R. Shafer , Yung-Ho Chuang , J. Joseph Armstrong
IPC分类号： G02B9/00
CPC分类号： G02B17/0892 , G02B17/0812 , G02B17/0856 , G02B21/04 , G03F7/70225 , G03F7/70341
摘要： A reduced size catadioptric objective and system is disclosed. The objective may be employed with light energy having a wavelength in the range of approximately 190 nanometers through the infrared light range. Elements are less than 100 mm in diameter. The objective comprises a focusing lens group configured to receive the light energy, at least one field lens oriented to receive focused light energy from the focusing lens group and provide intermediate light energy, and a Mangin mirror arrangement positioned to receive the intermediate light energy from the field lens and form controlled light energy for transmission to a specimen. The Mangin mirror arrangement imparts controlled light energy with a numerical aperture in excess of 0.65 and up to approximately 0.90, and the design may be employed in various environments.
摘要翻译：公开了一种减小尺寸的反射折射物镜和系统。该目的可以通过红外光范围具有在约190纳米范围内的波长的光能。元件的直径小于100毫米。该目的包括被配置为接收光能的聚焦透镜组，至少一个取向为从聚焦透镜组接收聚焦光能并提供中间光能的场透镜，以及设置成接收来自光源的中间光能并且形成用于传输到样本的受控光能。芒格镜配置赋予数值孔径超过0.65并且高达约0.90的受控光能，并且该设计可以用于各种环境中。

19. 发明授权

US07633675B2 Catadioptric imaging system employing immersion liquid for use in broad band microscopy 有权
标题翻译：使用浸没液的反射折射成像系统用于宽带显微镜
公开(公告)号：US07633675B2
公开(公告)日：2009-12-15
申请号：US11999558
申请日：2007-12-05
申请人： J. Joseph Armstrong , Yung-Ho Chuang , David R. Shafer
发明人： J. Joseph Armstrong , Yung-Ho Chuang , David R. Shafer
IPC分类号： G02B17/08
CPC分类号： G03F7/70341 , G02B17/023 , G02B17/0808 , G02B17/0812 , G02B17/0856 , G02B17/0892 , G02B21/02 , G02B21/04 , G02B21/33 , G03F7/70225
摘要： A reduced size catadioptric inspection system employing a catadioptric objective and immersion substance is disclosed. The objective may be employed with light energy having a wavelength in the range of approximately 190 nanometers through the infrared light range, and can provide numerical apertures in excess of 0.9. Elements are less than 100 millimeters in diameter and may fit within a standard microscope. The objective comprises a focusing lens group, a field lens, a Mangin mirror arrangement, and an immersion substance or liquid between the Mangin mirror arrangement and the specimen. A variable focal length optical system for use with the objective in the catadioptric inspection system is also disclosed.
摘要翻译：公开了一种使用反射折射物镜和浸没物质的缩小尺寸反射折射检查系统。该目的可以通过红外光范围具有在约190纳米范围内的波长的光能，并且可以提供超过0.9的数值孔径。元素的直径小于100毫米，并且可以适合标准显微镜。该目的包括聚焦透镜组，场透镜，Mangin镜布置以及Mangin镜布置和样品之间的浸没物质或液体。还公开了用于反射折射检查系统中的目的的可变焦距光学系统。

20. 发明申请

US20080247035A1 Catadioptric imaging system employing immersion liquid for use in broad band microscopy 有权
标题翻译：使用浸没液的反射折射成像系统用于宽带显微镜
公开(公告)号：US20080247035A1
公开(公告)日：2008-10-09
申请号：US11999558
申请日：2007-12-05
申请人： J. Joseph Armstrong , Yung-Ho Chuang , David R. Shafer
发明人： J. Joseph Armstrong , Yung-Ho Chuang , David R. Shafer
IPC分类号： G02B17/08
CPC分类号： G03F7/70341 , G02B17/023 , G02B17/0808 , G02B17/0812 , G02B17/0856 , G02B17/0892 , G02B21/02 , G02B21/04 , G02B21/33 , G03F7/70225
摘要： A reduced size catadioptric inspection system employing a catadioptric objective and immersion substance is disclosed. The objective may be employed with light energy having a wavelength in the range of approximately 190 nanometers through the infrared light range, and can provide numerical apertures in excess of 0.9. Elements are less than 100 millimeters in diameter and may fit within a standard microscope. The objective comprises a focusing lens group, a field lens, a Mangin mirror arrangement, and an immersion substance or liquid between the Mangin mirror arrangement and the specimen. A variable focal length optical system for use with the objective in the catadioptric inspection system is also disclosed.
摘要翻译：公开了一种使用反射折射物镜和浸没物质的缩小尺寸反射折射检查系统。该目的可以通过红外光范围具有在约190纳米范围内的波长的光能，并且可以提供超过0.9的数值孔径。元素的直径小于100毫米，并且可以适合标准显微镜。该目的包括聚焦透镜组，场透镜，Mangin镜布置以及Mangin镜布置和样品之间的浸没物质或液体。还公开了用于反射折射检查系统中的目的的可变焦距光学系统。

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